Description
MRL Sandvik Cyclone 430 diffusion furnace, loadstation, source cabinet, tmx:
This furnace was built at the MRL factory with the tmx control system, the most standard control system for all furnace systems.
It is a 30 inch flat zone and 150mm wafers. The load station is approximately 7 feet long. The source cabinet is compact and fits the MRL design criteria.
One bank does have a stand alone TMX cabinet (like a thermco) and the other 3 have the modified tube drawers designed into the loadstation base on slides.
Condition: Unit pulled from a working service, however due to lack of power supply unable to fully test. Sold As-Is. Complete,working,functional test or refurbished conditions are optional at extra cost.
Valid time: Subject to prior sale without notice.
Contact us (sales@semistarcorp.com) for more info pls. Appreciate your time.
ID-SS380-e
