Semiconductor Equipment Spare Parts Service

Description

Valid: These are only for end users. Subject to prior sale without notice. Appreciate your time!

The trademarks of the equipment and parts contained in this website belonged to the Original Equipment Manufacturers.

AMAT	0020-21275	CLAMP RING	21
AMAT	0020-21275	CLAMP RING	2
AMAT	0020-21323	INSULATOR, CABLE AC REMOTE	1
AMAT	0020-21362	CR MBT I6-C	6
AMAT	0020-21371	BRKT BREAKER PANEL TRIM	1
AMAT	0020-21380	PIN, DEP RING ANTI-ROTATION, 200MM ESC	2
AMAT	0020-21428	CLAMP RING	1
AMAT	0020-21428	CLAMP RING	9
AMAT	0020-21464	SHIELD	1
AMAT	0020-21465	SHIELD	1
AMAT	0020-21465	SHIELD	1
AMAT	0020-21469	ADAPTER	1
AMAT	0020-21479	CLAMPING RING 6″ TIW SEMI MAJOR FLAT	5
AMAT	0020-21479	CLAMPING RING 6″ TIW SEMI MAJOR FLAT	50
AMAT	0020-21498	CLAMPING RING 6 TIW SEMI MAJ	1
AMAT	0020-21528	PANEL	2
AMAT	0020-21619	PLATE, MOUNTING	1
AMAT	0020-21625	SHIELD COLLIMATOR LOWER 6″	2
AMAT	0020-21637	BRACKET, ATG, PCB MAG/ LAMP DRIVER	3
AMAT	0020-21675	ARM LIFTER DEGAS/ ORIENTER	2
AMAT	0020-21707	LIFTER 8″	1
AMAT	0020-21708	CHUCK	5
AMAT	0020-21716	PLUG, CVD/MONOLITH INTERFACE	4
AMAT	0020-21738	HOOP 8IN PRECLEAN	3
AMAT	0020-21739	SHIELD UPPER 8″	1
AMAT	0020-21753	FINGER, 6″ CERAMIC	4
AMAT	0020-21756	SPACER INSULATOR 6″	1
AMAT	0020-21797	BRACKET, FORELINE SUPPORT, PRODUCER E	1
AMAT	0020-21804	SLIM, MAGNET ASSY, 4MM	1
AMAT	0020-21806	COVER RIGHT, MAIN AC	1
AMAT	0020-21863	SHIM,MAGNET,1.5MM	5
AMAT	0020-21944	POCKET PLATE QTZ 8″ PRECLEAN	1
AMAT	0020-21945	POCKET PLATE AL203 8″ PRECLEAN	1
AMAT	0020-21956	FLANGE, ADAPTER Z DRIVE	2
AMAT	0020-21963	CAM RIM CASSETTE BEARING	9
AMAT	0020-21976	GRILL DIFFUSER	5
AMAT	0020-22033	HEX COLLIMATOR	1
AMAT	0020-22088	BRKT. INTERLOCK ACTUATION	1
AMAT	0020-22126	COVER LIFT PVD	1
AMAT	0020-22129	STIKER,MAG LATCH	1
AMAT	0020-22130	HEATER SWITCH	7
AMAT	0020-22187	ADAPTER STAND	4
AMAT	0020-22196	PEDESTAL, TIN	25
AMAT	0020-22207	CASE BOTTOM SWITCH	4
AMAT	0020-22237	COVER RING	23
AMAT	0020-22237	COVER RING	57
AMAT	0020-22242	LIFTER, HOOP	8
AMAT	0020-22260	CLIP SPRING WINDOW .19 THK FRONT DOOR CO	11
AMAT	0020-22260	CLIP SPRING WINDOW .19 THK FRONT DOOR CO	7
AMAT	0020-22281	ADJUSTABLE WAFER SENSOR BRACKET	2
AMAT	0020-22312	SHIELD TERM BLOCK 12 POS	3
AMAT	0020-22362	6″ LIFTER TC	1
AMAT	0020-22453	TOOL ROBOT CLAMP ASSY	25
AMAT	0020-22459	6″ LIFTER	1
AMAT	0020-22461	LIFTER, 8″	1
AMAT	0020-22461	LIFTER, 8″	1
AMAT	0020-22478	SUSCEPTOR, 8″	4
AMAT	0020-22491	PLATE COVER	94
AMAT	0020-22492	CLAMP, LOWER	8
AMAT	0020-22492	CLAMP, LOWER	8
AMAT	0020-22497	BLOCK, WATER	28
AMAT	0020-22497	BLOCK, WATER	4
AMAT	0020-22506	COVER, PWR IN, CRYO NESLAB	2
AMAT	0020-22510	PRECISION RING, AI CLAMP (HOLZ)	1
AMAT	0020-22510	PRECISION RING, AI CLAMP (HOLZ)	29
AMAT	0020-22511	RETAIN BUTTON1001 PEDESTAL	245
AMAT	0020-22511	RETAIN BUTTON1001 PEDESTAL	2
AMAT	0020-22512	REST, BUTTON PEDESTAL	32
AMAT	0020-22543	BLOCK,NUT BROOKS, MFC	2
AMAT	0020-22548	PLATE, BLANKOFF	8
AMAT	0020-22551	COLLIMATOR,BRACKET GUIDE SOURCE	1
AMAT	0020-22553	CLAMP SHIELD	5
AMAT	0020-22553	CLAMP SHIELD	34
AMAT	0020-22555	UPPER SHIELD	15
AMAT	0020-22555	UPPER SHIELD	2
AMAT	0020-22577	BRACKET SYSTEM MANIFOLD INLET	2
AMAT	0020-22577	BRACKET SYSTEM MANIFOLD INLET	1
AMAT	0020-22578	COVER SYSTEM LEFT MANIFOLD	1
AMAT	0020-22579	COVER, CENTER MANIFOLD LEFT	3
AMAT	0020-22660	CLAMP RING, 8″	2
AMAT	0020-22660	CLAMP RING, 8″	14
AMAT	0020-22678	TOOL HOOP	1
AMAT	0020-22710	SHIELD HEAT N2 HEATER	1
AMAT	0020-22734	COLLIMATOR	1
AMAT	0020-22735	HUB	1
AMAT	0020-22737	WEIGHT, 200MM CASSETTE CLAMPING	10
AMAT	0020-22738	OBS: PLATFORM	2
AMAT	0020-22739	CASSETTE SUPPORT	9
AMAT	0020-22741	SIDE, RECEIVER, 200MM PLASTIC	2
AMAT	0020-22744	POWER BLOCK, 1 TO 4 100 AMPS	5
AMAT	0020-22745	BAR CAPACITOR MOUNT	9
AMAT	0020-22770	BRACKET 2/L SST PANEL	4
AMAT	0020-22800	SHIELD	5
AMAT	0020-22801	COLLIMATOR	11
AMAT	0020-22805	PLATE ADAPTER CLAMP WIDE BODY	4
AMAT	0020-22820	ACTUATOR SWITCH TOP PRECLEAN	3
AMAT	0020-22840	MOUNTING PLATE, RF MATCH	1
AMAT	0020-22841	RF ROD PRECLEAN	1
AMAT	0020-22846	COVER,GAS TRENCH	2
AMAT	0020-22852	SHIELD, PRECLEAN 8″	9
AMAT	0020-22852	SHIELD, PRECLEAN 8″	1
AMAT	0020-22862	HUB, SHUTTER DC BIAS	2
AMAT	0020-22872	SPACER, UPPER BRG SHUTTER MGN COUPLING	4
AMAT	0020-22873	SPACER, LOWER BRG SHUTTER MGN COUPLING	10
AMAT	0020-22873	SPACER, LOWER BRG SHUTTER MGN COUPLING	34
AMAT	0020-22898	COVER, DISC	1
AMAT	0020-22898	COVER, DISC	2
AMAT	0020-22906	PIN, QUARTZ, PRECLEAN PEDESTAL	1
AMAT	0020-22906	PIN, QUARTZ, PRECLEAN PEDESTAL	308
AMAT	0020-22908	INSULATOR	1
AMAT	0020-22913	STRAP CAPACITOR	1
AMAT	0020-22913	STRAP CAPACITOR	1
AMAT	0020-22916	COVER PLATE	1
AMAT	0020-22918	BRACKET	7
AMAT	0020-22920	SHIELD, 6″ PRECLEAN II	9
AMAT	0020-22950	ADAPTER	8
AMAT	0020-22993	PLATE COVER COHERENT 8″ CHAMBER 16 INCH	40
AMAT	0020-23032	CAM RIGHT OUTBOARD	1
AMAT	0020-23033	BAR SAFETY	3
AMAT	0020-23035	CAM, RIGHT INBOARD	3
AMAT	0020-23036	CAM, LEFT OUTBOARD	3
AMAT	0020-23039	BRACKET, LEFT	1
AMAT	0020-23043	SHIELD, UPPER T/TIN	25
AMAT	0020-23045	SHIELD, LOWER, T/TIN	6
AMAT	0020-23052	CASS. SUPPORT SPECIAL	1
AMAT	0020-23069	SHIELD TIN LOWER 6″ WAFER	9
AMAT	0020-23076	SHIELD	1
AMAT	0020-23095	BRACKET, A.L.L. CASSETTE SENSOR 200MM	6
AMAT	0020-23098	REFLECTOR, RIGHT	2
AMAT	0020-23109	REFLECTOR, LEFT, A.L.L. CASSETTE SENSOR 200MM	3
AMAT	0020-23138	BRACKET	8
AMAT	0020-23138	BRACKET	4
AMAT	0020-23178	LIFT HOOP,SST 5 101% COVERAGE	1
AMAT	0020-23184	CONNECTING ROB	1
AMAT	0020-23184	CONNECTING ROB	3
AMAT	0020-23191	TRUNION RIGHT LLA LONG	1
AMAT	0020-23193	TRUNNION SHORT LEFT, A.L.L. CASSETTE SENSOR 200MM	1
AMAT	0020-23194	TRUNNION SHORT RIGHT	1
AMAT	0020-23220	SHIELD 6 TI MTRL TIW PROCESS	6
AMAT	0020-23230	SUPPORT LEFT	66
AMAT	0020-23231	BRACKET RIGHT, 125MM CASSETTE	1
AMAT	0020-23232	BRACKET LEFT, 125MM CASSETTE	1
AMAT	0020-23246	CLAMP RING, REDUCED FLT 6JMF AL/TI	1
AMAT	0020-23278	SHIELD, UPPER,ENDURA HOT-E-CHUCK AL	18
AMAT	0020-23320	PLATE	1
AMAT	0020-23355	PC2 PEDESTAL	10
AMAT	0020-23356	QUARTZ INSULATOR @ APC II	1
AMAT	0020-23367	CONNECTOR	1
AMAT	0020-23396	ENDURA HOT-E-CHUCK AL LOWER SHIELD	15
AMAT	0020-23397	RECEIVER BASE	1
AMAT	0020-23403	SPECIAL WEIGHT 8	1
AMAT	0020-23405	CLAMP RING	13
AMAT	0020-23438	HEATER CHAMBER COVER,PVD	4
AMAT	0020-23438	HEATER CHAMBER COVER,PVD	11
AMAT	0020-23485	HOUSING DRIVE MOTORIZED LIFT.	1
AMAT	0020-23563	BRACKET CRYO COMPRESSOR	1
AMAT	0020-23566	PRECLEAN FINGER INSERT 6 & 8	2
AMAT	0020-23568	FINGER GUARD	5
AMAT	0020-23580	COUNTERWEIGHT CASSETTE PRESENT	2
AMAT	0020-23584	SHIELD	7
AMAT	0020-23585	SHIELD,LOWER	4
AMAT	0020-23586	SHIELD ADAPTER	20
AMAT	0020-23586	SHIELD ADAPTER	6
AMAT	0020-23587	PIN	124
AMAT	0020-23612	SHIELD	1
AMAT	0020-23623	ENDURA 6 LOWER SHIELD	3
AMAT	0020-23630	CLAMP RING	3
AMAT	0020-23631	VENT LINES BRACKET 1 OF 3	2
AMAT	0020-23647	CLIP MIRROR RETAINER	4
AMAT	0020-23656	BRKT COHERENT CLAMP FLT-TRGT CH 2 & 4	1
AMAT	0020-23694	PLATE RETAINER	1
AMAT	0020-23730	BRACKET INDEXER	4
AMAT	0020-23731	LEFT SUPPORT	3
AMAT	0020-23732	RIGHT SUPPORT	1
AMAT	0020-23744	Cover	2
AMAT	0020-23796	BUSS/BAR CKT BREAKER K-FRAME STRAIGHT	5
AMAT	0020-23811	COHERENT 8″ W/1.25:1 0.5″ HEX	9
AMAT	0020-23825	CLAMP RING	18
AMAT	0020-23833	PLATE	1
AMAT	0020-23836	PLATE ADAPTER CLAMP G-12	24
AMAT	0020-23836	PLATE ADAPTER CLAMP G-12	9
AMAT	0020-23837	SPACER 6-12 SOURCE GUIDE PIN	1
AMAT	0020-23850	BRACKET STAUFF CLAMPS GASLINE MANIFOLD	3
AMAT	0020-23876	SPACER 6-12 SOURCE GUIDE PIN	30
AMAT	0020-23876	SPACER 6-12 SOURCE GUIDE PIN	6
AMAT	0020-23878	SIDE RECEIVER SPECIAL	1
AMAT	0020-23881	SHIELD	57
AMAT	0020-23917	BRACKET, CABLE COVER LIFT	2
AMAT	0020-23928	SHIM, MOTOR COVER , LIFT	60
AMAT	0020-24010	AL. DOOR HOLDER	12
AMAT	0020-24011	HOLDER, FINGER	10
AMAT	0020-24011	HOLDER, FINGER	3
AMAT	0020-24028	REFLECTOR L.L.B	1
AMAT	0020-24056	LOWER SHIELD	2
AMAT	0020-24059	FIXTURE 1 PIPE	4
AMAT	0020-24065	POST FLAG MOUNT MOTO LIFT	1
AMAT	0020-24082	SHIELD 8″ LOWER 101 G-12	18
AMAT	0020-24090	SHLD HTR HOT AL	2
AMAT	0020-24100C	INSULATOR, QTZ, PC2, CLEAN	1
AMAT	0020-24101	INSERT, PEDESTAL PCII 8″	5
AMAT	0020-24101	INSERT, PEDESTAL PCII 8″	1
AMAT	0020-24139	BRACKET	2
AMAT	0020-24141	SHIELD HEATER REFLOW CHAM	1
AMAT	0020-24145	BRACKET CONN MTG DEGAS CHAMBER	10
AMAT	0020-24171	CLAMP RING, 8″ SHORT AI/TI ETCH	10
AMAT	0020-24171	CLAMP RING, 8″ SHORT AI/TI ETCH	1
AMAT	0020-24225	DUAL DOOT PANEL	1
AMAT	0020-24256	COLLIMATOR DISPOSABLE	2
AMAT	0020-24318	MOUNTING BRACKET INTERLOCK	2
AMAT	0020-24328	LLB INNER SAFETY COVER, CENTURA AP LID H	2
AMAT	0020-24329	LLA INNER SAFETY CVR CENTURA	1
AMAT	0020-24403	SHIELD LIFTER HNGR P/H AT 5	1
AMAT	0020-24406	RING,CLAMP,AL,/REFL	2
AMAT	0020-24406	RING,CLAMP,AL,/REFL	1
AMAT	0020-24418	WAFER, TEST T1 PASTE 6″	13
AMAT	0020-24432	INSULATOR QUARTZ 8 INCH	3
AMAT	0020-24453	SHIELD	2
AMAT	0020-24453	SHIELD	4
AMAT	0020-24456	INSULTR QTZ 6 JMF PCII EXT PAS @A	1
AMAT	0020-24507	BRACKET	1
AMAT	0020-24530	SHIELD, UPPER G12 SST	2
AMAT	0020-24530	SHIELD, UPPER G12 SST	20
AMAT	0020-24531	ADAPTOR, SHIELD G12 SST	76
AMAT	0020-24531	ADAPTOR, SHIELD G12 SST	11
AMAT	0020-24532	SHIELD LOWER	1
AMAT	0020-24532	SHIELD LOWER	5
AMAT	0020-24534	ADAPTER COH (AR) 13 FLT SRC – W/B	1
AMAT	0020-24536	SHIELD, LOWER	3
AMAT	0020-24628	COVER	2
AMAT	0020-24632	DOOT PANEL	1
AMAT	0020-24642	BRACKET	2
AMAT	0020-24719	COVER, RING, AL	20
AMAT	0020-24722	SHADOW G3 TIN SEED RING	19
AMAT	0020-24727	BRACKET	6
AMAT	0020-24732	MIDCLAMP, TOP PNEUMATIC GAS BOX CVDT	2
AMAT	0020-24735	PEDESTAL	1
AMAT	0020-24736	SHIELD RF	1
AMAT	0020-24736	SHIELD RF	10
AMAT	0020-24737	PLATE	4
AMAT	0020-24737	PLATE	1
AMAT	0020-24742	QUARTZ INSULATOR (SER# PA-WCQ/445)	2
AMAT	0020-24746	SHIELD, LOWER, AL	48
AMAT	0020-24754	CLEAT SP CASS	1
AMAT	0020-24771	COUPLER 4 BAR LINKAGE SHUTTER LINKAGE	1
AMAT	0020-24782	STOP ACTUATOR SHUTTER LINKAGE	2
AMAT	0020-24798	CAM LEFT CH OUTBOARD	1
AMAT	0020-24798	CAM LEFT CH OUTBOARD	4
AMAT	0020-24802	END PLATE/HOLE BEAM LONG HOIST	1
AMAT	0020-24862	CLAMP RING	1
AMAT	0020-24862	CLAMP RING	2
AMAT	0020-24866	SHIELD, LOWER 8″	10
AMAT	0020-24866	SHIELD, LOWER 8″	14
AMAT	0020-24913	PEDESTAL, 8″	16
AMAT	0020-24913	PEDESTAL, 8″	15
AMAT	0020-24914	COVER, 8″ RING	48
AMAT	0020-24914	COVER, 8″ RING	12
AMAT	0020-24994	AL DOOR SUPPORT STD PRECLEAN CH.	1
AMAT	0020-25110	PA BRACKET	1
AMAT	0020-25111	DOOR	1
AMAT	0020-25114	BLANK OFF PANEL UPPER INTERFACE	1
AMAT	0020-25121	SHIELD	1
AMAT	0020-25289	CLAMP RING 5 SMF AL/TI 4 FEET	6
AMAT	0020-25313	FLANGE UPPER BELLOWS N2 COH TIN	1
AMAT	0020-25389	BRACKET SENSOR 26 WFR CASS	1
AMAT	0020-25454	PLATE, 8IN COHERENT 1.50:1 5/8	8
AMAT	0020-25551	BRACKET	1
AMAT	0020-25563	CHUCK 150MM	1
AMAT	0020-25622	FLANGE, 300MM HEATER CLAMP	2
AMAT	0020-25640	LOWER SHIELD	3
AMAT	0020-25662	CLAMP SHIELD SCREWLESS 13 SRC	3
AMAT	0020-25666	SHIELD SCRWLESS 101 COH TIN 8 WAFER	1
AMAT	0020-25666	SHIELD SCRWLESS 101 COH TIN 8 WAFER	2
AMAT	0020-25670	SHIELD	2
AMAT	0020-25672	CLAMP RING & LOWER SHIELD	1
AMAT	0020-25679	FLAG LOWER MOTOR LIFT EXT	1
AMAT	0020-25680	CLAMP RING	24
AMAT	0020-25713	CLAMP RING 6 INCH	1
AMAT	0020-25766	ROBOT BLADE 8, 5500 X PER	1
AMAT	0020-25800	SHIELD, UPPER	2
AMAT	0020-25864	CLAMP RING 5 TIN SMF 4 PADS W/B SHUTTER	1
AMAT	0020-25874	CLAMP RING & LOWER SHIELD	2
AMAT	0020-25917	H_ISOLATOR DC BIAS SHUTTER	4
AMAT	0020-25931	CLAMP RING 6 IN	2
AMAT	0020-25953	BRACKET	1
AMAT	0020-26004	GUIDE	1
AMAT	0020-26020	BLOCK MOUNTING AERA FC780C MFC	1
AMAT	0020-26020	BLOCK MOUNTING AERA FC780C MFC	2
AMAT	0020-26094	OBS, COVER, DC SOURCE CONNECTOR, 300MM P	2
AMAT	0020-26099	RING	1
AMAT	0020-26117	CLAMP RING 5 INCH	1
AMAT	0020-26139	PLUG W/B LOADLOCK ENDURA INTERFACE	1
AMAT	0020-26216	SHIELD (95-1)	2
AMAT	0020-26217	COVER RING 6″ TI	1
AMAT	0020-26228	PEDESTAL	1
AMAT	0020-26262	CLAMP RING 6″ SMP AL	1
AMAT	0020-26289	SHIELD LOWER 101 TTN	17
AMAT	0020-26289	SHIELD LOWER 101 TTN	5
AMAT	0020-26310	SHIELD, LWR, 6-IN, CLAMPED	8
AMAT	0020-26319	INSULATOR LIGHT LID	2
AMAT	0020-26321	INSULATOR MAGNETIC SWITCH LIGHT LID	1
AMAT	0020-26396	COVER RING	17
AMAT	0020-26485	MOUNTING BRACKET	1
AMAT	0020-26487	COVER PLASTIC GFI SENSOR&CB SYS AC	4
AMAT	0020-26588	SHIELD, LOWER T/TIN	17
AMAT	0020-26603	SHIELD COLLIMATOR UPPER 8	2
AMAT	0020-26610	CLAMP RING	1
AMAT	0020-26820	CLAMP RING 8″ AL	6
AMAT	0020-26836	SHIELD UPPER SCRLS 101 COH 1:1 TIN 8	3
AMAT	0020-26847	6 CLAMPING	2
AMAT	0020-26851	WAFER BLOCK	6
AMAT	0020-26852	COVER RING AND ADAPTER	1
AMAT	0020-26853	ADAPTER	3
AMAT	0020-26854	ADAPTER	3
AMAT	0020-26863	SHIELD MIDDLE	7
AMAT	0020-26864	INNER SHIELD	7
AMAT	0020-26865	UPPER SHIELD (SIDE FLOW)	5
AMAT	0020-26866	UPPER SHIELD (DOWNFLOW)	5
AMAT	0020-26926	N2 BLANKOFF	5
AMAT	0020-26967	PC II GAS TRENCH COVER	24
AMAT	0020-26980	CLAMP AI-SI-CU	11
AMAT	0020-26981	CLAMP RING	4
AMAT	0020-26987	FIXTURE ABT CALIBRATION	3
AMAT	0020-27021	PLATE, TEXTURING FIXTURE	1
AMAT	0020-27094	SHIELD, LOWER 6″	2
AMAT	0020-27099	SHIELD, UPPER, SCREWLESS, 8″	2
AMAT	0020-27163	CLAMP PADDED 6″MOSI	2
AMAT	0020-27168	BRACKET, WATER, RETURN, 300MM TICL4 TI M	2
AMAT	0020-27191	CLAMP RING	18
AMAT	0020-27300	CLAMP BLOCK, AXIOM	1
AMAT	0020-27472	PLATE MTG DRIVE MOTOR 5000 MC ROBOT	1
AMAT	0020-27472	PLATE MTG DRIVE MOTOR 5000 MC ROBOT	1
AMAT	0020-27594	PANEL,CH A & B BLANK OFF, LNK	1
AMAT	0020-27644	LOWER SHIELD	8
AMAT	0020-27737	PLATE	21
AMAT	0020-27738	CLAMP RING, 5 SMF, SST, 3.048 MM 10445	3
AMAT	0020-27741	RING,CLAMP,PADDED	14
AMAT	0020-27827	METAL RING	6
AMAT	0020-27834	REAR PLATE, Q2 EXTRACTION	1
AMAT	0020-27842	PEDESTAL 8″ PINLESS	60
AMAT	0020-27842	PEDESTAL 8″ PINLESS	60
AMAT	0020-27863	SHIELD LOWER	15
AMAT	0020-27865	PEDESTAL	4
AMAT	0020-27942	BRACKET CABLE VHP COVER LIFT	4
AMAT	0020-27942	BRACKET CABLE VHP COVER LIFT	1
AMAT	0020-28043	SHIELD, LOW KNEE AL CLAMPED (TI)	3
AMAT	0020-28110	CLAMP RING, SMF, 1.8MM, NON-MILLED	38
AMAT	0020-28110	CLAMP RING, SMF, 1.8MM, NON-MILLED	2
AMAT	0020-28190	SCREW CLAMP RING TEXTURING FI	1
AMAT	0020-28251	SHIELD	2
AMAT	0020-28256	ROBOT BLADE 8	1
AMAT	0020-28315	SENSOR BRACKET SHUTTER ENCLOSURE	1
AMAT	0020-28315	SENSOR BRACKET SHUTTER ENCLOSURE	1
AMAT	0020-28352	BRACKET CROY LINE MODIFIED	1
AMAT	0020-28367	SHIELD, 6-IN HTHU AL/TI	3
AMAT	0020-28367	SHIELD, 6-IN HTHU AL/TI	1
AMAT	0020-28393	BRACKET MOUNTING QUAD CRYO LI	2
AMAT	0020-28445	METAL RING	15
AMAT	0020-28445	METAL RING	8
AMAT	0020-28446	METAL RING	12
AMAT	0020-28446	METAL RING	9
AMAT	0020-28447	METAL RING	9
AMAT	0020-28449	SHIELD,LOWER 8″ G-12 CLAMP FLAME SP	2
AMAT	0020-28460	STOP, 300MM HEATER LIFT	1
AMAT	0020-28460	STOP, 300MM HEATER LIFT	4
AMAT	0020-28506	CONNECTOR PEDESTAL LIFT 300MM	6
AMAT	0020-28507	STOP 300MM WATER LIFT	3
AMAT	0020-28623	CLAMP RING	2
AMAT	0020-28626	PEDESTAL, 6-IN SMRMF PC88@A TI	6
AMAT	0020-28626	PEDESTAL, 6-IN SMRMF PC88@A TI	1
AMAT	0020-28646	SPACER PILLOW BLOCK K3/P4	6
AMAT	0020-28676	HANDLES	2
AMAT	0020-28711	VIEWPORT SHIELD, 10, CH A OR B LID	1
AMAT	0020-28743	BLOCK, WATER IMP	3
AMAT	0020-28743	BLOCK, WATER IMP	10
AMAT	0020-28744	PLATE, COVER	2
AMAT	0020-28744	PLATE, COVER	3
AMAT	0020-28754	COVER, 8″ PEDESTAL	2
AMAT	0020-28772	SHIELD,DARKSPACE,IMP	1
AMAT	0020-28800	DISK,SHUTTER,IMP,2C	3
AMAT	0020-28889	BLANK-OFF ADAPTER GASLINE	2
AMAT	0020-28924	RING	1
AMAT	0020-28929	RING	1
AMAT	0020-28989	101 G3 LOWER SHUTTER SHIELD	7
AMAT	0020-28989	101 G3 LOWER SHUTTER SHIELD	5
AMAT	0020-28994	SHUTTER DISK, 6 101 SMLMF, TI MATERIAL	1
AMAT	0020-29026	BRACKET	1
AMAT	0020-29027	BRACKET	1
AMAT	0020-29046	BRUSH	11
AMAT	0020-29072	CERAMIC PLATE COVER	1
AMAT	0020-29143	CAP,IMP,COIL,SUPPORT	142
AMAT	0020-29206	BUSHING, RIGID, COIL, SUPPORT	97
AMAT	0020-29206	BUSHING, RIGID, COIL, SUPPORT	13
AMAT	0020-29240	CLAMP RING 8 SNNF SST E/E 3.404 6 PAD	1
AMAT	0020-29240	CLAMP RING 8 SNNF SST E/E 3.404 6 PAD	2
AMAT	0020-29286	BUSHING COIL SUPPORT	6
AMAT	0020-29298	BRACKET, LL BOTTOM, FRONT PANEL MOUNT	1
AMAT	0020-29303	BRACKET, SOURCE GUIDE, VECTRA IMP	1
AMAT	0020-29310	TI PIN	56
AMAT	0020-29311	SPACER, SOURCE GUIDE PIN, VECTRA IMP	2
AMAT	0020-29318	POST, DC BIAS	2
AMAT	0020-29328	BLOCK, MAGNET HOLDER, RH-1, RH-2	1
AMAT	0020-29350	COVER PLATE	6
AMAT	0020-29365	G2 ELECTRODE ADJUSTABLE	1
AMAT	0020-29439	CLAMP RING 6″ SMRMF, TI, 6PAD	1
AMAT	0020-29448	CLAMP RING, ZLS, ALUMINUM	1
AMAT	0020-29450	ZLS CLAMP RING CH D	2
AMAT	0020-29451	ZLS CLAMP RING,CH1/3	3
AMAT	0020-29458	CLAMP RING, SS	5
AMAT	0020-29581	SHIELD	2
AMAT	0020-29586	INSULATOR, TOP RF SHIELD, HP LIFT (NON-H	1
AMAT	0020-29589	NUT	1
AMAT	0020-29646	BRACKET	4
AMAT	0020-29647	PLATE	4
AMAT	0020-29719	PEDESTAL,ZDP,CH34	11
AMAT	0020-29719	PEDESTAL,ZDP,CH34	10
AMAT	0020-29739	REST POINT,FLOATING,101,AL,STD BODY,E-PO	89
AMAT	0020-29739	REST POINT,FLOATING,101,AL,STD BODY,E-PO	1
AMAT	0020-29743	SHIELD LOWER 5″	1
AMAT	0020-29764	CLAMP, WATER RETURN	13
AMAT	0020-29771	CLAMP 1/0 CONTROLLER DC DRAWER	3
AMAT	0020-29783	BRACKET	2
AMAT	0020-29791	DRUM WASHER, SLIT VALVE	4
AMAT	0020-29862	TARGET,AL,5N5,300MM	6
AMAT	0020-29865	RING CLAMP SHIELD IMP 300MM	3
AMAT	0020-29865	RING CLAMP SHIELD IMP 300MM	4
AMAT	0020-29899	BLOCK FIXTURE – 2	2
AMAT	0020-29913	BRACKET	1
AMAT	0020-29944	CUP, INNER, COIL SPRT, 1/4 THK, CU	5
AMAT	0020-29960	COVER INSULATOR,COMER VAC CAP	5
AMAT	0020-29972	CLAMP RING 6 JMF SST 4.191MM	1
AMAT	0020-29982	BUSS BAR 4 POS	22
AMAT	0020-30028	SCREW, GAS RING C&D	154
AMAT	0020-30029	Plate, gas distrib etch	3
AMAT	0020-30072	RING, VESPEL, 200MM	18
AMAT	0020-30076	SUSCEPTOR SLEEVE BELLOWS(SAME:	2
AMAT	0020-30084	COVER FRONT THROTTLE VALVE	1
AMAT	0020-30090	CLAMP,SHIELD 200MMSTD	1
AMAT	0020-30090	CLAMP,SHIELD 200MMSTD	31
AMAT	0020-30110	CVD LAMP COLLAR	1
AMAT	0020-30110W	COLLIMATOR, OUTER 200MM	1
AMAT	0020-30115	COVER,GEAR	11
AMAT	0020-30115	COVER,GEAR	10
AMAT	0020-30173	FILTER HOUSING, ENDPOINT DECTECTOR	2
AMAT	0020-30179	CLAMP RING EXT POLY 4.4	45
AMAT	0020-30180	INSULATOR,0 SCREW	4
AMAT	0020-30196	STRIP, CONTACT	4
AMAT	0020-30200	STRAPS, EXT., CATHODE, GND	34
AMAT	0020-30203	PEDESTAL, 200MM NOTCH PHASE 1	7
AMAT	0020-30203	PEDESTAL, 200MM NOTCH PHASE 1	3
AMAT	0020-30223	PLATE, GAS DISTRUBUTION	5
AMAT	0020-30226	BRACKET SWITCH	31
AMAT	0020-30228	SCREEN, PLASMA	4
AMAT	0020-30287	PUMPING PLATE,PEOX	1
AMAT	0020-30291	H2O MANIFOLD	16
AMAT	0020-30292	H2O MANIFOLD	2
AMAT	0020-30317	RING	9
