Description
Please contact us for the availability of the following used Used OXFORD Plasmalab 133 RIE (CL) Semiconductor Equipment Parts.
Condition: Complete system
QTY: 2 sets
Description for your reference.
- Windows PC , user friendly interface
- 330mm Platen
- RIE set up for GaN Etch
- RF Power: 600W, 13.56MHz
- Water cooled electrode 10C-80C
- Load Lock with turbo pump
- End point detection: Verity Optical emission spectroscopy (200-800nm)
- Gas pod with 6 lines including following MFCs:
Ar – 100sccm
CL – 100sccm
BCL3 – 100sccm
N2O – 100sccm
The items are subject to prior sale without notice. These items are only for end users.
SS5248