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SemiStar Corp. Semiconductor Equipment Parts Service

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Novellus

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Quartz Parts

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Novellus Equipment Parts in CA USA

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Novellus Spare Parts

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NOVELLUS MB2 PVD SYSTEM

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Novellus MC1/MC3 Controller

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NOVELLUS MB2 PVD SYSTEM

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AMAT TEL Novellus Varian Ceramic Heaters, MCA E-Chuck Assy

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Semiconductor Equipment Spare Parts

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NOVELLUS Parts

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SPUTTERING SYSTEM

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Spare Parts

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Novellus Sabre XT

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We have recently acquired the following equipment from a 4-inch GaAs Fab in the USA: 8 sets of Lam AutoEtch 490 plasma etchers; 5 sets of Matrix 105 plasma asher/descum systems; 4 sets of AG Heatpulse RTP systems (models 4100 and 8108).

Main New Equipment & Parts Service

Vacuum Rapid Thermal Processors
Furnace :Atmosphere CVD/ PLCVD
Plasma Asher / Descum
Plasma Etch /RIE/ ICP/ DRIE/ PEALE
- Ion Beam Milling
Atomic Layer Deposition -ALD/PEALD
- Hybrid Systems
PECVD / Microwave PECVD
MOCVD, PA-MOCVD
Sputtering Deposition
E-Beam & Thermal Evaporator
Optical Coating System
Wet & Dry Cleaning, Reticle/Mask Cleaning
Space Simulation & Metrology Instruments
Accessories, Spare Parts & Service

Main Refurbished Equipment and Accessories

Rapid Thermal Processors
Plasma Asher /Descum
Plasma Etchers
Plasma Etch/ RIE/ ICP/ DRIE
ALD PECVD CVD
Sputtering Deposition
E-Beam & Thermal Evaporator
Metrology Instruments
Wafer Probes
SEM FEG
Tester
Mask Aligner
Robot Controller Aligner Accessories
Vacuum Pumps /Compressor Accessories
Chillers Accessories

Main Rapid Thermal Processors

Rapid Thermal Processors

The trademarks of the equipment and parts contained in this website belonged to the Original Equipment Manufacturers

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Navigation

Quartz Parts

Novellus Equipment Parts in CA USA

Novellus Spare Parts

NOVELLUS MB2 PVD SYSTEM

Novellus MC1/MC3 Controller

NOVELLUS MB2 PVD SYSTEM

AMAT TEL Novellus Varian Ceramic Heaters, MCA E-Chuck Assy

Semiconductor Equipment Spare Parts

NOVELLUS Parts

SPUTTERING SYSTEM

Spare Parts

Novellus Sabre XT