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CVE 301 AC-X 2″

Inventory Equipment List (Updated)

Categories: Refurbished Hot Main Items, Resell Products

Description

Description

CVE 301 AC-X 2″ RF sputtering thin film deposition system coater. This Unit is Currently Fully Set Up and operational!

RF Magnetron High-Vacuum Sputtering Thin-Film Deposition System Comprised of a Cooke Vacuum Vessel and Pressure Control Apparatus PLUS the Supporting Electronics for Monitoring and System Regulation plus all Vacuum Hardware shown including:

Cooke Vacuum Products (Norwalk CT) Ultra-High Vacuum Test and Measurement Vacuum Control System Model # CVE-301 AC-X. Includes Vacuum Monitoring Panel Housed on All-Steel, Wheeled-Cart. Custom Made. Electrical Motor and Opening and Closing Vacuum Vessel. Also has operating (but currently disconnected) stage rotation motor and biasing feedthroughs.
Nine (9) Very Good Condition 2” Sputter Targets (1/4” Thick: Cu-Copper, W-Tungsten, ITO-Indium Tin Oxide, Si-Silicon, Ti-Titanium, CuO-Cupric Oxide, Zn-Zinc, Ti/Ta 95% Titanium / 5% Tantalum), Al-Aluminum). Almost all include the specialized Meivac backing plate centering support. Some are sealed from the factory.
MCS-Mercator Control Systems (Santa Ana CA)_rf Tuner. Mod.# ATN 500
U.S. Meivac Magnetron. 2” Sputter Gun – rebuilt by Meivac (2015)
Balzers (Pfeiffer) TMH-065 Turbo Pump BN63ISO-K. Mod.# PM P02 350, with TCP 015 controller
ENI Model ACG-5 RF Plasma Generator
Applied Thermal Control Model Recirculating Chiller.
Capacitance Manometer, ion, and thermocouple pressure gauges. Two Tylan General Model 80-6B controllers.
Custom built gas cabinet with custom built touch-screen Arduino based gas controller
Leybold Trivac Roughing Pump. Mod.# D8A, Cat.# 898020, Ser.# 12892
Operators Data Log Book and Component Equipment Instruction Manuals and wiring and mechanical drawings
Custom made glove box and air filtration system
Matching wood side cart

ID-SS380EB

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