Description

Model: LAM TCP9408 SE                 SOLD

Category:  Plasma Etch

Original Equipment Manufacturer: Lam Research

Condition:  In warehouse, Bagged & Skidded

Process: POLY ETCHER

Wafer Size: 8-inch

Valid Time: Subject to prior sale

Vintage: 2004

Serial Number:4431

Software Version: 1.6.012A

Main System:LAM POLY ETCHER (1 Unit)

SMIF System: ASSYST (2 Units)

Process Chamber: POLY ETCHER (1 Unit)

AC Power Box:  (1 Unit)

RF rack: 2 Units

Chiiler: 1 Unit

Pumps: 2 Units

Inspection: Against appointment after PO and payment.

Equipment Configuration:

• Machine Serial Number 4431
• Chamber config Type TCP 9400SE
• TCP RF Match Part No. 853-0322294-002
• Bias RF Match 853-025083-001
• ESC Power Supply 810-017086-010
• Chamber manometer. MKS Make (All) 629A-14608
• Turbo Manometer MKS Make (All) 625A11TDE
• Ref Manometer MKS Make (All) 625A11TDE
• Turbo Pump ATH 1300 M
• TCP RF Gen. -AE Make(All) 660-024637-006 RFDS
• BIAS RF Gen.AE Make( All) 660-024637-013 HALO
• Wafer Drag Back ENABLE
• Wafer Offset alignment Alignment 310
• Gas Ring Capacitance 1145 +/-15 pf
• Software Version 1.6.012A
• MFC Config.CL2-200 sccm 200
• MFC Config.O2-100 sccm 100
• MFC Config.HE/O2-20 sccm 20
• MFC Config.CF4-100 sccm 100
• MFC Config.HBR-500sccm 500
• MFC Config.SF6-100 sccm 100
• MFC Config.HE-500 sccm 500
• MFC Config.CL2-30 sccm 30
• TCP Coil position 5 O ‘ CLK
• Chiller used BOC 40/80
• Vat Vale/Pendulum Valve VAT -64 Valve
• PC Pump A30W
• Load Lock Pump A30W
• Turbo Pump capacity 1300L

All the Lam Plasma Etcher equipment  trademarks belongs to Lam Research , the original equipment manufacturer. All rights reserved.