AMAT	0020-30323	PLATE,GAS DISTRIB 8 101 HOLES	1
AMAT	0020-30329	SCREW, ALUMINUM, MACHINE, HEX	2
AMAT	0020-30345	PLUG,DC,8″,METAL	1
AMAT	0020-30354	FINGER, REMOVABLE, 4	17
AMAT	0020-30362	RING QUARTZ 8EXT CATH	5
AMAT	0020-30382	CAP NUT TOP MOUNT SUSCEPT	1
AMAT	0020-30382	CAP NUT TOP MOUNT SUSCEPT	1
AMAT	0020-30405	PERF PLATE, 125MM	7
AMAT	0020-30407	PLATE, PERFERATED REPLACES 0020-10595	27
AMAT	0020-30418	RING, TOP 8″ EXT CATH DC POLY	41
AMAT	0020-30420	COVER PEDESTAL 8″	51
AMAT	0020-30422	INSERT INNER PEDESTAL	126
AMAT	0020-30425	INSERT AL OUTER PEDEATAL	165
AMAT	0020-30426	INSERT AL INNER PEDESTAL	73
AMAT	0020-30427	RING CLAMP 8″ EXT CATH	4
AMAT	0020-30447	PLATE,BLOCKER “SX” 6 IN	3
AMAT	0020-30482	COUPLING, FLEX	5
AMAT	0020-30483	CLAMP RING XTAL NOTCH EXT 8 QER	1
AMAT	0020-30486	SENSOR CAP MODIFIED	2
AMAT	0020-30517	TC, ANGLE, (PRSP)	4
AMAT	0020-30533	SCREW,SUSCEPTOR AND WAFER LIF (PACK OF 10)	68
AMAT	0020-30547	COVER,VME CONTROLLER AND SYSTEM ELECTRONICS, CLEAR	1
AMAT	0020-30556	ELBOW, GAS SUPPLY, SS METAL ETCH	4
AMAT	0020-30585	INSERT NI POLY/WSI 200MM	38
AMAT	0020-30595	PEDESTAL, 200MM	4
AMAT	0020-30608	PEDESTAL ETCH	1
AMAT	0020-30615	RING, CLAMPING, 125MM 121MM	2
AMAT	0020-30625	DIST, HSG, GAS	1
AMAT	0020-30628	RING, CLAMP VESPEL POLY	18
AMAT	0020-30629	PEDESTAL	33
AMAT	0020-30685	GIZMO PLATE, 150MM	1
AMAT	0020-30700	125MM OXIDE PEDESTAL INSERT	2
AMAT	0020-30709	RING CLAMP VESPEL REMOVE, FINGERS AL 200M	2
AMAT	0020-30710	RING CLAMP VESPEL	7
AMAT	0020-30710	RING CLAMP VESPEL	4
AMAT	0020-30723	LIFT CYLINDER	3
AMAT	0020-30733	PLATE, DISTRIBUTION 20MM	3
AMAT	0020-30773	PLATE DISTRIBUTION 200 MM HEWEB	2
AMAT	0020-30782	COVER MECHANISM GUARD POSITION B	1
AMAT	0020-30810	PEDESTAL OX/MLR/NIT 200MM NOT	2
AMAT	0020-30812	COVER OX/MLR/NIT PEDESTA	12
AMAT	0020-30812	COVER OX/MLR/NIT PEDESTA	2
AMAT	0020-30813	INSERT OX/MLR/NIT PEDESTAL	64
AMAT	0020-30815	PLATE, GAS DISTRIBUTION	1
AMAT	0020-30815	PLATE, GAS DISTRIBUTION	5
AMAT	0020-30822	FINGER	1
AMAT	0020-30827	RING CLAMP VESPEL REMF GR ALUM 125MM FLAT	6
AMAT	0020-30855	PLUG, GDP VESPEL C&D	212
AMAT	0020-30865	BRACKET	5
AMAT	0020-30865	BRACKET	6
AMAT	0020-30869	ROD, TUNING	7
AMAT	0020-30874	BRACKET, GENERATOR, MATCH DELTA	2
AMAT	0020-30876	BRACKET GENERATOR, DELTA	1
AMAT	0020-30890	CLAMP, ADUSTATBLE	18
AMAT	0020-30938	PLATE, CONTROL TOP	1
AMAT	0020-31001	RING	1
AMAT	0020-31003	CLAMP RING	2
AMAT	0020-31019	PERF PLATE	25
AMAT	0020-31020	PLATE, BLOCKER, 200MM WCVD	7
AMAT	0020-31035	MANIFOLD INPUT BWCVD	1
AMAT	0020-31035	MANIFOLD INPUT BWCVD	15
AMAT	0020-31071	PUMPING PLATE	1
AMAT	0020-31138	GAS PASSAGE PLATE	2
AMAT	0020-31147	BASE, INSERT ALUMINIUM	10
AMAT	0020-31153	PIN P2K CHAMBER LIFT ETCH 300	9
AMAT	0020-31154	SEAL FERULE SLEEVE SUS BELLOW	9
AMAT	0020-31163	RING,FOCUS,AL,200MM,PRSP3	18
AMAT	0020-31260	MANIFOLD, BARATRON, ASP	2
AMAT	0020-31269	COVER CONTROL READ OUT	2
AMAT	0020-31276	PLUG DC .6 SHAFT SIC-SI DOPED	4
AMAT	0020-31278	BLOCK, MFC HEATER, H20 VDSII	1
AMAT	0020-31282	HINGE, CVD CHAMBER	3
AMAT	0020-31283	HINGE	14
AMAT	0020-31292	WALL CENTER CHAMBER ASP	1
AMAT	0020-31293	HEAT SHIELD, INTERNAL, ASP	1
AMAT	0020-31294	HEAT SHIELD, INTERNAL, ASP	2
AMAT	0020-31305	AL OUTER SHUNT	6
AMAT	0020-31308	RING, CLAMPING, 150 MM POLY	2
AMAT	0020-31333	BRACKET, I/0 INTERCONNECT	1
AMAT	0020-31377	FLANGE BLANKOFF, UNIBODY	2
AMAT	0020-31389	CYLINDER, FLOW THRU 8″	10
AMAT	0020-31395	PLUG, DC	24
AMAT	0020-31397	SCREW VESPEL	1
AMAT	0020-31463	CARRIER, COMPLAINT, EXT CATHODE	16
AMAT	0020-31463	CARRIER, COMPLAINT, EXT CATHODE	10
AMAT	0020-31470	INSERT, NI, MEDIUM, 150MM POLY, EXT CATH	3
AMAT	0020-31472	AL INNER SHUNT	5
AMAT	0020-31478	SLEEVE TEFLON VESSEL FITTING	10
AMAT	0020-31492	GAS DIST. PLATE, 101 HOLES	26
AMAT	0020-31493	GAS DISTRIBUTION PLATE	1
AMAT	0020-31493	GAS DISTRIBUTION PLATE	1
AMAT	0020-31503	CHUCK,200MM,ASP	1
AMAT	0020-31509	PEDESTAL,RIMLESS,OX/MLR/	1
AMAT	0020-31514	THREAD INSERT CERAMIC WAFER HOOP RING	25
AMAT	0020-31547	PLATE GAS DIST OXALIC	3
AMAT	0020-31548	PLATE,GAS DIST., OXALIC	2
AMAT	0020-31552	TOOL, CALIBRATION, DISK, FLAT	3
AMAT	0020-31556	BEZEL, FILLER DC	6
AMAT	0020-31556	BEZEL, FILLER DC	4
AMAT	0020-31557	CONECTOR, RF PLATE, ESC	1
AMAT	0020-31572	PLATE, BLOCKER, LID, 200MM	4
AMAT	0020-31597	HANDLE	5
AMAT	0020-31609	COVER SACVD W/LOW PASS	7
AMAT	0020-31614	PEDESTAL, 6″ FLAT CERAMIC AL	17
AMAT	0020-31621	RING CLAMPING VESPEL 8″	25
AMAT	0020-31628	WASHER, INSULATING TUNGSTEN	18
AMAT	0020-31629	TOP, INSULATING	41
AMAT	0020-31632	CARRIER,ESC	7
AMAT	0020-31632	CARRIER,ESC	1
AMAT	0020-31634	ADAPTOR DELRIN	19
AMAT	0020-31634	ADAPTOR DELRIN	1
AMAT	0020-31637	COVER INSERT 200MM ESC	6
AMAT	0020-31638	COVER 200MM ESC	71
AMAT	0020-31639	INSERT INNER NI 200MM ESC	10
AMAT	0020-31640	INSERT OUTER NI 200MM	25
AMAT	0020-31643	GAS DISTRIBUTION PLATE	57
AMAT	0020-31651	CENTERING PIN	12
AMAT	0020-31656	RING, CLAMPING POLY EXT. CATH.	1
AMAT	0020-31658	RING	31
AMAT	0020-31664	MANIFOLD, BOTTOM PURGE	6
AMAT	0020-31666	WASHERS,INSERT, LIFT	210
AMAT	0020-31666	WASHERS,INSERT, LIFT	36
AMAT	0020-31668	SCREW SHOULDER 4/48 UNF (PACK OF 10)	10
AMAT	0020-31672	MOUNT RETROREFLECTOR LEFT SIDE	3
AMAT	0020-31678	BRACKET	2
AMAT	0020-31680	RING TOP, XTAL TIER IV W/ HOLES	8
AMAT	0020-31681	RING, VESPEL, EXT CA, 200MM, XTAL, TIERL	6
AMAT	0020-31694	COVER	2
AMAT	0020-31700	SHAFT	6
AMAT	0020-31700	SHAFT	2
AMAT	0020-31747	PLATE HANDLE BASE	7
AMAT	0020-31747	PLATE HANDLE BASE	2
AMAT	0020-31764	PLATE FRONT HRTV	1
AMAT	0020-31767	CYLINDER, CLAMPING, 200MM POLY/W SI	34
AMAT	0020-31767	CYLINDER, CLAMPING, 200MM POLY/W SI	1
AMAT	0020-31786	BRACKET HANDLE	4
AMAT	0020-31804	GAS PLATE DIST PLATE	1
AMAT	0020-31812	SCREW,SHOULDER, INCONEL, WL (PACK OF 10)	1
AMAT	0020-31822	FILTER, RECESSED ENDPOINT	2
AMAT	0020-31823	BRACKET, ENDPOINT	2
AMAT	0020-31829	COVER, OPENING, SOLID LID	1
AMAT	0020-31833	HINGE, BRACKET , TOP METAL ETCH	1
AMAT	0020-31833	HINGE, BRACKET , TOP METAL ETCH	2
AMAT	0020-31838	ADAPTOR,DELRIN	9
AMAT	0020-31855	HEAT SHIELD HRTV	3
AMAT	0020-31906	MICRO SWITCH HOLDER	2
AMAT	0020-31940	PEDESTAL,AL,200MM,FLAT,CERAMIC	1
AMAT	0020-32028	BRACKET, CONTROL MODULE, BARATRON	1
AMAT	0020-32029	COVER, THROTTLE VALVE	12
AMAT	0020-32029	COVER, THROTTLE VALVE	12
AMAT	0020-32034	VESPEL CLAMPING SPEC	1
AMAT	0020-32063	SPACER MFC	4
AMAT	0020-32126	PLATE, SX100, BLOCKER	20
AMAT	0020-32129	SPACER N15 SHUNT 200MM ESC	3
AMAT	0020-32129	SPACER N15 SHUNT 200MM ESC	1
AMAT	0020-32130	SPACER NI5 SHUNT 200MM ESC	5
AMAT	0020-32132	INSERT OUTER NI5 200MM ESC	1
AMAT	0020-32148	SHOWERHEAD,FACEPLATE	47
AMAT	0020-32151	PEDESTAL 200MM NOTCH HV IB SOLID COMP R	4
AMAT	0020-32161	ESC. PED. 200MM. MOTCH. WFB	2
AMAT	0020-32166	COVER PROTECTION,200MM,ESC	5
AMAT	0020-32166	COVER PROTECTION,200MM,ESC	4
AMAT	0020-32214	SHOE, FRONT REGISTRATION 15MM W X 2	3
AMAT	0020-32222	TERMINAL BLOCK	20
AMAT	0020-32260	DIST. PLATE	2
AMAT	0020-32262	W GAS DIST PLATE, 133 HOLES .156 THICK	1
AMAT	0020-32263	GAS DIST. PLATE,145 HOLES,156 THICK	1
AMAT	0020-32303	BRACKET PLATE	1
AMAT	0020-32319	GAS DIST. PLATE	10
AMAT	0020-32319	GAS DIST. PLATE	1
AMAT	0020-32320	GAS DISTRIBUTION PLATE ANODIZED	8
AMAT	0020-32326	CAPACITOR MOUNT	10
AMAT	0020-32326	CAPACITOR MOUNT	10
AMAT	0020-32399	MOUNT	1
AMAT	0020-32835	SPACER LOADLOCK COVER	6
AMAT	0020-32835	SPACER LOADLOCK COVER	1
AMAT	0020-32909	ESC. PED. 200MM NOTCH (2) 0.8 THK	1
AMAT	0020-32930	PLATE ARM ROTATION	2
AMAT	0020-32963	COVER, BACK, HV CENTER	2
AMAT	0020-32963	COVER, BACK, HV CENTER	2
AMAT	0020-32982	PEDESTAL, FULL ROUND NI, OX/M	1
AMAT	0020-32992	PRIMARY LINK ROTATION STABILIZER P5000 M	1
AMAT	0020-33000	BEARING HSG COUPLER, LWR P500	4
AMAT	0020-33000	BEARING HSG COUPLER, LWR P500	1
AMAT	0020-33001	DRIVE GEAR COUPLER P5000 MC R	1
AMAT	0020-33002	SECTOR GEAR COUPLER, DRIVEN P	1
AMAT	0020-33003	BEARING MNT SECONDARY LINK, C	14
AMAT	0020-33003	BEARING MNT SECONDARY LINK, C	1
AMAT	0020-33009	BRG SPACER COUPLER SECONDARY/ARM 5000	17
AMAT	0020-33013	BRG SUPPORT PRIM. LINK/ROTATI	2
AMAT	0020-33015	BRG RET ECCENTRIC LINK BLADE/SUPT P5000 MC	1
AMAT	0020-33035	DRIVE PLATE ROTATION 5000 MC ROBOT	1
AMAT	0020-33042	ECCENTRIC LINK WAFER GRIP P5000 MC ROBOT	15
AMAT	0020-33062	FLAG TUBE ROTATION ENABLE P50	1
AMAT	0020-33066	MAGNET RING OUTER EXTENSION LOWER 5000	2
AMAT	0020-33097	BRACKET,COIL,FRONT,R2	13
AMAT	0020-33100	PLVG MANOMETER	2
AMAT	0020-33163	ADAPTER THROTTLE VALVE METCH MXP CENTURA	1
AMAT	0020-33164	THROTTLE VALVE HOUSING	5
AMAT	0020-33320	CARRIER, 200 MM (EXT. CATHODE)	1
AMAT	0020-33339	HINGE, INNER	1
AMAT	0020-33339	HINGE, INNER	4
AMAT	0020-33342	HINGOUTERT	1
AMAT	0020-33366	BLOCKER PLATE	3
AMAT	0020-33410	PIN, GUIDE, SPRING	7
AMAT	0020-33522	B-PLATE,TOP,PLUMBING,WATERBOX,R2	11
AMAT	0020-33526	PLATE,TOP,RECOVER,WATERBOX,R2	1
AMAT	0020-33530	LID CVR HTR	1
AMAT	0020-33564	FLAG, SENSOR, THROTTLE, DPS	3
AMAT	0020-33564	FLAG, SENSOR, THROTTLE, DPS	1
AMAT	0020-33569	PLUNGER THROTTLE	1
AMAT	0020-33589	PLATE	1
AMAT	0020-33665	SCREW, CAP, SUSCEPTOR	1
AMAT	0020-33666	GAS DISTRIBUTION PLATE, MTG	2
AMAT	0020-33668	COVER, TOP UNI-LID SEE THRU	1
AMAT	0020-33671	CLAMP VESPEL SEE THRU UNI-LID	42
AMAT	0020-33672	MOTOR PLATE	2
AMAT	0020-33805	COVER FEED,DPS MEC	1
AMAT	0020-33809	INSULATOR, CATHODE BASE, DPS MECGECO	1
AMAT	0020-33810	COVER,GAS FEED ASSY(CAT)	1
AMAT	0020-33811	COVER, SIDE, LOWER CHAMBER, DPS	2
AMAT	0020-33816	ISOLATOR, RF BULKHEAD, DPS	4
AMAT	0020-33819	COVER, INSULATING, GND, CATHODE, DPS,ME	8
AMAT	0020-33820	CLAMP, VIEWPORT, LOWER CHAMBER, DPS	1
AMAT	0020-33881	TUBE STD CATHODE, RZ	6
AMAT	0020-33883	RING INSULATOR	5
AMAT	0020-33967	GEAR, HINGE	1
AMAT	0020-33978	PLATE, MTG, T/C AM	1
AMAT	0020-33999	BRACKET, HDD LIGHT-P/C ENP PT	1
AMAT	0020-34015	GAS DISTRIBUTION PLATE .101 HOLE ON 8.5	1
AMAT	0020-34017	PLATE	3
AMAT	0020-34038	PIN-CONTACT RETAINING SPRING	1
AMAT	0020-34042	SPACER	159
AMAT	0020-34047	COVER TURBO SIDE	1
AMAT	0020-34076	GUIDE,HINGE,UPPER,R2 CHAMBER	1
AMAT	0020-34093	PLATE	1
AMAT	0020-34112	PLATE, REFERENCE, INTICATOR	4
AMAT	0020-34130	PIN,TUBE LIFT	7
AMAT	0020-34130	PIN,TUBE LIFT	50
AMAT	0020-34167	COVER,SHIELD,FRONT,R2	2
AMAT	0020-34188	PLATE, VIEWPORT	1
AMAT	0020-34286	BRKT,GAS LINES,SIDE POST,TOP,CENTURA	4
AMAT	0020-34288	BRACKET,EXTENDED,GAS LINES,ULTIMA	3
AMAT	0020-34293	TOP COVER, DSGD, R2 CHAMBER	3
AMAT	0020-34311	HEAT SINK LINER	1
AMAT	0020-34312	INLET GAS FEED, SGD	1
AMAT	0020-34315	LINER, CATHODE, RPS	5
AMAT	0020-34319	BRACKET, SPRING, HEATER, LIFT	4
AMAT	0020-34387	CAPS	9
AMAT	0020-34428	MOUNT, BRACKET, BULKHEAD, DPS	2
AMAT	0020-34432	CLAMP, BRACKET, BULKHEAD, DPS	1
AMAT	0020-34464	SCREW, SHOULDER, P-CHUCK	9
AMAT	0020-34488	ADAPTOR, BULKHEAD, 5/8-18 TO 3/4-20	4
AMAT	0020-34508	COVER TERMINAL	1
AMAT	0020-34509	COVER AC CHANNEL	1
AMAT	0020-34509	COVER AC CHANNEL	1
AMAT	0020-34585	BRACKET LF GENERATOR DX2	2
AMAT	0020-34592	GUIDE DXZ VIEW LID	16
AMAT	0020-34628	WELDMENT BRACKET	1
AMAT	0020-34629	ADAPTOR, THROTTLE VALVE, BUTTERFLY	4
AMAT	0020-34657	BRKT, PHOTOHELIC GUAGE	1
AMAT	0020-34694	LINER, GDP, R2, OXIDE, GECO	1
AMAT	0020-34697	POWER SUPPLY SHIELD	2
AMAT	0020-34708	LID, SIN, DXZ	3
AMAT	0020-34722	PLATE, ADAPTER	1
AMAT	0020-34764	SEPARATOR, SEAL	10
AMAT	0020-34813	LINK, TAPPED, MICROWAVE, UPPE	11
AMAT	0020-34813	LINK, TAPPED, MICROWAVE, UPPE	1
AMAT	0020-34828	FLAG, SENSOR	1
AMAT	0020-34829	BASE, ADAPTER HANDLE 5000 LOADLOCK COVE	2
AMAT	0020-34859	RETAINER, LENS, HOT DETECTOR	1
AMAT	0020-34861	RETAINER, LENS & FILTER, H.O.T.	1
AMAT	0020-34873	GAS DIST. PLATE	1
AMAT	0020-34880	(NEW) PLATE BLANKOFF SEIKO SEIKI CONTROL PANEL	2
AMAT	0020-34890	SWITCH MOUNT SACVD CHAMBER	23
AMAT	0020-34896	FILLER, SLIT VALVE, RPS	2
AMAT	0020-34896	FILLER, SLIT VALVE, RPS	3
AMAT	0020-34985	PULLEY, TIMING BELT	6
AMAT	0020-34986	COVER BELT MOTOR DRIVE THROTTLE	1
AMAT	0020-35004	WRIST FOR QUARTZ	2
AMAT	0020-35013	DUPLEX CLAMP ROBOT BLADE	1
AMAT	0020-35032	WING FROG LEG	2
AMAT	0020-35079	CHAMBER COVER	1
AMAT	0020-35173	BRKT, DOOR INTERLOCK SWITCH	2
AMAT	0020-35173	BRKT, DOOR INTERLOCK SWITCH	5
AMAT	0020-35234	BEARING MOUNT	1
AMAT	0020-35234	BEARING MOUNT	2
AMAT	0020-35235	MOUNTING SCREW, 8 CASSETTE CLAMPING	10
AMAT	0020-35237	PIVOT SCREW	10
AMAT	0020-35547	NUT, ROTATION ASSY ADJUST	132
AMAT	0020-35624	RING CLAMP	1
AMAT	0020-35730	ROBOT TUBE OBS	1
AMAT	0020-35735	COVER PROCESS CHAMBER PROTECTIVE	1
AMAT	0020-35782	PRESSURE PLATE BEARING SET 5200	3
AMAT	0020-35894	BRACKET, WATER FLO SWITCH	5
AMAT	0020-35894	BRACKET, WATER FLO SWITCH	3
AMAT	0020-35962	BRACKET CONNECTOR CHAMBER A , B	1
AMAT	0020-35968	COVER HIGH POWER RACEWAY FRONT SIDE	1
AMAT	0020-36036	HOUSING MAGNETIC FOR ROTATION CENTURA	1
AMAT	0020-36084	CHANNEL PLUMBING	2
AMAT	0020-36092	BUSS BAR LOWER BOTTOM CONTACTOR	1
AMAT	0020-36093	BUSS BAR LOWER RIGHT CONTRACTOR	1
AMAT	0020-36094	BUSS BAR, LOWER CENTER CONTACTOR	1
AMAT	0020-36113	PANEL BULKHEAD I/O SYSTEM AC BOX	2
AMAT	0020-36202	BRACKET 400 A CB LOWER COVER	2
AMAT	0020-36233	BRACKET 2 PHASE DRIVER MOUNTING	3
AMAT	0020-36289	BUSS BAR FUSES JUMPER REM AC	26
AMAT	0020-36308	BRACKET DOOR INTERLOCK SWITCH	1
AMAT	0020-36353	BRKT NUT RETAINER COVERS MTG	20
AMAT	0020-36396	COVER RING	2
AMAT	0020-36418	NUT CLAMP TRANSFER CHMBR	12
AMAT	0020-36419	CLAMP ,TRANSFER CHAMBER W/SPRING	7
AMAT	0020-36419	CLAMP ,TRANSFER CHAMBER W/SPRING	10
AMAT	0020-36423	BRKT. MOUNTING, CONNECT	1
AMAT	0020-36472	PANEL BLANK 19 X 8.72 BLACK	2
AMAT	0020-36505	BRKT GUIDING SCR DRIVER	33
AMAT	0020-36547	BRKT PNEUMATIC CONNECTOR R3.1 ROTATION	3
AMAT	0020-36560	WAFER DUMMY 5	1
AMAT	0020-36574	SHLD TERMINAL BLOCK 8 POS	5
AMAT	0020-36593	BOX COVER HEATER	1
AMAT	0020-36630	BRACKET LOWER	1
AMAT	0020-36720	HOUSING, MAGNET	1
AMAT	0020-36727	COVER, HOLE, LIFT PIN	1
AMAT	0020-36728	COVER, HOLE, 200MM LIFT PIN	2
AMAT	0020-36745	COVER,BEARING,LAMP HOUSING	8
AMAT	0020-36754	BRACKET, CYLINDER,LIFT PIN	1
AMAT	0020-36957	BRKT FLOOR CHMBR C,D PEC FRAME	1
AMAT	0020-36964	BRKT, CONT CABLE SUB D CONN	1
AMAT	0020-37005	BRKT, LEFT BULGE DOOR	1
AMAT	0020-37133	TRANSFORMER BOX 50VA	2
AMAT	0020-37160	CLAMP EXHAUST 2 IN	5
AMAT	0020-37255	COVER,RACEWAY, CENTER	1
AMAT	0020-37277	COVER BULKHEAD D-CONNS CHAMBER TRAY	4
AMAT	0020-37303	PANEL POS A/C BULKHEAD D-CONNS, CHAMBER TRAY	1
AMAT	0020-37312	POLY DOM HEBER Y46 TOOL	2
AMAT	0020-37430	BAFFLE,INJECT,TEFLON, HORIZONTAL SPLIT	5
AMAT	0020-37430	BAFFLE,INJECT,TEFLON, HORIZONTAL SPLIT	1
AMAT	0020-37535	BUS FLEX PH A CB-4&5 350AMP	1
AMAT	0020-37581	BLOCK (PT-P1-4700)	1
AMAT	0020-37581	BLOCK (PT-P1-4700)	1
AMAT	0020-37656	SHIELD TERM BLOCK 6 POS A/C CHANNEL	1
AMAT	0020-37684	BRACKET MOUNTING STATUS LAMP	1
AMAT	0020-37684	BRACKET MOUNTING STATUS LAMP	4
AMAT	0020-37688	BUS, PH-B OUTPUT, K1 CONTACTOR	2
AMAT	0020-37696	PLATE BLANK BOX CONNECTORS	1
AMAT	0020-37701	BRACKET VENT LINE POSITION A	1
AMAT	0020-37817	COVER PLATE EXHAUST	1
AMAT	0020-37923	BRACKET, FLOW METR, LTC	3
AMAT	0020-37949	BRKT, BLOCK VALVE	4
AMAT	0020-37953	GAS PANEL	1
AMAT	0020-37962	BAR, MTG PALLET 5200 CENTURA	1
AMAT	0020-38058	CYLINDER,LIFTER	10
AMAT	0020-38062	INSERT SUPPORT	5
AMAT	0020-38066	BRACKET	2
AMAT	0020-38067	WING GUIDE RF – BOX	1
AMAT	0020-38067	WING GUIDE RF – BOX	1
AMAT	0020-38074	INSUL. HV FEED	2
AMAT	0020-38077	LIFT PIN,ANOD., (REPLACED BY 0020-38752) GECO	1
AMAT	0020-38084	ROD, STOPPERGECO	5
AMAT	0020-38086	CONTACT BASE	4
AMAT	0020-38087	ESC AL FOIL(GASKET)	6
AMAT	0020-38119	SHOWER HEAL, DXZ TEOS	6
AMAT	0020-38121	NEUTRAL ADAPTER 208V Y SYSTEM	1
AMAT	0020-38164	TOP COVER	10
AMAT	0020-38183	COVER, PID CONTROLLER – R2 CHM	1
AMAT	0020-38192	FLOOR COVER POS. A REAR	2
AMAT	0020-38259	PLATE	2
AMAT	0020-38273	FLOOR COVER CHMBR. C & D FRONT	1
AMAT	0020-38280	BLOCK, DOOR LATCH MOUNT	11
AMAT	0020-38286	PLATE COVER XFER CHAMBER HEATER	7
AMAT	0020-38298	RING	2
AMAT	0020-38319	FLOOR COVER, POS C, ASP #3	1
AMAT	0020-38475	BRACKET	1
AMAT	0020-38555	PLATE,CLDWN PEDESTAL,RTP CLDWN CH	2
AMAT	0020-38694	FLAG,SENSOR,THROTTLE,DPS-A3	1
AMAT	0020-38786	CARRIER 5200 MXP ESC OXIDE	96
AMAT	0020-38786	CARRIER 5200 MXP ESC OXIDE	2
AMAT	0020-38809	TERMINAL STRIP MOUNTING BRACKET	1
AMAT	0020-38889	COVER, FIXTURE, R2, SIMP, CATHODE	6
AMAT	0020-38925	BLANKOFF, CHAMBER, DPS METAL/POLY	1
AMAT	0020-38980	COVER,CONDUIT EXTENSION BOX RTP	5
AMAT	0020-39033	CLAMP, WELDMENT, 03-OUT, CENTURA 5200G02	1
AMAT	0020-39034	BLOCK, WELDMENT CLAMP,03-OUT,CENTURA 520	1
AMAT	0020-39034	BLOCK, WELDMENT CLAMP,03-OUT,CENTURA 520	1
AMAT	0020-39201	COVER,BRACKET,WAFER LIFT,DPS	3
AMAT	0020-39237	AIR VANE GUARD	1
AMAT	0020-39238	BRACKET, INTERLOCK CLIP	2
AMAT	0020-39238	BRACKET, INTERLOCK CLIP	2
AMAT	0020-39254	RIGHT CLAMP D X2 CH	2
AMAT	0020-39278	OUTRIGGER, FRONT PANEL, RTP	4
AMAT	0020-39319	BRACKET	2
AMAT	0020-39325	BRACKET,WATER MANIFOLD,TTF SUPPLY	3
AMAT	0020-39399	COVER TB,CENTURA GAS PANEL	4
AMAT	0020-39406	BRACKET, ROT COVER , REAR, RTP CHMBR	1
AMAT	0020-39466	STDF,RIGHT ROT COVER,.50 INCH,RTP CHAMBER	1
AMAT	0020-39487	HINGE RIGHT LID PUMPING PLATE DXZ	1
AMAT	0020-39487	HINGE RIGHT LID PUMPING PLATE DXZ	3
AMAT	0020-39491	SHAFT	2
AMAT	0020-39501	SC PN HD 6-32X.4 HAST, VENTED	2
AMAT	0020-39606	BRACKET FJKN BLOCK VALVE	2
AMAT	0020-39692	ROD, STAINLESS STEEL	1
AMAT	0020-39732	CLAMP MIDDLE EXH. TORR	1
AMAT	0020-39732	CLAMP MIDDLE EXH. TORR	1
AMAT	0020-39820	BAR, STANDOFF VANE SWITCH	10
AMAT	0020-39836	BRACKET,ADAPTER,H.O.T.,DETECTOR	8
AMAT	0020-39883	CLP,OUTR,GS LN,1/4 & 3/8,RTP	1
AMAT	0020-39906	BOTTOM PANEL SLD	1
AMAT	0020-39958	PIN SIDE THRUST BEARING	4
AMAT	0020-40028	KEY, PLATFORM, MAIN SHAFT	1
AMAT	0020-40038	HOLD DOWN RING, VIEWPOINT	1
AMAT	0020-40042	BUSHING PLATFORM	30
AMAT	0020-40044	CLAMP, BASE 150MM /200MM PLATFORM	1
AMAT	0020-40108	COVER PLATE S1 200MM 1/4 THK E-CHCK	1
AMAT	0020-40123	BRACKET LIMIT SWITCH AC POWER	1
AMAT	0020-40157	CLIP, SPRING	12
AMAT	0020-40157	CLIP, SPRING	1
AMAT	0020-40158	BRACKET MOUNTING	1
AMAT	0020-40164	PLUG,HOLE	2
AMAT	0020-40190	FILTER,UV,TURBO PORT LINER	52
AMAT	0020-40190	FILTER,UV,TURBO PORT LINER	125
AMAT	0020-40260	FITTING, RTD ADAPTER, CHEM VE	2
AMAT	0020-40362	PANEL	2
AMAT	0020-40376	SHAFT, BUTTERFLY, 200MM THROTTLE VALVE	2
AMAT	0020-40376	SHAFT, BUTTERFLY, 200MM THROTTLE VALVE	1
AMAT	0020-40383	COVER	1
AMAT	0020-40429	CLAMP, ADJ TRIM	1
AMAT	0020-40469	PANEL	1
AMAT	0020-40544	SPIDER	1
AMAT	0020-40545	CARRIER	1
