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AG Associates Heatpulse 210M

Description

Please contact us for the availability of the following used AG Associates Heatpulse 210M Thermal Processor  semiconductor equipment.

Rapid Thermal Processing System

Manufacturer AG Associates
Model 210M
Description Rapid Thermal Processing System
Other Information
  • Ion Implant Activation, Polysilicon Annealing, Silicide Formation, Oxide Reflow (PSG & BPSG), Alloying and Metallization
  • Single Wafer Process
  • Accommodates Wafer Sizes Through 4”
  • 400 – 1200ºC Operating Temperature Range
  • High-Intensity, Radiant Heating
  • 1-100 Seconds Processing Cycle

The items are subject to prior sale without notice. These items are only for end users.

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