Description
Please contact us for the availability of the Plasma Therm Versaline RIE- Reactive Ion Etching System.
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Plasma Therm VLR (Versaline) 7000 series Cassette to Cassette RIE system. (1) LM/TM module & (1) RIE Module. Can run up to 8″ dia. wafers. Cassette to Cassette Load Lock with robot transfer into RIE module. RIE module consist of a Leybold 361C turbo pump with Leybold controller, MKS throttle valve with controller, Advanced Energy RF10S – 1000W RF lower Electrode power supply with match work and tuner. Currently set up with four Mass Flow Controllers |
The items are subject to prior sale without notice. These items are only for end users.
SSEB380