Description
Please contact us for the availability of the following used Used OXFORD Plasmalab 133 RIE (FL) Semiconductor Equipment Parts.
Condition: Complete system
QTY: 2 sets
Description for your reference.
- Windows PC , user friendly interface
- 330mm Platen
- RIE set up for SiO2 Etch
- RF Power: 600W, 13.56MHz
- Load lock with Turbo Pump
- Water cooled electrode 10C-80C
- Gas pod with 6 lines including following MFCs:
Ar – 100sccm
N2 – 200sccm
CHF3 – 200sccm
NF3 – 200sccm
N2O – 200sccm
The items are subject to prior sale without notice. These items are only for end users.
SS5248