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NOVELLUS Parts

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Description

The following NOVELLUS Parts are only for end user. Please contact us if you have any questions. Subject to prior sale without notice. Appreciate your time!

  1. NOVELLUS 02-00343-02 Harness Assy, Sensor 12.0″
  2. NOVELLUS 02-00343-03 Harness Assy, Sensor 17.5″
  3. NOVELLUS 02-00343-04 Harness Assembly, Sensor, 26.5″
  4. NOVELLUS 02-111903-00 RF Feedthru
  5. NOVELLUS 03-00057-00 Harness Assy, Loadlock Door
  6. NOVELLUS 03-00095-02 Assy, Cable CA93
  7. NOVELLUS 03-00145-00 Wire, Ground, Wrist & Elbow
  8. NOVELLUS 03-00295-00 Cable Assy Robot Sensor
  9. NOVELLUS 03-00296-00 Cable, Lift & Extension Sensor
  10. NOVELLUS 10-135228-00 Tube Assy, INJ, 0.010, VCR
  11. NOVELLUS 15-00027-02 Guide, Nozzle Adjuster
  12. NOVELLUS 15-000410-00 Fliter, UV, Lexan
  13. NOVELLUS 15-00043-02  Ceramic Adjuster, Gas Plate
  14. NOVELLUS 15-00216-01 Holder, LL Backfill Filter
  15. NOVELLUS 15-00229-00 Nut, Hex, ½-20
  16. NOVELLUS 15-00309-00(1.33″) / 15-00309-01 (1.50″)  Hanger, Nozzle, 150mm & 200mm
  17. NOVELLUS 15-00311-00 Cap, Electric Feedthru
  18. NOVELLUS 15-00341-00 Screw
  19. NOVELLUS 15-00371-00 Nut, Heater Feedthru
  20. NOVELLUS 15-00372-00 Washer, Heater Feedthru
  21. NOVELLUS 15-00385-00 Nut, 10-32 UNF-2B
  22. NOVELLUS 15-00386-00 Washer, Flat, #10
  23. NOVELLUS 15-00399-02 Screw, Top Spindle
  24. NOVELLUS 15-00399-02 SCRW, HEX, 8-32x.96
  25. NOVELLUS 15-00399-03 Screw, Top Spindle
  26. NOVELLUS 15-00399-04 Screw, Top Spindle
  27. NOVELLUS 15-00399-05 Screw, 1.12LG, Top Spindle
  28. NOVELLUS 15-00401-00 Spindle Shaft
  29. NOVELLUS 15-00457-00 Screw, Heater Strap
  30. NOVELLUS 15-00475-00 Insulator, Gas Feedthru, Ceramic
  31. NOVELLUS 15-00480-00 Geneva Driver
  32. NOVELLUS 15-00485-00/15-00486-00  Bracket, Paddle, 150mm & 125mm
  33. NOVELLUS 15-00507-00 Spacer, Ext Seal
  34. NOVELLUS 15-00516-00 Bushing, Rotor Brake
  35. NOVELLUS 15-00558-01 Sleeve, Heater, Lead, Ceramic, 2.0″
  36. NOVELLUS 15-00558-02  Sleeve, Heater, Lead, Ceramic (Modify)
  37. NOVELLUS 15-00558-02 Sleeve, Heater, Lead, Ceramic, 2.75″
  38. NOVELLUS 15-00567-00 Tube,TC, Ceramic
  39. NOVELLUS 15-00578-00 Sleeve, Flange, Feedthru, Ceramic
  40. NOVELLUS 15-00578-00 Sleeve, Flange, Feedthru, Ceramic
  41. NOVELLUS 15-00653-00  Clamp,Spindle Hub Mount
  42. NOVELLUS 15-00654-00 Clamp, Rotation Adjustment
  43. NOVELLUS 15-00680-00 Sleeve, TC Ceramic
  44. NOVELLUS 15-00684-00  Cap, TC, Ceramic