AMAT	0020-40550	BRACKET, CLAMP	4
AMAT	0020-40550	BRACKET, CLAMP	1
AMAT	0020-40621	INSULATOR, RF HDP ETCH	2
AMAT	0020-40627	GRAFOIL ROOF TOP	2
AMAT	0020-40683	COUPLING, FLEX	2
AMAT	0020-40705	TOP COVER	6
AMAT	0020-40711	BRACKET WAFER DETECTOR	8
AMAT	0020-40732	COVER	1
AMAT	0020-40738	PANEL	1
AMAT	0020-40779	BLOCK, CYL MT, LLC	3
AMAT	0020-40841	COVER PLATE	1
AMAT	0020-40842	COVER	1
AMAT	0020-40905	5000 STD INTERFACE BLANK OFF	2
AMAT	0020-40925	INSULATOR RING	3
AMAT	0020-40971	NUT, CLAMP, VESPEL W/FLATS	4
AMAT	0020-40984	PLATFORM	2
AMAT	0020-41006	PANEL	1
AMAT	0020-41035	FRONT PANEL, E CHUCK BOX	3
AMAT	0020-41036	POWER SUPPLY CENTURA	2
AMAT	0020-41040	BLANK, E CHUCK BRACKET	1
AMAT	0020-41092	ACTUATOR SAFETY VALVE	1
AMAT	0020-41097	BRACKET	1
AMAT	0020-41145	HE FITTING	1
AMAT	0020-41145	HE FITTING	4
AMAT	0020-41150	CARRIER LIFT, E-CHUCK	4
AMAT	0020-41152	SPIDER LIFT E-CHUCK	1
AMAT	0020-41152	SPIDER LIFT E-CHUCK	1
AMAT	0020-41156	SHAFT, RING, COVER	2
AMAT	0020-41157	BUSHING	18
AMAT	0020-41165	STUD, E-CHUCK POWER SUPPLY	2
AMAT	0020-41168	INSERT PLUG	7
AMAT	0020-41217	OUTRIGGER,FRONT PANEL,CENTURA 5500LL	2
AMAT	0020-41263	APERTURE OPTICAL END POINT	1
AMAT	0020-41263	APERTURE OPTICAL END POINT	1
AMAT	0020-41307	PLATE, MTG	2
AMAT	0020-41326	GASKET, GRAFOIL, ROOF TOP CHIL	1
AMAT	0020-41331	RING, ROOF AND DOME COOLING, 5300	1
AMAT	0020-41414	SCR 5/16 -18 X 1.25 SLIT VALVE	2
AMAT	0020-41588	BRACKET	1
AMAT	0020-42004	CARRIER, LOWER	1
AMAT	0020-42005	CARRIER, UPPER, LIFT	2
AMAT	0020-42012	BRACKET SPRING	4
AMAT	0020-42015	TUBE EXTENTION	4
AMAT	0020-42024	SLIDE GAS BELLOWS, WXZ	1
AMAT	0020-42031	CAP, END RT, HINGE WxZ	1
AMAT	0020-42035	PLUG,PMS EXHAUST PORT,WXZ	10
AMAT	0020-42048	COVER BOTTOM THROTTLE VALVE WXZ	1
AMAT	0020-42061	BLOCK BRACE GASLINE WXZ	1
AMAT	0020-42062	BLOCK, CLAMP, GA LINE, WXZ	1
AMAT	0020-42062	BLOCK, CLAMP, GA LINE, WXZ	1
AMAT	0020-42075	COLLAR, DRIVE, HEATER LIFT	1
AMAT	0020-42083	PLATE, PUMPING, 6 FC, WXZ	3
AMAT	0020-42086	CLAMP, LT, HOLD DOWN, WXZ	2
AMAT	0020-42112	CYLINDER LIFT	2
AMAT	0020-42160	LIFT RING ALUM	1
AMAT	0020-42164	CLAMP SET HEATER WXZ	38
AMAT	0020-42164	CLAMP SET HEATER WXZ	2
AMAT	0020-42166	FLAG, SENSOR LIFT	1
AMAT	0020-42167	CAP LIFT PIN GUIDE W X Z	31
AMAT	0020-42168	RING, LIFT 8″ ALUM	3
AMAT	0020-42186	ENCLOSURE, INTERLOCK/END PT .HTR, WXZ	1
AMAT	0020-42191	ADAPTER LASER ASSY	1
AMAT	0020-42234	BRACKET 5 PH MOTOR DRVR WXZ	1
AMAT	0020-42258	MANIFOLD WATER BWCVD	2
AMAT	0020-42266	FACE PLATE ALUMINUM SCREW	4
AMAT	0020-42266	FACE PLATE ALUMINUM SCREW	2
AMAT	0020-42298	CLAMP TRANSFER MICROWAVE REMOTE PLASMA	7
AMAT	0020-42304	CLAMP TRANSFER VALVE MICROWAVE REMOTE PL	2
AMAT	0020-42304	CLAMP TRANSFER VALVE MICROWAVE REMOTE PL	5
AMAT	0020-42311	BAR MTG POS A MICROWAVE REMOTE PLASMA	2
AMAT	0020-42312	MTG PLASMA DETECTOR HOUSING MCVD	2
AMAT	0020-42769	LOTO DEVICE, PG-21 CONNECTOR, 300MM EMAX	1
AMAT	0020-43909	PLT AUGLED STRAIN R	1
AMAT	0020-43961	SPRING CONTACT, SAFE CONNECTOR	4
AMAT	0020-44405	COVER	1
AMAT	0020-44847	BRACKET, LOTO PLATE CAPTURE (ACD), REPAC	1
AMAT	0020-44847	BRACKET, LOTO PLATE CAPTURE (ACD), REPAC	1
AMAT	0020-45069	SEAL, METAL, E-TYPE, 7.669 ID	1
AMAT	0020-47132	UPA TUBE BRACKET, 200MM MULTI	8
AMAT	0020-47141	SPACER HEATER THERMAL	2
AMAT	0020-47188	MEMBRANE CLAMP INTERNAL, 300M	1
AMAT	0020-47197	FINGER, TRANSFER MECH, ANNEAL, SC ECP	1
AMAT	0020-51176	GASKET	4
AMAT	0020-51283	GASKET (HEAT EXCHANGE)	1
AMAT	0020-51284	GASKET,(HEAT EXCHANGE)	1
AMAT	0020-52745	MOTOR CLAMP INPUT SHUTTLE	3
AMAT	0020-55631	O-RING	10
AMAT	0020-55635	O-RING	13
AMAT	0020-57678	SPACER	18
AMAT	0020-58488	TEFLON SCREW	77
AMAT	0020-59094	MACHINE BRACKET (BLACK)	2
AMAT	0020-60028	SUSCEPTOR OVERLAY	1
AMAT	0020-60057	TRAY SUPPORT	8
AMAT	0020-60404	CLAMP RING	1
AMAT	0020-60771	SHIELD UPPER	2
AMAT	0020-60824	SHIELD LOWER	2
AMAT	0020-62423	SHIELD, LOWER, 190MM SPACING, 200MM ALPS	2
AMAT	0020-65880	PLATE, COVER	1
AMAT	0020-65948	ARM HINGE LEFT	2
AMAT	0020-68056	INSULATOR, CONN OUTPUT, R0+ DPS FILTER B REV A	2
AMAT	0020-68339	BRACKET HINGE	2
AMAT	0020-70051	WINDOW, UPPER CLEAR	4
AMAT	0020-70052	WINDOW, CLEAR , LOWER	2
AMAT	0020-70055	BRACKET WINDOW STOP	3
AMAT	0020-70056	CAP FITTING PIPE 2″ HEAT EXCHA	1
AMAT	0020-70059	PLATE COVER PCB HEAT EXCHANGER	2
AMAT	0020-70060	BRACKET, HEAT EXCHANGER	2
AMAT	0020-70066	ROD, 200MM 29 POSN STOR ELEU	5
AMAT	0020-70069	PLATE, TRAY SUPPORT, 200MM, 29 POSITION STORAGE EL	1
AMAT	0020-70090	BLOCK MOUNTING HEAT EXCHANGER BRAZEPAK	1
AMAT	0020-70123	PANEL, GENERIC ELECTRICAL I/O EXP GP	1
AMAT	0020-70127	BRAKET, RPBOT I/C PCBA RIGHT	4
AMAT	0020-70128	BRKT ROBOT I/C PCBA LEFT	1
AMAT	0020-70128	BRKT ROBOT I/C PCBA LEFT	2
AMAT	0020-70139	COVER ENCODER INTERFACE BD	2
AMAT	0020-70141	PIVOT BLOCK WINDOW BELLCRANK	1
AMAT	0020-70173	PLATE, MOUNTING TURBO PCB	1
AMAT	0020-70173	PLATE, MOUNTING TURBO PCB	1
AMAT	0020-70180	SUPPORT DOOR DLL	1
AMAT	0020-70184	RING, ADAPT, MTL	2
AMAT	0020-70184	RING, ADAPT, MTL	4
AMAT	0020-70223	PLATE CHAMBER MONOLITH	2
AMAT	0020-70276	REMOTE DIGITAL	2
AMAT	0020-70290	BRACKET WINDOW STOP SUPPORT	1
AMAT	0020-70327	PLATE SPACER	25
AMAT	0020-70327	PLATE SPACER	1
AMAT	0020-70336	FROG LEG WING	19
AMAT	0020-70379	SHIELD	1
AMAT	0020-70396	TRAY LEFT SIDE ELEVATOR 200MM LOADLOCK ORIENTER	2
AMAT	0020-70410	BEARING RETAINER ELEVATOR SHAFT	31
AMAT	0020-70411	BRACTET MOTOR ELAVAT	1
AMAT	0020-70418	HOUSING LOWER BEARING LIFT LOADLOCK ORIE	15
AMAT	0020-70420	BRKT HOME SENSOR LL ORIENT	34
AMAT	0020-70420	BRKT HOME SENSOR LL ORIENT	18
AMAT	0020-70421	FLAG HOME SENSOR LOADLOCK ORIENTER	32
AMAT	0020-70430	SPR LEAF,SLIT VALVE	35
AMAT	0020-70433	HINGE RIGHT SLIT VALVE	1
AMAT	0020-70435	SHAFT, SLIT VALVE	1
AMAT	0020-70436	PLATE,CAM SLIT,VALVE	107
AMAT	0020-70436	PLATE,CAM SLIT,VALVE	1
AMAT	0020-70532	FIG BLANK ORIENTER PORT W/RGA PORT POS	1
AMAT	0020-70549	BRACKET	1
AMAT	0020-70558	TRACK LOAD LOCK DOOR MECHANISM	1
AMAT	0020-70590	SEAL COVER Z-DRIVE`	1
AMAT	0020-70640	COVER, RIGHT REAR LEG	1
AMAT	0020-70645	BRACKET LINE, NE PURGE	3
AMAT	0020-70712	BKT, MICRO SWITCH WINDOW, TILT CASSETTE	5
AMAT	0020-70717	LEVER, GAS POST, MACHINED	3
AMAT	0020-70717	LEVER, GAS POST, MACHINED	2
AMAT	0020-70739	BRACKET	1
AMAT	0020-70739	BRACKET	1
AMAT	0020-70746	MONITOR HARNESS	3
AMAT	0020-70761	STANDOFF SLIT VALVE WIRE HARNESS	1
AMAT	0020-70762	BRACKET FOR WATER VALVE	1
AMAT	0020-70782	BTKT 10 WAY MNFLD	3
AMAT	0020-70821	CHAMBER COVER INTERCONNECT	2
AMAT	0020-70821	CHAMBER COVER INTERCONNECT	1
AMAT	0020-71674	BRACKET	1
AMAT	0020-72772	BUSHING	31
AMAT	0020-73110	SHAFT COVER	1
AMAT	0020-73110	SHAFT COVER	47
AMAT	0020-74530	BUSHING	10
AMAT	0020-74530	BUSHING	8
AMAT	0020-74757	BUSHING	48
AMAT	0020-74991	SUPPORT GLASS OUTER	6
AMAT	0020-74992	CAP	10
AMAT	0020-74992	CAP	44
AMAT	0020-75023	CONNECTING ROD	1
AMAT	0020-75035	RETAINER SPRING LL DOOR	46
AMAT	0020-75036	LOAD LOCK DOOR CARRIAGE LINKAGE	9
AMAT	0020-75038	PIN LINKAGE LL DOOR	15
AMAT	0020-75073	CRANK	1
AMAT	0020-75092	CLAMP VIEWPORT WC CHAMBER	2
AMAT	0020-75108	CLEAT	35
AMAT	0020-75137	FLAG	8
AMAT	0020-75200	COVER	1
AMAT	0020-75201	OBS:BRACKET,CHAMBER TRAY PNEUMATICS MANIFOLD CENTU	2
AMAT	0020-75204	BRACKET, CONDUIT MOUNT	1
AMAT	0020-75218	SUPPORT BRACKET LEFT ENP,	2
AMAT	0020-75219	SUPPORT BRACKET RIGHT ENP,	2
AMAT	0020-75235	PANEL, BLANK CHAMBER	1
AMAT	0020-75295	BRACKET	1
AMAT	0020-75330	PANEL	1
AMAT	0020-75388	BRACKET HINGE TOP LEFT 29 POS STOR ELEV	1
AMAT	0020-75390	BRACKET HINGE TOP RIGHT	4
AMAT	0020-75557	SHROUD, LFM & VAPORIZER, CMP	1
AMAT	0020-75580	STOP, LIFT, UPPER	1
AMAT	0020-75732	COVER, SENSOR BRACKET	3
AMAT	0020-75733	MOUNTING BRACKET	2
AMAT	0020-75759	BRACKET, CDA TIF FITTING	1
AMAT	0020-75763	DOOR INNER MAINFRAME AC BOX	2
AMAT	0020-75784	PLUG, LIFT POINT 300MM	6
AMAT	0020-75784	PLUG, LIFT POINT 300MM	14
AMAT	0020-75791	COVER LOWER, SLITVALVE 300MM	1
AMAT	0020-75841	PLATE, CLAMP, 300MM	1
AMAT	0020-75841	PLATE, CLAMP, 300MM	8
AMAT	0020-75852	PLATE TOP PLATFORM WBLL CMF CENTURA	2
AMAT	0020-75896	BLOCK NEST CASSETTE 150MM WBLL CMF CENTU	3
AMAT	0020-75908	CAP, LAMP FEEDTHROUGH	74
AMAT	0020-75927	PLATE COVER	2
AMAT	0020-75998	BRACKET SUPPORT WBLL FASTER WAFFER MAPPIN	1
AMAT	0020-76059	SEAL HOLDER ROOT DRIVE	19
AMAT	0020-76066	ROBOT ARM COUPLER, ROBOT	4
AMAT	0020-76066	ROBOT ARM COUPLER, ROBOT	1
AMAT	0020-76074	ARM, LOWER RT ROBOT DRIVE	15
AMAT	0020-76085	SEAL RETAINER , EXT S	12
AMAT	0020-76097	SPACER SET3 ROBOT DRIVE	1
AMAT	0020-76111	BLADE FEED THRU 200MM	4
AMAT	0020-76169	VME COVER	5
AMAT	0020-76169	VME COVER	3
AMAT	0020-76170	COVER SYSTEM ELECTRONICS	1
AMAT	0020-76170	COVER SYSTEM ELECTRONICS	2
AMAT	0020-76188	OBSOLETE, WB AC HOUSING	1
AMAT	0020-76191	CLAMP1, 1 OVERPRESSURE LINE	14
AMAT	0020-76191	CLAMP1, 1 OVERPRESSURE LINE	3
AMAT	0020-76242	ROT. STOP II COVER LIFTER	2
AMAT	0020-76255	BUSHING, STAINLESS STEEL	21
AMAT	0020-76273	P2 ROLLER SUPPORT	13
AMAT	0020-76276	TRUNNION ENP LONG LLA	10
AMAT	0020-76284	FLANGE ADAPTER Z DRIVE ENP	2
AMAT	0020-76292	GUAGE BLOCK, .522″ , TILT CASSETTE 8″	91
AMAT	0020-76311	YOKE, COVER, ENP CHAMBER LID LI	1
AMAT	0020-76355	BRKT,U-CHANNEL,CH.A&B	2
AMAT	0020-76356	SPACER,CHAMBER A/B BRACKET	2
AMAT	0020-76391	OBS: COVER,AC ENCLOSURE,CENTURA FACILITIES TRAY	2
AMAT	0020-76400	HINGE, HIDDEN	4
AMAT	0020-76400	HINGE, HIDDEN	1
AMAT	0020-76429	SIDE PLATE UPPER FRAME REAR CENTURA	1
AMAT	0020-76432	BRACKET VERTICAL ORIENTER HINGE	3
AMAT	0020-76434	BRACKET, PIVOT, ORIENTER HINGE	16
AMAT	0020-76434	BRACKET, PIVOT, ORIENTER HINGE	11
AMAT	0020-76443	MOUNT PLATE BULKHEAD ADPT CENTURA 5200ST	5
AMAT	0020-76444	GAS LINE BRACKET	52
AMAT	0020-76447	PANEL RETURN SUPPLY	1
AMAT	0020-76447	PANEL RETURN SUPPLY	2
AMAT	0020-76449	BRACKET, MTG SHORT	1
AMAT	0020-76450	BRACKET TOP MTG SHORT MANIFOLD FAC I/F CENTURA	12
AMAT	0020-76473	BRKT GEN RACK	44
AMAT	0020-76473	BRKT GEN RACK	1
AMAT	0020-76474	BRACKET, GEN RACK CONNECTOR PLATE	28
AMAT	0020-76522	ALIGNMENT PIN	2
AMAT	0020-76569	CLAMP, BASE FRNT WATER LINE FAC I/F	2
AMAT	0020-76569	CLAMP, BASE FRNT WATER LINE FAC I/F	2
AMAT	0020-76570	CLAMP, HOLD FRNT WATER LINE FAC I/F	4
AMAT	0020-76570	CLAMP, HOLD FRNT WATER LINE FAC I/F	2
AMAT	0020-76571	CLAMP, BASE REAR WATER LINE FAC I/F	5
AMAT	0020-76571	CLAMP, BASE REAR WATER LINE FAC I/F	2
AMAT	0020-76572	CLAMP, PLT REAR WATER LINE FAC I/F	2
AMAT	0020-76572	CLAMP, PLT REAR WATER LINE FAC I/F	1
AMAT	0020-76597	CASS, PLATFORM, Z DRIVE	1
AMAT	0020-76618	CLAMP, HOLD REAR WATER LINE FAC I/F	3
AMAT	0020-76619	AMAT PART	1
AMAT	0020-76674	BLANK OFF PLATE	1
AMAT	0020-76674	BLANK OFF PLATE	1
AMAT	0020-76733	CAP BAFFLE SCREEN	1
AMAT	0020-76737	NUT, JAM, PC2 PED. HEIGHT ADJUSTMENT	1
AMAT	0020-76877	SUPPORT STANDARD RIGHT 150 MM END	4
AMAT	0020-76885	COVER ROBOT MOTOR SENSOR	1
AMAT	0020-76954	BRACKET CLAMP	32
AMAT	0020-76975	BLOCK CLAMP REAR UPPER CHBR. C,D CEN.	2
AMAT	0020-77210	SENSOR FLAG	3
AMAT	0020-77210	SENSOR FLAG	1
AMAT	0020-77224	NUT CLAMP, SWEEP HEAD	1
AMAT	0020-77237	STOP, RETURN	1
AMAT	0020-77241	BRAKE PAD	1
AMAT	0020-77249	CLAMP, BRACKET	1
AMAT	0020-77279	ARM ROTATION SHAFT	1
AMAT	0020-77280	PULLEY MOUNT	1
AMAT	0020-77282	L-BRACKET	1
AMAT	0020-77293	SPINDLE CAP PULLEY	1
AMAT	0020-77299	SPACER, DRIVE PULLEY BEARING	6
AMAT	0020-77300	SPACER,ROBOT	5
AMAT	0020-77330	SPACER-DRIVE SHAFT BEARING	2
AMAT	0020-77336	CLAMP, WRIST DRIVE SHAFT	6
AMAT	0020-77336	CLAMP, WRIST DRIVE SHAFT	1
AMAT	0020-77370	PULLEY	3
AMAT	0020-77373	GEAR	2
AMAT	0020-77373	GEAR	4
AMAT	0020-77443	SEAL (PACK OF 10)	12
AMAT	0020-77740	BRACKET	1
AMAT	0020-77754	BRACKET, CMP BASE	4
AMAT	0020-78126	MANIFOLD	1
AMAT	0020-78126	MANIFOLD	1
AMAT	0020-78127	MANIFOLD, SLURRY	2
AMAT	0020-78262	BRUSH PAD,CLEAN CUP	4
AMAT	0020-78283	MOTOR MOUNT, ROBOT X-AXIS	1
AMAT	0020-78333	COVER PANEL	1
AMAT	0020-78434	PULLEY COUPLING	1
AMAT	0020-78435	6 HOLE BASE PLATE	1
AMAT	0020-78443	BRACKET PLATE	1
AMAT	0020-78477	SHIELD	2
AMAT	0020-78514	SUPPORT BRACKET	1
AMAT	0020-78529	PP MANIFOLD	1
AMAT	0020-78552	MEMBRANE, WAFER, 8.00 TITAN HEAD	1
AMAT	0020-78593	MOUNT BLOCK VAC SENSOR	3
AMAT	0020-78593	MOUNT BLOCK VAC SENSOR	2
AMAT	0020-78648	RING	1
AMAT	0020-78658	ARM	1
AMAT	0020-78667	PULLEY	6
AMAT	0020-78697	WAFER RING 8” TUNGSTEN	8
AMAT	0020-78711	CLAMP, MEMBRANE	1
AMAT	0020-78712	SEAL, UPPER (PACK OF 5)	24
AMAT	0020-78783	BLADDER, DECHUCK	2
AMAT	0020-78832	DETENT	2
AMAT	0020-78849	HOLDER	3
AMAT	0020-78850	ROD, GIMBAL	9
AMAT	0020-78879	BRACKET, TRACK BEARING	1
AMAT	0020-78885	CLAMP, LOWER TITAN 6″	2
AMAT	0020-78965	GEAR, KEYED WRIST ROBOT	5
AMAT	0020-78967	SLEEVE,WRIST,DRIVE,SHAFT	1
AMAT	0020-78972	WRIST,DRIVE,SHAFT,SPACER	2
AMAT	0020-79071	LWR MTG PLT LEFT PANEL	1
AMAT	0020-79072	FLANGE	2
AMAT	0020-79091	RING,RETAINING,STANDARD	22
AMAT	0020-79151	HOOK, SLURRY	1
AMAT	0020-79162	SEAL CLAMP (PACK OF 10)	4
AMAT	0020-79173	BEARING HOUSING	1
AMAT	0020-79190	FRAME,HARMONIC,DRIVE	1
AMAT	0020-79229	MOTOR BRACKET	3
AMAT	0020-79230	MOTOR BRACKET	5
AMAT	0020-79230	MOTOR BRACKET	1
AMAT	0020-79293	CENTURA PLATE	1
AMAT	0020-79354	BULKHEAD, LEFT PANEL	20
AMAT	0020-79475	WAFER ARM	2
AMAT	0020-79550	PLATE, ACCESS ENCLOSURE	5
AMAT	0020-79567	LATCH KEEPER	4
AMAT	0020-79621	ANGLE, FINGER MT	1
AMAT	0020-79630	WASHER, SPECIAL	4
AMAT	0020-79877	PIN, SENSOR ANCHOR	3
AMAT	0020-79901	DDF3,TBG,MNFLD	10
AMAT	0020-79974	NOZZLE	1
AMAT	0020-79986	MEMBRANE, 300MM, TITAN	9
AMAT	0020-80051	PIN, LOCATION	1
AMAT	0020-80070	ANTI-CATHODE SUPPORT BAR	3
AMAT	0020-80452	LINER BEAMSTOP	3
AMAT	0020-80627	ARC CHAMBER, PLASMA GUN	1
AMAT	0020-80662	MOUNTING PLATE	1
AMAT	0020-80961	FLAG, SENSOR 200MM (FWI)	14
AMAT	0020-81067	RETAINING BRACKET FLOW SWITCH	1
AMAT	0020-81226	SLEEVE, OVEN NOZZLE	9
AMAT	0020-81377	BLADE, 200MM	1
AMAT	0020-81538	CHAMBER, ARC, FILAMENT, 2.2 PURE (PACK OF 10)	5
AMAT	0020-81756	GASKET – NOZZLE	1
AMAT	0020-81784	NOZZLE, RETAINING	11
AMAT	0020-81791	SENSOR COMB 200MM	2
AMAT	0020-81878	CLIP, FIXED LOCATING 200-ODEG	2
AMAT	0020-82191	PARTICAL SHIELD 200MM (R.I.G.	1
AMAT	0020-82379	GRAPHITE BLOCK, L.C.BEAMSTOP	1
AMAT	0020-82675	APERTURE EH0 PYRO COAT-ED	1
AMAT	0020-82741	STRAP ION SOURCE	20
AMAT	0020-82747	RING, DRIVE	3
AMAT	0020-82780	PIN GUIDE	2
AMAT	0020-82833	SHIELD	5
AMAT	0020-83142	SPRING, DRIVE (150)	5
AMAT	0020-83227	GRAPHITE SPACER	25
AMAT	0020-83283	SCREW, WHEEL, RETAINING	7
AMAT	0020-83404	HOUSING, ROLLER 150	1
AMAT	0020-83521	ARC CHAMBER, REMO, INS, PFS. CARBOGRAF 500	3
AMAT	0020-83795	LONG FINGER	1
AMAT	0020-83799	BLANKING PLATE TOP BOX S.PIP	3
AMAT	0020-83928	ELECTRODE, EH3	5
AMAT	0020-83928	ELECTRODE, EH3	1
AMAT	0020-83984	SPACER, BELLOWS, GROUND	1
AMAT	0020-84036	LOWER CROSS MEMBER	1
AMAT	0020-84129	PILLAR, SUPPORT	1
AMAT	0020-84148	ARM, CONTACT	1
AMAT	0020-84219	FRONT PLATE HALF	2
AMAT	0020-84329	INSULATOR, HV, BELLOWS	5
AMAT	0020-84364	BRACKET, GRD, ELECT	4
AMAT	0020-84365	BRACKET, SUPPRESSION ELECTRODE	2
AMAT	0020-84377	CLAMP,PLATE	2
AMAT	0020-84522	MOUNTING, GROUND ELECTRODE	1
AMAT	0020-84590	SHIELD, INSULATOR	1
AMAT	0020-84757	TUBE,SHIELD,COOLED	1
AMAT	0020-84819	PRE-FOCUS APERTURE 2	1
AMAT	0020-84820	PRE-FOCUS APERTURE 1	1
AMAT	0020-84856	PILLAR,MOUNTING	1
AMAT	0020-84863	COVER EARTHING	1
AMAT	0020-84895	SUPPORT, ARC CHAMBER, LOWER	1
AMAT	0020-84897	FILAMENT	11
AMAT	0020-84898	STRAP,LINK,ANTICATHODE	1
AMAT	0020-84940	CONTACT, SCREW	9
AMAT	0020-84964	APERTURE PLATE	6
AMAT	0020-84966	CLAMP, 2.4 L/H FILAMENT	1
AMAT	0020-85070	POST, RETENTION	3
AMAT	0020-85114	DI WATER CONNECTOR	11
AMAT	0020-85115	FACTORY WATER CONNECTOR	2
AMAT	0020-85230	LINER BASE 6 SLOT SIDE-VENT	1
AMAT	0020-85413	GUIDE PLATE, LEFT	6
AMAT	0020-85414	GUIDE PLATE, RIGHT	5
AMAT	0020-85415	TOP GUIDE PLATE	8
AMAT	0020-85419	ELECTRODE, FOCUS	6
AMAT	0020-85420	PRE-FOCUS APERTURE,2	17
AMAT	0020-85539	SHIELD, INSULATOR, LONG	1
AMAT	0020-85607	ARC CHAMBER, FRONT FILAMENT	3
AMAT	0020-86366	RETAINER,MAGNETS	2
AMAT	0020-86613	AIR FLOW RESTRICTER	5
AMAT	0020-86640	E_BRACKET, GROUND ELECTRODE	1
AMAT	0020-86740	LINER, END, ANTICATHODE	7
AMAT	0020-86740	LINER, END, ANTICATHODE	1
AMAT	0020-86835	SPACER, UPPER	5
AMAT	0020-87018	FILAMENT	45
AMAT	0020-87359	FLAG, SENSOR (CASSETTE RETURN)	1
AMAT	0020-87385	BRACKET LIFT	1
AMAT	0020-87415	BRACKET MOUNTING	1
AMAT	0020-87472	HOLLOW GRIPPER EXTENDED FINGER	1
AMAT	0020-88305-A	HOLDER, GRAPHITE PLATE	2
AMAT	0020-88732-A	SHEILD, GUIDE TUBE ASSY	1
AMAT	0020-89024	REFLECTOR, SPILT LEFT, LAMP SLED ASSY	3
AMAT	0020-89025	REFLECTOR SPILT LEFT, RIGHT SLED ASSY.	1
AMAT	0020-89144	BKT, M/SW. MTG	3
AMAT	0020-89179	FEED ROD	1
AMAT	0020-89248	FLG. PRCS. POSITION DETECT R3.4 STRETCH	2
AMAT	0020-89273	SPRING CLIP,LAMP HEAT SINK	6
AMAT	0020-89334	OPTO FLAG	12
AMAT	0020-89586	LIVER, END, CATHODE	1
AMAT	0020-89644	CONNECTOR DOUBLE	3
AMAT	0020-89894	FLAG, FWI, INCLINED	8
AMAT	0020-90054	REAR COMB	1
AMAT	0020-90203	ORING,CARRIER,BS	1
AMAT	0020-90724	VAPORIZER, SOURCE OLD STYLE SOURCE	1
AMAT	0020-90731	PLATE TOP	10
AMAT	0020-90850	COLLAR, CONNECTING	1
AMAT	0020-90918	SUPPORT, ADJUSTING NUT	1
AMAT	0020-90927	WHEEL INDEX	2
AMAT	0020-90927	WHEEL INDEX	1
AMAT	0020-91063	BRKT.,MTG.LH	1
AMAT	0020-91357	ANCHOR, SPRING	3
AMAT	0020-91811	BRACKET OPTP	6
AMAT	0020-91864	BLOCK MTG FIBRE OPTIC	2
AMAT	0020-92099	RING, RETAINING	2
AMAT	0020-92330	FINGER, GRIPPER 150 EXT 4-FINGER GRIPPER	9
AMAT	0020-92355	SENSOR CONE	2
AMAT	0020-92399	MOUNTING ACTUATOR	1
AMAT	0020-92459	BRACKET 9WAY “D” TYPE	1
AMAT	0020-92510	MANIFOLD SOURCE COOLANT	1
AMAT	0020-92536	MTG BOLT,SOURCE FLANGE	2
AMAT	0020-92536	MTG BOLT,SOURCE FLANGE	2
AMAT	0020-92544	DISC CLAMP	1
AMAT	0020-92579	BLOCK, STOP	1
AMAT	0020-92643	INSERT E10 STANDARD	4
AMAT	0020-92653	LUG, E4-LEFT	1
AMAT	0020-92654	LUG, E4-RIGHT	1
AMAT	0020-92654	LUG, E4-RIGHT	1
AMAT	0020-92656	LUG, E5-BOTTOM	1
AMAT	0020-92776	MOUNTING, MAGNET	2
AMAT	0020-92811	WASHER SPACER	10
AMAT	0020-92902	BEARING,ECCENTRIC	2
AMAT	0020-93002	APERTURE FIXTURE	1
AMAT	0020-93002	APERTURE FIXTURE	6
AMAT	0020-93044	PLATE MICRO SWITCH MOUNTING	1
AMAT	0020-93150	ADAPTOR FEEDTHROUGH	1
AMAT	0020-93508	BLOCK, PLUG	1
AMAT	0020-93577	PLATE, ALIGNMENT	1
AMAT	0020-93668	BLOCK, CONNECTOR	1
AMAT	0020-93833	SHIELD, GRAPHITE	6
AMAT	0020-93901	MEMBRANE, SILICON, 8.00 TITAN HEAD	296
AMAT	0020-94026	CHANNEL STIFFENING	2
AMAT	0020-94035	BRACKET	7
AMAT	0020-94180	KNOB, ADJUSTMENT	1
