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Drytek 384T Metal Etch

Description

Please contact us for the availability of the following used Drytek 384T Metal Etch Plasma Etch Semiconductor Equipment.

anufacturer Drytek
Model 384T
Cassette to Cassette YES
Other Information
  • Configured for 6″ Wafers
  • Standard Chuck
  • LAM RESEARCH 13.56 MHz RF Power Source
  • MKS Type 651 Pressure Controller
  • UNIT Model UPC 1300 – HE 50 sccm
  • TYLAN Model FC-280S – N2 1 slpm
  • TYLAN Model FC-280S – N2 100 sccm
  • TYLAN Model FC-280S – N2 500 sccm
  • TYLAN Model FC-280S – N2 500 sccm
  • TYLAN Model FC-280S – N2 1 slpm
  • TYLAN Model FC-280S – N2 500 sccm
  • Software Version V3.11

The items are subject to prior sale without notice. These items are only for end users.

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