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OEMs: AG Associates
Branson/IPC
Brooks Equipe PRI
CHA
Ekrubnano
Electroglas
F.E.I.
Gasonics
Glow-Research
HP Agilent
Hitachi
KLA-Tencor
Lam Research
Matrix
MRC
NanoMaster
Oxford
Perkin-Elmer
PlasmaTherm
Premtek
STS SPTS
Tegal
Temescal
TES
Tystar
USIC -Wafers
Pumps
Chillers
Si Wafer Carriers

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SemiStar Corp. Semiconductor Equipment Parts Service

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Brooks Automation

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Brooks Z-Bot (PN: 001-0000-41)
~~$12,000.00~~ $8,000.00
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Repair Robot Controller Aligner

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2-02-1021 and 2-02-1022

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ASYST TECHNOLOGIES Parts -ID-SS380EB

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Semiconductor Equipment Spare Parts

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Semiconductor Equipment Spare Parts

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Pre-3839 Prealigner

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ATM105-1-S-CE robot

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ESC-212-KLA-UNI robot controller

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EE TOOLS TOP MAX TM-A48

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DBM-2406

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Equipment Parts

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We have recently acquired the following equipment from a 4-inch GaAs Fab in the USA: 8 sets of Lam AutoEtch 490 plasma etchers; 5 sets of Matrix 105 plasma asher/descum systems; 4 sets of AG Heatpulse RTP systems (models 4100 and 8108).

Main New Equipment & Parts Service

Vacuum Rapid Thermal Processors
Furnace :Atmosphere CVD/ PLCVD
Plasma Asher / Descum
Plasma Etch /RIE/ ICP/ DRIE/ PEALE
- Ion Beam Milling
Atomic Layer Deposition -ALD/PEALD
- Hybrid Systems
PECVD / Microwave PECVD
MOCVD, PA-MOCVD
Sputtering Deposition
E-Beam & Thermal Evaporator
Optical Coating System
Wet & Dry Cleaning, Reticle/Mask Cleaning
Space Simulation & Metrology Instruments
Accessories, Spare Parts & Service

Main Refurbished Equipment and Accessories

Rapid Thermal Processors
Plasma Asher /Descum
Plasma Etchers
Plasma Etch/ RIE/ ICP/ DRIE
ALD PECVD CVD
Sputtering Deposition
E-Beam & Thermal Evaporator
Metrology Instruments
Wafer Probes
SEM FEG
Tester
Mask Aligner
Robot Controller Aligner Accessories
Vacuum Pumps /Compressor Accessories
Chillers Accessories

Main Rapid Thermal Processors

Rapid Thermal Processors

The trademarks of the equipment and parts contained in this website belonged to the Original Equipment Manufacturers

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Brooks Z-Bot (PN: 001-0000-41)

Repair Robot Controller Aligner

2-02-1021 and 2-02-1022

ASYST TECHNOLOGIES Parts -ID-SS380EB

Semiconductor Equipment Spare Parts

Semiconductor Equipment Spare Parts

Pre-3839 Prealigner

ATM105-1-S-CE robot

ESC-212-KLA-UNI robot controller

EE TOOLS TOP MAX TM-A48

DBM-2406

Equipment Parts