Description
Please contact us for the availability of the Gasonics Pep 3510A Plasma Asher, Dual Chamber.
- Manufacturer : GaSonics, Pep 3510
- Model : Pep 3510A
- Condition : Used, AS IS
- • Currently Configured for 200mm Wafer Sizes• Cassette Interface:• Yaskawa Robot: Dual Blade• MKS 600 Series Pressure Controller• Axicon 2500W Microwave Power Supply• Gas Configuration: O2, N2, H2 4%/N2
- • Electrical Requirements: 208VAC, 3 Phase, 50/60Hz
- • Dual Cooling Stations
- • IBM Compter/Controller
- • Dual Chamber PEP 3510
- (2) Open Cassette Stations
- • Install Type: Through-the-Wall
The items are subject to prior sale without notice. These items are only for end users.
SSEB380