AMAT	0020-94243	SPRING,RETAINING PINS	1
AMAT	0020-94259	ROD	1
AMAT	0020-94458	SWITCH MODIFICATION FOR INTEL PHX ONL	4
AMAT	0020-94700	PULLEY,POT,DRIVE	1
AMAT	0020-94700	PULLEY,POT,DRIVE	1
AMAT	0020-94805	ADAPTER NUT	2
AMAT	0020-94848	STRIP CONDUCTOR	2
AMAT	0020-94862	PILLAR MOUNTING TYP 1	6
AMAT	0020-94896	RETAINING PLATE	4
AMAT	0020-94928	COLLER SHIM	16
AMAT	0020-94999	SHAFT VANE	4
AMAT	0020-95166	SHIELD,FRONT,BS	4
AMAT	0020-95262	ELECTRODE E10 ALUM (STD) VA	1
AMAT	0020-95294	CLAMP CARTRIDGE WATER	1
AMAT	0020-95369	PILLAR SUPPORT DIFF.PP	2
AMAT	0020-95451	ELECTRODE FOCUS	8
AMAT	0020-95733	RING RETAINING BEAMSTOP	1
AMAT	0020-95749	ENCLOSURE VA 360 MODIFI- CATI	1
AMAT	0020-95978	BLOCK	6
AMAT	0020-96059	GRIPPER FINGER, 150 EXT.	1
AMAT	0020-96117	CRIPPER FINGER	4
AMAT	0020-96262	SHIELD, MTG, PLATE BS	4
AMAT	0020-96302	CUP SEATING RPL 0020-94292	1
AMAT	0020-96608	FRONT PANEL TEMP CONTROL	6
AMAT	0020-96658	GASKET	1
AMAT	0020-96753	GASKET	1
AMAT	0020-96765	PLATE LEG L.H.	3
AMAT	0020-97104	INSERT VAPORIZER	13
AMAT	0020-97105	INSERT GAS LINE	2
AMAT	0020-97240	ANTI BACKLASH GEAR	2
AMAT	0020-97240	ANTI BACKLASH GEAR	1
AMAT	0020-97315	BUSH, RETAINING	1
AMAT	0020-97724	LINER, BEAMSTOP	1
AMAT	0020-98484	INSERT LARGE UPPER EXIT FLIGHT TUBE	1
AMAT	0020-98631	BLOCK, RESTRAINING	8
AMAT	0020-98755	ARC MODULE EXT RANGE	1
AMAT	0020-98904	SHIELD, INSULATOR	1
AMAT	0020-98911	THUMBSCREW, CAPTIVE, M4	6
AMAT	0020-98911	THUMBSCREW, CAPTIVE, M4	2
AMAT	0020-98941	SHIELD MAGNET	1
AMAT	0020-98949	GRAPHITE PLATE	3
AMAT	0020-98951	APERATURE, EH5	3
AMAT	0020-98952	APERATURE, EH6	3
AMAT	0020-98955	SUPPORT PILLAR	1
AMAT	0020-98956	SUPPORT PILLAR, STD>SIGMA CONV.	6
AMAT	0020-98981	GRIPPER FINGER, CONDUCTIVE	1
AMAT	0020-98981	GRIPPER FINGER, CONDUCTIVE	2
AMAT	0020-98988	ADJUSTING SCREW	1
AMAT	0020-99046	ELECTRODE E14 UNIVERSAL	1
AMAT	0020-99047	ELECTRODE E5 UNIVERSAL	2
AMAT	0020-99064	ELECTRODE E9 STANDARD DP BOX	2
AMAT	0020-99214	APERTURE FIXED	2
AMAT	0020-99231	ELECTRODE ES GRAPH. BF	2
AMAT	0020-99233	APERTURE PRE-DEFINING BF	1
AMAT	0020-99235	LINER,MRS,PLATE	4
AMAT	0020-99239	INSULATOR, EF	6
AMAT	0020-99470	INSERT INNER MULTI-CHARGED TUBE	12
AMAT	0020-99481	SHIELD,SPUTTER,STANDOFF	8
AMAT	0020-99481	SHIELD,SPUTTER,STANDOFF	2
AMAT	0020-99502	BRACKET LIGHT CURTAIN	3
AMAT	0020-99515	PLENUM, CHAMBER SHIELD, TURBO	1
AMAT	0020-99516	PLANUM, CHAMBER SHIELD, PA PORT	5
AMAT	0020-99536	STUD, BACK MRS SHIELD MTG	4
AMAT	0020-99590	BRACKET,LED PANEL	2
AMAT	0020-99590	BRACKET,LED PANEL	1
AMAT	0020-99640	MIDDLE LINER, LEAP II BEAMSTOP	1
AMAT	0020-CR9	8 ALUMINUM CLAMP RING	2
AMAT	0020-JC022-A	SHIELD, LOWER	2
AMAT	0020-JT253-2	COLLAR	1
AMAT	0020-RW049E	GASKET	1
AMAT	0020-RW049E-1	RING	1
AMAT	0020-SK006	(ESC) PEDESTAL, 195MM	1
AMAT	0020-TE711-1	COVER RING	1
AMAT	0020-WM020-E1	SHIELD, LOWER	3
AMAT	0020-WM021	COLLIMATOR SUPPORT	7
AMAT	0021-00045	FLAG, PIN LIFT WXZ 300MM	3
AMAT	0021-00047	BRCKT SENSOR PIN LIFT WXZ 300	1
AMAT	0021-00119	FLAG OPTO	10
AMAT	0021-00127	COVER, REAR, AC CHANNEL EMXP+	3
AMAT	0021-00152	BRACE, SIMPLE CATHODE	1
AMAT	0021-00152	BRACE, SIMPLE CATHODE	14
AMAT	0021-00207	Plunger ,RP Adaptor Interlock	6
AMAT	0021-00281	INSERT, TOP, BLANK, FILLER HOUSING	1
AMAT	0021-00396	BRACKET, HANDLE GAS BOX, TI-XZ	3
AMAT	0021-00471	PREVENTATIVE WASHER, STACKING RACK	2
AMAT	0021-00503	COVER	1
AMAT	0021-00506	COVER	1
AMAT	0021-00508	COVER	1
AMAT	0021-00697	BRACKET REGULATOR O2 ANALYZER, RTP	4
AMAT	0021-00726	BLOCK	2
AMAT	0021-00793	INSULATOR, CONN OUTPUT, R0+ DPS FILTER B	1
AMAT	0021-01013	STST MACHINE BLOCK	2
AMAT	0021-01039	HINGE, BODY, RT, 300MM PRODUC	1
AMAT	0021-01040	HINGE, BODY, LEFT, 300MM PROD	4
AMAT	0021-01105	VIEWPORT, COVER LID	2
AMAT	0021-01107	MIRROR, PRODUCER	274
AMAT	0021-01176	BRK, CATHODE MAINT	1
AMAT	0021-01255	LID ALIGNMENT PIN TXZ 200MM	22
AMAT	0021-01309	PLUG. PLENUM	1
AMAT	0021-01358	PIN ADAPTER LOCATOR	4
AMAT	0021-01385	COVER, SHIELD, HEATED GL	1
AMAT	0021-01401	COLLAR, 200MM CERAMIC ESC TC RPS	1
AMAT	0021-01482	PUSH BUTTON	6
AMAT	0021-01495	CLAMP,HGL, MIDSPAN, TOP,1.25DIA	1
AMAT	0021-01496	CLAMP,HGL, MIDSPAN, BASE,1.25DIA	1
AMAT	0021-01562	INSULATOR, DC FEEDTHROUGH, CE	1
AMAT	0021-01564	SEAL	2
AMAT	0021-01614	CLAMP RING, CERAMIC HEATER 200MM TI/HT	1
AMAT	0021-01614	CLAMP RING, CERAMIC HEATER 200MM TI/HT	2
AMAT	0021-01730	COVER, TOP, MULTI-SLOT COOLDOWN	1
AMAT	0021-01862	FACEPLATE SIDE FEED G/P RTP	2
AMAT	0021-01934	PLATE	1
AMAT	0021-01963	COVER,TXZ DRIVER BELT HEATER LIFT	1
AMAT	0021-02092	PIN,PEDESTAL ALIGNMENT	3
AMAT	0021-02109	BRACKET, HGL, MIDSPAN, CH A, B, D,MCVD	1
AMAT	0021-02112	BRACKET, OR GATE, HT CVD TIN	1
AMAT	0021-02176	BRACKET,INTLK CABLE EXTENSION MTG	6
AMAT	0021-02186	BRACKET	2
AMAT	0021-02302	PANEL, RIGHT REAR C X 2	1
AMAT	0021-02319	BRACKET RP VAC LINE FAC SIDE PLATE	6
AMAT	0021-02365	C-CLAMP, SACVD	1
AMAT	0021-02365	C-CLAMP, SACVD	4
AMAT	0021-02423	STOPPER LEFT LL HI ALT	1
AMAT	0021-02496	INSERT JIT RETAINING	1
AMAT	0021-02609	FAN	1
AMAT	0021-02705	BRCKT / BLOCK	10
AMAT	0021-02748	BRACKET SWITCH	2
AMAT	0021-02983	SHIELD,INNER,TXZ	7
AMAT	0021-03065	LINER, LOWER THROTTLE VALVE	3
AMAT	0021-03066	LINER, MIDDLE THROTTLE VALVE	1
AMAT	0021-03102	PLATE LEVELING, HEATER TI-XZ/HT TIN	1
AMAT	0021-03104	PIN HEATER TX7	2
AMAT	0021-03232	INSULATOR RF PIN CONNECTOR BULLHEAD	4
AMAT	0021-03271	CAP BEARING WRIST,200/300 MM PRODUCER RO	1
AMAT	0021-03273	HARD STOP LEASSCREW LL 300MM PRODUCER	1
AMAT	0021-03451	WASHER, VALVE .875-1.00	3
AMAT	0021-03469	CONDUCTOR RF MALE DPS	3
AMAT	0021-03527	PLATE BOTTOM BPSG REFLECTOR 200MM	2
AMAT	0021-03528	BRACKET, BLOCKING CAP	5
AMAT	0021-03561	ADAPTER SHROUD COVER LATCH POINT OF USE	12
AMAT	0021-03562	ADAPTOR SHROUD COVER STRIKER REACTOR	8
AMAT	0021-03568	FACEPLATE, SACVD PRODUCER 200MM	1
AMAT	0021-03579	TEMP. PANEL	1
AMAT	0021-03631	PRODUCER SHOWERHEAD	2
AMAT	0021-03647	SCR 4-40-X .50LG, BLOCKER 200MM SACVD	10
AMAT	0021-03690	SHEILD MAGNETIC HR DTCU DPS CHAMBER	1
AMAT	0021-03692	RING INNER 200MM FLAT 1.5MM	1
AMAT	0021-03697	SCR CAP 4-40 UNC INSERT VALVE	16
AMAT	0021-03724	CENTER FIND FLANGE,COOLDOWN,DPS 200MM	13
AMAT	0021-03805	BRACKET,LOCKOUT AND NUPRO,TICL MCVD	3
AMAT	0021-03833	RF ROD, SIMPLE CATHODE, 125MM	3
AMAT	0021-03881	BRACKET	1
AMAT	0021-03927	CLAMP,VESPEL OX/MLR/NIT-200MM (5003963)	26
AMAT	0021-03987	BRACKET	1
AMAT	0021-04137	FLANGE APPLICATOIN RTP	10
AMAT	0021-04249	INNER CUP COIL SUPPORT ELECTRA, COPPER	3
AMAT	0021-04252	OUTER CUP COIL SUPPORT ELECTRA	145
AMAT	0021-04252	OUTER CUP COIL SUPPORT ELECTRA	6
AMAT	0021-04253	FEEDTHRU COIL SUPPORT	3
AMAT	0021-04253	FEEDTHRU COIL SUPPORT	3
AMAT	0021-04276	COVER LAMP SIDE WB CH LTESC WITH LAMP	2
AMAT	0021-04299	COVER MIXING INSERT LID PRODU	7
AMAT	0021-04313	FLAP, TOP, MAIN, THROTTLE VALVE	1
AMAT	0021-04338	PIN, SOURCE ALIGNMENT VECTRA	2
AMAT	0021-04498	INDEXER HOUSING, RIGHT, ENP	2
AMAT	0021-04540	PLATE	3
AMAT	0021-04629	BRACKET, HTR RETRACT 2 INTLK SW, WXZ	4
AMAT	0021-04630	SHIELD, HTR RETRACT 2 INTLK SW, WXZ	2
AMAT	0021-04635	SW BRACKET, HALOGEN LAMP LTESC	8
AMAT	0021-04660	COVER BELLOWS A/B LIFT D.C	15
AMAT	0021-04666	DUAL ZONE HEATER CLAMP RING	2
AMAT	0021-04679	PLATE, LOCK, HEATER LIFTER	2
AMAT	0021-04680	PIVOT BLOCK, BALL END, LEVELING STUD	1
AMAT	0021-04681	STRIKE, LATCH, DOME, DPS	40
AMAT	0021-04736	BREAK, ARM, ECP	1
AMAT	0021-04741	BLOCK, HARDSTOP, LOWER, ECP	1
AMAT	0021-04741	BLOCK, HARDSTOP, LOWER, ECP	6
AMAT	0021-04744	HARDSTOP, PIVOT, ECP	2
AMAT	0021-04744	HARDSTOP, PIVOT, ECP	4
AMAT	0021-04745	SHAFT, PIVOT 2-PIECE, ARM, ECP	2
AMAT	0021-04745	SHAFT, PIVOT 2-PIECE, ARM, ECP	1
AMAT	0021-04747	HARDSTOP BLOCK	1
AMAT	0021-04748	CLAMP, PIVOT HARDSTOP	2
AMAT	0021-04753	SHAFT, DOUBLE CLEVIS, ARM, ECP	4
AMAT	0021-04754	HARDSTOP PIVOT	1
AMAT	0021-04755	CAP, SHAFT HOUSING, ECP	8
AMAT	0021-04756	CLAMP, BOLT PLATE, DUAL CELL,	20
AMAT	0021-04871	BLANK, CHAMBER LEAK U WAVE WXZ	1
AMAT	0021-04915	BAR RF CONNECTOR	1
AMAT	0021-04916	BAR LEFT, RF CONNECTOR	1
AMAT	0021-04919	CU,CUP,OUTER,FEEDTHROUGH,O/U	3
AMAT	0021-04919	CU,CUP,OUTER,FEEDTHROUGH,O/U	4
AMAT	0021-04932	CAP, NOZZLE, BOWL ASSY, 200MM SRD, ECP	4
AMAT	0021-04935	HOLDER, WAFER SENSOR, 200MM SRD, ECP	4
AMAT	0021-04936	NOZZLE, STRAIGHT BOWL ASSY, 200MM SRD, E	5
AMAT	0021-06038	LAMPS/HEATER OUTPUT	1
AMAT	0021-06073	BRACKET	2
AMAT	0021-06096	BRACKET, N2 PURGE, GAS LINE, PRODUCER	1
AMAT	0021-06097	CLAMP RING, 8, SEMI NOTCH, 4 ALIGNMENT	1
AMAT	0021-06108	CUP INNER COIL SUPPERT KNURLED VECTRA-IM	16
AMAT	0021-06134	POST, HOLLOW ENCAP FLOW AROUND CU ANODE	7
AMAT	0021-06148	CLAMP RING, 8″” SEMI NOTCH, 4 ALIGNMENT	30
AMAT	0021-06166	END CAP,3X3,FRAME, LID HOIST 250, ENDU	1
AMAT	0021-06214	VIEWPORT INDEPENDENT	1
AMAT	0021-06215	COVER, 125MM ESC	1
AMAT	0021-06235	WINDOW, BREAKER, AC ENCLOSURE	10
AMAT	0021-06235	WINDOW, BREAKER, AC ENCLOSURE	6
AMAT	0021-06269	METAL BAR 1/2 X 3/8 X 4 1/2 L	1
AMAT	0021-06283	SENSOR FLAG	1
AMAT	0021-06285	COVER MIXING INSERT LID 200MM PRODUCER	9
AMAT	0021-06285	COVER MIXING INSERT LID 200MM PRODUCER	16
AMAT	0021-06336-P1	PLATE	1
AMAT	0021-06375	COVER, HINGE SINERGY CHAMBER	1
AMAT	0021-06410	FLANGE, T/C, NOSE LINER	5
AMAT	0021-06411	HANDLE, NOSE LINER, SHORT, BST-CVD	8
AMAT	0021-06436	TRIM STRIP, LONG SEAL 200MM SWLL DOOR	1
AMAT	0021-06457	INSERT, MIXING BLOCK, LID PRODUCER 200MM	7
AMAT	0021-06457	INSERT, MIXING BLOCK, LID PRODUCER 200MM	8
AMAT	0021-06523	INSULATOR, CERAMIC HEATER, 200MM PRODUCE	1
AMAT	0021-06566	CAP, MAG-ICP SUPPORT BAR END	1
AMAT	0021-06582	STOP, HARD, LIFT, ROT HEAD-EC	10
AMAT	0021-06645	COVER, WIC/WOB BRACKET, CENTURA	2
AMAT	0021-06666	BRACKET MT CERAMIC H TR WXZ	13
AMAT	0021-06667	BRACKET, MOUNT, CERAMIC	3
AMAT	0021-06709	HOLDER, IEP, FIBER OPTIC/DTCU, 300MM DPS	1
AMAT	0021-06720	TRIGGER INTERLOCKL-CONNECTOR RI DTC	1
AMAT	0021-06720	TRIGGER INTERLOCKL-CONNECTOR RI DTC	1
AMAT	0021-06734	PROCESS KIT PART	4
AMAT	0021-06762	INSULATOR, RF MATCH POWER STR	1
AMAT	0021-06827	BRACKET, OUTER, HOSE MOUNT, SMIF	21
AMAT	0021-06849	PULLEY COVER, LID HOIST 250, ENDURA E	3
AMAT	0021-06921	HUB, LID HOIST 250 ENDURA E	14
AMAT	0021-06923	CLAMP, BASE, FLEX GASLINE DZ IHC	72
AMAT	0021-06923	CLAMP, BASE, FLEX GASLINE DZ IHC	20
AMAT	0021-06924	CLAMP FLEX GASLINE DZ IHC	17
AMAT	0021-06924	CLAMP FLEX GASLINE DZ IHC	22
AMAT	0021-06953	CLAMP, MOTOR	1
AMAT	0021-06958	CLAMP, MOTOR	1
AMAT	0021-06970	CLAMP, DRAIN TANK, IECP	2
AMAT	0021-06970	CLAMP, DRAIN TANK, IECP	4
AMAT	0021-07076	BUTTON, SPRING PLUNGER, EP WINDOW	3
AMAT	0021-07077	CLAMP, QUICK RELEASE, EP WINDOW	1
AMAT	0021-07128	CLAMP TUVE SUPPORT OTB FCW CENTURA	1
AMAT	0021-07146	SHOE/ALIGN FIX, UNIV.CASSETTE	1
AMAT	0021-07148	BRACKET, UNCLAMP SENSOR 300MM	3
AMAT	0021-07167	PLATE, ORIFICE SEL OXIDE	1
AMAT	0021-07230	SHUTTER DISK, 8″” SNNF CLAMPED ELECTRA	35
AMAT	0021-07310	PANEL, BRACKET	2
AMAT	0021-07406	SHIELD,LOWER,300MM,B101SHORT,PVD	1
AMAT	0021-07501	BASE KF 25 DIFFUSER	5
AMAT	0021-07529	HINGE, BODY, LEFT, 300MM PRODUCER	1
AMAT	0021-07531	CU,SHIELD,LOWER,LTBESC,SIP	13
AMAT	0021-07563	SPACER, IEP, 2.75 WINDOW, .18THK, DPS CH	1
AMAT	0021-07647	BEARING,SUPPORT ALIGNER/PASSTHRU CASS. 3	1
AMAT	0021-07660	BLOCK VEE F/1 INTERFACE	12
AMAT	0021-07661	BLOCK	2
AMAT	0021-07686	HIGNE, LIFT PIN 200MM	2
AMAT	0021-07686	HIGNE, LIFT PIN 200MM	4
AMAT	0021-07719	PLATE	1
AMAT	0021-07735	CLAMP, WITH SHAFT GIMBAL, EBR	62
AMAT	0021-07735	CLAMP, WITH SHAFT GIMBAL, EBR	2
AMAT	0021-07744	NUT, RF FEEDTHRU, REV 5.0, VECTRA IMP 30	1
AMAT	0021-07793	MTG BRKT, MLDS POWER SUPPLY	2
AMAT	0021-07874	FLAG, HOME FLAG, DISPENSE ARM	1
AMAT	0021-07955	PLATE, BOTTOM LP-1.2, MAGNET	2
AMAT	0021-07984	SHIELD,OUTER	1
AMAT	0021-07986	SETTING PLATE	1
AMAT	0021-08052	BRACKET	2
AMAT	0021-08113	VDPLATE, COVER, ADAPTOR SIP-CU	9
AMAT	0021-08113	VDPLATE, COVER, ADAPTOR SIP-CU	4
AMAT	0021-08162	HITCH, SCREW	1
AMAT	0021-08277	INSULATOR, LIFT PINS, CESC	12
AMAT	0021-08290	BAR SIDE PALLET MTG SPCR GAS PNL PROD S	2
AMAT	0021-08315	SHIELD,UPPER	6
AMAT	0021-08327	RING CLAMP, SHIELD, PRECLEAN 300MM	21
AMAT	0021-08327	RING CLAMP, SHIELD, PRECLEAN 300MM	5
AMAT	0021-08404	BRACKET UNCLAMP SENSOR FLAG ENDURA	1
AMAT	0021-08438	CONNECTOR,L-SHAPE	2
AMAT	0021-08505	MOUNT 300MM PWR.	1
AMAT	0021-08505	MOUNT 300MM PWR.	1
AMAT	0021-08523	CONN HTR WXZ 300MM	1
AMAT	0021-08539	BRACKET, CLAM #2, HEATER HUB, GAS MODULE	4
AMAT	0021-08574	HINGE BASE TAN OX	3
AMAT	0021-08586	ADAPTER, GLENAIR BULKHEAD 1/2 – 3/4	1
AMAT	0021-08588	SHAFT MIDDLE DISPENSE ARM EBR1.5, ECP	1
AMAT	0021-08588	SHAFT MIDDLE DISPENSE ARM EBR1.5, ECP	9
AMAT	0021-08650	JAMNUT, PYROMETER, 300MM RADI	15
AMAT	0021-08699	BRACKET, DISPENSE ARM MOTOR, EBR 1.5, EC	1
AMAT	0021-08717	PLATE, STEP ADAPTER, UWAVE WXZ	1
AMAT	0021-08717	PLATE, STEP ADAPTER, UWAVE WXZ	1
AMAT	0021-08753	BRACKET	1
AMAT	0021-08863	SPIDER LEGS, WEDGE POST, ELECTRA ECP	1
AMAT	0021-09002	PLATE DISTRIBUTION, HALETH	15
AMAT	0021-09002	PLATE DISTRIBUTION, HALETH	1
AMAT	0021-09004	COVER	3
AMAT	0021-09008	COVER, UNI-LID, DSGD, MXP	1
AMAT	0021-09016	LID,QUARTZ,TRAN,KIT0270-09283	11
AMAT	0021-09016	LID,QUARTZ,TRAN,KIT0270-09283	2
AMAT	0021-09069	SLEEVE MOUNTING SCREW	28
AMAT	0021-09069	SLEEVE MOUNTING SCREW	9
AMAT	0021-09074	CLAMP, ACME LEADSCREW, EXZ	3
AMAT	0021-09098	RING, SEPARATION, MXP+	50
AMAT	0021-09101	MOUNT BRKT. BACK PRESSURE REGULATOR	1
AMAT	0021-09104	LINER,CATHODE,KIT	7
AMAT	0021-09109	BEAMUNTAPPED	2
AMAT	0021-09152	PEDESTAL, 200MM, SHOWER DBL NOTCH, BIPOLAR	4
AMAT	0021-09156	RING CLAMPING CLEAR	1
AMAT	0021-09160	COVER, GAS, CLEAR LID	1
AMAT	0021-09428	COVER,VIEW WINDOW,SOLID ALUMN	2
AMAT	0021-09429	FILTER,UV,SOLID ALUMINUM	2
AMAT	0021-09444	PLATE INSULATOR	1
AMAT	0021-09510	BLOCK, COOLING, DTCU, DPC	1
AMAT	0021-09522	BLOCK,MOUNT,CAPS,DTCU,DPS	1
AMAT	0021-09544	COVER	1
AMAT	0021-09545	COVER,ENCLOSURE,CATHODE VPP,DPS	1
AMAT	0021-09587	COVER, CHANNEL	2
AMAT	0021-09708	INSULATOR, GDP, NG-1 HOLE	46
AMAT	0021-09708	INSULATOR, GDP, NG-1 HOLE	1
AMAT	0021-09716	ROD,EXTENSION,HEATER,DXZ	1
AMAT	0021-09718	LINER, SLIT VALVE	9
AMAT	0021-09744	GEAR DRIVEN FIXED LOWER ROTATION 5000 M	3
AMAT	0021-09751	COMPOSITE SPACER, 6 SEMI, ES	1
AMAT	0021-09751	COMPOSITE SPACER, 6 SEMI, ES	1
AMAT	0021-09755	SPACER,COMPOSITE,ESC. 8IN	1
AMAT	0021-09756	VESPEL RING	24
AMAT	0021-09759	FACEPLATE, DXZ	10
AMAT	0021-09759	FACEPLATE, DXZ	7
AMAT	0021-09771	VESPEL SCREW	12
AMAT	0021-09771	VESPEL SCREW	5
AMAT	0021-09791	SCREW,ALIGNMENT,SIMP	3
AMAT	0021-09822	INSULATOR, HANDLE, LID, TRENCH-NARROW GA	2
AMAT	0021-09827	CAPOFF, LARGE OPEN LID, RPS	1
AMAT	0021-09835	CHAMBER-LINER	12
AMAT	0021-09868	LINER THICK R2 CHAMBER RPS	1
AMAT	0021-09872	BRACKET	1
AMAT	0021-09873	GUIDE, SCREW, PLENUM, RPS	2
AMAT	0021-09873	GUIDE, SCREW, PLENUM, RPS	4
AMAT	0021-09874	PLENUM, CATHODE LINER, RPS	1
AMAT	0021-09875	COLLAR RING, SHOWERHEAD 200MM	4
AMAT	0021-09918	BOX,RF PEAK DETECTOR, SIMPLE CATHODE	1
AMAT	0021-09984	SUPPORT	2
AMAT	0021-09984	SUPPORT	1
AMAT	0021-09985	BRACKET	1
AMAT	0021-09986	BRACKET	2
AMAT	0021-09986	BRACKET	2
AMAT	0021-09987	PLATE	2
AMAT	0021-09988	COVER	2
AMAT	0021-09988	COVER	4
AMAT	0021-09989	PEDESTAL, 200M, NOTCH(1T), BARRIER, HE ORINGS, S20	1
AMAT	0021-10063	SENSOR MTG. WPS/CHAMBER LF MC-ROBOT P500	13
AMAT	0021-10086	PLATE CORD STRAIN RELIEF POWER SUPPLY	1
AMAT	0021-10090	SPACER	14
AMAT	0021-10136	GAS TRENCH COVER RING	33
AMAT	0021-10233	CHAMBER, LINER FOR SUPER E	8
AMAT	0021-10287	BRACKET, LOWER, SWING ARM SUPPO	1
AMAT	0021-10345	CATHODE, SUPPORT CAN MXP, POLY	2
AMAT	0021-10429	MANIFOLD, LOWER,DPA-SHRINK	4
AMAT	0021-10495	PLATE, GAS DISTRIBUTION, 43-H	25
AMAT	0021-10539	BLOCK, TAPERED RETAINER,1/4″”LINER POLY	1
AMAT	0021-10543	SPRING, ANTI BACKLASH	1
AMAT	0021-10550	SHIELD	2
AMAT	0021-10642	FEEDTHRU, HELIUM, HOUSING	7
AMAT	0021-10668	PLATE, UD GIGA-FILL	18
AMAT	0021-10673	CLAMP RING	8
AMAT	0021-10693	INSERT,SLIT VALVE	8
AMAT	0021-10693	INSERT,SLIT VALVE	13
AMAT	0021-10694	LINER, PUMP THROAT	2
AMAT	0021-10699	LINER, PUMP PORT	1
AMAT	0021-10732	PAD, VESPEL MAGNET RING	8
AMAT	0021-10773	GROUND STRAP, CHILLER PLATE	1
AMAT	0021-10885	SCREW	34
AMAT	0021-10900	COVER VESPEL (PACK OF 10)	21
AMAT	0021-10901	CLAMP RING, VESPEL	23
AMAT	0021-10913	GUIDE, LIFT PIN, ESC, IPS	1
AMAT	0021-10918	SUPPORT, LIFT PIN GUIDE, ESC	1
AMAT	0021-10954	PLATE, INTERLOCK	1
AMAT	0021-10959	ADAPTOR APPLICATION RPS BOTTOM MOUNT .	1
AMAT	0021-11025	BRACKET, PLATE, CRYO WATER LINER	1
AMAT	0021-11038	BRACKET	1
AMAT	0021-11075	PEDESTAL ZDP TI FLOATING	1
AMAT	0021-11075	PEDESTAL ZDP TI FLOATING	12
AMAT	0021-11083	Plate, Blank Off, A101, Water Box	2
AMAT	0021-11083	Plate, Blank Off, A101, Water Box	1
AMAT	0021-11110	RING,ASSY,EDGE,TXZ,300MM	5
AMAT	0021-11119	SHIELD,BOTTOM	1
AMAT	0021-11129	FITTING BLOCK	1
AMAT	0021-11147	OBS, CLAMP, LID COOLING	1
AMAT	0021-11181	BLOCK, MOUNT	10
AMAT	0021-11224	WAFER SENSOR PLUNGER FOR TUNGSTEN HEAD	36
AMAT	0021-11338	SCREW, CAPTIVE #6-32, VESPEL	15
AMAT	0021-11474	COVER, ACCESS, HEAD SPIN MOTOR, ECP	1
AMAT	0021-11506	BRACKET	1
AMAT	0021-11552	BRACKET, SUPPORT, VME PS BATTERY PACK	8
AMAT	0021-11755	INSERT, PEEK PAD, BUFFER CASSETTE	8
AMAT	0021-11817	COPPER BRKTS	8
AMAT	0021-11826	CAP PIN GAS 300MM SL	1
AMAT	0021-11839	MOUNTING PLATE, 30MM MOBILE WORKSTATION	20
AMAT	0021-11839	MOUNTING PLATE, 30MM MOBILE WORKSTATION	21
AMAT	0021-11900	BRKT, MOTOR DRIVER LIFT	3
AMAT	0021-11901	POST, SRD SPIDER, WEDGE POST, ECP SF3	4
AMAT	0021-11946	BRACKET, MOUNTING, SWITCH-2, HVM 300MM	11
AMAT	0021-11952	SMALL MACHINED BLOCK APPROX LINX 1-1/2 IN X3/4IN T	1
AMAT	0021-12050	POST FRONT	5
AMAT	0021-12053	INSULATOR TOP AMPOL	9
AMAT	0021-12129	BLOCK, NYLON	2
AMAT	0021-12201	PIN,LIFT,HEATER,SST,300MM,TXZ	1
AMAT	0021-12201	PIN,LIFT,HEATER,SST,300MM,TXZ	3
AMAT	0021-12262	PLATE, SPACER	2
AMAT	0021-12283	COVER,SAFETY,TERMINAL BLOCK MARATHON 210	6
AMAT	0021-12355	STOP HTR LIFT 300MM CWXZ	1
AMAT	0021-12566	PLATE	1
AMAT	0021-12582	CU, RING, COVER, TI, SIP TA, REV2	40
AMAT	0021-12640	BALL STUD GAS SPRING SOURCE LIFT, 300MM	12
AMAT	0021-12640	BALL STUD GAS SPRING SOURCE LIFT, 300MM	13
AMAT	0021-12670	BRACKET	27
AMAT	0021-12716	PULLEY HUB	1
AMAT	0021-12729	KEY, SHAFT, PULLEY, LID HOIST, 300MM END	4
AMAT	0021-12730	PIN, SHAFT PULLEY, LID HOIST, 300MM ENDU	1
AMAT	0021-12731	SPACER, PULLEY, LID HOIST, 300MM ENDURA	1
AMAT	0021-12743	CLAMP TOP, EXHAUST TOP, 300TORR WXZ 200M	12