  45. NOVELLUS 15-00685-00 Feedthru, O-Seal, Ultra-Torr Feedthru, Inner
  46. NOVELLUS 15-00686-00 Washer, Feedthru
  47. NOVELLUS 15-00698-00 Screw, Fork
  48. NOVELLUS 15-00699-01 Fork, Finger, 150mm
  49. NOVELLUS 15-00699-02 Fork, Finger, 200mm
  50. NOVELLUS 15-00700-00 Plate, Fork Retainer, Bottom, 200mm
  51. NOVELLUS 15-00701-00 Plate, Fork Retainer, Bottom,150mm
  52. NOVELLUS 15-00702-00 Top Plate, 200mm 8″
  53. NOVELLUS 15-00703-00 Top Plate, 150mm
  54. NOVELLUS 15-00721-00 Washer, #8
  55. NOVELLUS 15-00729-00 Clamp, Flat
  56. NOVELLUS 15-00731-00 Bushing, Keyed
  57. NOVELLUS 15-00742-00 Tube, TC Ceramic
  58. NOVELLUS 15-00935-00 Screw
  59. NOVELLUS 15-00951-00 Cup, Screw Cover
  60. NOVELLUS 15-01111-00/15-01123-00  Paddle, Optical 150mm & 125mm
  61. NOVELLUS 15-024881-00 Fork, End, Cap
  62. NOVELLUS 15-032014-00 Quartz Window (Sapphire Coating)
  63. NOVELLUS 15-032016-00 Ceramic Pin For Heater Block
  64. NOVELLUS 15-032452-00 View Port For Speed
  65. NOVELLUS 15-032631-00 / 15-00730-00 Flange, Keyed
  66. NOVELLUS 15-032939-00   200mm Moer Ring 2.25mm
  67. NOVELLUS 15-034333-00 Tube Process Injector Tube, Ceramic, Process 4″
  68. NOVELLUS 15-050160-15 Tube, Injector, Hi-Purity, 1.5″
  69. NOVELLUS 15-053394-02 Fork, Finger, Min Contact Area, 200mm
  70. NOVELLUS 15-054434-03   2.5mm Moer Ring
  71. NOVELLUS 15-101482-00 Fork, Toplate A Antideflect
  72. NOVELLUS 15-101482-01 Fork, Toplate B Antideflect
  73. NOVELLUS 15-101482-02 Fork, Toplate C Antideflect
  74. NOVELLUS 15-103913-02 Clamp, Strap, Feedthru
  75. NOVELLUS 15-10489-00 Clamp Chamber Viewport
  76. NOVELLUS 15-107698-00 Cap, Ceramic, Feedthru
  77. NOVELLUS 15-108174-00 Cup, Screw Cover
  78. NOVELLUS 15-108307-00 Clamp, RF Strap
  79. NOVELLUS 15-11263-02 Sapphire View Port For Speed
  80. NOVELLUS 15-114331-00 Screw
  81. NOVELLUS 15-116097-00 Blankoff, Slit Valve Seal, Clear
  82. NOVELLUS 15-119059-00 Screw
  83. NOVELLUS 15-130746-01 Fork, Finger, Min Contact Area, 200mm
  84. NOVELLUS 15-250878-00    Screw, Moer Ring
  85. NOVELLUS 15-252807-00 DLCM-S LL Door Shim(0.75mm)
  86. NOVELLUS 15-258837-00 Clamp, RF Strap
  87. NOVELLUS 15-267661-00 C3 Altus Holder
  88. NOVELLUS 15-277463-00 Plate, Fork Retainer, Bottom, 200mm, Ceramic
  89. NOVELLUS 16-00092-00 Wire, Insulated (Short)
  90. NOVELLUS 16-033932-00/16-033931-00/16-271392-00  Shower Head 6/8/12″
  91. NOVELLUS 17-00094-01 Strap, LF Bias, Alum 6″
  92. NOVELLUS 17-00148-00 Spring, Fork
  93. NOVELLUS 17-101596-00 Retainer, Fork, Seq.
  94. NOVELLUS 17-103987-00 RF Strap for 8″
