Description
Applied Materials Precision 5000 Nitride Etch, 8“
Condition: Great condition. We sell this item at AS IS WHERE IS
Quantity:1 set
Price: Make offer
These are subject to prior sale. These are only for end user. Appreciate your time.
The trademarks of the equipment and parts contained in this website belonged to the Original Equipment Manufacturers.
Info on the system for your reference.
– MXP chamber lid on standard Mark 2 chamber (x4)
– with four Mark 2 etch chambers
– ESC clamping
– Software v.4.70
– CIM: SECS
– Robot with single blade
– 10 slot elevator
– Open cassette (x2)
– Mini controller for expanded gas panel
– 400 liter/sec Mag400 Lev Turbo (x4)- Electrostatic clamping
– Edwards QDP40 mech pump
– AMAT-0 heat exchanger
– Neslab HX150 heat exchanger
– Edwards WS151/QDP80 mech pump (x4)
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