Description
Please contact us for the availability of the Edwards Auto 500 used semiconductor equipment.
Deposition System with Low Temp Organic Source and Resistive Evaporation. Front loading thin film deposition system for research and development or pre-production. System has a total of three evaporation sources, two standard resistive sources and one Kurt J. Lesker low temperature source for organics. Dual crystal deposition film thickness monitor. Substrate rotation controller. Single shudder. Controller for substrate heat but does not have heaters. Dry scroll pump in base for chamber roughing. CTI cryopump with compressor for high vacuum pump down. CE marking. System can deposit one source at a time or can do codeposition.
The items are subject to prior sale without notice. These items are only for end users.
SS5626