  95. NOVELLUS 17-110412-00 Screen, RF Shield, Etched, Short
  96. NOVELLUS 19-00056-00 Feedthru, HI Volt, Alter Detail
  97. NOVELLUS 19-00111-01 Lead-Screw
  98. NOVELLUS 19-00144-00 Gear, Motor-Rotation
  99. NOVELLUS 19-00145-00 Gear, Motor-Ext
  100. NOVELLUS 19-00155-00 / 19-00155-01 Heater Block 150mm
  101. NOVELLUS 19-00266-01  Robot Extension Motor
  102. NOVELLUS 19-00267-00 C1 Robot Rotation Motor
  103. NOVELLUS 20-00144-00 Belt Timing, 150mm
  104. NOVELLUS 20-00153-00 Ball Ceramic
  105. NOVELLUS 20-00212-00 Nut, 8-32, UNC-2B
  106. NOVELLUS 20-00257-00 Washer, Spring, 1.25 OD
  107. NOVELLUS 20-107688-00 Crank Bolt, VAT Valve, 200mm
  108. NOVELLUS 22-00021-00 O-Ring
  109. NOVELLUS 22-00021-01 O-Ring
  110. NOVELLUS 22-00118-00 O-Ring
  111. NOVELLUS 22-00134-00 O-Ring
  112. NOVELLUS 22-00136-00 O-Ring, LL Left Plate
  113. NOVELLUS 22-00152-00 O-Ring Top PL
  114. NOVELLUS 22-00174-00 O-Ring, 6.234 X 0.139
  115. NOVELLUS 22-00217-00 O-RING, 0.484 X 0.139″
  116. NOVELLUS 22-00236-00 O-ring
  117. NOVELLUS 22-00288-00 T-Seal
  118. NOVELLUS 22-00304-00 Extensow Shaft Bearing 1.50OD
  119. NOVELLUS 22-00324-00 Seal, Lip, Extension
  120. NOVELLUS 22-00343-00 Sleeve, ⅜ O-Seal, Ultra-Torr, Shower Head
  121. NOVELLUS 22-00344-00 O-Ring
  122. NOVELLUS 22-00345-00 O-Ring
  123. NOVELLUS 22-00358-00 O-Ring,  0.239 x 0.070
  124. NOVELLUS 22-00612-00 Valve, Dia, NC, ¼ VCR-F, AIR OPR
  125. NOVELLUS 22-00658-00 O-Ring
  126. NOVELLUS 22-026085-02 Veriflo Diaphragm Valve 945Y
  127. NOVELLUS 22-026373-00   Filter, IN:ML, OUT:FML Pall GLFN1100VMF4 Gaskleen Gas Line Filter
  128. NOVELLUS 22-026373-01 Filter, Millipore, Male Inlet, Female Outlet
  129. NOVELLUS 22-028382-00   Seal, Flanged Lower
  130. NOVELLUS 22-100613-00 Sapphire Ball
  131. NOVELLUS 22-101053-00   Seal Assembly
  132. NOVELLUS 22-104042-00 O-ring, Injector
  133. NOVELLUS 22-112748-00 Ferro Spindle O-Ring
  134. NOVELLUS 22-122556-00  UHP High Flow Diaphragm Sealed Valve, ¼ in. Female HVCR
  135. NOVELLUS 22-122969-04 Valve 930 LOTO Valve M-M
  136. NOVELLUS 22-134586-00 High Performance Point-Of-Use Regulators
  137. NOVELLUS 22-146276-00 Valve, Pneu, Diaphragm 2WY, 125 PSI
  138. NOVELLUS 22-146297-00  Diaphragm Valve 930y2nc/ncfsfffb
  139. NOVELLUS 22-156667-00  UHP High Flow Diaphragm Sealed Valve, ¼ in. Female HVCR, Indicator Switch
  140. NOVELLUS 22-177150-00 VCR Double Unlon
  141. NOVELLUS 22-254880-00 High Purity Manifold Valve 930y2nc/ncsls07148
  142. NOVELLUS 27-00010-01 Thermo Couple Type J ⅛”
  143. NOVELLUS 27-00079-00 Thermocouple, Type J