AMAT	0021-12747	BRACKET,CH SPRT,FRONT,RIGHT, 300MM EMAX	1
AMAT	0021-12792	STAND OFF 750W HEAD	1
AMAT	0021-12851	CLAMP DOME DPS 300MM	4
AMAT	0021-12858	PIN, GUIDE, GAS PANEL 300MM	2
AMAT	0021-12878	ROBOT TRANSFER BLADE K100S,300MM	1
AMAT	0021-12948	BOLT LATCH	2
AMAT	0021-12971	COVER LEAD SCREW B101	3
AMAT	0021-13119	SUPPORT LEFT ENP	11
AMAT	0021-13119	SUPPORT LEFT ENP	15
AMAT	0021-13198	DIN RAIL SMOKE	1
AMAT	0021-13257	BAR,RIGHT,RF,CONNECTOR	14
AMAT	0021-13258	BAR,LEFT,RF,CONNECTOR	14
AMAT	0021-13280	BEARING HOUSING LIFT ASSY DPS	1
AMAT	0021-13289	BRACKET, HARNESS BULKHEAD, FACILITY	2
AMAT	0021-13308	SHIELD,LOWER,LO-C,300MMNIV	2
AMAT	0021-13396	QUART RING	6
AMAT	0021-13405	S & S SHAFT	1
AMAT	0021-13604	BRACKET 300MM, MOTOR CABLE RE	5
AMAT	0021-13700	SPACER, INPUT, BRUSH MOUNT ASSY, FLOW TH	2
AMAT	0021-13715	BRACKET	1
AMAT	0021-13741	PLENUM WATER, UPPER CHAMBER, 300MM DPS I	1
AMAT	0021-13836	SENSOR ASSY W/ PCB	1
AMAT	0021-13890	RING,COVER	5
AMAT	0021-13979	CATCH, CHAMBER RACK TO FRAME	1
AMAT	0021-14160	LARGE,HOLE,MEMBRANE,SUPPORT,PAD	10
AMAT	0021-14287	SHIELD, 6-IN, LOWER, ESC	4
AMAT	0021-14650	WATER SUPPORT LEFT	1
AMAT	0021-14660	CABLE GUIDE, HOIST, 300MM SL	1
AMAT	0021-14733	BRACKET, BOTTOM TRAY, EMAX 300MM	1
AMAT	0021-14771	PANEL SHIELD, PCB CHAMBER PCB ELECT. BOX	1
AMAT	0021-14773	BRACKET, BOTTOM TRAY, EMAX 300MM	2
AMAT	0021-14975	BLOCK MAN.	27
AMAT	0021-15062	BRACKET UPPER COVER TPCC AC BOX	2
AMAT	0021-15070	SHIELD, TERMINAL BLOCK 6 POS.	8
AMAT	0021-15089	FITTING COOLANT CATHODE PRODUCER	3
AMAT	0021-15122	BRACKET SHORT SAFETY COVER	1
AMAT	0021-15196	WATER LINE COVER SWLL 300MM E	1
AMAT	0021-15196	WATER LINE COVER SWLL 300MM E	17
AMAT	0021-15303	SCREW	14
AMAT	0021-15362	CLAMP, MAGNET K3-9, FIX TYPE	1
AMAT	0021-15376	BRACKET ANTI ROTATION END POINT	1
AMAT	0021-15538	CLAMP PEEK	2
AMAT	0021-15576	SHIM (.03) AIR CYLINDER	2
AMAT	0021-15577	SHIM (.02) AIR CYLINDER	2
AMAT	0021-15607	SHIELD,UPPER	11
AMAT	0021-15607	SHIELD,UPPER	1
AMAT	0021-15609	SHIELD,BOTTOM	2
AMAT	0021-15714	BUSHING/BLOCK	1
AMAT	0021-15759	SHIELD, 6-IN, MODIFIED-G12 ESC	1
AMAT	0021-15763	DEPOSITION RING 6-IN ESC SMF	1
AMAT	0021-15778	COVER FINAL SIGNAL	1
AMAT	0021-15794	10MM SLIDE BEARING	4
AMAT	0021-15807	SHAFT, ELBOW, XP ROBOT, 300MM	2
AMAT	0021-15896	SCREW, 6-32, VENT, NICKEL	10
AMAT	0021-15906	BAR	1
AMAT	0021-16143	HOLDER, HANDLE 300MM PRECLEAN CHAMBER	1
AMAT	0021-16169	TOP CLAMP	2
AMAT	0021-16224	PIN, TILT ARM, IECP	1
AMAT	0021-16226	HARDSTOP, UPPER, TILT, ARM, IECP	2
AMAT	0021-16344	BLANKOFF, PORT, RIGHT SIDE TTW PANEL	14
AMAT	0021-16364	SPACER, BEARING, RPS VALVE, P	2
AMAT	0021-16378	SHAFT,SPINDLE,IBC,ECP	3
AMAT	0021-16439	PLATE, TOP, LID, XZ ANNEAL	1
AMAT	0021-16440	POST, LID, XZ ANNEAL	1
AMAT	0021-16739	HANDLE LID PLATE	3
AMAT	0021-16768	WALL, FRONT, TOP	1
AMAT	0021-16790	TOXIC SKIN FLAP REAR PANELS	1
AMAT	0021-16916	PLUG, SHIPPING, VHP ROBOT MOU	2
AMAT	0021-17004	FLAG, HEATER LIFT, PRODUCER S	4
AMAT	0021-17226	BRKT, BD TEOS LINE, DCVD	1
AMAT	0021-17321	BRACKET	2
AMAT	0021-17718	SHIELD, INNER, 200MM SIP TA(N)	16
AMAT	0021-17722	CU,TA,UPPER,SHIELD,NO,GROOVE	28
AMAT	0021-17800	THROTTLE, RPS VALVE, PRODUCER	1
AMAT	0021-18088	SHIELD,LOWER,NIV,PVD	6
AMAT	0021-18225	LOWER HARDSTOP, HEATER LIFT,	1
AMAT	0021-18366	CLAMP CERAMIC HEATER 300MM PR	2
AMAT	0021-18568	GORMMET, BELT, LID HOIST 300MM EXTRA SL	1
AMAT	0021-18704	WASHER, SPHERICAL, TARGET LIFT, 200MM SI	1
AMAT	0021-19036	NUT PLATE MICROWAVE	5
AMAT	0021-19330	INSULATOR, TOP RF PWR STRAP SLTESC	2
AMAT	0021-19754	PIN,LIFT,TXZ,300MM HOURGLASS	1
AMAT	0021-19819	BRACKET	3
AMAT	0021-19993	SPIDER FINGER, ELLIPTICAL, WET CLEAN	2
AMAT	0021-20045	SHIELD, DARK SPACE, NOTCH BOTTOM, ARC, TA ONLY	81
AMAT	0021-20047	COVER RING, 8″ B101, T1, 10.5″DIA, 12 GRIT	6
AMAT	0021-20133	PLATE	2
AMAT	0021-20148	LOWER SHIELD	17
AMAT	0021-20474	REST/LIFT POINT, TI/TIN, FLOAT, W/B	60
AMAT	0021-20577	TITANIUM,REFLOW BUCKET SHIELD	5
AMAT	0021-20768	ICEVAC RELAY BRACKET	8
AMAT	0021-20813	BRACKET, CLAMP	2
AMAT	0021-20815	HEAT SHIELD, LEFT HALF, HTHU	3
AMAT	0021-20817	BUSHING	1
AMAT	0021-20830	ADAPTER, BLOCK WATER 300MM, IMP, REV 4.5	2
AMAT	0021-20836	CLAMP HEATER	1
AMAT	0021-20846	CLAMP, RF FEEDTHRU 300MM IMP REV 4.5	8
AMAT	0021-20847	BAR, RF CONNECTOR 300MM IMP REV 4.5	2
AMAT	0021-20983	ORIENTER HOOP	1
AMAT	0021-21076	HARNESS, RIGHT, 2 MHZ	1
AMAT	0021-21193	PLATE ADAPTER CLAMP, K3/P4 SO	12
AMAT	0021-21258	CAP, HTR PWR F/T	2
AMAT	0021-21262	FINGER INSULATED	3
AMAT	0021-21274	BRACKET	3
AMAT	0021-21307	BUSHING COIL SUPPORT, ELECTRA IMP-CU	111
AMAT	0021-21307	BUSHING COIL SUPPORT, ELECTRA IMP-CU	10
AMAT	0021-21311	CUP OUTER RIGID COIL SPRT ELECTRA IMP-CU	93
AMAT	0021-21312	CLMAP FEEDTHRU COIL SUPPORT 1	1
AMAT	0021-21320	CU,RING,CLAMP,BLT,2,TAB	28
AMAT	0021-21323	SPACER PLATE, CLAMP, RF WATER BOX IMP-CU	71
AMAT	0021-21392	COVER, HEATED, 1/2 ATM SW, SEC.	1
AMAT	0021-21402	STUD, AMPOULE LEVELING TIN DLI	3
AMAT	0021-21513	FLAT, PANEL	1
AMAT	0021-21515	INSULATOR, FILTER HT ESC	1
AMAT	0021-21522	BRACKET, RAIL	1
AMAT	0021-21524	BRACKET	1
AMAT	0021-21531	SPACER STD TIN	1
AMAT	0021-21545	COVER WATER BOX B101	1
AMAT	0021-21546	BRACKET	1
AMAT	0021-21567	SCREW,SHOULDER ALIGNMENT,ASML	22
AMAT	0021-21592	SHOULDER SCREW, 312-18 X .375 HEX 59T	18
AMAT	0021-21615	PEDESTAL	9
AMAT	0021-21615	PEDESTAL	3
AMAT	0021-21662	BRACKET	2
AMAT	0021-21698	PANEL BRACKET L SHAPE	1
AMAT	0021-21765	SPACER, HEATER, 300MM, PVD	1
AMAT	0021-21770	SHIM .75MM .029 SST 300MM PVD	1
AMAT	0021-21771	SHIM, .50MM(.019)SST 300 MM PVD	1
AMAT	0021-21806	RING CLAMP ZLS CH1&3	1
AMAT	0021-21806	RING CLAMP ZLS CH1&3	7
AMAT	0021-21807	ZLS RING CLAMP	2
AMAT	0021-21808	CLAMP RING, ZLS, ALUMINUM	14
AMAT	0021-21840	EXTENSION,INTERLOCK CONN,300MM PRECLEAN	1
AMAT	0021-21859	BRKT, SENSOR FLAG MOTORIZED LIFT	6
AMAT	0021-21871	INSULATOR, TC ISOLATION AMPLIFIER, HT BESC	22
AMAT	0021-21872	BRACKET, FILTER MOUNT, HT BESC	92
AMAT	0021-21916	BRACKET MTG VALVE /REGULATOR UNIVER. G	5
AMAT	0021-22017	SHIELD	1
AMAT	0021-22183	RESTRAINT PIN, 300MM CERAMIC BRAZED ESC	1
AMAT	0021-22196	CLIP BRACKET	6
AMAT	0021-22260	BLANK-OFF, BACKSIDE	2
AMAT	0021-22274	STOPPER, AMPOULE CLAMP, CUXZ	2
AMAT	0021-22363	LIGHT PEN SELECTOR BOX L STAT	1
AMAT	0021-22373	COVER, HV IND CONTROL BOX	1
AMAT	0021-22418	SLEEVE RETAINER	3
AMAT	0021-22496	PLATE T18-F	3
AMAT	0021-22560	I/O BLOCK CONNECTOR PLATE	1
AMAT	0021-22576	CLAMP FEEDTHRU COIL SUPPORT ELECTRA	132
AMAT	0021-22577	PIN,FEEDTHRU COIL SUPPORT,1/4 THK COPPE	32
AMAT	0021-22587	NUT RF CONNECTOR, 10-32	10
AMAT	0021-22602	COVER RING, 8″” B101 TI, 10.5″” DIA 12	28
AMAT	0021-22621	SCREW, LIFT HOOP AL – PROD	1
AMAT	0021-22641	BRACKET, HOLDER DOOR, LINK	3
AMAT	0021-22718	HE SPLITTING BLOCK PRODUCER E	1
AMAT	0021-22955	BLOCK	1
AMAT	0021-23056	RING, BEAUTY TITAN II	1
AMAT	0021-23336	ROD SPLASH GUARD HOUSING SCRUBBER	1
AMAT	0021-23466	BRACKET	1
AMAT	0021-23946	BRACKET	2
AMAT	0021-24177	VENTED SCREW	7
AMAT	0021-24232	TEFLON SPACER 1/4 I. D X 7/16 O.D 1/2 L	4
AMAT	0021-24644	SHAFT ROLLERS	1
AMAT	0021-24793	BRACKET MTG, SWITCH CONTR., 300MM CMP	1
AMAT	0021-24793	BRACKET MTG, SWITCH CONTR., 300MM CMP	1
AMAT	0021-24846	CORE, HOLDER, MAGNET TOP	1
AMAT	0021-24952	SCREW	7
AMAT	0021-24963	PIN, SST 1/4 DIA X 15/16 LONG	4
AMAT	0021-24987	HUB	1
AMAT	0021-25229	INSULATOR, SCREW, AL MANIFOLD	4
AMAT	0021-25230	INSULATOR SCREW HEAD, AL MANIFOLD	1
AMAT	0021-25794	RING, ISOLATOR, TXZ	1
AMAT	0021-25928	SPACER	1
AMAT	0021-26019	CLAMP, LEAD SCREW, PLATEN DRI	1
AMAT	0021-31463	CARRIER, COMPLAINT	1
AMAT	0021-33701	RAIL (11929600)	1
AMAT	0021-35024	PLATE,INNER CAPTIVE SCREW,MOD II	16
AMAT	0021-35037	BLOCK, TERMINAL, 12 POS, MOD	1
AMAT	0021-35052	8 JMF SHADOW RING, AXZ	1
AMAT	0021-35087	PLATE, BLOCKER, N2/HE CARRIER GAS, DXZ, UNIV.	3
AMAT	0021-35095	OXIDE CLAMP CARRIER,5200 SYSTEM	28
AMAT	0021-35095	OXIDE CLAMP CARRIER,5200 SYSTEM	19
AMAT	0021-35096	CARRIER, P1 POLY	39
AMAT	0021-35103	SPACER HARD STOP HEATER LIFT DXZ	3
AMAT	0021-35163	REFLECTOR PLATE, CHMBR. BOTTOM	1
AMAT	0021-35278	Switch, CP	6
AMAT	0021-35281	BRACKET	3
AMAT	0021-35295	BRACKET	1
AMAT	0021-35296	BRACKET	1
AMAT	0021-35297	SIDE RECEIVER	1
AMAT	0021-35299	SIDE RECEIVER	1
AMAT	0021-35742	ARM, LEFT, UPPER CHMBR LIFTING	1
AMAT	0021-35752	Shield, inner, TxZ	1
AMAT	0021-35757	SHAFT,HINGE LID PUMPING PLATE DXZ	2
AMAT	0021-35769	.25 OD GASLINE, RP ADAPTER PLATE	1
AMAT	0021-35772	CLAMP, BASE, GASLINE, RTP	9
AMAT	0021-35802	BRACKET MNFRM NON-HTD GAS LN	4
AMAT	0021-35813	CABLE FLANGE	2
AMAT	0021-35817	LINER,R2 CHAMBER	11
AMAT	0021-35869	PLATE,PERF,TXZ,200MM	13
AMAT	0021-35892	REV. A SUPPORTER	10
AMAT	0021-35944	Shield, outer, TxZ	1
AMAT	0021-35947	OBS BRACKET,TxZ SLIT WINDOW	7
AMAT	0021-36008	BASE,HEATER,GIGA-FILL SACVD	1
AMAT	0021-36015	RING,CLAMP,HEATER,NGK,GIGA-FILL SACVD	2
AMAT	0021-36015	RING,CLAMP,HEATER,NGK,GIGA-FILL SACVD	12
AMAT	0021-36019	STRAP,LID,RF	7
AMAT	0021-36019	STRAP,LID,RF	1
AMAT	0021-36066	PLATE	1
AMAT	0021-36081	CLAMP,PERF,PLATE	2
AMAT	0021-36133	PLATE, BLANK OFF, GP ENSLOSURE	2
AMAT	0021-36154	ADAPTER, RF FEEDTHRU, DTCU, DPS POLY	1
AMAT	0021-36204	GAS DISTRIBUTION PLATE	4
AMAT	0021-36247	CARRIER WXP CLAMP CENTURA	1
AMAT	0021-36264	BLOCK	1
AMAT	0021-36273	STRAP,RF,PRODUCT X INPUT	4
AMAT	0021-36273	STRAP,RF,PRODUCT X INPUT	5
AMAT	0021-36300	CHAMBER MICRO WAVE	1
AMAT	0021-36517	BLOCK SET LAMP TEST FXTURE	2
AMAT	0021-36517	BLOCK SET LAMP TEST FXTURE	1
AMAT	0021-36560	SAX BLOCKER, GIGA FILL SACVD	1
AMAT	0021-36604	UPPER MAGNET BRACKET,SLIT VLV	5
AMAT	0021-36674	COVER AUTO BIAS	1
AMAT	0021-36677	PLATE ADAPTER	1
AMAT	0021-36678	GUIDE INSTALLATION AUTOBIAS	12
AMAT	0021-36680	CLAMP SUPPORT BRACKET AUTO BIAS DC POW	2
AMAT	0021-36689	PLATE,CERAMIC	3
AMAT	0021-36699	CLAMP SIDE FEED 1/4 LINE RTP	1
AMAT	0021-36727	AMAT PART	1
AMAT	0021-36816	LUG,HEATER,NGK,GIGA-FILL SACVD	1
AMAT	0021-36865	COVER VIEWPORT 300MM RTP	2
AMAT	0021-36866	CLAMP, FOLTER, VIEWPORT, 300MM RTP	2
AMAT	0021-36866	CLAMP, FOLTER, VIEWPORT, 300MM RTP	2
AMAT	0021-36868	RETAINING RING	100
AMAT	0021-37046	PANEL BLANK	1
AMAT	0021-37154	SHIELD, TERMINAL BLOCK 8 POS	4
AMAT	0021-37154	SHIELD, TERMINAL BLOCK 8 POS	1
AMAT	0021-37187	ADAPTOR,POLYLINE,HEAT RESIST	3
AMAT	0021-37263	BRACKET, SUPPORT DIFF XDCR	4
AMAT	0021-37263	BRACKET, SUPPORT DIFF XDCR	2
AMAT	0021-37264	BRKT. CLAMP DIFF X DCR PLATE	14
AMAT	0021-37279	ADAPTER,SIDE INJECTOR, SEL OXIDE	4
AMAT	0021-37393	BOX, SHIELDING CHX CABLE	1
AMAT	0021-37395	COVER BOX 1 CONNECTOR CHX CABLE	1
AMAT	0021-37408	BRACKET, SPRING, HEATER LIFT, CVD 300	2
AMAT	0021-37435	PLATE	16
AMAT	0021-37436	PLATE BLANK-OFF, BOTTOM MODULE CXZ	3
AMAT	0021-37501	PLATE, WEIGHT DISPERSION	2
AMAT	0021-37543	INSULATOR CAP 300MM DPS	14
AMAT	0021-37543	INSULATOR CAP 300MM DPS	2
AMAT	0021-37544	INSULATOR SCREW 300MM DPS	1
AMAT	0021-37548	COVER ENCLOSURE CATHODE	1
AMAT	0021-37553	GUIDE LIFT PIN 300MM	1
AMAT	0021-37570	INSULATOR, RF, BOTTOM BULKHED	1
AMAT	0021-37579	CLAMP, TOP CYLINDER, DPS	2
AMAT	0021-37579	CLAMP, TOP CYLINDER, DPS	2
AMAT	0021-37600	HUB	1
AMAT	0021-37612	PLATE ADAPTOR CLDWN	3
AMAT	0021-37737	BRACKET	1
AMAT	0021-37828	COVER BOTTOM MODULE	3
AMAT	0021-37860	SCREW PIN	1
AMAT	0021-37875	THUMB WHEEL	4
AMAT	0021-37888	CLAMP, CASSETTE PLATFORM COR-RES	10
AMAT	0021-37888	CLAMP, CASSETTE PLATFORM COR-RES	2
AMAT	0021-37891	LOCK NUT LEAD SCREW BEARING 300MM LS	3
AMAT	0021-37891	LOCK NUT LEAD SCREW BEARING 300MM LS	1
AMAT	0021-37977	SCREEN COVER WIDE COR-RES	6
AMAT	0021-38008	HOUSING TC AMP 300MM	1
AMAT	0021-38055	SCREEN COVER NARROW COR-RES	14
AMAT	0021-38055	SCREEN COVER NARROW COR-RES	1
AMAT	0021-38087	UFO-XZ-200-NCH-CENTURA	1
AMAT	0021-38097	LEFT SUPPORT, ERGO MTG SYS.	2
AMAT	0021-38099	COVER PLATE #3 SHROUD BOTTOM MXP CE	1
AMAT	0021-38101	CHAMBER LID, NGDT, ANODIZED	2
AMAT	0021-38101	CHAMBER LID, NGDT, ANODIZED	1
AMAT	0021-38106	BRKT, TEOS LINE, 300MM, DCVD	10
AMAT	0021-38119	FACDPLATE(SA-BP)	1
AMAT	0021-38260	SLEEVE, UPPER, RF MATCH PRODUCER	1
AMAT	0021-38407	WASHER	4
AMAT	0021-38408	WASHER	4
AMAT	0021-38427	WINDOW	1
AMAT	0021-38432	BLANK-OFF BOTTOM, BST CHAMBER	11
AMAT	0021-38433	HANDLE	1
AMAT	0021-38445	HANDLE	1
AMAT	0021-38446	PIN	1
AMAT	0021-38560	MTG; PLATE	2
AMAT	0021-38596	MOUNTING PLATE	1
AMAT	0021-38682	WAFER COVER	1
AMAT	0021-38790	PLATE LID 300MM PRODUCER SACVD	7
AMAT	0021-38828	BEARING PLASTIC INDEXER HOUSING,LL, NB, 5200	25
AMAT	0021-38830	BEARING PLASTIC,CASSETTE HANDLER CENTUR	3
AMAT	0021-38833	PLATFORM ELECTRO POLISH	2
AMAT	0021-39076	MANIFOLD, OUTPUT H2O, TI-XZ	2
AMAT	0021-39174	BRACKET, COIL, 4 HOLES	2
AMAT	0021-39241	COVER, TOP, SHROUD, GAS PANEL	1
AMAT	0021-39343	BRACKET	1
AMAT	0021-39346	BRACKET	1
AMAT	0021-39378	RF STRAP	2
AMAT	0021-39401	COVER, RF CONTACT	1
AMAT	0021-39413	SUPPORT BRACKET	12
AMAT	0021-39518	HOOP 150MM	1
AMAT	0021-39533	PLATE, BACK, THROTTLE DRIVE 300MM	5
AMAT	0021-39569	PLATE BOTTOM BPSG 200MM XE CHAMBER RTP	1
AMAT	0021-39696	HANDLE, ALUMINUM COVERM 300MM	10
AMAT	0021-39697	ARM, BELLOWS	1
AMAT	0021-39697	ARM, BELLOWS	2
AMAT	0021-39705	FLAP, THROTTLE VALVE, 300MM	1
AMAT	0021-39706	FLAP, OPPOSITE, THROTTLE VALV	1
AMAT	0021-39722	COVER ACCESS, WATER LINES, 30	2
AMAT	0021-39724	INSULATOR, PEDESTAL, 300MM	1
AMAT	0021-39725	PLUG HIGH VOLTAGE PORT	1
AMAT	0021-39795	BRACKET GAS SUPPLY	2
AMAT	0021-39796	PLATE,STRAIN RELIEF MTG	19
AMAT	0021-39918	RF SHELL	2
AMAT	0021-39919	RF STRAP COVER	1
AMAT	0021-39935	LINER UPPER	1
AMAT	0021-39942	LINER, INNER PUMP PORT	8
AMAT	0021-39971	LINER,THROTTLE PORT,LOWER,IPS	2
AMAT	0021-39972	LINER,MIDDLE THROTTLE VALVE	1
AMAT	0021-39972	LINER,MIDDLE THROTTLE VALVE	5
AMAT	0021-39986	PLATE HI-PWR CLN RMTE GEN RACK, CENTURA	1
AMAT	0021-39995	LINER, UPPER	2
AMAT	0021-3DPN2	PIN LIFT HEALER	1
AMAT	0021-40317	LIFT PIN HOLDERS 5300	1
AMAT	0021-40317	LIFT PIN HOLDERS 5300	1
AMAT	0021-61061	550 NITRIDE FACE PLATE	3
AMAT	0021-70012	MAGNET HOLDER EXTENSION, INNE	1
AMAT	0021-70015	ROTATION PLATE PRIMARY LINK 5000 MC ROB	1
AMAT	0021-70023	BRACKET, TENSION SWITCH	1
AMAT	0021-70220	ENDURA HOT-E-CHUCK AL DEPO RING	25
AMAT	0021-70257	BRACKET CON GAS BOX WITH SWITCH	2
AMAT	0021-70385	COVER CHAMBER HEATER	1
AMAT	0021-70396	COVER DISC W/DUMMY	1
AMAT	0021-70413	BRACKET	13
AMAT	0021-71060	SEAL	135
AMAT	0021-71205	BLOCK	80
AMAT	0021-71205	BLOCK	6
AMAT	0021-72391	HOUSING	1
AMAT	0021-72417	BRACKET	1
AMAT	0021-72418	BRACKET	11
AMAT	0021-72419	BRACKET	10
AMAT	0021-72545	BRACKET	1
AMAT	0021-73688	BOLT	41
AMAT	0021-73945	STABLIZER BAR	1
AMAT	0021-73982	BRACKET	2
AMAT	0021-76033	BRACKET,OPTION VACUUM	1
AMAT	0021-76335	SHIELD,TERM 8 POS 7/16 CTR	17
AMAT	0021-76535	BAR BUS PWR SUPPLY CB, LOAD PHASE 1, GEN	3
AMAT	0021-76536	BAR BUS LOAD PHASE 2	1
AMAT	0021-76767	CLAMP REV 3 SLIT VALVE DOOR	1
AMAT	0021-76784	OBS, MFC, STABILIZER BRACKET MOD.	1
AMAT	0021-76827	INSULATOR, LID SWITCH, DUAL MAG	5
AMAT	0021-76838	OBS: PLATFORM	1
AMAT	0021-76869	OBSOLETE, REPLACED BY 0020-44040.	1
AMAT	0021-76889	FACEPLATE, UPS PHASE II CONTR	1
AMAT	0021-76956	COVER, FLOOR, REAR – MIDDLE, CENTURA	1
AMAT	0021-77006	COUNTER,WEIGHT,EXT	1
AMAT	0021-77031	SHIELD,PAD,COND. BACK	1
AMAT	0021-77068	BRACKET	1
AMAT	0021-77092	MOTOR MOUNT DRIVE	2
AMAT	0021-77114	BRACKET ROBOT Z-AXIS PCB	7
AMAT	0021-77124	STAND, ROLLER ASSY	2
AMAT	0021-77124	STAND, ROLLER ASSY	1
AMAT	0021-77125	BRUSH,ROLLER,ASSEMBLY	14
AMAT	0021-77126	ROLLERS HOLDER, ROLLER ASSY SCRUBBER 30	4
AMAT	0021-77145	8 PEDESTAL POLITEX PAD REV.2	5
AMAT	0021-77213	COVER	3
AMAT	0021-77241	LOWER FLANGE	5
AMAT	0021-77274	MANIFOLD PAD CONDITIONER	1
AMAT	0021-77289	SHAFT STOPPER ASSY	4
AMAT	0021-77306	BRACKET	6
AMAT	0021-77307	SHAFT	3
AMAT	0021-77317	HINGE SHAFT	1
AMAT	0021-77343	SPRAY BAR, 300MM	1
AMAT	0021-77347	FLAG, HASTELLOY	10
AMAT	0021-77348	FLAG	1
AMAT	0021-77402	PIN	13
AMAT	0021-77403	FLAG	11
AMAT	0021-77415	PAD, HEAD INSTALLATION	2
AMAT	0021-77456	ROD 6 TITAN HEAD	1
AMAT	0021-77521	CORNER INSERT SIDE SHORT	3
AMAT	0021-77546	BASE CLAMP, BRUSH ASSY, MESA	4
AMAT	0021-77557	MANDREL BRUSH 200MM	4
AMAT	0021-77566	BRACKET, LOWER EXTENSION, FLUSH MOUNT 7	3
AMAT	0021-77624	MEMBRANE WAFER 8″	1
AMAT	0021-77642	DOOR LINK	1
AMAT	0021-77766	BAR, CLM MODULE	15
AMAT	0021-77923	SEAL CLAMP	2
AMAT	0021-77926	TORQUE WRENCH EXTENSION	1
AMAT	0021-78052	BRACKET	8
AMAT	0021-78164	SHELL, DRIVER	1
AMAT	0021-78215	BRACKET, MTG GUARD	2
AMAT	0021-78217	BKT, MTG, SWITCH VALVE RETROF	1
AMAT	0021-78235	BRACKET	1
AMAT	0021-78248	COVER SENSOR, BOUBLE BLADE ROBOT	1
AMAT	0021-78402	COVER	1
AMAT	0021-78524	RAIL	1
AMAT	0021-78582	UPPER STOP SHIELD TOP COVER	4
AMAT	0021-78589	ROLLER TOP COVER ASSY	47
AMAT	0021-78589	ROLLER TOP COVER ASSY	34
AMAT	0021-78606	BRACKET, FRONT, MEG	2
AMAT	0021-78788	CMP RACK BRACKET	1
AMAT	0021-78797	STRAIN,RELIEF,FLEX,CABLE,ROBOT	3
AMAT	0021-78808	SMALL BKLACK ANODIZED PLATE/BRACKET	1
AMAT	0021-78827	SHAFT	9
AMAT	0021-78827	SHAFT	1
AMAT	0021-79081	SENSOR PLUNGER, 8 TITAN HEAD II	84
AMAT	0021-79131	SHAFT, CLAMP, WALKING BEAM	8
AMAT	0021-79232	HANGER	1
AMAT	0021-79274	SHAFT GEAR BASE ASSEMBLY PAD CONDITIONER	1
AMAT	0021-79279	DETENT EXT SLURRY DISPENSE ARM	1
AMAT	0021-79290	BRACKET, SMALL TABLE CLEANER	4
AMAT	0021-79328	DOUBLE SENSOR BRACKET	1
AMAT	0021-79448	MANIFOLD	1
AMAT	0021-79449	RESTRAINT	1
AMAT	0021-79512	BRKT , SWITCH MTG, NON-LATCH	1
AMAT	0021-79623	WALL RIGHT	1
AMAT	0021-79685	BLOCK	1
AMAT	0021-79874	SUPPORT BRACKET	1
AMAT	0021-79915	SLIDE MOUNT PULLEY INPUT STATION	1
AMAT	0021-89026	BASE LAMP SLED	9
AMAT	0021-89669	BRACKET	1
AMAT	0021-89685	BRACKET	1
AMAT	0021-90311	E_FILAMENT INSULATOR	15
AMAT	0021-90405	LINER,END,CATHODE,TUNGSTEN	6
AMAT	0021-90649	INSULATOR, CAP	4
AMAT	0021-90653	COVER PLASMA HEAD	1
AMAT	0021-90851	SHIELD, INSULATOR	3
AMAT	0022-57136	BRACKET	2
AMAT	0022-77011	BRACKET	20
AMAT	0022-77011	BRACKET	1
AMAT	0022-77023	SPACER	4
AMAT	0022-77089	MOUNT, RINSE ARM, REFLECTION	4
AMAT	0022-77136	ROBOT DOOR INTERLOCKS	3
AMAT	0022-77155	PLATE, MEMBRANE, SUPPORT	3
AMAT	0022-77176	EDGE CONTROL RING	1
AMAT	0022-77251	COLLAR 4 SLURRY DISPENSE ARM	1
AMAT	0022-77577	MOTOR MOUNT	2
AMAT	00220550549	LINERTUBE	2
AMAT	00220730022	FAN UNIT WIDE	1
AMAT	0023-04098	CUP CALIBRATION	3
AMAT	0030-00173	STOP SPRING VALVE	45
AMAT	0030-00184	WAFER BUTTON MOLDED	100
AMAT	0030-00196	LARGE FACE SEAL 200MM	11
AMAT	0030-00213	BUTTON, WAFER	25
AMAT	0030-00218	RING, PEDESTAL, BOTTOM	1
