Description
The following Lam Research Spare Parts are only for end user. Please contact us if you have any questions. Subject to prior sale without notice. Appreciate your time!
| 1 | 715-3300394-002 | Frog Leg |
| 2 | 715-3300394-002 | Frog Leg Rework |
| 3 | 715-330825-006 | Chamber Liner |
| 4 | 715-330825-006 | Chamber Liner Rework |
| 5 | 715-330928-002 | Chamber Liner |
| 6 | 715-330981-001 | Chamber Liner |
| 7 | 715-330982-001 | Chamber Liner |
| 8 | 715-495014-001 | Slit Door Liner Reanodise only |
| 9 | 715-495014-001 | Slit Door Liner Rework |
| 10 | 715-015808-001 | Shower Head |
| 11 | 716-008608-002 | Window With Step |
| 12 | 716-011009-001 | Window Sapphire |
| 13 | 716-013423-001 | |
| 14 | 716-331088-001 | Ring ESC 8″Top Quartz Poly |
| 15 | 795-020446-005 | |
| 16 | 839-012255-001 | Inner Gate Bellows |
| 17 | 839-09866-040 | Bellows |
| 18 | 715-011640-006 | Fing, Focus Anodized (Semi 6″) |
| 19 | 715-018991-206 | Upper Electrode 6″ |
| 20 | 715-330825-007 | |
| 21 | 718-094523-261 | ESC Chuck 6″ |
| 22 | 716-011533-001 | NSG-OZ Quartz Window |
| 23 | 716-008645-001 | Cover Ring Quartz HP |
| 24 | 715-011531-008 | Electrode Aluminum Anodized 6″ |
| 25 | 715-011531-009 | Electrode Aluminum Anodized 8″ |
| 26 | 715-009657-001 | Ring Outer Anodized |
| 27 | 716-160255-002 | Bell Jar Sleeve Quartz ISO CH 4500 |
| 28 | 716-011009-001 | Window Quartz |
| 29 | 716-011427-001 | DSQ Quartz Window |
| 30 | 716-011493-001 | DSQ Quartz Spacer |
| 31 | 716-021323-001 | Funnel Quartz Power Supply Moduel |
| 32 | 716-028454-012 | Disk Quartz |
| 33 | 716-028454-012 | Disk Quartz |
| 34 | 716-031052-001 | Window Quartz HDT Endpoint |
| 35 | 716-140236-003 | Confinment Ring |
| 36 | 716-330504-065 | Focus Ring Ceramic |
| 37 | 716-051609-003 | Spacer Heater (4Pin Arry) |
| 38 | 716-021717-001 | Bell Jar Sleeve Quartz |
| 39 | 716-021717-002 | Bell Jar Sleeve Quartz |
| 40 | 713-028487-001 | Vespel Confinement Ring |
| 41 | 716-012639-024 | Noz, Inj, 8X.055-45 Deg RD |
| 42 | 716-012640-011 | Window Gas Inj, Face Seal, Qtz, NSG |
| 43 | 716-012640-012 | Window Gas Inj, Face Seal, QR |
| 44 | 716-013344-001 | Ring Cover Outer GND |
| 45 | 716-013402-003 | Cover H/E Ring Quartz |
| 46 | 716-014843-001 | 6 Ring WAP Qtz Generic 17″ DFC 300mm |
| 47 | 716-023013-004 | Ring Hot Edge Si DFC 300mm Flex |
| 48 | 716-331142-305 | Top Edge Ring |
| 49 | 716-801306-009 | Quartz Disk |
| 50 | 716-801451-019 | Baffle Chamber 2300 MW Stripper U |
| 51 | 716-802779-009 | Gas Injector |
| 52 | 716-140236-062 | Confinement Ring Quartz |
| 53 | 716-330891-002 | Window TCP Quartz 9600 |
| 54 | 716-000941-001 | Quartz Plasma Disk Baffle |
| 55 | 716-347266-002 | Baffle Liner Chamber Opaque (9600) |
| 56 | 716-330355-001 | Window Quartz Heated Endpoint |
