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PLASMA THERM WAF’R BATCH 74 Parrell Plasma Etcher

Description

Please contact us for the availability of the following used PLASMA THERM WAF’R BATCH 74 Parrell Plasma Etcher Semiconductor Equipment.

Manufacturer Plasma-Therm
Model WAF’R BATCH 74
End Point Detection AG-300
Other Information
  • ADVANCED ENERGY System Controller
  • RF Plasma RF-5 Generator
  • AG-300 Auto Gain Endpoint Detector
  • MKS Type 252A Exhause Valve Controller
  • (2) BROOKS 5850E Mass Flow Controllers

The items are subject to prior sale without notice. These items are only for end users.

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