AMAT	0030-00219	RING, PEDESTAL, TOP/MID	18
AMAT	0030-01005	SPACER, TRAYS ARDELL (PACK OF 10)	12
AMAT	0030-01038	CLIP, WAFER	459
AMAT	0030-09004	MONITOR COVER BEZEL CRT USE 0030-0929	10
AMAT	0030-09022	TRAY ELEVATOR 125MM	16
AMAT	0030-09026	8 SLOT ELEVATOR COM	2
AMAT	0030-09027	TC AMPLIFIER	1
AMAT	0030-09049	SEAL LARGE FACE CHEMREZ 513 125M	1
AMAT	0030-09055	SEAL LARGE FACE 125MM	6
AMAT	0030-09057	MARK II PANEL,	1
AMAT	0030-40030	O-RING,GINGERBREAD,LIFT BASE,ESC	1
AMAT	0030-60013	RING	1
AMAT	0030-60020	COVER	1
AMAT	0030-70001	BUTTON SWITCH,EMO	2
AMAT	0030-70048	SLIT VALVE ASSY	2
AMAT	0030-70057	BEZEL CRT WALL MOUNT	2
AMAT	0035-00027	BRACKET	1
AMAT	0035-00069	BASE, RF FILTER BOX, 300MM DPS II	1
AMAT	0035-00072	SHIELD,TOP	13
AMAT	0035-00072	SHIELD,TOP	2
AMAT	0035-00074	TOP SHIELD	4
AMAT	0040-00050	ROBOT SUPPORT PLATE, WELDMENT	1
AMAT	0040-00089	PROCESS ROUGH LNE LOWER	1
AMAT	0040-00097	BASEPLATE, WLDMT, ROUGHLINE	1
AMAT	0040-00159	HOSE, CRYO VACUUM LINE	1
AMAT	0040-00186	MANIFOLD, T WELDMENT	4
AMAT	0040-00188	AUX TUBE, GAS DIST UPPER	2
AMAT	0040-00248	SCREEN, PUMP PAST	1
AMAT	0040-00249	PORT SCREEN AL, COARSE METAL	6
AMAT	0040-00250	OPERATOR CONTROL PANEL ASSEMBLY	2
AMAT	0040-00263	SCREEN, 1″ PORT	3
AMAT	0040-00267	TUBE, FLEX CAP MAN	5
AMAT	0040-00305	HOUSING, RF MICRO MATCH	1
AMAT	0040-00312	GAS LINE #I VCR	3
AMAT	0040-00313	GAS LINE #II VCR	2
AMAT	0040-00313	GAS LINE #II VCR	1
AMAT	0040-00314	GAS LINE #III VCR	2
AMAT	0040-00314	GAS LINE #III VCR	2
AMAT	0040-00324	GAS FEED THRU WELDMENT	2
AMAT	0040-00324	GAS FEED THRU WELDMENT	1
AMAT	0040-00347	PEDESTAL	1
AMAT	0040-00411	BRACKET	2
AMAT	0040-00443	GAS TUBE	11
AMAT	0040-00456	CABLE ASSY FOBER OPTIC ZO	1
AMAT	0040-00456	CABLE ASSY FOBER OPTIC ZO	1
AMAT	0040-00457	CABLE FIBER OPT 6 FT	1
AMAT	0040-00519	GASLINE	2
AMAT	0040-00523	HEXACORD	3
AMAT	0040-00539	ELBOW JOINT	3
AMAT	0040-00540	ELBOW JOINT	3
AMAT	0040-00551	ADAPTOR, WELDMENT BARATRON	1
AMAT	0040-00553	HELIUM SUPPLY LINE PNL TO CONTROLLER	2
AMAT	0040-00555	CHAMBER SHIELD FRONT	1
AMAT	0040-00555	CHAMBER SHIELD FRONT	1
AMAT	0040-00556	CHAMBER SHIELD	1
AMAT	0040-00557	CHAMBER SHIELD (2)	1
AMAT	0040-00557	CHAMBER SHIELD (2)	5
AMAT	0040-00558	CHAMBER SHIELD (3)	4
AMAT	0040-00559	CHAMBER SIDE SHIELD 4	1
AMAT	0040-00560	CHAMBER SHIELD REAR	1
AMAT	0040-00560	CHAMBER SHIELD REAR	6
AMAT	0040-00567	HE DELIVERY LINE CHD INITIAL IHC	1
AMAT	0040-00594	TUBE, KEYED, GAS	35
AMAT	0040-00594	TUBE, KEYED, GAS	1
AMAT	0040-00611	SHAFT, RIGHT	1
AMAT	0040-00738	CLAMP, DTCU LIFT	16
AMAT	0040-00753	COVER LAMP END, HTESC W/INNER ZONE	1
AMAT	0040-00855	MOTOR MOUNT, LOWER, HDP ROBOT	2
AMAT	0040-00985	ARM ASSY	1
AMAT	0040-00999	BRACKET, THROTTLE VALVE DRIVER MOUNTING,	2
AMAT	0040-00999	BRACKET, THROTTLE VALVE DRIVER MOUNTING,	1
AMAT	0040-01009	GAS MODULE TUBE	2
AMAT	0040-01038	RIGHT SHOE PICK-UP 125MM	2
AMAT	0040-01039	BRACKET	1
AMAT	0040-01079	BRACKET	4
AMAT	0040-01080	CONNECTOR, FLEXIBLE	1
AMAT	0040-01130	CONNECTOR, CERAMIC HEATER, TA	2
AMAT	0040-01159	ROLLER SUPPORT RIGHT WITH HEL	1
AMAT	0040-01247	BRKT, M-FRM, HTD GAS LN	1
AMAT	0040-01255	CHUCK, ASP 150MM	2
AMAT	0040-01262	SPACER, PILLOW BLOCK, ELECTRA IMP, OU	2
AMAT	0040-01330	HOUSING, COVER	1
AMAT	0040-01380	CONNECTOR,RF FEEDTHROUGH	2
AMAT	0040-01445	INSULATOR 50MM X 17DIAM M5	1
AMAT	0040-01487	BRKT 8 POSITION, TB MOUNT CENTURA	1
AMAT	0040-01501	POST D.C CHAMBER SUPPORT 200MM	2
AMAT	0040-01671	SPIDER CLIP, 200MM SRD, ECP	1
AMAT	0040-01671	SPIDER CLIP, 200MM SRD, ECP	69
AMAT	0040-01680	BRACKET, SYSTEM MANIFOLD INLET	1
AMAT	0040-01802	BRACKET, SMC PNUE MAINFOLD OTF	4
AMAT	0040-02204	CLAMP	3
AMAT	0040-02283	PULLY 11MM SHAFT, SRD	29
AMAT	0040-02297	BASE STAND	2
AMAT	0040-02326	CLAMP, CLEAR LID, RF SW, 300 TWIN	2
AMAT	0040-02334	BRKT MTG ZDV VALVE SOL	1
AMAT	0040-02378	ISOLATOR TEFLON WITH SPRT	1
AMAT	0040-02410	GUIDE BUSHING, SPINNING HEAD ECP	1
AMAT	0040-02467	BUS BAR LOWER SWLL	37
AMAT	0040-02496	TOP CAN SOURCE	1
AMAT	0040-02638	BRACKET SUPPORT, 78.5 MM PIPE	5
AMAT	0040-02644	HINGE FOR ORIENTER 5200, 5500	1
AMAT	0040-02645	HINGE FOR ORIENTER 5200, 5500	1
AMAT	0040-02674	COVER, CELL CONNECTOR, ECP CE	2
AMAT	0040-02750	CLAMP, DTCU LIFT	3
AMAT	0040-02771	FAN BRACKET HTR LIFT WXZ 300M	1
AMAT	0040-02847	PLATE, ADAPTER, HEAD MOTOR	1
AMAT	0040-02854	PLATE MOUNT HEATER LIFT 200MM	1
AMAT	0040-02927	PLATE BOTTOM	1
AMAT	0040-02946	POWER CORD BRACKET	10
AMAT	0040-03024	SHIELD, HEATER,TOP, SPOOL	1
AMAT	0040-03025	SHIELD, HEATER, BOTTOM, SPOOL	1
AMAT	0040-03063	BELT BRACKET, LID HOIST 250, ENDURA E	4
AMAT	0040-03095	PULLEY, LID HOIST 250, ENDURA E	2
AMAT	0040-03096	CUP, INLET ATOMFZER	2
AMAT	0040-03173	DOOR SPCL ACCESS DRIVER ENCL	1
AMAT	0040-03238	CATHODE COOLING BASE	1
AMAT	0040-03239	CATHODE W/PLATE	1
AMAT	0040-03254	BASE, TOWER, EMAX	28
AMAT	0040-03383	FRONT PANEL,2-WIDE FI 300MM	1
AMAT	0040-03383	FRONT PANEL,2-WIDE FI 300MM	2
AMAT	0040-03532	ENCLOSURE, SWITCH MODULE, PRODUCER	1
AMAT	0040-03647	BLANK PLATE, FILTER BLOCK, 300MM WATERBO	12
AMAT	0040-03947	BRACKET RF SWITCH DPS, EDTCU	1
AMAT	0040-03947	BRACKET RF SWITCH DPS, EDTCU	1
AMAT	0040-03966	PANEL ASSY, INTERFACE LEGACY 3 CONTROLLE	1
AMAT	0040-03987	SHIM CLAMP LEFT PRODUCER	1
AMAT	0040-04100	MOUNT, STEPPER MOTOR	1
AMAT	0040-04118	DRAIN, WELDMENT, POST, EBR 20	1
AMAT	0040-04134	STRAP GROUNDING SHIELD SUPPORT	1
AMAT	0040-04154	COVER, BACK, HTR BLOCK, PUMP/PURGE, TXZ	1
AMAT	0040-04181	HANDLE ASSY ST ST	1
AMAT	0040-04200	ARM TIE ROD	1
AMAT	0040-04207	FTG, WATER INLET ADAPTER, REV 5.0,VECTRA	1
AMAT	0040-04207	FTG, WATER INLET ADAPTER, REV 5.0,VECTRA	1
AMAT	0040-04339	PLATE, COVER FAN ENCLOSURE	17
AMAT	0040-04339	PLATE, COVER FAN ENCLOSURE	37
AMAT	0040-04355	BRACKET, 13.56 MHZ VAC RELAY FILTER	1
AMAT	0040-04387	BRACKET CONNECTORS SERVO MOTOR LIFT	1
AMAT	0040-04440	BLOCK, INTLCK SWITCH, DPS E-DTCU REV P2	1
AMAT	0040-04465	CLAW, UPPER GRIPPER RH 200MM	1
AMAT	0040-04626	ASSY, FORK BLADE WAFER LOADER ECP	1
AMAT	0040-04626	ASSY, FORK BLADE WAFER LOADER ECP	1
AMAT	0040-05052	BLANK OFF, AC FILTER	2
AMAT	0040-05281	BLOCK, RF CONN PIN, WATER BOX 300MM DTOR	1
AMAT	0040-05318	BRACKET	1
AMAT	0040-05464	BUS BAR SIDE PANEL FEED	2
AMAT	0040-05466	HOUSING DISPENSE ARM, EBR 1.5, ECP	1
AMAT	0040-05468	ADAPTER, MOTOR, KR46 TO P5200W	1
AMAT	0040-05528	CHAMBER BODY	1
AMAT	0040-05550	BRKT. FLOW SWITCH/ N2 PURGE CU SZ CHILL	35
AMAT	0040-05581	BRACKET SHIELD	1
AMAT	0040-05609	NOZZLE, 45/2.5, EBR 1.5, ECP	1
AMAT	0040-05832	COVER	2
AMAT	0040-05988	SUPPORT,ARC CHAMBER,LOWER	1
AMAT	0040-05988	SUPPORT,ARC CHAMBER,LOWER	1
AMAT	0040-06002	ALUMNIUM BOX 2INX4INX9IN	1
AMAT	0040-06102	PANEL, LOWER, 300 MM FI	3
AMAT	0040-06136	FLANGE ELBOW, ANNEAL, ECP	2
AMAT	0040-06137	FITTING VALVE GAS ANNEAL ECP 200MM	2
AMAT	0040-06213	BRACKET, CLAMP, SOURCE ASSY, 300MM, PVD	1
AMAT	0040-06213	BRACKET, CLAMP, SOURCE ASSY, 300MM, PVD	1
AMAT	0040-06260	HOUSING, SWITCH, PAN	7
AMAT	0040-06316	HOLDER, ROTATING CONNECTOR, 750W MOTOR,	2
AMAT	0040-06316	HOLDER, ROTATING CONNECTOR, 750W MOTOR,	1
AMAT	0040-06460	WATLOW, BLANKOFF PANEL	1
AMAT	0040-06596	TXZ LID FRAME	2
AMAT	0040-06762	CLAMP, TERMINAL ADJUSTMENT NUT	1
AMAT	0040-06866	BRACKET	1
AMAT	0040-06934	COVER, WIRE, HEATED II	1
AMAT	0040-07090	WAFER GRIP, WEDGE POST, SRD SPIDER ECP	8
AMAT	0040-07102	WELDMENT FEED THRU GAS	3
AMAT	0040-07192	SLIT VALVE LINER (NICKEL)	12
AMAT	0040-07399	BRACKET, FRONT DRAWER, ELECTRONICS RACK	8
AMAT	0040-07458	BRACKET, CB 1 MTG, CKT BKR EN	1
AMAT	0040-07498	CARRIER, LAMP WIRE, RH, 300MM PVD	1
AMAT	0040-07551	FRONT STOPPER, 9600 CRYO COMP. FRAME	2
AMAT	0040-07551	FRONT STOPPER, 9600 CRYO COMP. FRAME	6
AMAT	0040-07632	COVER, FRONT, WATERBOX 300MM IMP DTOR	1
AMAT	0040-07985	BRACKET	2
AMAT	0040-07985	BRACKET	1
AMAT	0040-08156	ASSY. BELLOWS/YOKE, CR, SLIT VALVE	3
AMAT	0040-08278	Bracket	1
AMAT	0040-08290	LAMP FIXTURE 300MM LT ESC	8
AMAT	0040-08426	NEUTRAL BAR, AC ENCLOSURE, 300MM CENTURA	1
AMAT	0040-08511	BUS BAR CAP ASSY DTCU DPS 300	3
AMAT	0040-08512	INSULATOR RF SOURCE DTCU DPS	2
AMAT	0040-08534	BRACKET LID – SHOCK, FRONT – REAR, TANOX	6
AMAT	0040-08735	CLAMP, LOWER, GAS INLET, 300MM DPS DTCU	15
AMAT	0040-08739	BRACKET	1
AMAT	0040-08757	BRACKET	1
AMAT	0040-08902	SUPPORT PLATE LEFT HW FILTER 300MM DPS	3
AMAT	0040-09021R	CHAMBER BODY ETCH RE-ANODIZED	2
AMAT	0040-09026	MANIFOLD BLOCK 2:1	9
AMAT	0040-09026	MANIFOLD BLOCK 2:1	2
AMAT	0040-09115	FEEDTHROUGH	10
AMAT	0040-09125	COVER PANEL	2
AMAT	0040-09157	SHIELD	2
AMAT	0040-09193	WELDMENT, BELLOWS, SLIT VALVE DOOR, DPS2	2
AMAT	0040-09199	BRACKET, SUSC. LIFT	2
AMAT	0040-09199	BRACKET, SUSC. LIFT	1
AMAT	0040-09205	BRACKET, WAFER LIFT	1
AMAT	0040-09217	PIPE,CLUSTER EXHAUST, THROTTLE VALVE, N	1
AMAT	0040-09217	PIPE,CLUSTER EXHAUST, THROTTLE VALVE, N	1
AMAT	0040-09221	CHAMBER BODY CVD UNIVERSAL	2
AMAT	0040-09238	SHIELD FRONT	2
AMAT	0040-09238	SHIELD FRONT	2
AMAT	0040-09256-D	PEDASTALL	2
AMAT	0040-09262	4 WSI PERF PLATE	1
AMAT	0040-09273	BRACKET, SUSCEPTOR LIFT	2
AMAT	0040-09340	SCREEN, TURBO ANODIZED	9
AMAT	0040-09397	LL, HINGE	1
AMAT	0040-09407	WELDMENT, R/F GROUND,T2 WELDED SUSCEPTOR	205
AMAT	0040-09478	PLATE, GAS DIST, UPPER, 200MM ASP PRSP3	1
AMAT	0040-09547	CHAMBER SHIELD, REAR UNIVERSAL	2
AMAT	0040-09548	COVER WINDOW, SIDE SHIELD UPER UNIVERSAL	2
AMAT	0040-09560	COVER WINDOW, SIDE SHIELD LOWER UNIVERSAL	1
AMAT	0040-09616	PLATE BLANK OFF BACK TEMP CONTRLR ASSY	1
AMAT	0040-09664	INTERCONNECT BOARD	2
AMAT	0040-09668	ASSY, BELLOWS SUSCEPTOR	2
AMAT	0040-09752	SIDE SHIELD	1
AMAT	0040-09760	ESC POLYMIDE 200MM NOTCH HV IB 37MIC COMP	1
AMAT	0040-09798	SHELL ASSY 200MM NOTCH	4
AMAT	0040-09832	FEED THROUGH	8
AMAT	0040-09863	BACK PANEL, IN-LINE	2
AMAT	0040-09875	JACK CONNECTOR	3
AMAT	0040-09960	PEDESTAL,200MM NOTCH,IS,SOLID,ESC,9 HE	5
AMAT	0040-09961	ESC ASSY, 200MM NOTCH WITH BACKING	1
AMAT	0040-09975	ELECTROSTATIC CHUCK	1
AMAT	0040-13055	BLOCK	1
AMAT	0040-13061	BLOCK	2
AMAT	0040-13083	FRONT BRACKET TURBO CONTROLLER	1
AMAT	0040-13125	OBS. LIFT PIN COVER	1
AMAT	0040-13140	ELECTRODE PLATE	1
AMAT	0040-13142	STAND,STEC LIQUID INJECTOR	1
AMAT	0040-13142	STAND,STEC LIQUID INJECTOR	1
AMAT	0040-13153	CARD CAGE BOX COVER	1
AMAT	0040-13165	BRACKET, UPPER PNL SAFETY COVER	1
AMAT	0040-13168	PLATE	1
AMAT	0040-13226	OBS-BUS BAR, MAIN PANEL FEED, PH B, CENTURA, 208V	5
AMAT	0040-13264	ELBOW,LLC EXHAUST TTF,CENTURA COMMON	11
AMAT	0040-13264	ELBOW,LLC EXHAUST TTF,CENTURA COMMON	2
AMAT	0040-13270	BLANKOFF, AC RECEPTACLE, CHAMBER FAC AC	4
AMAT	0040-13273	SIDE COVER, CHAMBER TRAY AC , CENTURA	4
AMAT	0040-13647	MTG, BLOCK 150 MM SENSOR	7
AMAT	0040-13664	SUPPORT BAR	4
AMAT	0040-13674	GUIDE, SHAFT PRE-CLEANER	1
AMAT	0040-13691	PANEL,CONVENIENCE OUTLETS,CENTURA	1
AMAT	0040-13865	PANEL	1
AMAT	0040-13931	EMO BRKT SKINS CENTURA	1
AMAT	0040-13931	EMO BRKT SKINS CENTURA	2
AMAT	0040-14008	SHAFT	1
AMAT	0040-14010	KEYED CASSETat BEZEL	1
AMAT	0040-16136	COVER LAMP TOWER FRONT PANEL	1
AMAT	0040-16136	COVER LAMP TOWER FRONT PANEL	1
AMAT	0040-16139	BRACKET, CONNECTOR MTG, BEZEL	4
AMAT	0040-18018	E-CHUCK,200MM,MK4,JF,CVD	1
AMAT	0040-18024	E-CHUCK,200MM,MKA,SNNF,CVD	6
AMAT	0040-18157	COVER SERIPLEX GEN RACK HDP-CVD ULTIMA	9
AMAT	0040-18233	UPPER, ISOLATOR BRACKET, MICROWAVE SUP, ULTIMA	8
AMAT	0040-18234	SHAFT BLOCK MW BRACKET, ULTIMA, HDP-CVD	1
AMAT	0040-18234	SHAFT BLOCK MW BRACKET, ULTIMA, HDP-CVD	3
AMAT	0040-20020	BELLOWS LIFT	1
AMAT	0040-20068	BELLOWS LIFTER PVD	1
AMAT	0040-20140	BRACKET JSK AR FLEX 8 GT VLV	1
AMAT	0040-20142	GAS FILTER	1
AMAT	0040-20320	5 ” LIFT HOOP	1
AMAT	0040-20328	SUPPORT	3
AMAT	0040-20329	ADAPTER, UTI RGA	1
AMAT	0040-20330	BRACKET	1
AMAT	0040-20402	BRKT MNT CRYO LINES	1
AMAT	0040-20417	ADATPER TURBO SHROT, CENTURA	1
AMAT	0040-20418	ASSY, BELLOWS, SLIT, VALVE	1
AMAT	0040-20566	COLLIMATOR	4
AMAT	0040-20621	Cover	2
AMAT	0040-20821	ENCLOSURE SW MOUNTING PCII	1
AMAT	0040-20855	COVER, HEATER LLB CENTURA PVD	2
AMAT	0040-20856	COVER, HEATER LLA CENTURA PVD	2
AMAT	0040-20973	BRACKET, FLOW METER, NESLAB	2
AMAT	0040-21073	ROBOT ARM CLAMPS	2
AMAT	0040-21297	HUB,TEXTURING FIXTURE	1
AMAT	0040-21516	WATER BLOCK SOURCE MANIFOLD	1
AMAT	0040-21516	WATER BLOCK SOURCE MANIFOLD	6
AMAT	0040-21826	FLANGE,EDWARDS PUMP,CVD EXH SW	7
AMAT	0040-21826	FLANGE,EDWARDS PUMP,CVD EXH SW	1
AMAT	0040-21934	HANDLE	1
AMAT	0040-21985	HPT-E-CHUCK AL WAFER HOLDER	5
AMAT	0040-22029	COLLIMATOR	29
AMAT	0040-22038	SHUTTER G3 GAS LINE CLAMP	4
AMAT	0040-22140	VECTRA IMP MAGNETS	1
AMAT	0040-22144	BRKT, INTERLOCK, IMP RF MATCH CABLE	8
AMAT	0040-22146	INSULATOR SPACER, IMP RF MATCH BOX	1
AMAT	0040-22347	BRACKET/PLATE	4
AMAT	0040-22366	PCII INTLK ROTATION RING ASSM @ C	3
AMAT	0040-22366	PCII INTLK ROTATION RING ASSM @ C	1
AMAT	0040-22412	COVER, WAFER BIAS VAC INTLK	1
AMAT	0040-22414	BOX COVER	2
AMAT	0040-22438	GUARD, SHUTTER BLADE, 8 E-CHUCK	2
AMAT	0040-22462	AC COVER PANEL COD	4
AMAT	0040-22464	PILLOW BLOCK, GAMMA 2 194 MM	2
AMAT	0040-22477	BRACKET, LOADLOCK BOTTOM, SHP-FABS	1
AMAT	0040-22482	GUARD, SHUTTER BLADE, 8 E-CHUCK	1
AMAT	0040-22489	SPACER PLATE, TC AMP, B101 HEATER	1
AMAT	0040-22548	PA BRACKET	2
AMAT	0040-22592	LID	2
AMAT	0040-22804	BRACKET, RIGHT MATCH BOX SUPPORT	4
AMAT	0040-22805	BUSHING TUNING SHAFT H.E.	1
AMAT	0040-22812	COVER, RF ENCLOSURE CABLE INTERLOCK	3
AMAT	0040-22829	STOP SHUTTER BLADE	1
AMAT	0040-22864	HOUSING BEARING ENCO.	11
AMAT	0040-22868	COVER INTERLOCK SQ CONN RF MATCH PVD	3
AMAT	0040-22872	HOUSING, QDS CONN NORYL	1
AMAT	0040-22906	BLOCK	1
AMAT	0040-22932	HOUSING, 300MM PVD CHAMBER GAS	2
AMAT	0040-23136	STRAP CAR CAPS/ COIL	1
AMAT	0040-23192	CONTROLLER COVER	4
AMAT	0040-23193	COVER	1
AMAT	0040-23218	BASE. TC ISOLATION AMP SUB-ZERO, LTBESC BLT	12
AMAT	0040-23312	BOX COVER	2
AMAT	0040-23374	COVER	1
AMAT	0040-23458	SPACER INSULATER VOR	11
AMAT	0040-23466	BLANKOFF DC CONNECTOR VOR IMP	1
AMAT	0040-23500	COVER	2
AMAT	0040-23542	POST, FLAG MOUNT, MOTORIZED LIFT	2
AMAT	0040-23548	CLAMP, RF POWER, HT BESC	2
AMAT	0040-23555	COVER	4
AMAT	0040-23609	PLATE	1
AMAT	0040-23617	PANEL	1
AMAT	0040-23694	BASE COIL SUPPORT VO R IMP	3
AMAT	0040-23921	BRKT,Mounting Status Lamp Rear	1
AMAT	0040-24263	BRACKET	1
AMAT	0040-31813	CHUCK ASSY (0090-35688)	1
AMAT	0040-31845	COVER CYLINDER SUPPORT	1
AMAT	0040-31963	CABLE ASSY, RF GROUND, PLASMA	1
AMAT	0040-31993	CHAMBER SKIN, CHAMBER	3
AMAT	0040-31999	WELDMENT, BELLOWS ASSY, LOWER	1
AMAT	0040-32247	BRACKET	1
AMAT	0040-32249	LINKAGE, LID, RPS	4
AMAT	0040-32251	ADAPTER,GAS,APPLICATOR,RPS	9
AMAT	0040-32254	MOUNTING PLATE	1
AMAT	0040-32259	GAS BOX 200MM	2
AMAT	0040-32265	BASE,PROTECTION COVER,ESC PEDESTAL,WEB	4
AMAT	0040-32289	MANIFOLD BLOCK	1
AMAT	0040-32306	TUBE ASSY	1
AMAT	0040-32320	PLATE, FRONT PANEL SEALING, OZONATOR	3
AMAT	0040-32418	COVER FANS H.E. MATCH	2
AMAT	0040-32433	SCREEN TURBO, WELDED, GROUNDED	3
AMAT	0040-32543	RING, MAGNET, LOWER	1
AMAT	0040-32543	RING, MAGNET, LOWER	11
AMAT	0040-32552	BLADE THROTTLE VALVE	4
AMAT	0040-32552	BLADE THROTTLE VALVE	1
AMAT	0040-32583	CARD CAGE BOX COVER, SERIPLEX	1
AMAT	0040-32596	PLUG, SIGNAL TOWER, CONDUCTIVE P	1
AMAT	0040-32597	PLUG,SIGNAL TOWER,SST	14
AMAT	0040-32609	SHIM,WAVEGUIDE,TUBING CXZ SACVD	1
AMAT	0040-32627	WELD, PIPE TECH CLUSTER EXHAUST	2
AMAT	0040-32630	8 HT DX2 HEATER	1
AMAT	0040-32677	ASSY,ROLLER CATCH,CLAMP LID	2
AMAT	0040-32679	BASE,SMALL TOWER,CLAMP LID	1
AMAT	0040-32823	BRACKET	1
AMAT	0040-32874	BELLOWS LIFT PIN 300MM RADIANCE RTP	2
AMAT	0040-32960	WELDMENT TBF APPLICATOR MICROW	1
AMAT	0040-32963	PANEL, 2 POLE CB BLANK-OFF	1
AMAT	0040-33204	WELDMENT, BELLOWS THROTTLE	6
AMAT	0040-33242	HOUSING, TOP, INPUT STATION, 200MM MESA	1
AMAT	0040-33248	CONN RIGHT GAS SPRING	1
AMAT	0040-33354	COVER	1
AMAT	0040-33395	PLATE	7
AMAT	0040-33395	PLATE	8
AMAT	0040-33509	BRACKET GAS LINE	1
AMAT	0040-33513	BRCKT., GAS LINE, 1/4, #1, CHMBR. C 300 MM	1
AMAT	0040-33516	BRACKET, GAS LINE, PROC., W’INSULATION#1, CHAMBER A	1
AMAT	0040-33520	BRACKET, GAS LINE PROC W/ INSLTN #2 CENTRAL	2
AMAT	0040-33532	HOLDER, LIFT PIN, FLOATING	3
AMAT	0040-33541	BRACKET UPPER SHEILD	1
AMAT	0040-34263	COVER	2
AMAT	0040-34615	SENSOR PLATE	2
AMAT	0040-34824	COVER ENCLOSURE MAG-LEV CONTR	2
AMAT	0040-35067	EMERGENCY OFF SWITCH	1
AMAT	0040-35134	CAP, EXHAUST	1
AMAT	0040-35237	COVER PLATE	3
AMAT	0040-35238	COVER PLATE	1
AMAT	0040-35344	BELLOWS	2
AMAT	0040-35381	POWER BOX	3
AMAT	0040-35483	BRK, CLAMP TOP LID, MXP CENTURA	1
AMAT	0040-35485	ELBOW,2VCR,SS316L,METCH R2	1
AMAT	0040-35496	PLATE, RF BOX	1
AMAT	0040-35527	FLEX BELLOWS	1
AMAT	0040-35553	BELLOWS	6
AMAT	0040-35854	PEDESTAL,145MM,SEMI MAJOR FLAT, DPS	1
AMAT	0040-36000	BOX, INTERLOCK, GAS LOCK	1
AMAT	0040-36189	CLAMP,SUPPORT BRACKET,ENDPOINT	4
AMAT	0040-36193	LOCK OUT BRACKET	7
AMAT	0040-36274	SHIELD	1
AMAT	0040-36284	ENCLOSURE,INTERLOCK	1
AMAT	0040-36285	CONN,CERAMIC HEATER	1
AMAT	0040-36290	BELLOWS,LOWER DCXZ	5
AMAT	0040-36360	BRACKET NUT UNISTRUT	1
AMAT	0040-36815	WELDMENT, COVER, SPILL SENSOR	2
AMAT	0040-36843	WELDMENT BELLOW FEED THUR HEATED LINER	1
AMAT	0040-36846	BST-LDS LEVEL INDICATOR COVER	1
AMAT	0040-36853	PLATE,FRONT NOSE,BST-CVD	1
AMAT	0040-36867	COVER TEOS GAS LINE CH 300MM PRODUCER	1
AMAT	0040-37132	BRACKET, CLAMP, LINE	1
AMAT	0040-37175	PLATE, MTG DRIVER, 300MM	1
AMAT	0040-37588	BRACKET, FAN, VAR SPEED BLOWER DRIVER	2
AMAT	0040-37588	BRACKET, FAN, VAR SPEED BLOWER DRIVER	2
AMAT	0040-37658	TUBE, LIFT, DCSXZ	3
AMAT	0040-37672	FACE PLATE TXZ 200MM	2
AMAT	0040-37735	BLOCK MIXER MICROWAVE REMOTE	1
AMAT	0040-38029	BELLOWS FOR CENTURA HEATER LIFT	1
AMAT	0040-38050	MOUNT BRACKET,BIAS MATCH,DPS DT CHBR	2
AMAT	0040-38114	PLATE, MNTG, DPA SYSTEM INTERCONNECT BD, CENTURA	1
AMAT	0040-38300	BRACKET	1
AMAT	0040-38354	HOUSING	1
AMAT	0040-38398	COVER	1
AMAT	0040-38472	BRACKET, MULTI CONNECTOR GAS PANEL, 300M	2
AMAT	0040-38609	SST METAL BLOCK 1 5/8 X 1 5/8 X 1 3/8	1
AMAT	0040-38662	CLAMP, QUARTZ WINDOW, PRODUCER 200MM	18
AMAT	0040-38770	GAS SPRING LID	4
AMAT	0040-38783	BRACKET GPLIS/CH GAS LINES 300MM PRODUCE	53
AMAT	0040-38981	PLUG, SHIPPING UNIVERSAL PROD	1
AMAT	0040-38981	PLUG, SHIPPING UNIVERSAL PROD	1
AMAT	0040-39045	SHOWERHEAD, DUAL	1
AMAT	0040-39131	POWER STRIP	1
AMAT	0040-39254	PLATE, ALIGN PIN CLEAR LID	5
AMAT	0040-39431	MODERN COMPONENT BRACKET	1
AMAT	0040-39498	HINGE, LID, LEFT, 300MM PRODUCER	1
AMAT	0040-39498	HINGE, LID, LEFT, 300MM PRODUCER	2
