Description
Please contact us for the availability of the following used Drytek 384T Metal Etch Plasma Etch Semiconductor Equipment.
| anufacturer |
Drytek |
| Model |
384T |
| Cassette to Cassette |
YES |
| Other Information |
- Configured for 6″ Wafers
- Standard Chuck
- LAM RESEARCH 13.56 MHz RF Power Source
- MKS Type 651 Pressure Controller
- UNIT Model UPC 1300 – HE 50 sccm
- TYLAN Model FC-280S – N2 1 slpm
- TYLAN Model FC-280S – N2 100 sccm
- TYLAN Model FC-280S – N2 500 sccm
- TYLAN Model FC-280S – N2 500 sccm
- TYLAN Model FC-280S – N2 1 slpm
- TYLAN Model FC-280S – N2 500 sccm
- Software Version V3.11
|
The items are subject to prior sale without notice. These items are only for end users.
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