| 57 | 716-443179-102 | R Edge Base Quartz |
| 58 | 839-012255-001 | Inner Gate Bellows |
| 59 | 716-008718-001 | Quartz Gas Injector |
| 60 | 716-801667-005 | Quartz Viewport Window |
| 61 | 716-801306-004 | Window Quartz Gas Inject Fire Polish |
| 62 | 716-016763-001 | Ring Filler Inv Step 200mm |
| 63 | 716-016830-003 | |
| 64 | 716-016831-007 | Ring WAP Qtz Geniric 200mm |
| 65 | 716-027740-001 | Window Quartz |
| 66 | 716-031257-209 | Ring Edge Top 2300 |
| 67 | 716-443090-002 | Ring Quartz Upper |
| 68 | 716-005205-003 | Pl CVR Step Qtz 200mm 2300 Exelan |
| 69 | 716-016763-001 | Ring Filler Inv Step 200mm |
| 70 | 716-016830-003 | Ring Filler Inv Step 200mm |
| 71 | 716-016831-007 | Ring WAP Qtz Geniric 200mm |
| 72 | 716-027740-001 | Window Quartz |
| 73 | 716-031257-209 | Ring Edge Top 2300 |
| 74 | 716-140236-001 | Confinement Ring Quartz (002, 003) |
| 75 | 716-003543-006 | Ring, Hot Edge, Si, 300mm |
| 76 | 716-003543-001 | Ring, Hot Edge, Si DFC, 300mm |
| 77 | 716-044863-001 | Ring, He, A/FL, Si, SGL XTAL, 1.51D, 300mm |
| 78 | 716-023013-020 | Ring, Hot Edge, 195 HGT, Si, 300mm, SP |
| 79 | 716-003543-016 | Ring, Hot Edge, Si, 300mm |
| 80 | 716-023013-007 | Ring, Hot Edge, 195 HGT, Si, 300mm |
| 81 | 716-040738-402 | R, HE, 4XX ESC, W/Flat, SGL XTL, 300mm |
| 82 | 716-040738-412 | R, HE, 4XX /FLAT, SGL XTL, 300mm |
| 83 | 715-030860-001 | Chamber Liner |
| 84 | 715-801021-012 | Chamber Liner (2300Metal_AL) |
| 85 | 715-443178-300 | Al, Hot Edge Ring |
| 86 | 715-009779-002 | Cap Electrode |
| 87 | 715-007025-001 | Electrode Aluminum Anodized |
| 88 | 715-008721-001 | Electrode Aluminum Anodized |
| 89 | 715-007469-002 | Electrode Lower 8″ 4-Pin |
| 90 | 602006 | Pin, Lift Lower Electrode (Drytek) |
| 91 | 2301721 Rev 3 | Liner Ceramic, 100-150mm, CHMBR 2, 4, Upper Electrode(Drytek) |
| 92 | 716-006721-001 | 3-Hole Ring |
| 93 | 716-006753-001 | Insulator Ring |
| 94 | 716-011036-001 | Orifice Ring |
| 95 | 716-011510-001 | 3-Hole Ring |
| 96 | 716-011536-001 | Ring Upper Electrode Insulator Ceramic |
| 97 | 716-011563-001 | Clamp Ring 6″ |
| 98 | 716-011758-016 | Lower Combo Ring, 6″ |
| 99 | 716-011922-001 | Upper Electrode CeramicNg, 6″ |
| 100 | 716-011923-001 | Clamp Attachment Ring 6″ |
| 101 | 716-020904-016 | Lower Focus Ring, BAC, 6″ |
| 102 | 716-020905-001 | Lower Filler Ring, BAC, 6″ |
| 103 | 716-028028-004 | Upper Electrode Clamp Ring, 6″ |
| 104 | 716-028123-002 | Ceramic Filler Ring, 6″ |
| 105 | 716-028678-261 | Ceramic Clamp Ring, 6″ |
| 106 | 716-028688-01 | Clamp Lower Plate, 8″ |
| 107 | 716-028688-261 | Plate, Bottom, Wafer Clamp, 6″ |
| 108 | 716-028725-161 | Clamp Ring |
| 109 | 716-030136-001 | Ceramic Focus Ring, 6″ |
| 110 | 716-140068-001 | ESC Ceramic Focus Ring, 6″ |
