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SemiStar Corp. Semiconductor Equipment Parts Service

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Lam Research

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Semiconductor Equipment Spare Parts

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Semiconductor Equipment Spare Parts

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Lam Research Ceramic Quartz Spare parts

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PWB 110494-005 for Lam Research Lam AutoEtch PN 810-001314-002

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Spare Parts In USA

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Lam PN 660-091820-001

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AutoEtch 490

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LAM 4520XL

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Lam 490 AutoEtch

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LAM RESEARCH MASTER MODULE,Lam AutoEtch

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LAM RESEARCH RECIPE MODULE,Lam AutoEtch

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Si ELECTRODE Ring

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We have recently acquired the following equipment from a 4-inch GaAs Fab in the USA: 8 sets of Lam AutoEtch 490 plasma etchers; 5 sets of Matrix 105 plasma asher/descum systems; 4 sets of AG Heatpulse RTP systems (models 4100 and 8108).

Main New Equipment & Parts Service

Vacuum Rapid Thermal Processors
Furnace :Atmosphere CVD/ PLCVD
Plasma Asher / Descum
Plasma Etch /RIE/ ICP/ DRIE/ PEALE
- Ion Beam Milling
Atomic Layer Deposition -ALD/PEALD
- Hybrid Systems
PECVD / Microwave PECVD
MOCVD, PA-MOCVD
Sputtering Deposition
E-Beam & Thermal Evaporator
Optical Coating System
Wet & Dry Cleaning, Reticle/Mask Cleaning
Space Simulation & Metrology Instruments
Accessories, Spare Parts & Service

Main Refurbished Equipment and Accessories

Rapid Thermal Processors
Plasma Asher /Descum
Plasma Etchers
Plasma Etch/ RIE/ ICP/ DRIE
ALD PECVD CVD
Sputtering Deposition
E-Beam & Thermal Evaporator
Metrology Instruments
Wafer Probes
SEM FEG
Tester
Mask Aligner
Robot Controller Aligner Accessories
Vacuum Pumps /Compressor Accessories
Chillers Accessories

Main Rapid Thermal Processors

Rapid Thermal Processors

The trademarks of the equipment and parts contained in this website belonged to the Original Equipment Manufacturers

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Semiconductor Equipment Spare Parts

Semiconductor Equipment Spare Parts

Lam Research Ceramic Quartz Spare parts

PWB 110494-005 for Lam Research Lam AutoEtch PN 810-001314-002

Spare Parts In USA

Lam PN 660-091820-001

AutoEtch 490

LAM 4520XL

Lam 490 AutoEtch

LAM RESEARCH MASTER MODULE,Lam AutoEtch

LAM RESEARCH RECIPE MODULE,Lam AutoEtch

Si ELECTRODE Ring