Description
Please contact us for the availability of the Edwards Auto 500 Turbo used semiconductor equipment.
Sputtering System. The Auto 500 box chamber system is a versatile front loading thin film system for Research & Development or preproduction. The chamber is mounted on a pedestal, housing the pumping stack. A rack panel next to the vacuum pedestal houses controls for vacuum and all thin film processes accessories. Three RF magnetron cathodes, two are 4 in. dia. and one is 3 in. dia. Rotating Substrate Carrier: 11 in. dia. Includes RF etch. Crystal film thickness monitor. Turbo pump with controller and roughing pump.
The items are subject to prior sale without notice. These items are only for end users.
SS5626