| 111 | 716-140069-002 | Ring, Upper Insulator |
| 112 | 716-140139-001 | Hot Edge Ring or Focus Ring Insert, 8″ |
| 113 | 716-140163-001 | Hot Edge Ring or Focus Ring Insert, 8″ |
| 114 | 716-230121-001 | RF Shaped Window (6″ or 8″) |
| 115 | 716-330045-001 | Edge Ring 8″ |
| 116 | 716-330121-001 | RF Shaped Window (6″ or 8″) |
| 117 | 716-330167-281 | Bottom Actuated Clamp Ring, 8″ |
| 118 | 716-330504-064 | ESC Focus Ring (Modified–Regrind), 6″ |
| 119 | 716-330504-064 | ESC Focus Ring, 6″ |
| 120 | 716-330504-081 | ESC Focus Ring 8″ |
| 121 | 716-330504-081 | ESC Focus Ring, 8″ |
| 122 | 716-026652-002 | Ring Edge BOT 200-300mm |
| 123 | 716-031257-309 | Ring Edge Top 2300 |
| 124 | 716-017112-330 | Ring WAP 17.07 x 1.10 Thk AN SLT |
| 125 | 720-009531-010 | Screw FLTHD 6-32 KEL-F |
| 126 | 715-011565-002 | Bolt Clamp Rtng |
| 127 | 713-011585-004 | Cover Clamp Bolt “A” |
| 128 | 713-011926-001 | Cap Bolt Clamp Retain |
| 129 | 796-002673-001 | Stem 1/4″ KEL-F |
| 130 | 720-093815-006 | Screw Gas Dir Disk |
| 131 | 716-011969-100 | RING,QTZ,COUPLING,HI EDGE,300MM |
| 132 | 716-014843-300 | RING,WAP,QTZ,GENERIC,17IN,DFC |
| 133 | 720-090943-010 | 10-32 X 5/8 KEL-F SCREW |
| 134 | 716-031052-002 | Window Quartz HTD Endpoint |
| 135 | 715-011563-161 | CLAMP, WAFER, DOMED, CERAMIC, 6″, 1-FLAT, 4500 |
| 136 | 715-140153-001 | Coupling Ring, Ceramic. Ref. 715-140153-001. |
| 137 | 716-001427-003 | CERAMIC DISK |
| 138 | 716-006721-001 | Insulator Ring |
| 139 | 716-006753-001 | Ceramic Insulator Ring. Reference 716-006753-001 |
| 140 | 716-011570-001 | ORIFICE FILLER W/C CERAMIC |
| 141 | 716-011571-001 | CERAMIC WASHER |
| 142 | 716-011572-001 | CERAMIC RETAINER CLAMP, 1/4 TURN |
| 143 | 716-011573-001 | CERAMIC PLUNGER, SHORT |
| 144 | 716-011573-001 | Ceramic Plunger, 1/4 Turn
OEM# 716-011573-001 CPN: ML-43224 |
| 145 | 716-011573-004 | CERAMIC PLUNGER LONG |
| 146 | 716-011759-016 | RING, MOUNTING, CERAMIC |
| 147 | 716-020905-001 | Lower Filler Ring, BAC, 6″ |
| 148 | 716-028414-015 | RING, FOCUS, CERAMIC |
| 149 | 716-028447-002 | CERAMIC DISK |
| 150 | 716-029435-006 | RING, ELECTRODE, CERAMIC |
| 151 | 716-030135-001 | CERAMIC RING |
| 152 | 716-140139-001 | Hot Edge Ring, 200mm |
| 153 | 716-140427-001 | SAME AS 716-140427-001 IN CERAMIC |
| 154 | 716-230121-001 | RF Shaped Window (6″ or 8″) |
| 155 | 716-230121-211 | RF SHAPED WINDOW |
| 156 | 716-250514-001 | INSULATOR RING CLAMP CERAMIC |
| 157 | 716-250515-002 | INSULATOR RING LOWER CERAMIC |
| 158 | 716-330045-002 | EDGE RING 8″ – ALLIANCE 9600 PTX |
| 159 | 716-330121-211 | RF Shaped Window (6″ or 8″) |
| 160 | 716-330122-002 | Plate, Top, Ceramic |
| 161 | 716-330167-161 | CLAMP RING |
| 162 | 716-330167-261 | Bottom Actuated Clamp (BAC) Ring. 99.8% High Purity Alumina. Ref. P/N 716-330167-261. |