AMAT	0040-39569	BELLOWS,ALUM TUBE,SMALL EAR,UNIVERSAL	1
AMAT	0040-39633	PANEL	1
AMAT	0040-39635	PANEL	1
AMAT	0040-39715	PANLE SENSOR-HEATER	1
AMAT	0040-39721	BRACKET, MIRROR, TRANSFER CHAMBER	1
AMAT	0040-39756	FORELINE, VERTICAL PRODUCER 200MM	1
AMAT	0040-39944	BRACKET GAS SPRING PUSH L 300MM	2
AMAT	0040-39971	BRACKET, LEFT, GAS SPR D X Z	1
AMAT	0040-40047	PAD, LEVELING, 3/4-10	1
AMAT	0040-40103	FEED THRU ASSY RF	1
AMAT	0040-40322	WELDMENT, SCREEN FRAME, PUMP PORT LINER	1
AMAT	0040-40928	BRACKET ASSY, PROGRAMMABLE RE	1
AMAT	0040-41006	COVER PLATE	1
AMAT	0040-41060	MICRO CLAMP FOUR PT	8
AMAT	0040-41174	END EFFECTOR HOLDER/ WET ROBO	9
AMAT	0040-41199	PANEL, FDP BULKHEAD 2, CENTURA AP	6
AMAT	0040-41488	BRACKET CHAMBER FRAME DPSII	3
AMAT	0040-41924	ESC ASSY, 200MM SNNF DPS HT CATHODE	1
AMAT	0040-41949	STAND OFF	2
AMAT	0040-41949	STAND OFF	2
AMAT	0040-41985	COVER RSP PLUG HDP-CVD WLTIMA 1.5	1
AMAT	0040-42312	PEEK,FINGERS,SHORT	1
AMAT	0040-42314	FINGER ASSY PEEK LONG WALKING BEAM 300MM	2
AMAT	0040-42315	FINGER ASSY PEEK SHORT WALKING BEAM 300M	2
AMAT	0040-42357	GUIDE, RIGHT,10 VALVE	2
AMAT	0040-42358	GUIDE, LEFT, IO VALVE	4
AMAT	0040-42706	STAND OFF, SUPPORT	1
AMAT	0040-42956	BAR, MOUNTING, GPLIS, TICL4 P	4
AMAT	0040-43113	COVER	2
AMAT	0040-43204	PIVOT BLADE ASSY	1
AMAT	0040-43364	LEFT SIDE PLATE, LID LIFTER,	1
AMAT	0040-43704	PIVOT, BLADE ASSEMBLY LEFT HAND	304
AMAT	0040-43704	PIVOT, BLADE ASSEMBLY LEFT HAND	3
AMAT	0040-43992	COVER, REAR, GRIP, DRV. +/-15	1
AMAT	0040-44187	BRACKET, SUPPORT, LOWER, COLD	6
AMAT	0040-45290	CENTER BRACKET, ROLLER SUPPOR	6
AMAT	0040-45413	MTG PLATE SENSOR	1
AMAT	0040-47051	CU, BULKHEAD,CABLE,MOTORIZED,TILT,IECP	1
AMAT	0040-47226	WELDMENT, FEET, LEVELING, 3.75LG	5
AMAT	0040-47226	WELDMENT, FEET, LEVELING, 3.75LG	3
AMAT	0040-47450	COOLING PEDESTAL WITH PINS 20	1
AMAT	0040-47647	BRACKET, FRONT PERF PLATE LINK FRAME	1
AMAT	0040-47871	Housing, MCG Sensor	4
AMAT	0040-47985	DI ARM, BACK FLOW, 300MM IBC,	2
AMAT	0040-48014	ROTATION HOME FLAG, DISPENSE ARM ASSY, W	1
AMAT	0040-48030	UPPER CHAMBER LINER	14
AMAT	0040-48339	SHOWER HEAD,DUAL	10
AMAT	0040-48400	RING (CLEANED)	1
AMAT	0040-48654	BRACKT, COLUMN, RIGHT LOWER DOOR SUPPORT	1
AMAT	0040-48839	SHOWERHEAD, DUAL	4
AMAT	0040-49572	BRACKET DI WATER PNEUMATIC VALVE MOUNTING LINK FRA	1
AMAT	0040-49665	BASE, DC SOURCE CONNECTOR, 300MM PVD	1
AMAT	0040-49666	REPLACED BY 0040-81497, ECO 211501	1
AMAT	0040-50843	PLATE	1
AMAT	0040-52790	BRACKET	1
AMAT	0040-54154	BRACKET, MOUNTING	1
AMAT	0040-60434	VEEM BACK PANEL	1
AMAT	0040-60626	SMALL METAL BAR 3/8IN X 1/2IN X 2IN LONG	2
AMAT	0040-61187	VIEWPORT POLYCARBONATE PRODUCER LOADLOCK	1
AMAT	0040-61248	LIFT PINS, P29, DPS, 150MM	7
AMAT	0040-61343	YOKE, FEND ROBOT GRIPPER 300MM	1
AMAT	0040-62636	TRAY EXTENSION, TAG READER, A	2
AMAT	0040-63563	CAP, FEED THRU	5
AMAT	0040-66431	COVER	1
AMAT	0040-70082	BRACKET, LOADER INTERCONNECT PCB	1
AMAT	0040-70097	HOUSING, BALL BUSHING LOADLOCK ORIENTER	2
AMAT	0040-70184	POST, PVD CHAMBER CART	1
AMAT	0040-70250	COOLING PLATE	29
AMAT	0040-70289	SWLL DRIVE MOUNTING V-BLOCK	5
AMAT	0040-70291	ASSEMBLY, SWLL BELLOWS	1
AMAT	0040-75287	FACEPLATE, W/LOCKOUT,CB-4/CB-5, TWIN 350	1
AMAT	0040-75434	BRACKET, FRONT INTERLOCK SWITCH	5
AMAT	0040-75625	BRKT FUSE XFRMR AC REMOTE	1
AMAT	0040-75668	ASSEMBLY, IDLER PULLEY	4
AMAT	0040-75769	OBS: COVER PC BOARD SMIF INTERCONNECT	1
AMAT	0040-75893	FLANGE, MOUNTING	2
AMAT	0040-75930	BRKT. CASSETTE PRESENT SENSOR CENTURA	2
AMAT	0040-75936	COVER DOORS,LL’S	4
AMAT	0040-76019	COVER, HOUSING	1
AMAT	0040-76022	PLATE ADAPTER, E-RACK COOLING	1
AMAT	0040-76129	SHAFT/FLANGE INDEXER, WIDE BO	2
AMAT	0040-76252	LOADER, TIRT CASSETTE	5
AMAT	0040-76294	MANIFOLD ADAPTOR	1
AMAT	0040-76310	MANIFOLD CONNECTORS	1
AMAT	0040-76385	COVER TOP MF AUX PWR BOX CENTURA	1
AMAT	0040-76403	BRACKET	1
AMAT	0040-76480	ROBOT ARM	1
AMAT	0040-76555	TRAY STORAGE WAFER DUMMY WBLL CMF CENTURA	2
AMAT	0040-76708	OUTER CLAMP RING	5
AMAT	0040-77090	LOWER PLATEN	4
AMAT	0040-77153	TRAY, CASSETTE, MEG	2
AMAT	0040-77181	FLEXURE	2
AMAT	0040-77243	RING	7
AMAT	0040-77405	TOOL,DDF3 I-CLP	1
AMAT	0040-77462	AXLE, WRIST GEAR ROBOT	1
AMAT	0040-77471	ARM SUPPORT	1
AMAT	0040-77522	GUIDE, UPPER FLUSH MOUNT NOVA INTEGRATI	1
AMAT	0040-77545	LINK PIVOT RIGHT	10
AMAT	0040-77577	HOUSING, 300MM HEAD	1
AMAT	0040-77799	RETAINING RING COMPOSITE (NOGROOVES)	30
AMAT	0040-77799	RETAINING RING COMPOSITE (NOGROOVES)	2
AMAT	0040-77961	BRACKET, DRIP PAN SUPPORT, MI	1
AMAT	0040-78014	MANIFOLD, AIR WAFER TRASNFER UNIT 300MM	2
AMAT	0040-78211	DISK HOLDER PEEK PAD CONDITIONER	1
AMAT	0040-78261	EM TUBE,8 INCH,TITAN,HEAD,PROFILER	11
AMAT	0040-78379	MANIFOLD, CLEANCUP, REFLECTION	1
AMAT	0040-78442	DRIVE SHAFT ASSY	1
AMAT	0040-83985	ASSEMBLY, UL 94V-0, CASSETTE HOLDER, 200	2
AMAT	0040-84263	CASSETTE FIN, AMBIENT CONTROL CHAMBER	2
AMAT	0040-89404	BRACKET	1
AMAT	0040-90082	BELLOWS ASSY	1
AMAT	0040-90098	FILTER AIR CTRL MODULE	2
AMAT	0040-90907	FLANGE, ANTI-ROTATION	1
AMAT	0040-91253	PICK UP SHOE 150MM	1
AMAT	0040-91253	PICK UP SHOE 150MM	3
AMAT	0040-91763	ASSY BELLOWS 100-150MM	1
AMAT	0040-91910	ADAPTOR – SHORT	1
AMAT	0040-91922	MANIFOLD,PIGTAIL DIN 8	1
AMAT	0040-92467	PIPE COOLING	1
AMAT	0040-92586	HARD STOP LEFT	1
AMAT	0040-92945	MVG CLIP	2
AMAT	0040-93051	SHOE PICK UP	2
AMAT	0040-93234	TUBE OUTER COOLING	1
AMAT	0040-93340	OVEN NOZZLE	8
AMAT	0040-93365	BELLOWS MANIPULATOR ASSEMBLY	1
AMAT	0040-93481	GASLINE ASSY INSULATED	2
AMAT	0040-94052	INSERT, HSINK COATED 150-0 DEG	1
AMAT	0040-94133	SEALING NUT	3
AMAT	0040-94187	FILAMENT CLAMP, R/H, DIA 2.2	1
AMAT	0040-94202	MOUNTING GROUND ELECTRODE	2
AMAT	0040-94215	BLOCK,SLIDER	1
AMAT	0040-94220	LEAD SHIELD	1
AMAT	0040-94454	TUBE, SUPPORT	1
AMAT	0040-94968	ROBOT SPRING ASSY	1
AMAT	0040-95689	FXP CLIP SILICON COATED	1
AMAT	0040-95852	PIPE GAS EXTRACTION	1
AMAT	0040-96521	SUPPORT RESISTOR CHAIN	2
AMAT	0040-96525	FIXED RESTRAINT	13
AMAT	0040-969352	SUPPORT BAR	1
AMAT	0040-97344	HANDLE MRS	1
AMAT	0040-97400	FORELINE	1
AMAT	0040-97401	VAC MANIFOLD.550LG/KF40	1
AMAT	0040-98663	BLOCK, SLIDE	2
AMAT	0040-DY228	PIN ANTI – ROTATION 200 MM	1
AMAT	0041-00298	ELECTRODE, ALUM 55 HOLES	17
AMAT	0042-50067	CABLE RIBBON, ENCODER	1
AMAT	0045-00013	CLAMP GAS TUBE (REPLACES 0300-00003)	7
AMAT	0045-00030	RING, PEDESTAL	85
AMAT	0045-00031	RING, PEDESTAL, BOTTOM	111
AMAT	0045-00091	FEED ROD SET	2
AMAT	0045-0031	RING PEDESTAL BOTTOM	3
AMAT	0045-20002	CLAMP ACTUATOR SHUTTER LINKAGE	1
AMAT	0045-90005	PLATE GEAR MOUNTING	1
AMAT	0050-00032	TUBING, GAS SUPPLY, CHAMBER A	5
AMAT	0050-00929	WELDMENT 1/2 ATM SWITCH ENDPOINT DETECTOR	1
AMAT	0050-00939	TUBE ASSY	1
AMAT	0050-01001	LINE, RETURN IOC VAPOR	1
AMAT	0050-01072	WELDMENT, TEOS LINE SPACER, DXZ CENTURA	1
AMAT	0050-02390	WLD,BTM FEED EVEN,MANUAL VALVE UPPER CO	1
AMAT	0050-02534	GAS LINE	1
AMAT	0050-03432	LINE, NUPRO	1
AMAT	0050-03433	LINE, NUPRO	1
AMAT	0050-03434	LINE, NUPRO	1
AMAT	0050-03435	LINE, NUPRO	1
AMAT	0050-03436	LINE, NUPRO	1
AMAT	0050-03437	LINE, NUPRO	1
AMAT	0050-03438	LINE, NUPRO	1
AMAT	0050-03439	LINE, NUPRO	1
AMAT	0050-03440	LINE, NUPRO	1
AMAT	0050-03441	LINE, NUPRO	1
AMAT	0050-03670	LINE SPU04	2
AMAT	0050-03755	GAS LINE	2
AMAT	0050-03766	GAS LINE	1
AMAT	0050-03927	GAS LINE	1
AMAT	0050-04523	GAS LIINE	1
AMAT	0050-04938	WELDMENT	1
AMAT	0050-04999	WELDMENT, GOOSE NECK	1
AMAT	0050-05058	WELD/MAN,5RA FUJIKIN 1+FV/FL POS 2 EXT.,	2
AMAT	0050-05061	WELDMENT, MANIFOLD	1
AMAT	0050-05172	GL, HGL, CHA, DUMP, IM, BASIC	1
AMAT	0050-05256	GASS FEED 5RA, WALL, 300MM, DPS	3
AMAT	0050-05256	GASS FEED 5RA, WALL, 300MM, DPS	2
AMAT	0050-06084	WLEMT 3 FINAL VLVS CTR VERIFL	1
AMAT	0050-06184	GAS LINE	3
AMAT	0050-06249	WELDMENT 2 FINAL VLVS OFFSET FUJ	1
AMAT	0050-06817	WELDMENT, WXZ	1
AMAT	0050-06882	WELDMENT, INPUT, GAS MODULE MCVD XZ	1
AMAT	0050-07028	MANIFOLD, CARRIER, MICRON DLI	1
AMAT	0050-07742	GAS LINE MANIFOLD	1
AMAT	0050-08003	GAS LINE	6
AMAT	0050-09003	TUBE WELDMENT 3:1 OFFSET	1
AMAT	0050-09009	TUBE WELDMENT FINAL LINE	1
AMAT	0050-09019	TUBE WELDMENT ELBOW FILT	3
AMAT	0050-09026	MANIFOLD LLC VENT	1
AMAT	0050-09032	PIPING	1
AMAT	0050-09080	STAINLESS STEEL TUBE	1
AMAT	0050-09377	ELBOW	2
AMAT	0050-09385	WELDMENT MAINIFOLD, 3 LINES	1
AMAT	0050-09386	WELDMENT MANIFOLD, 6 LINES	5
AMAT	0050-09387	SPOOL CHAMBER (AR PURGE)	2
AMAT	0050-09398	WELDMENT PURGE CHAMBER B	1
AMAT	0050-09399	WELDMENT LINE2 CHAMBER B	1
AMAT	0050-09400	WELDMENT LINE1 CHAMBER B	1
AMAT	0050-09419	WELDMENT MANIFOLD SINGLE VALVE 4L	1
AMAT	0050-09595	TUBE, GAS SUPPLY POSN A&D	1
AMAT	0050-09597	TUBE, GAS SUPPLY B&C	1
AMAT	0050-09644	ADAPTOR, VALVE TO MAN	11
AMAT	0050-09670	TUBE WELDMENT TEOS IN LIQUIED SOURCE ENC	1
AMAT	0050-09678	GAS LINE	1
AMAT	0050-09736	PLUMBING WLDMNT ADAPTOR UNIVERSAL	1
AMAT	0050-09754	PUMPING WLDMNT, MANIFOLD, SINGLE VALVE	1
AMAT	0050-09877	5″GAS FEED WELDMENT	2
AMAT	0050-09955	WELDMENT TUBE INSERT	1
AMAT	0050-10030	WELDMENT	2
AMAT	0050-10048	ADAPTOR, VALVE UNSHIELDED	1
AMAT	0050-10048	ADAPTOR, VALVE UNSHIELDED	24
AMAT	0050-10106	WELDMENT LINE CH A 28 LI	2
AMAT	0050-10140	WELDMENT GAS TUBE	4
AMAT	0050-10186	ADAPTER, MANOMETER, VALVE TO ADAPTER	12
AMAT	0050-10194	WELDM’T EDGE PURGE WX2	1
AMAT	0050-10239	WELDMENT, TIN/HE N2 INTERCONNECT , CVD TIN	1
AMAT	0050-10249	WELDMNT BACK SIDE PRESSURE WXZ	1
AMAT	0050-10256	WELDMENT,AR PURGE	1
AMAT	0050-10259	GAS LINE FLEX	2
AMAT	0050-10308	ELBOW SAE TO 1/2 MALE VCR	9
AMAT	0050-10309	WELDMENT BYPASS ROUGH LINE VER PHASE III	5
AMAT	0050-10312	TUBE GAS	1
AMAT	0050-10477	TUBE WELDMENT CHAMBER BLOWER	9
AMAT	0050-10588	WELDMNT, INLET W/O DIVERTER, WXZ	4
AMAT	0050-13146	4 PORT MANIFOLD	1
AMAT	0050-14534	WELDMENT, WATER RETURN CH.C	1
AMAT	0050-18587	WELDMENT,SIH4,TOP	1
AMAT	0050-18588	GAS LINE,TOP FEED,HDP	7
AMAT	0050-18714	GAS LINE	1
AMAT	0050-18904	WELDMENT, IHC DUMP 2, ULTIMA HDP CVD	1
AMAT	0050-20067	GAS LINE CHAMBER,2 PROCRESS,MFC 8&9VCR	2
AMAT	0050-20073	GAS LINE,CHAMBER 3 HEATER,MFC,1VCR	1
AMAT	0050-20199	2 STAGE VENT L/L CHAMBER RIGHT SIDE	1
AMAT	0050-20406	GASLIINE #5 SYSTEM MANIFOLD	2
AMAT	0050-20459	GASLINE #0 LEFT 2 STAGE L/L VENT VCR	1
AMAT	0050-20609	GAS TUBE	1
AMAT	0050-20662	OBS, GASLINE DUAL VALVE LLC	1
AMAT	0050-20950	UPPER GAS LINE CH3 MFC 12VCR	1
AMAT	0050-21165	GASLINE HTR CH 3 LOWER 5RA VA	2
AMAT	0050-21186	GASLINE HTR BYPASS H2O CHMBR	1
AMAT	0050-21342	GASLINE #2 SYSTEM MANIFOLD	5
AMAT	0050-21577	CASLINE #3 SYSTEM MANIFOLD	2
AMAT	0050-21578	GASLINE #4 SYSTEM MANIFOLD	2
AMAT	0050-25088	G3 SPIDER	1
AMAT	0050-25217	HE GAS LINE	1
AMAT	0050-25237	PROCESS-CARRIER,T,TXZ,CH2/3	2
AMAT	0050-26293	GASLINE EDGE PURGE VERTICALCH3 TXZ	1
AMAT	0050-26295	GAS LINE EDGE PURGE	1
AMAT	0050-26298	STAINLESS STEEL GAS LINE	1
AMAT	0050-26667	HE,DUMP LINE,IN.ZONE,5RA,DPS-CHAMBER	3
AMAT	0050-26704	VENT LINE CHAMBER 3 UPPER	1
AMAT	0050-26707	ADAPTER ELBOW VCR TO MINI CF	4
AMAT	0050-26922	WELDMENT FEEDTHRU 5RA N2 LOADLOCK PURGE	1
AMAT	0050-27752	WELDMENT UPPER, NF3, RPSII, 300MM PRODUC	1
AMAT	0050-27944	MANIFOLD	1
AMAT	0050-28026	GAS LINE, M/F TO CH TRAY AR VENT, ENDURA	1
AMAT	0050-30383	WELDM’T,FORELINE UPPER PMS,WXZ	1
AMAT	0050-30395	GAS MANIFOLD, TUNGSTEN BACKSIDE	1
AMAT	0050-30514	WELDMENT, WATER LINE	1
AMAT	0050-30858-A	GAS LINE	1
AMAT	0050-31063	GAS WELDMENT	2
AMAT	0050-31240	FLANGE ROUSHINE LINE	4
AMAT	0050-31358	WELDMENT, OZONE IN	1
AMAT	0050-31373	GAS LINE, FHD BASIC	1
AMAT	0050-31440	WELDMENT,GASLINE,N2 TURBO PURGE SUPPLY,DPS	1
AMAT	0050-31485	CH. C. WELDMENT MXP/MXP+	1
AMAT	0050-31486	WELDMENT C MXP/MXP+,MAIN PROCESS,C2	1
AMAT	0050-31494	WELDMENT, C MXP/MXP+, MAIN PROCESS C3	1
AMAT	0050-31528	WELDMENT CONNECTOR	1
AMAT	0050-31601	WELDMENT, GAS FEED	1
AMAT	0050-31615	CH B GAS LINE TO FRAME	1
AMAT	0050-32020	GAS LINE	2
AMAT	0050-32076	GAS LINE	2
AMAT	0050-32281	WLDMNT,GAS LINE,ADAPTER CH.A,B,D DXZ CEN	2
AMAT	0050-32354	GAS FEED LINE	1
AMAT	0050-32425	LINE, VALVE, PNEU 1/4 VCR	1
AMAT	0050-32928	GAS LINE	1
AMAT	0050-32930	GAS LINE	2
AMAT	0050-32988	LINE, 3/8 MANUAL VALVE	1
AMAT	0050-33030	WELDEMENT	1
AMAT	0050-33304	WLDMNTN2 HP 20PSIPOS B/D10RA	1
AMAT	0050-33610	FITTING, GAS TUBE ASSY	1
AMAT	0050-33694	LINE, 1/4″ N2 SUPPLY	1
AMAT	0050-33707	LINE CHAM CN2 PURGE + RP VENT W/PS	1
AMAT	0050-33825	VALVE TXZ THROTTLE WELDMENT	31
AMAT	0050-34118	GAS LINE, VALVE	1
AMAT	0050-34671	MANIFOLD, TTF SUPPLY COMMON M/F	4
AMAT	0050-35533	LINK XFER/PROCESS	3
AMAT	0050-35721	LINE, NUPRO	2
AMAT	0050-35922	GAS LINE	2
AMAT	0050-35990	GAS VALVE	1
AMAT	0050-35996	LINE 4 NUPRO CHAMBER A	1
AMAT	0050-36141	GAS LINE MANIFOLD	1
AMAT	0050-36198	LINE,RP EXH.CHAMBER -B	1
AMAT	0050-36199	GAS LINE, EXH. CHAM. B, VALVE/BELLOW	1
AMAT	0050-36214	GAS LINE, PROCESS CHAMBER EXH. A/B MF	1
AMAT	0050-36244	LINE REGULATOR, 3/8 INCOMING, H2 IN GAS JUNGLE CENTURA	1
AMAT	0050-36481	LINE, 1/4 MANUAL VALVE	3
AMAT	0050-36652	TUBE ASSY	1
AMAT	0050-37178	LINE MAIN SIH4-DCS	1
AMAT	0050-37548	GAS LINE	1
AMAT	0050-37560	GAS LINE	3
AMAT	0050-37563	GAS LINE	1
AMAT	0050-37564	GAS LINE	1
AMAT	0050-37568	GAS LINE	1
AMAT	0050-37678	WELDMENT SPOOL 4.69 M/FGECO	1
AMAT	0050-37815	TUBING COOLANT LINE	3
AMAT	0050-37815	TUBING COOLANT LINE	2
AMAT	0050-37878	WELDMENT, CHAMBER C, VENT LINE C1	1
AMAT	0050-38160	GAS FEED LINE	1
AMAT	0050-38189	WELDMENT,CH A IHC	1
AMAT	0050-38199	WELDMENT, CHAMBER B, IHC TO FORELINE B2	1
AMAT	0050-38207	WELDMENT, CHAMBER B, VENT LINE B2 (MXP+)	1
AMAT	0050-38411	WELDMENT,MANIFOLD,7 VALVE,FUJIKIN 5RA	1
AMAT	0050-38964	GAS LINE, RP EXH. TEE CHAMB	1
AMAT	0050-39049	FORELINE TUBE	1
AMAT	0050-39100	WELDMENT, CHAMBER B, MAIN FRAME, PROCESS B3	1
AMAT	0050-39124	GAS LINE	1
AMAT	0050-39339	AMAT PART	1
AMAT	0050-39565	GAS LINE	2
AMAT	0050-39609	GAS LINE	1
AMAT	0050-40015	TUBE	1
AMAT	0050-40136	GAS LINE	1
AMAT	0050-40159	GAS LINE, MIXED, LOWER ISOLATOR, SUBZERO	13
AMAT	0050-40309	GAS LINE MANIFOLD	2
AMAT	0050-40494	GAS LINE	1
AMAT	0050-40513-P1	GAS LINE	1
AMAT	0050-40523	LINE MIX DOPANT 1 VENT 300MM EPI	1
AMAT	0050-40598-PO	GAS LINE	1
AMAT	0050-40601	GAS LINE	3
AMAT	0050-40657	WELDMENT	1
AMAT	0050-40667	ADAPTER CHAMBER VENT LINE	14
AMAT	0050-40761	EXHAUST WELDMENT LLCK,MOD PR SW	10
AMAT	0050-40762	TBG, ELBOW, LLCK EX MAN PR SW	3
AMAT	0050-40792-P2	GAS LINE	6
AMAT	0050-40822-002	GAS LINE	2
AMAT	0050-40968	VACCUUM LINE	1
AMAT	0050-41195	GAS LINE, BLOCKVALVE TO INJEC. VALVE (TE	1
AMAT	0050-41235	GAS LINE	1
AMAT	0050-41241-003	GAS LINE MANIFOLD	3
AMAT	0050-41321	GAS LINE ASSY	2
AMAT	0050-41347	GAS LINE, VAC CHUCK HORIZONTAL CH2 TXZ	1
AMAT	0050-41552	GAS LINE, INJECTION VALVE TO	1
AMAT	0050-41773-001-A	GAS LINE MANIFOLD	1
AMAT	0050-41834	ADAPTER CHAMBER VENT, 300MM TXZ	1
AMAT	0050-41834	ADAPTER CHAMBER VENT, 300MM TXZ	2
AMAT	0050-41874	FORELINE, ULTIMA 300MM HDPCVD	1
AMAT	0050-41928	ELBOW, LINE. ADAPTER	1
AMAT	0050-42235-002	GAS LINE	2
AMAT	0050-42411-001-A	GAS LINE	1
AMAT	0050-42430	WELDMENT	1
AMAT	0050-42874	LINE POSITION 13 TO STK 2 300	1
AMAT	0050-43470	GASLINE, INLET TO VALVES, SWLL, CENTURA	2
AMAT	0050-43748	GAS LINE, MAINFRAME TO CHAMBE	1
AMAT	0050-45379	VAC LINE	1
AMAT	0050-45392	LINE N2 VENT	3
AMAT	0050-46265	TUBING 90 ELBOW	1
AMAT	0050-46868	GAS TUBE, TOP O2, WELDMENT	3
AMAT	0050-47741	GAS LINE, O2, SIDE2, ULTIMET HOP CVO	1
AMAT	0050-48703	GAS LINE	1
AMAT	0050-49113	WELDMENTS	1
AMAT	0050-49250	LINE, BPSG, CH N2, EXHAUST, CH A, RTP, T	1
AMAT	0050-49357	GAS LINE	1
AMAT	0050-50674	WELDMENT	1
AMAT	0050-52526	MANIFOLD CHAMBER TI CL4 PRODUCER	1
AMAT	0050-54509	WELDMENT, SPOOL 6.97″ M/F, TPCC	1
AMAT	0050-54510	WELDMENT, SPOOL 3.49″ M/F, TPCC	1
AMAT	0050-54577	WELDMENT, FINAL LEFT TO CH POS 6 TPCC	1
AMAT	0050-62098	Line, Lower IHC, ch.C	1
AMAT	0050-62208	WELDMENT	3
AMAT	0050-62983	WELDMENTS	1
AMAT	0050-63150	WELDMENT	1
AMAT	0050-63309	WELDMENT, GASFEED, TOP SOURCE	2
AMAT	0050-65138	GASLINE, CONNECTOR	3
AMAT	0050-66160-A	GAS LINE MANIFOLD	1
AMAT	0050-66236-A	GAS LINE	4
AMAT	0050-70003	EXHST WELDMENT LLC SENSORS	1
AMAT	0050-70013	ELBOW, GAS LINE	1
AMAT	0050-70025	LOAD LOCK DIFF	1
AMAT	0050-70083	GASLINE	1
AMAT	0050-70106	GAS LINE	1
AMAT	0050-75161	PLMB WELDMENT,VER 4TEOS,CH-B,GAS PANEL	2
AMAT	0050-75729	GASLINE MIXED, LOWER ISOLATOR, HT BESC	6
AMAT	0050-75730	GASLINE CAJAN, UPPER ISOLATOR	3
AMAT	0050-76033	LLA VENT SIDE NARR LLC	1
AMAT	0050-76592	EXHAUSE LINE	1
AMAT	0050-76610	2 STAGE VENT LLK CHAMBER LEFT SIDE CAJON	1
AMAT	0050-76887	GASLINE NBLL – B VENT CENTURA COMMON M/F	1
AMAT	0050-77119	SLURRY SENSOR	2
AMAT	0050-77120	SLURRY SENSOR	2
AMAT	0050-77121	SLURRY SENSOR	2
AMAT	0050-77172	TUBE ASSY	2
AMAT	0050-77173	TUBE ASSY	2
AMAT	0050-77174	TUBE ASSY	2
AMAT	0060-01152	DAUGHTER BOARD	1
AMAT	0060-21215	LABEL ENDURA VHP FRONT PANEL	1
AMAT	0060-35350	RTP ROBOT ALIGNMENT KIT	1
AMAT	0060-76127	LAB.WARNING HAZ/CURRENT/ANSI-IEC MULTILIN. T,K,J	2
AMAT	0090-00008	ELECTRICAL ASSY, SLIT VALVE OPEN/CLOSE S	17
AMAT	0090-00008	ELECTRICAL ASSY, SLIT VALVE OPEN/CLOSE S	1
AMAT	0090-00018	JUMPER PLUG ASSY	1
AMAT	0090-00021	MOTOR ASSY	1
AMAT	0090-00022	MOTOR, ASSY	1
AMAT	0090-00026	PRESSURE SWITCH, HAL ATM	2
AMAT	0090-00026	PRESSURE SWITCH, HAL ATM	3
AMAT	0090-00028	SWITCH, PRESSURE	1
AMAT	0090-00048	MONOCHROMATOR HOME SENSOR ASS	3
AMAT	0090-00073	ELECT. ASSY., RF CONN INTLK SW, E-DTCU	6
AMAT	0090-00073	ELECT. ASSY., RF CONN INTLK SW, E-DTCU	2
AMAT	0090-00131	ASSY MONITOR LIGTH PEN SELECT W/PUSH BUT.	2
AMAT	0090-00131	ASSY MONITOR LIGTH PEN SELECT W/PUSH BUT.	1
AMAT	0090-00154	PENDANT AND CABLE	1
AMAT	0090-00233	INTERLOCK ASSY PCB	9
AMAT	0090-00246	ASSEMBLY, GEN RACK RF ON ROTA	1
AMAT	0090-00341	ESC ENA BLOCK	3
AMAT	0090-00341	ESC ENA BLOCK	1
AMAT	0090-00358	SERVOMOTOR W/ 0040-04387002	5
AMAT	0090-00399	CABLE ASSY, LAMP INTERLOCKS 2	3
AMAT	0090-00400	ASSY, HEATER DRIVER CAPACITOR FILTER	1
AMAT	0090-00443	PLATEN UNION TEMPERATURE SENSOR	1
AMAT	0090-00484	CABLE ASSY	1
AMAT	0090-00484	CABLE ASSY	3
AMAT	0090-00555	SWITCH, 3300 SCCM AIR, 3 POS MR CAP	10
AMAT	0090-00562	HARNESS, H2O BOX FAN 300MM PROCESS CHAMB	1
AMAT	0090-00587	ASSY, TRM SNSR MAG LEG WHEELS DOWN	13
AMAT	0090-00635	FAN	8
AMAT	0090-00637	ASSY, MAINFRAME INTERLOCK BOARD SF3	1
AMAT	0090-00655	MOTOR ASSY, 200W SERVO W/ BRAKE, REV. 5	1
AMAT	0090-00701	ASSEMBLY, 300MM CDA PRESSURE SWITCH	3
AMAT	0090-00764	RF FILTER ASSY	1
AMAT	0090-00769	ELECTRONIC PRESSURE TRANSDUCER	14
AMAT	0090-00798	HEATER ASSEMBLY, WALL ASP 300MM 22	2
