Description
Electron Beam (E-beam) Evaporation System
- 40 inch diameter x 60 inch high, D-Shaped, stainless steel, water cooled process chamber with multiple penetrations.
- Front opening, O-ring sealed, stainless steel access door, water cooled. Includes two 4” viewports for viewing substrate and E-beam source.
- Oxford Instruments Cryoplex-16, 16” cryogenic pump with helium compressor, power cable and helium lines. VAT 16” 3-possition high vacuum isolation combination throttle valve.
- Temescal E-Gun, 4x40CC/HPE, 270-3CKB, Bottom Drive
- Temescal CV6SXL, 6 kW Electron beam power supply with Niles Precium Programmable beam sweep controller.
- Deposition rate / process controller with dual crystal sensor head assembly.
- Kaufman and Robinson EH 2000F EH 2000 End-Hall permanent magnet ion source with eHF power supply, controller with readout.
- Rotating / Tilt Substrate tooling with tilt angle positioning and rotation.
- System can be reconfigured with planetary domes, lift-off dome or other
- 16 kW IR substrate heater array with SCR control
Valid Time: Subject to prior sale without notice.
SS231649291038