| 163 | 716-330504-061 | RING FOCUS 6″ GDRING JEIDA ESC |
| 164 | 716-330890-001 | CONTAINMENT RING BASR |
| 165 | 716-330892-001 | CERAMIC SHOWER HEAD |
| 166 | 716-330892-007 | GDP – ALLIANCE 9600 PTX |
| 167 | 716-460417-001 | INNER CERAMIC LINER |
| 168 | 716-331157-022 | Disk Interferometer Top Gas |
| 169 | 839-017612-009 | Assy, Window Quartz Tube |
| 170 | 716-331142-001 | Ring Edge Top Wide |
| 171 | 716-039961-001 | Ring Focus Steped Filter 200mm |
| 172 | 716-011969-100 | RING,QTZ,COUPLING,HI EDGE,300MM |
| 173 | 716-013344-001 / 716-013344-601 | RING,COVER,OUTER,GND |
| 174 | 716-012640-012 | WINDOW,GAS INJ,FACE SEAL,QRTZ,NSG |
| 175 | 716-012639-024 | NOZZLE, INJ. 8x, .055-45DEG RDL-1CTR |
| 176 | 716-014843-300 | RING,WAP,QTZ,GENERIC,17IN,DFC |
| 177 | 716-023013-004 | RING,HOT EDGE,.195 HGT,SI,DUAL |
| 178 | 716-013402-003 | Cover H/E Ring Quartz 300mm |
| 179 | 716-017112-330 | RING,WAP,17.07X1.10THK,AN SLT |
| 180 | 716-012639-024 | NOZZLE, INJ. 8x, .055-45DEG RDL-1CTR |
| 181 | 716-014843-300 | RING,WAP,QTZ,GENERIC,17IN,DFC |
| 182 | 716-039962-001 | Edge Ring |
| 183 | 716-014843-303 | Ring WAP Thk |
| 184 | 716-021323-002 | Quartz Funnel DSQ Chamber |
| 185 | 716-331089-001 | |
| 186 | 716-026652-902 | Ring Edge BOT 200-300mm |
| 187 | 716-031257-531 | Ring Edge Top Quartz EBP 300mm |
| 188 | 716-140139-211 | Hot Edge Ring Silicon |
| 189 | 716-008608-001 | IEP Window Sapphire Gas Innjector |
| 190 | 716-441044-005 | Shower Head Sapphire Coated Strip Chamber |
| 191 | 716-021323-002 | Quartz Funnel DSQ Chamber |
| 192 | 790-098558-002 | Quartz Extention Liner Kit |
| 193 | 15367-01 | Pin Lift Quartz |
| 194 | 16532-01 | Plate Quartz Lamp |
| 195 | 16784-01 | Spool Quartz |
| 196 | 17621-01 | Plate Gas Dist 6” |
| 197 | 17622-01 | Plate Diffuser Quartz |
| 198 | 71805-01 | Window Quartz 1.25 DIA |
| 199 | 17688-01 | Gas Distribution Plate 200mm |
| 200 | 14738-01 | Bubbler Quartz |
| 201 | 734-007524-294 | O-Ring Chemraz, SSE38 21.17 ID x .142C/S |
| 202 | 734-007524-284 | O-Ring Chemraz, SSE38 17.955 ID x .139C/S |
| 203 | 796-028633-010 | Screw |
| 204 | 720-090943-010 | Kel-F 10-32 Screw |
| 205 | 715-011746-161 | Aluminum Plate Wafer Clamp 6″ |
| 206 | 716-443086-301 | Silicon Hot Edge Ring |
| 207 | 716-801306-008 | |
| 208 | 716-800951-201 | |
| 209 | 716-331142-201 | Ring Edge Top Wide NSG |
| 210 | 716-331099-001 | Quartz Edge Ring |
| 211 | 716-007136-002 | Ring Quartz Upper HPT |
| 212 | 718-094523-281 | Assy Electd ESC 8″ Notched Lt Focus |
| 213 | 716-331030-001 | WDO RF SHP CER F/G 37 Holes 3xC |
| 214 | 716-013402-008 | Cover H/E Ring Quartz |
| 215 | 716-801667-003 | Window Quartz |
| 216 | 716-011572-001 | Clamp Retainer, 1/4 Turn |
| 217 | 716-011563-161 | Plate Wafer Clamp 6″ Dome |
