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MODULAR One

The MODULAR One™ , a reliable high throughput production RTP system with up to 3 chambers, includes an advanced gas handling system, with dynamic, and realtime multi-zone temperature control. The MODULAR One™ RTP system defines superior process performance for critical ULSI process requirements and supports an impressive list of processes. AGV and SMIF are available. Processes are defined and controlled by software having unique features. The system includes extensive safety features and on-line CD-ROM documentation for easy maintenance.

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Description

High Throughput, Flexible Multi-Chamber Rapid Thermal Processing Production System

The MODULAR One™ , a reliable high throughput production RTP system with up to 3 chambers, includes an advanced gas handling system, with dynamic, and realtime multi-zone temperature control. The MODULAR One™ RTP system defines superior process performance for critical ULSI process requirements and supports an impressive list of processes. AGV and SMIF are available. Processes are defined and controlled by software having unique features. The system includes extensive safety features and on-line CD-ROM documentation for easy maintenance.

Key Features:

  • High throughput production RTP system
  • Accommodates up to three chambers
  • Up to eight gas channels per chamber
  • Dynamic real-time multi-zone temperature control
  • On-line CD-ROM documentation for easy maintenance
  • Low cost of ownership

High Throughput:

The robot arms are designed and assembled with high rigidity and high precision. Variation of the end effecter height in all horizontal positions is 0.25 mm or less and the height variation in the wafer size range is less than 0.1 mm. Therefore, by combining the elevator with a wafer height detector, and installing two end effectors on the robot, two wafers can be transported at one time without generating particles. Robot stroke and end effectors are large enough to reach beyond the center of the wafers to keep the wafers from falling in case of vacuum failure. Because of this, the wafers in carriers can be unloaded or loaded from the carrier securely and are prevented from generating particles by rubbing the carrier. The ceramic chuck end effector is mirror polished to prevent particle contamination of the back side of wafers.

Three Process Chambers:

The heat source and the quartz processing tube are enclosed within a water cooled metal chamber with highly reflective surfaces, manufactured to specific standards of reflectivity and specularity. The heating source employs multiple arrays of tungsten-halogen lamps.  Each lamp is individually controlled and monitored by the process controller.

Gas Delivery:

The MODULAR One™ has an advanced gas handling system. The MODULAR One™ gas box can accommodate up to a maximum of 8 gas channels per chamber. The gas manifold and distribution system is constructed of ultra clean low Ra internally electro polished stainless steel tubing and Micro-Fit weld fittings. High purity metal-sealed mass flow controllers (MFCs) are available as an option.

Temperature Control:

The MODULAR One™ features an adaptive auto-tuning closed loop temperature control algorithm with a temperature control stability of 2 deg. C from set point. This feature greatly simplifies programming complex multi-step cycles. The individual Lamp Calibration feature allows user-optimization of the heating uniformity. Software diagnostics are provided to monitor each lamp and compensate for lamp aging effects. The temperature measurement techniques available for the MODULAR One system are thermocouple, pyrometer, and optional fiber-optic thermometer.

Typical Proven Processes:MODULAR One

  • Ti salicidation
  • Ti nitridation (diffusion barrier)
  • Source/drain implant activation
  • PSG/BPSG reflow
  • TEOS spacer densification
  • Contact tapering
  • Trench oxidation
  • Gate dielectric formation
  • Metal alloy
  • GaAs implant anneal
  • GaAs contact alloy
  • Polysilicon anneal

Software Features:

  • User friendly GUI (windows)
  • Pop up user help screens
  • Real-time process data sampling (0.1 sec)
  • Tracking by lot and wafer number
  • Alarm log with data and time (text format)
  • Event log with data and time (text format)
  • Data format compatible with Lotus 1-2-3, Excel, etc.
  • Local hard disk storage of all data
  • File transfer via integrated Ethernet LAN network
  • Spreadsheet format process recipe data entry
  • Data field validation during creation of process recipe
  • Recipe file storage and retrieval
  • Gas compatibility safety checking during recipe creation
  • Recipe editing can be performed while processing wafers
  • Password protection
  • GEM/SECS compatible
  • SMIF compatible

Safety:

The system incorporates extensive features designed to ensure safe and efficient operation. Interlocks are provided for process gases, water flow, cabinet and chamber pressure. The chamber door opening is inhibited until the process chamber has been purged with nitrogen. A negative pressure inside the gas cabinet is maintained during the process. Process gases are hardware interlocked to prohibit using forbidden combinations of process gases, and the gas is enabled only when the chamber has been properly purged.

Easy maintenance:

The modular construction of the MODULAR OneTMSystem provides for easy maintenance. The system is designed for rapid, easy access to all components. Extensive use of auto-calibration methods are employed, eliminating the need for maintenance “tweaking” of any component.

The system software provides comprehensive diagnostic features, including the automatic logging of key system parameters, resulting in the ability to monitor for any degradation of the system’s performance. This provides an early warning indication of potential system failure. These features, along with the system’s high reliability design, provides a guaranteed uptime of better than 95%.

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Modular Process Technology is a semiconductor equipment manufacturer of Rapid Thermal Processing Systems, hybrid UV-RTP  systems, and stand alone UV Ozone Cleaning Systems. There are many unique features incorporated into our product lines which make our products attractive to advanced research and development and manufacturing. Modular Process Technology has in-depth experience in fundamental materials science research and process development. Our extensive process technology is reflected in the quality of our system design and integration. 

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