Description
Please contact us for the availability of the MRC 643P In-Line Sputtering System used Semiconductor Equipment.
| Manufacturer | MRC |
| Model | 643P |
| Description | In-Line Sputtering System — Refurbished by KDF |
| Vacuum System | Cryo Pumped |
| Vacuum System | CTI Onboard 8F Loadlock Pump CTI Onboard 8 High Vacuum Pump CTI 9600 Compressor Alcatel 2033 Mechanical Pump |
| Load Lock Included | Yes |
| Number of Cathodes | Two |
| Quantity of DC Cathodes | 2 |
| Gas Inputs | Three |
| Substrate Heaters | Yes |
| DC Power Supply |  |
| Manufacturer | Advanced Energy |
| Model | MDX 10K 2194 013 |
| Output Power | 10.00 kW DC |
| RF Generator | |
| Manufacturer | MRC |
| Rated Power Output | 1250 Watts |
| Frequency | 13.56 MHz |
| Matching Network | Yes |
| Accessories | CTI Network Interface Terminal P/N: 8113022G001 |
| Other Information | 13″ x 13″ Substrate Pallet Load Lock Heating Process Heating DC Bias RF Bias Three Cathode System — Two DC Magnetron Cathodes Installed |
| Power Requirements | 208 V 100.0 A 50/60 Hz 3 Phase |
The items are subject to prior sale without notice. These items are only for end users.
SS5732