| 218 | 716-011764-281 | Plate Wafer Clamp 8″ Dome No Flat |
| 219 | 716-028668-261 | Ring Clamp |
| 220 | 716-028721-261 | Plate Bottom Wafer Clamp 6″ Major Flat W/P |
| 221 | 716-028721-281 | Plate Bottom Wafer Clamp 6″ Domed Shadow |
| 222 | 716-440345-261 | Plate Bottom Wafer Clamp |
| 223 | 716-017581-002 | Ring ELCTD 2 Piece |
| 224 | 716-011969-002 | Ring Quartz Coupling 300mm |
| 225 | 716-803156-004 | B Focus Ring CVR DFC 300mm |
| 226 | 716-017112-300 | Ring WAP 17.07 x 1.10 THK AN SLT |
| 227 | 716-460875-002 | Insulator Lower Electrode Strip Chamber |
| 228 | 716-008854-001 | Disk Diffuser Duocel 6″ |
| 229 | 716-031257-534 | Edge Ring |
| 230 | 716-040737-407 | Coupling Ring Quartz |
| 231 | 716-331157-024 | Quartz Disk Top Gas |
| 232 | 715-011531-015 | Electrode Upper 6″ |
| 233 | 716-028454-015N | TPC Quartz Window Y203 (Coated New Only) |
| 234 | 716-140125-401, A | Baffle 8″ SiC-1H |
| 235 | 716-140125-100, G | Baffle 8″ SiC-1H |
| 236 | 716-330045-281 | Ring Focus 8″ ESC Guard |
| 237 | A06-001-01 | Window Vented Quartz |
| 238 | 16532-01 | Top Plate Quartz |
| 239 | 06-0091 | Quartz Plasma Chamber |
| 240 | 713-018426-369 | Insert, Vespel Ring |
| 241 | 715-007469-001 | Lower Electrode 6″, 4 pin |
| 242 | 715-007469-102 | Lower Electrode 6″, 4 pin |
| 243 | 715-011531-012 | Electrode |
| 244 | 715-011531-014 | Electrode 8″, |
| 245 | 715-011531-102 | Electrode 6″ |
| 246 | 715-011640-005 | Focus Ring 4″ |
| 247 | 715-011673-105 | Lower Electrode 5″, |
| 248 | 715-011746-141 | Plate Wafer Clamp 4″ |
| 249 | 715-011746-151 | Plate Wafer Clamp 5″ |
| 250 | 715-018991-208 | Electrode Upper 8″ |
| 251 | 715-018991-006 | Electrode Upper 8″ |
| 252 | 715-028087-005 | Shroud 6″ 2 mil hard |
| 253 | 715-028559-001 | Showerhead 6″ |
| 254 | 715-028606-161 | Wafer Clamp 6″ |
| 255 | 715-030320-001 | BSR Injection Ring |
| 256 | 715-28608-161 | Non-Contact Wafer Clamp |
| 257 | 715-31752-206 | Electrode Lower 6″ |
| 258 | 715-31752-208 | Electrode Lower 8″ |
| 259 | 715-330000-090 | Gas Injection Ring |
| 260 | 715-330135-001 | BSR Injection Ring |
| 261 | 715-330984-001 | BSR Injection Ring |
| 262 | 715-330987-001 | BSR Injection Ring |
| 263 | 715-11986-108 | Lower Elctrode |
| 264 | 715-011531-002 | Upper Electrode |
| 265 | 715-011639-006 | Upper Electrode |
| 266 | 716-460216-002 | Ring Focus 8″ STP Chamber |
| 267 | 716-331051-006 | Uniformity Ring |
| 268 | 715-009306-006 | RING FOCUS 6″ |
| 269 | 713-011560-001 | Teflon Shroud |
| 270 | 713-011574-001 | Plunger Wafer Clamp Upper |
| 271 | 713-011575-001 | Clamp Retaining Nut |
| 272 | 713-011578-001 | Plunger Guid Sleeve |
| 273 | 713-011579-001 | Plunger Guide |
| 274 | 713-021267-001 | Pin Clamp Aligment Head |
| 275 | 715-011664-004 | Cap Lower Electrode 4″ |
