Description
Brewer Science CEE-1300X programmable hot plate for 200mm wafers
Location: CA, U.S.A.
These are subject to prior sale. These are only for end user. Appreciate your time.
The trademarks of the equipment and parts contained in this website belonged to the Original Equipment Manufacturers.
- Substrate sizes up to 200mm round or 8×8″ square
- Pneumatic lift pins for loading and unloading substrates
- Bake plate auto sizing 75mm- 200mm wafers
- Up to 250,000 process recipe programs with unlimited number of program steps per recipe
- Ramping: up to 10 set points per recipe
- Step time: 0.1 to 9,999.9 seconds with resolution of 0.1 seconds
- ambient to 300C, configurable to 400C
- Temperature resolution within 0.1C
- unifirmity 0.3% across working surface
- control interface: Onboard Windows based PC with 7″ display screen
- USB and ethernet ports ofr uploading/down loading process parameters
- Bake methods: contact, vacuum, & proximity
SS7270-1-2-1-1 and SS7270W