  144. NOVELLUS 27-00127-00 Thermocouple, Type E, LG
  145. NOVELLUS 27-00149-00 Manometer
  146. NOVELLUS 27-10157-00 Digital Dynamics Input Output Controller
  147. NOVELLUS 27-104339-00  Endpoint Detector
  148. NOVELLUS 31-00114-00 Relay SSR, 90A
  149. NOVELLUS 33-00002-01 Spindle Rotation Motor
  150. NOVELLUS 34-00141-00 Switch, Push Button
  151. NOVELLUS 34-133701-00 Relay, 1P, 12VDC RHIB-U DC12V
  152. NOVELLUS 34-149543-00 Relay Spdt, 12VDC, 10A, Omron
  153. NOVELLUS 34-309953-02 Switch, Press, ATM, VCR, D89, 3-2, WASCO
  154. NOVELLUS 60-00013-00 Cylinder, Pneumatic LL Door ASSY Cylinder, AIR 4.5" STROKE
  155. NOVELLUS 60-00033-00  Filter Backfill
  156. NOVELLUS 60-00091-00 Cylinder, Pneumatic, Spindle Lift
  157. NOVELLUS 60-00180-00 TC Gauge,Vacuum Transducer, 25KF Flange
  158. NOVELLUS 60-103549-00 Valve, 1.50FX2.19MX2.07M
  159. NOVELLUS 60-168723-00 Check Valve
  160. NOVELLUS Amplifier Modulated 31-00249-00
  161. NOVELLUS Clamp, Strap, Feedthru (Small) 15-103913-02
  162. NOVELLUS      DLCM O-Ring
  163. NOVELLUS DLCM-S LL Door Shim(0.2mm)
  164. NOVELLUS DLCM-S LL Door Shim(0.5mm)
  165. NOVELLUS Endponit View Port
  166. NOVELLUS EV Valve
  167. NOVELLUS Ferro Spindle Shaft
  168. NOVELLUS Ferro Spindle, 200mm 02-106507-00
  169. NOVELLUS Fliter, UV, Lexan 7.5cm
  170. NOVELLUS Gasket, Slider
  171. NOVELLUS Gaskleen 6101 Filter Assembly
  172. NOVELLUS Hexagon Socket Set Screw 8#32
  173. NOVELLUS O-ring & Steel Ball of Gate Valve 8
  174. NOVELLUS O-Ring 22-00391-00 / 22-112743-00
  175. NOVELLUS Paddle, Ceramic Blade, High Purity
  176. NOVELLUS PCB, EPROM RAM With Jumpers 19-00122-00
  177. NOVELLUS Plate, Fork Retainer, Bottom, 150mm, Ceramic
  178. NOVELLUS Protection Cap for Hanger Nozzle
  179. NOVELLUS Relay, 2P, 24VDC
  180. NOVELLUS Sapphire Viewport
  181. NOVELLUS Seal
  182. NOVELLUS       Shaft of Spindle
  183. NOVELLUS Sleeve Ceramic Modify
  184. NOVELLUS Spindle Rotate Motor Clamp
  185. NOVELLUS Spring, Fork Modify
  186. NOVELLUS SS-6-UTN Stainless Steel Ultra-Torr Vacuum Fitting for ⅜ in. Nut
  187. NOVELLUS Steel Ball & O-ring of Gate Valve 4″
  188. NOVELLUS Strap, RF
  189. NOVELLUS Timing Belt for C2
  190. NOVELLUS T-Seal Spindle Shaft
  191. NOVELLUS Valve Diaphragm 1-4 F NC
  192. NOVELLUS Veriflo Diaphragm Valve 930
  193. NOVELLUS View Port For Speed Nanofill
  194. NOVELLUS Window Sapphire 15-110411-00
  195. NOVELLUS Wire, Insulated (YNS030M1)
  196. NOVELLUS Wire, Insulated (YNS030M2)
  197. NOVELLUS YNS043

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