| 276 | 715-011925-001 | Bolt Capped Clamp Retaining |
| 277 | 715-140125-101 | Baffle Lower |
| 278 | 716-011580-246 | Plate Clamp 4″ |
| 279 | 716-028414-014 | Ring Focus |
| 280 | 839-011906-001 | Electrode Silicon 6″ |
| 281 | 713-011577-001 | Retainer Washer |
| 282 | 716-011624-001 | Ring Filter Ceramic |
| 283 | 716-801568-002 | Window Quartz |
| 284 | 716-022030-004 | SLV Quartz Stepped Pin DC Bias |
| 285 | 720-092759-016 | 1/4-20 x 1″ Slotted FH Screw |
| 286 | 716-031257-909 | Ring Edge Top Quartz 300mm |
| 287 | 716-443189-002 | Quartz Cover Ring |
| 288 | 716-331157-004 | High Purity Quartz Disk for 9400DFM |
| 289 | 716-140432-002 | Insert Ring Upper Keyed |
| 290 | 716-028454-512 | Disk Quartz |
| 291 | 716-331088-004 | R Edge 8″ ES NCH Top Quartz EX |
| 292 | 716-004655-001 | Ring Quartz Upper |
| 293 | 716-331157-014 | Top Disk Quartz |
| 294 | 716-028123-003 | Filler Ring |
| 295 | 716-330915-001 | Insulator Ceramic Gas Ring |
| 296 | 716-331128-001 | Window Sapphire |
| 297 | 716-140432-004 | Quartz Ring Upper, Konsi 51182 |
| 298 | 716-016831-002 | Ring WAP Konsi 51182 |
| 299 | 716-011493-001 | Spacer Quartz P.R. (DSQ) |
| 300 | 716-140139-213 | Ring Hot Edge HI W |
| 301 | 716-016830-002 | Ring WrapTwist Top Stepped DFC200mm |
| 302 | 716-007136-011 | Ring Quartz Upper HPT |
| 303 | 716-008645-005 | Cover Ring Quartz HP |
| 304 | 716-026654-902 | Ring Edge Bot Quartz 200-300 KONSI 51182 |
| 305 | 716-045265-123 | Ring Cover Gnd EXT Quartz 300mm |
| 306 | 716-021216-002 | Top Adjust CPLG 2300 300mm |
| 307 | 716-802034-001 | Liner Chamber Lower |
| 308 | 716-802033-001 | Liner Chamber Lower |
| 309 | 716-801627-004 | R. FOC 300mm STPR 12″ |
| 310 | 716-443230-002 | Confinement Ring One Piece HP |
| 311 | 716-443090-010 | R. Quartz Upper HP |
| 312 | 716-330891-802 | Window Top Quartz 9600xx |
| 313 | 716-331157-013 | Plate Shield 300mm |
| 314 | 716-013350-010 | SP IEP Optics 2, 4 Long NSG |
| 315 | 716-021209-366 | BOT ADJ CPLG 2300 300mm DZ |
| 316 | 716-027425-001 | Ring Cover Outter Stepped |
| 317 | 716-012639-023 | Injector 1 CTR 8 RDL Quartz NSG |
| 318 | 716-021209-001 | BOT ADJ CPLG 2300 300mm |
| 319 | 716-331142-999 | R Edge Top Wide 8″ Flat Test |
| 320 | 716-140432-802 | Ring Upper Keyed |
| 321 | 716-140236-803 | Confinement Ring |
| 322 | 716-018468-130 | Ring Cover Outer Ground .130 Thk Quartz |
| 323 | 716-022025-001 | Ring Outer CPLG 2300 200mm |
| 324 | 716-018468-090 | Ring Cover Outer Ground .090 Thk Quartz |
| 325 | 716-0036516-02 / 716-0036516-01 | Quartz Face Outer Electrode |
| 326 | 716-028454-715 | Disk Quartz HPQ |
| 327 | 716-017112-002 | Ring WAP Twist Top 17″ 300mm EXELAN |
| 328 | 716-021216-367 | Top ADJ CPLG 2300 300mm DZ |
| 329 | 716-016394-001 | Ring Confinement One Piece HPT |
