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Wanted Equipment, Parts

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SemiStar Corp. Semiconductor Equipment Parts Service

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OXFORD PLASMAPRO 100 COBRA

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Hitachi S-8820 CD-SEM

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SUSS MicroTec Gamma

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Used Semiconductor Equipment Parts

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Used Semiconductor Equipment

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Robot Controller Pre Aligner

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A95-070-01 for Gasonics

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STS ICP with CL2 Gas

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Wanted Equipment Oct. 2023

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Lam Rainbow Etcher

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Heatpulse 4100 4108 8108 8800

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STS multiplex DRIE

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We have recently acquired the following equipment from a 4-inch GaAs Fab in the USA: 8 sets of Lam AutoEtch 490 plasma etchers; 5 sets of Matrix 105 plasma asher/descum systems; 4 sets of AG Heatpulse RTP systems (models 4100 and 8108).

Main New Equipment & Parts Service

Rapid Thermal Processors
Furnace :Atmosphere CVD/ PLCVD
Plasma Asher / Descum
Plasma Etch /RIE/ ICP/ DRIE/ PEALE
- Ion Beam Milling
Atomic Layer Deposition -ALD/PEALD
- Hybrid Systems
PECVD / Microwave PECVD
MOCVD, PA-MOCVD
Sputtering Deposition
E-Beam & Thermal Evaporator
Spin Coater
Dip Coater
Optical Coating System
Wet & Dry Cleaning, Reticle/Mask Cleaning
Space Simulation & Metrology Instruments
Accessories, Spare Parts & Service

Main Refurbished Equipment and Accessories

Rapid Thermal Processors
Plasma Asher /Descum
Plasma Etchers
Plasma Etch/ RIE/ ICP/ DRIE
ALD PECVD CVD
Sputtering Deposition
E-Beam & Thermal Evaporator
Metrology Instruments
Wafer Probes
SEM FEG
Tester
Mask Aligner
Robot Controller Aligner Accessories
Vacuum Pumps /Compressor Accessories
Chillers Accessories

Main Rapid Thermal Processors

Rapid Thermal Processors

The trademarks of the equipment and parts contained in this website belonged to the Original Equipment Manufacturers

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Navigation

OXFORD PLASMAPRO 100 COBRA

Hitachi S-8820 CD-SEM

SUSS MicroTec Gamma

Used Semiconductor Equipment Parts

Used Semiconductor Equipment

Robot Controller Pre Aligner

A95-070-01 for Gasonics

STS ICP with CL2 Gas

Wanted Equipment Oct. 2023

Lam Rainbow Etcher

Heatpulse 4100 4108 8108 8800

STS multiplex DRIE