Description
OCEAN CVD:
World is anticipating new wonder material to bring in positive influence on humans. The OCEAN CVD platform is one such hope for scientific community. This provides 5X faster development platform to derive new 2D materials.
More info download here.
- Standard: 1150mm (L) X 920mm (W) X 1240mm (H)
- With Options: 1700mm(L) X 1200mm(W) X 1240mm(H)
- 1100 Deg C (Operating) / 1250 Deg C (Maximum)
- Uniformity over 200 mm
- 2.5″ X 12″ (Roll)
- 40 mm X 60 mm – single substrate
- 240V, 16A, 50 Hz
- 20 Deg C/Min
- 1 mbar (ultimate vacuum)
- 240 min for manual version
- 45 mins automated version
- Gas Manifold with MFC
- Run & Vent line switch for pressure stabilisation
- Automatic pressure control with throttle valve
- User driven Recipe management software
- Gas Safety System
- Detachable Gas Delivery system
- Automatic Substrate transfer system
- Load Lock chamber
- Precursor Purifier
- Inbuilt Valve Manifold for multiple gas outlets, Electronic Regulators
- Bubbler for Liquid precursor
- Vent gas abatement Scrubber
ID-SS8435-1