| 330 | 716-027997-001 | Electrode Outer Half Quartz Face |
| 331 | 716-027996-001 | Electrode Outer Full Quartz Face |
| 332 | 716-021209-368 | BOT ADJ CPLG 2300 300mm DZ |
| 333 | 716-800951-311C | XXX Base Focus Ring Shield 300mm FNSH PROC |
| 334 | 716-082039-001 | TCP Window Silicon |
| 335 | 716-069688-002 | Silicon |
| 336 | 716-026653-902 | Bottom Edge Ring (KIYO) |
| 337 | 716-800952-001 | Base Focus Ring Metal |
| 338 | 716-003686-188 | Edge Ring (Metal Chamber) |
| 339 | 716-140118-001 | Focus Ring ESC 8″ |
| 340 | 716-031453-002 | Lam KK |
| 341 | 716-011624-007 | Ring Ceramic |
| 342 | 857-073299-001 | Talon Gaskets 300mm |
| 343 | 713-072792-003 | Talon Gaskets 300mm |
| 344 | 857-072806-005 | Talon Gaskets 300mm |
| 345 | 857-073710-002 | Talon Gaskets 300mm |
| 346 | 839-044157-431 (Local) | Flex 45 EX Silicon Electrode |
| 347 | 716-069688-040 | Flex 45 EX Silicon Electrode |
| 348 | 839-019090-324 | ESC 300mm |
| 349 | 839-800327-315 | ESC 300mm |
| 350 | 857-065064-004 | ABE Gaskets |
| 351 | 714-065064-004 | ABE Gaskets |
| 352 | 839-052157-010 | ABE Silicon Electrode Inner |
| 353 | 839-052158-021 | ABE Silicon Electrode Outer |
| 354 | 796-010692-002 | Bellows Rocker N/N |
| 355 | 790-022847-003 | ACTR Bellows BSR Lam 2300 WEB |
| 356 | 716-140432-001 | Ring Upper Keyed |
| 357 | 839-330743-002 | BASR Bellows |
| 358 | 839-011906-912 | Electrode Silicon Polish |
| 359 | 839-031766-001 | Bellows Lifter |
| 360 | 605-012620-001 | PCB Index Dual SNSR (X) |
| 361 | 716-140163-261 | Ring Hot Edge 15 Deg (Y) |
| 362 | 716-140432-804 | Ring Upper Keyed |
| 363 | 857-073299-001 | LAM 12″ Flex LRC Gaskets |
| 364 | 713-069935-003 | LAM 12″ Flex LRC Gaskets |
| 365 | 713-072792-003 | LAM 12″ Flex LRC Gaskets |
| 366 | 857-072806-005 | LAM 12″ Flex LRC Gaskets |
| 367 | 857-073710-002 | LAM 12″ Flex LRC Gaskets |
| 368 | 713-073439-010 | LAM 12″ Flex LRC Gaskets |
| 369 | 714-072727-048 | LAM 12″ Flex LRC Gaskets |
| 370 | 714-072728-003 | LAM 12″ Flex LRC Gaskets |
| 371 | 857-084241-010 | LAM 12″ Flex LRC Gaskets |
| 372 | 857-065064-004 | LAM 12″ Flex LRC Gaskets |
| 373 | 714-059445-025 | LAM 12″ Flex LRC Gaskets |
| 374 | 713-066269-002 | LAM 12″ Flex LRC Gaskets |
| 375 | 857-050466-008 | LAM 12″ Flex LRC Gaskets |
| 376 | 857-050466-001 | LAM 12″ Flex LRC Gaskets |
| 377 | 713-066825-001 | LAM 12″ Flex LRC Gaskets |
| 378 | 857-027108-001 | LAM 12″ Flex LRC Gaskets |
| 379 | 857-084241-025 | LAM 12″ Flex LRC Gaskets |
| 380 | 713-080721-001 | LAM 12″ Flex LRC Gaskets |
| 381 | 713-088966-001 | LAM 12″ Flex LRC Gaskets |
| 382 | 857-073299-002 | LAM 12″ Flex LRC Gaskets |
| 383 | 857-086768-095 | LAM 12″ Flex LRC Gaskets |
| 384 | 713-040539-001 | LAM 12″ Flex LRC Gaskets |
ID-SS5302-2ND
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