Description
Please contact us if you are interested in the Nanotechnology Equipment . The Nanotechnology Equipment is only for end users and are subject to prior sale without notice. Appreciate your time.
- 4-Pt Probe
- Airco Temescal FC-1800 Evaporator
- Airco Temescal FC-1800 Evaporator
- Alcatel Deep Reactive Ion Etch, Gases : SF6, C4F8, CF4, Ar, O2, Standard Etches : Si, Glass, SiO2, Samples : 1 – 6″ Wafer or Equivalent Area
- AMAT AMP-3300 PECVD
- Anechoic Chamber, This anechoic chamber provides a low reflection environment to measure antenna radiation pattern, gain, and reflection coefficient from 0.7 – 18 GHz. It can also serve a shielded room for wireless testing
- Branson IPC 3000
- Branson/IPC 3000
- Branson/IPC 4150
- CVC Products AST-601 Sputter
- Dektak D150 Contact Profilometer, Tip Size : 12.5um Radius Inverted Cone, Samples : Pieces – 8″ Wafer, Step Height Range : 100A – 1mm, Stress Measurement : 2″ – 8″ Wafers
- Differential Scanning Calorimeter (DSC), Measurement of specific heat, heat of reactions, and phase transition temperatures from 30 to 1500C.
- EG 1034
- EG 2001X with NAVITAR
- EG4085
- Gasonics Aura 2000LL
- Gasonics L3500
- Gasonics L3510
- GCA 5X Reduction i-line Stepper, Minimum Feature Sizes : 0.6um, Registration better than 500nm, Samples : 10mm Pieces – 6″ Wafer (Minimum Sample Thickness 350um)
- Glovebox , Box Conditions: N2; <0.1ppm H2O; <0.1ppm O2, Integrated Spinner, RH Evaporator, 3 Source Locations, Standard Source Boats W, Supplied Materials : Al, Mg, MgF, LiF, CuS, Cu, Ni, Ti, Au, Ag
- Heatpulse 210
- Heatpulse 4100
- Heatpulse 4108
- Heatpulse 610
- Heatpulse 610
- Heatpulse 8108
- Heatpulse 8800
- Heidelberg uP-101 Direct Write Lithography, Minimum Feature Sizes : 0.8um, Samples : Pieces to 6″ x 6″ Sample, 375nm UV Diode Laser for Positive and Negative Photoresists including SU8, Mask Writing for MA6 and GCA, Grayscale Exposure Mode 3D Lithography
- HP 4062 and Testers
- HP 4156A Precision Semiconductor Parameter Analyzer
- HP 4280A 1MHz C Meter/ C-V Plotter
- HP 54520A 500MSa/s 500MHz Oscilloscope
- HP 6623A System DC Power Supply
- Kurt J Lesker Dual Thermo Evaporator
- Lam Auto Etch 590
- Lam AutoEtch 590
- Lam Rainbow 4728
- Laser Flash, Measurement of the in-plane and cross-plane thermal diffusivity of bulk samples from -120 to 1500C.
- LSR, Simultaneous measurement of the Seebeck Coefficient and electrical conductivity of bulk and thin films (in-plane) from -120 to 1500C.
- Matrix 105
- Matrix 205
- Matrix 302
- Matrix 303
- Matrix Bobcat 209S
- Matrix Bobcat 209S
- Matrix System One Stripper
- Mini-Pulse 310
- MRC 603 MRC 693 TES-600 Sputter
- MRC 603 Sputter
- MRC 603 Sputter
- MRC 643 Sputter
- Multiplex ICP MACS
- Nanometrics
- Nanometrics 210 Nanospec AFT
- Olympus MX50A-F with Al100-L6
- Oxford Chlorine Etcher, Gases : BCl3, Cl2, SF6, O2, Ar, N2, Standard Etches : GaN, AlGaN, Samples : 1 – 6″ Wafer or Equivalent Area
- Oxford NGP80 RIE, Gases: CF4, CHF3, C2F6, SF6, Ar, O2, Standard Etches : SiO2, Si3N4, Glass, Si, and SiC, Samples : 1 – 4″ Wafer or Equivalent Area
- Perkin-Elmer 4400 Sputter
- Perkin-Elmer 4400 Sputter
- Plasma Therm 700
- Plasma Therm 700 Plasma Etch&PECVD
- Plasmalab CVD-2
- Plasmatherm 790
- Plasmatherm SLR 720
- Raith150 Two Ebeam Lithography, Minimum Feature Sizes : 10-20nm, Samples : Pieces – 6″ Wafers, Low kV Exposure and Imaging with Inlens SE Detector with BSE Detector Option, Accelerating Voltage up to 30kV,20 MHz Digital Pattern Generator, Stitching and Overaly Accuracy about 35nm
- RTP-3000
- Semigroup, Gases : CHF3, SF6, Ar, O2, Standard Etches : SiO2, Si3N4, Poly-Si, SiC, Samples : 1 – 6″ Wafer or Equivalent Area
- STS MESC Multiplex ICP
- STS multi-chamber Cluster
- STS Multiplex DRIE
- STS Multiplex ICP
- STS Mutiplex ICP
- STS PRO ICP Etcher
- Suss MA6/BA6 Contact Aligner, Minimum Feature Sizes :2um, Samples : 10mm Pieces to 1-6″ Wafer (Thickness 200um to 4mm), Front Side and Back Side Alignment, Mask Holders : 4″, 5″, and 7″, Sample Holders : 3″ Vac Chuck, 4″ Vac Chuck, 4″ Wafer, and 6″ Wafer, Modes : Flood, Proximity, Soft, Hard, and Vac Contact
- Tegal 903e Plasma Etch
- Tegal 903e Plasma Etch
- Tegal 903e Plasma Etch
- Temescal BJD-1800 Sputter
- Temescal FC-1800 Evaporator
- Temescal FC-1800 Evaporator
- Temescal FC-1800 Evaporation
- Thermal Oxidation, Steam Oxidation : Samples : 2″ – 6″ Wafers, Gases : N2, O2, H2, HCl, Temperatures : 950C and 1050C, Oxide Thickness Maximum : 1um
- Thermal Oxidation,Anneal: Forming Gas N2/H2, Drive-In Anneal
- Thermal Oxidation,Doping: Phosphorus Doping
- Thermal Oxidation,Doping: Boron Doping
- Thermal Oxidation,Dry Oxidation: Samples : 2″ – 6″ Wafers, Gases : N2, O2, HCl, Temperatures : 850C, 950C, 1000C, 1100C, Oxide Thickness Maximum : 300nm
- Trion Etcher, Gases : BCl3, Cl2, CF4, O2, Ar, N2, Standard Etches : GaAs, GaN, Poly-Si, Al, Samples : 1 – 4″ Wafer or Equivalent Area
- Varian 3118 E-Beam Thermal Evaporator
- Vase Ellipsometer, Multi-Angle Capable System
- Wyko NT9100 Optical Profilometer, White Light and Green Light Measurements, Samples : Pieces – 6″ Wafer, Surface Mapping and Characterization
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