AMAT	0090-00879	HARNESS, IM, 300MM WALKING BEAM, WAFER PR	1
AMAT	0090-00880	HARNESS, IM, 300MM, BUFFER, WAFER PRESENT	1
AMAT	0090-00916	MEGASONIC TANK HIGH LEVEL SWITCH	1
AMAT	0090-00936	HARNESS, SWITCH, CHEM FLOW, BRUSH LDM	1
AMAT	0090-00958	LAMP ASSY, WM-502-B WITH LEDS	3
AMAT	0090-01014	CONVENIENCE OUTLET ASSEMBLY	2
AMAT	0090-01022	HRNSS,INPT,MOD,BUFR,WFR,SNSR	4
AMAT	0090-01154	INDICATOR, RED/GREEN, WATER FLOW SWITCH,	1
AMAT	0090-01632	CABLE	1
AMAT	0090-01632	CABLE	1
AMAT	0090-01719	SENSOR ASSY	1
AMAT	0090-02798	ELECT ASSY, LEVEL SENSOR, 1/2	1
AMAT	0090-09004	CASSETTE LOCKED SENSOR A	1
AMAT	0090-09009	PUMP OVERTEMP CONNECTION	1
AMAT	0090-09044	FLOW SENSOR N2 PURGE	2
AMAT	0090-09045	PROBE, FLUID SPILL PAN	1
AMAT	0090-09046	MONOCHRMATOR BASE	2
AMAT	0090-09062	ASSY, THEMAL ELEC DRIVER	2
AMAT	0090-09068	CABLE ASSY GEN RACK	1
AMAT	0090-09070	ASSY. SWITCH/CABLE CHAMBER ATMOSPHERE	1
AMAT	0090-09071	DAQ MK II CHAS MOD	1
AMAT	0090-09073	VAPOR LINE HEATER POSN C PRS3 H2O VDSII	1
AMAT	0090-09084	RF SWITCH	1
AMAT	0090-09119	ASSY, OVER TEMP SWITCH, INJ.VALVE	1
AMAT	0090-09119	ASSY, OVER TEMP SWITCH, INJ.VALVE	1
AMAT	0090-09121	CABLE ASSY,HEATER	1
AMAT	0090-09125	A.C. WINDOW ASSY QUARTZ CENTERED OPTICS	3
AMAT	0090-09136	ASSY, FIBERIPTIC SENSOR DEGASSER	1
AMAT	0090-09137	CABLE ASSY	2
AMAT	0090-09138	CABLE ASSY, SLD SW, UHP	1
AMAT	0090-09139	PHOTOHELIC GAUGE (DWYER)	1
AMAT	0090-09139	PHOTOHELIC GAUGE (DWYER)	2
AMAT	0090-09157	BASE HV CONN, CATHODE, DPS MEC	1
AMAT	0090-09162	SWITCH ASSY. OZONATOR .28 PSI	1
AMAT	0090-09237	ASSY, PAD HEATER LID TRENCH NARROW	5
AMAT	0090-09242	COIL MAGNET SIDE	2
AMAT	0090-09273	ESC,METAL	3
AMAT	0090-10036	MOTOR	1
AMAT	0090-16033	ASSY, MONITOR LIGHT PEN SELECT	1
AMAT	0090-16034	ASSY, LOCKABLE LIGHT PEN SELECT	1
AMAT	0090-18007	ASSY SWITCH INTERLOCK ECPS	1
AMAT	0090-20003	ASSY,VALVE,SENSOR	1
AMAT	0090-20025	ASSY, EMO BYPASS JUMPER	1
AMAT	0090-20029	WAFER SENSOR	1
AMAT	0090-20040	4-WAY, DOUBLE VALVE	1
AMAT	0090-20065	ASSY CONNECTION,GAUGE BYPASS	2
AMAT	0090-20112	SW ASSY, SYS LAMPS W/ MAINTENANCE	2
AMAT	0090-20113	HONEYWELL SKINNER VALVE(71295SN2KNJ1N0H111C2)	1
AMAT	0090-20127	ELECTRICAL ASSY BUFFER DOWN	5
AMAT	0090-20128	ELECTRICAL ASSY BUFFER UP	1
AMAT	0090-20130	ELECTRICAL ASSY COVER INTCK SW	6
AMAT	0090-20139	SENSOR	1
AMAT	0090-20143	ASSY PHOTO I/O	4
AMAT	0090-20162	SWITCH ASSY	3
AMAT	0090-20188	FLOWMETER, ALPS	2
AMAT	0090-20206	CABLE	1
AMAT	0090-20209	ASSY EXT SMOKE DET	4
AMAT	0090-20210	ASSY STATUS LAMP LED WM RED	1
AMAT	0090-20252	ASSY VALVE 3-WAY 24VDC RING LUGS	2
AMAT	0090-20267	SOLENOID VALVE ASSY W/CABLE	1
AMAT	0090-20298	FAN ASSY, BACK COVER, RF MATCH, VECTRA I	18
AMAT	0090-20298	FAN ASSY, BACK COVER, RF MATCH, VECTRA I	13
AMAT	0090-20410	ELEC ASSY, VACUUM SENSOR WAFER LOADER	4
AMAT	0090-20410	ELEC ASSY, VACUUM SENSOR WAFER LOADER	3
AMAT	0090-35118	ELECT. ASSY LAMP TEMP SW CENTYRA DPS.	14
AMAT	0090-35121	ELECT. ASSY, FAC PANEL INTERLOCK SW. DPS CHAMB	1
AMAT	0090-35126	HTR CABLE ASP CHAMBER, POS C & D CENTURA	1
AMAT	0090-35132	MICRO SWITCH,RF CONNECTOR	7
AMAT	0090-35134	D_SHELL,ASSY,ESC 195MM,FLAT	1
AMAT	0090-35145	FLOW SENSOR NITROGEN PURGE	1
AMAT	0090-35157	ASSY, ELECTRICAL, RF TAP, DTCU DPS, METCH, RO	2
AMAT	0090-35161	PLATE ASSY	2
AMAT	0090-35483	BRK, CLAMP TOP LID, MXP CENTURA	1
AMAT	0090-35688	ESC ASSY,200MM, NOTCH (2), SOLID, XT FIN	11
AMAT	0090-35688	ESC ASSY,200MM, NOTCH (2), SOLID, XT FIN	5
AMAT	0090-35760	ASSY, EMO SWITCH & INTER-CIRC	1
AMAT	0090-36127	PCB EMMISSIVITY AND SENSOR	1
AMAT	0090-36129	ASSY. SENSOR – AMP/TEMP INTERLOCK	2
AMAT	0090-36210	ELECTR ASSY. TEC UPR LID SW	1
AMAT	0090-36241	ASSY. HV ESC, 200 CATHODE	1
AMAT	0090-36308	HTR ASSY. LINE PRE-HTR G-PLIS MCYD	4
AMAT	0090-36321	SWITCH AC & RF INTERLOCK	2
AMAT	0090-36321	SWITCH AC & RF INTERLOCK	5
AMAT	0090-36340	ASSEMBLY, INTERLOCK SWITCH	18
AMAT	0090-36340	ASSEMBLY, INTERLOCK SWITCH	3
AMAT	0090-36445	ELECT.ASSY.LOWER CHAMBER COVE	1
AMAT	0090-36532	0100-20012 ISOLATION AMP PCB	8
AMAT	0090-36552	HARNESS ASSY, FANS, 300MM H.E MATCH	1
AMAT	0090-39198	ASSY,BUZZER,DOME LIFT,UP BUZZER	1
AMAT	0090-39202	ASSY SELECT RE MOTE CONTROL DOME LIFT DPS.	1
AMAT	0090-39207	ASSY, ELECTRICAL COVER INTERLO	5
AMAT	0090-40014	SWITCH, OVER TEMP ROOF TOP	2
AMAT	0090-70013	ELEC. ASSY THERMAL CIRCUIT	8
AMAT	0090-70033	ASSY STATUS LAMP RYG-LED	1
AMAT	0090-75004	SW ASSLY, THERMAL CUTOUT FOR 5KVA	2
AMAT	0090-75007	MOTOR BRAKE ENCODER ASSY	1
AMAT	0090-75015	PCB, V440G9, CIRCUIT BOARD	8
AMAT	0090-76002	ASSY, SOLENOID	2
AMAT	0090-76002	ASSY, SOLENOID	2
AMAT	0090-76004	ASSY, SOLENOID 1/16ORF. W/2-PIN CONN.	4
AMAT	0090-76048	ASSEMBLY, 300MM OTF EMITTER, J4	1
AMAT	0090-76054	ASSEMBLY, LLC CASSETTE PRESENT	1
AMAT	0090-76065	MOTER ASSY., ROTATION	3
AMAT	0090-76097	PCB	1
AMAT	0090-76106	ELEC. ASSY, THERMAL CIRCUIT BREAKER	1
AMAT	0090-76106	ELEC. ASSY, THERMAL CIRCUIT BREAKER	3
AMAT	0090-76109	PCB, ASSY, ELECTRICAL, SBC, SYNERGY, 68040	7
AMAT	0090-76114	ASSY, IPS AC DISTRIBUTION	1
AMAT	0090-76115	ASSY 300MM WAFER SENSOR	5
AMAT	0090-76115	ASSY 300MM WAFER SENSOR	1
AMAT	0090-76170	SW ASSY THERMOSTAT	1
AMAT	0090-77001	ASSY SENSOR VACPT-613 PM2	1
AMAT	0090-77006	ASSY LVDT ZT-510/500 PM1	3
AMAT	0090-77007	ASSY LVDT ZT-610/600 PM1	5
AMAT	0090-77008	ASSY LVDT ZT-810/800 PM2	1
AMAT	0090-77031	SWITCH-ROBOT	1
AMAT	0090-77031	SWITCH-ROBOT	9
AMAT	0090-77033	ROBOT DOOR SWITCH	1
AMAT	0090-77037	CONTROLLER, SIGNAL LIGHT	1
AMAT	0090-77037	CONTROLLER, SIGNAL LIGHT	1
AMAT	0090-77049	VALVE-SOLENOID (W/ PCB CONNECT)	4
AMAT	0090-77049	VALVE-SOLENOID (W/ PCB CONNECT)	1
AMAT	0090-77053	TRANSDUCER,PRESSURE	2
AMAT	0090-77057	MOTOR,SLURRY PUMP	3
AMAT	0090-77064	DOOR SWITCH ROBOT	1
AMAT	0090-77078	KIT ASSY CONTROLLER LIGHT TOWER	2
AMAT	0090-77085	P.P. PRESSURE TRANSDUCTOR	3
AMAT	0090-77099	SWITCH,MAGNETIC,ROBOT,DOOR	5
AMAT	0090-77106	ASSY, RTD ELECTRONIC + FLOWMETER	1
AMAT	0090-77112	ASSY, SMOKE ALARM BYPASS	1
AMAT	0090-77137	FLOW SWITCH 1/2 ASSY, PLATEN RINSE	2
AMAT	0090-77141	ASSY POLISHER LIGHT TOWER R/G/Y LED FLAS	1
AMAT	0090-77146	SENSOR DOOR M/R	1
AMAT	0090-77159	SW,WAFER,LOCK	5
AMAT	0090-77180	GRIPPER SENSOR HARNESS, ARM 2	3
AMAT	0090-77182	GRIPPER SENSOR HARNESS, ARM 4	4
AMAT	0090-77214	CABLE ASSEMBLY SHUTTLE HOME	1
AMAT	0090-77215	HARNESS, MEGASONIC H202 PRESS SWITCH	2
AMAT	0090-77268	VOR XX PCB	1
AMAT	0090-77274	HRNS,DIW,FLOW,SWITCH,BRUSH	1
AMAT	0090-77304	CABLE ASSY, SENSOR CDA PGI SMC PRESSURE SWITCH	2
AMAT	0090-77321	CABLE ASSY VACUUM RR PG11	1
AMAT	0090-77331	SWITCH ASSY, LWR EXH, MEGASONIC	2
AMAT	0090-77351	ASSY VACUUM SW PM1/2 PS450/1 750/	1
AMAT	0090-77358	CBL, SNSR MAG DRWR LCKD PM1	1
AMAT	0090-90221	CHAS ASSY THERMISTE HD	2
AMAT	0090-90600	CHAS MDL.FLOOD GUN CONT.	2
AMAT	0090-90815	ELEVATOR MOTOR ASSY	1
AMAT	0090-90966	DAQ,BTYPE	11
AMAT	0090-91010	INDUCTOR SUB ASSY	1
AMAT	0090-91131	CHASSIS WIRED 8KW CONVERTER	1
AMAT	0090-91229	CRYO AUTO PURGE BOX	2
AMAT	0090-91288	CRYOPUMP INTERFACE 100-240VAC 50/60HZ	1
AMAT	0090-91422	MICRO DISCHARGE DETECTION BOX	1
AMAT	0090-91619	CHAS,WRP,OPTION,LIFT	1
AMAT	0090-91767	02 DEPLETION INTERLOCK BOX	1
AMAT	0090-91818	PRE ACCEL/AMAG CTRL CHASSIS	2
AMAT	0090-91859	OP INTERFACE / SIGNAL TOWER CHASSIS	1
AMAT	0090-91890	GAS CHASSIS/PSU	1
AMAT	0090-91927	WFL CHASSIS	1
AMAT	0090-99002	ASSY, ENCODER WIRING	1
AMAT	009874-104	Convectron PCB, 5200/5500	1
AMAT	01-31911-00	ION/TC CONTROLLER	1
AMAT	01-81033-00	GAS DISTR LN ASSY	2
AMAT	01-81334-00	GAS TUBE	44
AMAT	01-81912-00	ANALOG INTERFACE UNIT	4
AMAT	01-82868-00	DRIVE, AIR VARIABLE ASSY	2
AMAT	01-82914-00	SENSOR ASSY RF MATCH	2
AMAT	01-83800-00	HEXODE ROTATION ASSY 8100 ALL	1
AMAT	01-83802-00	HEX POSITION DECODER	1
AMAT	01-88018-00	CARTRIDGE, DEIONIZER	1
AMAT	0100-00001	MONITOR, DC POWER SUPPLY ASSY	1
AMAT	0100-00002	STEPPER BOARD	5
AMAT	0100-00002	STEPPER BOARD	5
AMAT	0100-00003	PCB, STEPPER DRIVE	36
AMAT	0100-00003	PCB, STEPPER DRIVE	70
AMAT	0100-00004	PCB, RPS2, DISTRIBUTION	1
AMAT	0100-00005	PCB, ANALOG	5
AMAT	0100-00009	PWB SYNC DETECTOR NON-ERASE	1
AMAT	0100-00010	PCB, ION GAUGE ASSY.	2
AMAT	0100-00010	PCB, ION GAUGE ASSY.	3
AMAT	0100-00012	PCB, VME COUNTER	1
AMAT	0100-00013	PCB, ION TC/AC CONTROL	6
AMAT	0100-00013	PCB, ION TC/AC CONTROL	1
AMAT	0100-00014	PCB,OPTO DETECT	4
AMAT	0100-00014	PCB,OPTO DETECT	3
AMAT	0100-00015	PCB, POSITION ENCODER BUFFER	2
AMAT	0100-00021	BOARD, SENSOR, OPTO	22
AMAT	0100-00024	OPTO BOARD,KEYBOARD INTERFACE	2
AMAT	0100-00025	PCB ASSY, 60V	2
AMAT	0100-00025	PCB ASSY, 60V	1
AMAT	0100-00032	BOARD, APPLIED, INTERFACE	1
AMAT	0100-00033	PCB, BIDIRECTIONAL DC MOTOR DRIVE	5
AMAT	0100-00034	PCB, POWER SUPPLY STATUS	5
AMAT	0100-00035	PCB, MANOMETER	3
AMAT	0100-00035	PCB, MANOMETER	1
AMAT	0100-00037	INDEXER INTERCONNECT BOARD	1
AMAT	0100-00038	INTERCONNECT BOARD	1
AMAT	0100-00038	INTERCONNECT BOARD	1
AMAT	0100-00039	PCB, ROBOT INTERCONNECT	3
AMAT	0100-00041	PCB, SENSOR ASSY, CATHODE	1
AMAT	0100-00042	BOARD, CIRCUIT, ROTATION	5
AMAT	0100-00044	PCB, ISOLATION AMPLIFIER	2
AMAT	0100-00045	PCB, INTERCONNECT EXTERNAL	2
AMAT	0100-00046	PCB, AC CURRENT SENSOR	1
AMAT	0100-00046	PCB, AC CURRENT SENSOR	6
AMAT	0100-00047	RIBBON CONNECT (7 PIN)	2
AMAT	0100-00048	I/O STATUS MONITOR ASSY	2
AMAT	0100-00048	I/O STATUS MONITOR ASSY	2
AMAT	0100-00049	PCB, ANALOG SIGNAL CONDITONER	1
AMAT	0100-00052	PCB, STEPPER DRIVE	1
AMAT	0100-00052	PCB, STEPPER DRIVE	1
AMAT	0100-00053	PCB, OPERATOR BEZEL ASSEMBLY	1
AMAT	0100-00053	PCB, OPERATOR BEZEL ASSEMBLY	1
AMAT	0100-00055	PCB, GATE HEATER CONTROL	4
AMAT	0100-00055	PCB, GATE HEATER CONTROL	1
AMAT	0100-00056	PNEUMATIC PANEL	2
AMAT	0100-00056	PNEUMATIC PANEL	3
AMAT	0100-00058	GATE VALVE INTERCONNECT BOARD	2
AMAT	0100-00059	PCB ASSY, ENCODER INTER	1
AMAT	0100-00061	BOARD, CIRCUIT, LIMIT	4
AMAT	0100-00061	BOARD, CIRCUIT, LIMIT	3
AMAT	0100-00062	PCB, STEPPER DRIVER	20
AMAT	0100-00063	PCB, TWB OPTP LIMIT DETECTOR	23
AMAT	0100-00065	ASSY, CRYO TEMP SENSOR	2
AMAT	0100-00066	PCB, EMISSION DETECTOR	2
AMAT	0100-00067	PHASE MAGNITUDE PWB	19
AMAT	0100-00070	PCB SENSOR	2
AMAT	0100-00070	PCB SENSOR	4
AMAT	0100-00080	PCB ASSY. SBC I/O BREAK	11
AMAT	0100-00086	PCB CENTER FINDER	2
AMAT	0100-00086	PCB CENTER FINDER	1
AMAT	0100-00100	PCB, DRIVER FLAT FINDER	1
AMAT	0100-00101	PCB, RF MATCH CONTROL	1
AMAT	0100-00106	PCB, OPTO SWITCH 2 ASSY	1
AMAT	0100-00107	PCB,DOOR/TP INTCON ASSY	5
AMAT	0100-00107	PCB,DOOR/TP INTCON ASSY	1
AMAT	0100-00109	PWB,GATE HEATER CONTROL	5
AMAT	0100-00114	wPCB ASSY. GRIPPER OPTO SENSOR	1
AMAT	0100-00116	PCB ASSY WRIST INTERCON	1
AMAT	0100-00124	BOARD SENSOR 1 CHAN OPTO	1
AMAT	0100-00125	BOARD SENSOR 2 CHAN OPTO	2
AMAT	0100-00132	PCB, SYNC DETECT EASE	1
AMAT	0100-00132	PCB, SYNC DETECT EASE	13
AMAT	0100-00133	PCB ASSY, DOOR INTRCNT 2, EASE	5
AMAT	0100-00134	PWB ASSY, OPTO SWITCH 5	2
AMAT	0100-00146	ASSY, SBC I/O	1
AMAT	0100-00156	PCB, ISO AMPLIFIER	2
AMAT	0100-00160	STRIPPER CHAMBER INTERCONNECT	1
AMAT	0100-00162	EXP. I/O DISTRIBUTION BOARD	4
AMAT	0100-00162	EXP. I/O DISTRIBUTION BOARD	13
AMAT	0100-00164	PC MONOCHROME W/ASSY INTERFACE BD	2
AMAT	0100-00164	PC MONOCHROME W/ASSY INTERFACE BD	3
AMAT	0100-00167	HEAT EXCHANGER PCB,ASSY DWG	2
AMAT	0100-00169	PCB, VME MODULE	3
AMAT	0100-00169	PCB, VME MODULE	6
AMAT	0100-00177	EP MODULE 1/0 INTERCONNECT BD	2
AMAT	0100-00177	EP MODULE 1/0 INTERCONNECT BD	5
AMAT	0100-00181	ISOAMP 2 ASSY,NONLINEAR APPLICATION	1
AMAT	0100-00192	PCB, SENSE AMP	4
AMAT	0100-00193	PCB, SYNC DETECTOR	1
AMAT	0100-00193	PCB, SYNC DETECTOR	3
AMAT	0100-00206	PCB, DETECTOR II	9
AMAT	0100-00208	PCB, GAS PANEL 3	2
AMAT	0100-00208	PCB, GAS PANEL 3	1
AMAT	0100-00260	PCB ASSY,DTCU R2 INTERCONNECT	1
AMAT	0100-00261	PCB ASSY (DC PWR. /SERIPLEX)	1
AMAT	0100-00266	PCB ASSY. LID SENSOR INPUT DNE	1
AMAT	0100-00269	CONTROLLER POWER DIST PCB	2
AMAT	0100-00288	PWR SUPPLY MINI PCB	3
AMAT	0100-00289	ASSY, BACKPLANE P2 DISTRIBUTION	1
AMAT	0100-00298	300MM MOTION DIST. BOARD	2
AMAT	0100-00311	PCB ASSEMBLY, MOTION CONTROL	1
AMAT	0100-00314	PCB ASSEMBLY, CONTACTOR CONTROL LLA/B LA	1
AMAT	0100-00322	SYSTEM AC INTERCONNECT	2
AMAT	0100-00325	ASSY PCB 300MM MAINFRAME RELAYS	1
AMAT	0100-00335	CHAMBER LIFT RF FILTER REV 001	4
AMAT	0100-00347	PCB ASSEMBLY, SYSTEM ELECTRON	2
AMAT	0100-00356	PCB ASSEMBLY,TANOX II TLDS CONTROL DISTR	2
AMAT	0100-00386	PCB, LIGHTPEN SELECT INTERCONNECT	4
AMAT	0100-00389	PCB ASSEMBLY, PERSONALITY BD, PVD SIMP	1
AMAT	0100-00393	INTERLOCK PERSONALITY BD	1
AMAT	0100-00407	PCB ASSEMBLY, CVD 300MM GAS PANEL STATUS	8
AMAT	0100-00420	PCB CELL I/O DISPLAY	11
AMAT	0100-00429	CONTACTOR INTERLOCK BOARD	1
AMAT	0100-00443	HD 300MM GAS PANEL DISH BD	1
AMAT	0100-00445	PCB ASSEMBLY, SMOKE/WATER DISTRIBUTION	1
AMAT	0100-00446	ASSEMBLY PCB, GAS PANEL CONTROLLER BACKPLANE	9
AMAT	0100-00453	PCB ASSEMBLY SOURCE CONDITIONING	1
AMAT	0100-00472	ASSY, PCB, MOTION SIGNAL CONDITIONING	5
AMAT	0100-00473	PCB ASSY TC ISOLATION AMPLIFIER	1
AMAT	0100-00492	PCB ASSY, LCF SENSORS INTERFACE	4
AMAT	0100-00516	CH INTERLOCK OPTION	1
AMAT	0100-00523	ASSY, PCB CONTROLLER DISTRIBUTION	2
AMAT	0100-00525	ASSY PCB CHAMBER I/O DISPLAY	1
AMAT	0100-00536	PCB ASSEMBLY, INDICATOR DRAWE	2
AMAT	0100-00537	SD STEPPER INTERFACE	4
AMAT	0100-00538	PCBA ECPS POWER SUPPLY	2
AMAT	0100-00539	PCBA ECPS FILTER	1
AMAT	0100-00541	PCB, ANNEAL CHAMBER DISTN	3
AMAT	0100-00544	PCB ASSEMBLY, OVER TEMP RELAY ISOLATION	3
AMAT	0100-00548	REMOTES DISTRIBUTION	1
AMAT	0100-00569	VME DC POWER DISTRIBUTION	1
AMAT	0100-00580	CONFIGURATION BOARD, GAS PANEL S/N:VAL-001-2410-10	1
AMAT	0100-00581	IGL BASE BOARD, GAS PANEL	1
AMAT	0100-00582	BACKPLANE 300MM, GAS PANEL	1
AMAT	0100-00588	PCB ASSY, LTESC LAMP CNTL, 30	1
AMAT	0100-00590	ASSY, PCB, MAINFRAME DISTRIBUTION SF3	1
AMAT	0100-00611	ASSY, PCB, SMOKE AND WATER LEAK DET	1
AMAT	0100-00629	ASSEMBLY PCB INTERLOCK SELECT GEN RACK	1
AMAT	0100-00634	DUAL GAS LOCK DETECTOR	42
AMAT	0100-00637	PCB ASSEMBLY 300MM MAINFRAME RELAYS	1
AMAT	0100-00650	OPS DELAYED SHUT DOWN	1
AMAT	0100-00651	INTERLOCK PERSONALITY BOARD MAINFRAME	1
AMAT	0100-00658	300MM RTP CONTROLLER DISTRIBUTION	1
AMAT	0100-00663	ASSEMBLY PCB ,TC AMP INTERLOCK	3
AMAT	0100-00663	ASSEMBLY PCB ,TC AMP INTERLOCK	2
AMAT	0100-00667	ASSY, PCB, DPS RPC/SOURCE MATCH/HE, CHAM	1
AMAT	0100-00678	PCB ASSEMBLY, 300MM RTP INTERLOCK PERSON	1
AMAT	0100-00694	PCB, ASSEMBLY, CHAMBER LIFT RF FILTER	3
AMAT	0100-00715	PCB ASSY. CH HDD POWER DIS.	13
AMAT	0100-00720	PCB ASSY,SIP MAGNET ROTATION DIR. S	1
AMAT	0100-00720	PCB ASSY,SIP MAGNET ROTATION DIR. S	1
AMAT	0100-00731	ASSY PCB, VAC PUMP/RGB INTLK INTERCONNECT	1
AMAT	0100-00731	ASSY PCB, VAC PUMP/RGB INTLK INTERCONNECT	6
AMAT	0100-00737	HDPCVD DC TO DC BD.	1
AMAT	0100-00748	CHAMBER INTERFACE WXZ ENDURA SL BD.	1
AMAT	0100-00749	PCB ASSEMBLY, INTERLOCK PERSONALITY, WXZ	1
AMAT	0100-00749	PCB ASSEMBLY, INTERLOCK PERSONALITY, WXZ	1
AMAT	0100-00782	ANALOG INPUT BOARD	1
AMAT	0100-00787	LCF EMITTER INTERCOM TOP	3
AMAT	0100-00788	LCF EMITTER INTERCOM BOTTOM	3
AMAT	0100-00804	GAS PANEL INTERLOCK PCB	1
AMAT	0100-00806	WCVD MOTOR CONTROL HEATER DRIVER BOARD	2
AMAT	0100-00825	ANALOG PCB IN/OUT	56
AMAT	0100-00890	PCB ASSY, MAINFRAME DISTRIBUT	1
AMAT	0100-00901	PCB	1
AMAT	0100-00947	SIGNAL CONDITIONING BD	1
AMAT	0100-00993	WAFER LOSS PCB	15
AMAT	0100-01004	PCB, UNIVERSAL ADDRESS	1
AMAT	0100-01043	TEMP MONITOR & DSP TRANS PCB	1
AMAT	0100-01094	PCB ASSY, CHAMBER INTERLOCK WXZ ENDU	1
AMAT	0100-01132	PCB ASSEMBLY, CHAMBER LIFT RF	1
AMAT	0100-01158	PCB ASSY, SYSTEM INTERLOCK CMP FA 300MM	3
AMAT	0100-01429	P.C POWER SUPPLY JUNCTION BOX	1
AMAT	0100-01739	VESDA SMOKE DETECTOR INTERFACE	1
AMAT	0100-02042	PCB ASSY,CIRCUIT ROTATION	1
AMAT	0100-02420	OPTO ISOLATION PCB	1
AMAT	0100-05199	PCB Led Board	5
AMAT	0100-09000	W/PCB ASSY RF MATCH CONT USE UP	2
AMAT	0100-09003	PCB, VIDEO CONTROLLER	17
AMAT	0100-09006	PCB, INTELLIGENT INTERFACE	16
AMAT	0100-09012	PCB	2
AMAT	0100-09012	PCB	1
AMAT	0100-09017	CHAMBER INTERCONNECT BOARD	8
AMAT	0100-09017	CHAMBER INTERCONNECT BOARD	1
AMAT	0100-09018	VIDEO INTERCONNECT BD	1
AMAT	0100-09018	VIDEO INTERCONNECT BD	3
AMAT	0100-09020	FUSE BOARD	2
AMAT	0100-09020	FUSE BOARD	34
AMAT	0100-09022	PCB, MINI AI/AO	6
AMAT	0100-09022	PCB, MINI AI/AO	31
AMAT	0100-09023	PCB ASSY MINI DI/DO CHAMBER INTER CONN	11
AMAT	0100-09023	PCB ASSY MINI DI/DO CHAMBER INTER CONN	5
AMAT	0100-09024	PCB	1
AMAT	0100-09027	BOARD AC INTERCONNECT	2
AMAT	0100-09028	PCB	3
AMAT	0100-09029	PCB, INTERFACE TURBO	2
AMAT	0100-09031	REMOTE GAS PANEL PCB	2
AMAT	0100-09037	PCB ASSY REMOTE DISTRIB	2
AMAT	0100-09038	PCB, DC BIAS DIVIDER	1
AMAT	0100-09040	PCB	4
AMAT	0100-09045	PCB ASSY GATEDRIVER	5
AMAT	0100-09045	PCB ASSY GATEDRIVER	6
AMAT	0100-09047	PCB ASSY OZONATOR DC POWER SUPPLY	4
AMAT	0100-09055	PCB, LIQUID	12
AMAT	0100-09055	PCB, LIQUID	31
AMAT	0100-09071	PCB I/O BREAKOUT	3
AMAT	0100-09078	ASSY ROBOT INTC BD	4
AMAT	0100-09078	ASSY ROBOT INTC BD	2
AMAT	0100-09079	SENSOR ROBOT MTR PCB	1
AMAT	0100-09079	SENSOR ROBOT MTR PCB	1
AMAT	0100-09081	PCB, ASSY N2-DRYVAC DIST	4
AMAT	0100-09084	PCB ASSY MONITOR LIGHT PEN INTERCONNECT BOARD	4
AMAT	0100-09084	PCB ASSY MONITOR LIGHT PEN INTERCONNECT BOARD	15
AMAT	0100-09085	PCB ASSY LVDT VOLTAGE REGULATOR	1
AMAT	0100-09099	PCB, CHAMBER INTERCONNECT	33
AMAT	0100-09102	PCB, CONTROLLER DISTRIBUTION	9
AMAT	0100-09104	PCB,CONTACTOR,INTERLOCK	1
AMAT	0100-09108	PCB, SENSOR LEVEL	10
AMAT	0100-09108	PCB, SENSOR LEVEL	2
AMAT	0100-09109	PCB ASSY TEMP CONTROL	6
AMAT	0100-09110	PCB ASSSY MINI AI FILTER BOARD	7
AMAT	0100-09112	THERMOELECTRIC DRIVER	1
AMAT	0100-09114	PCB, GAS PANEL	2
AMAT	0100-09115	PCB, GAS PANEL ANALOG	2
AMAT	0100-09115	PCB, GAS PANEL ANALOG	10
AMAT	0100-09116	ASSY PCB VME INT 2EXTG.P	2
AMAT	0100-09117	PCB, DIGITAL I/O FUSE	3
AMAT	0100-09117	PCB, DIGITAL I/O FUSE	27
AMAT	0100-09118	PCB	1
AMAT	0100-09126	REMOTE WIRING DISTRIBUTION	4
AMAT	0100-09126	REMOTE WIRING DISTRIBUTION	30
AMAT	0100-09129	ASSY DRAWING TEOS STATUS BOARD	4
AMAT	0100-09131	MASSY DWG FLUID OVERFILL	4
AMAT	0100-09136	PCB, MINI DI/DO	43
AMAT	0100-09136	PCB, MINI DI/DO	20
AMAT	0100-09161	EXPANDED INTERCONNECT BD	1
AMAT	0100-09161	EXPANDED INTERCONNECT BD	3
AMAT	0100-09174	ASSY, TEOS FAS INTERFACE B	1
AMAT	0100-09177	ASSY PCB EXTVME	5
AMAT	0100-09177	ASSY PCB EXTVME	10
AMAT	0100-09200	PCB ASSEMBLY PLASMA DETECT BOARD	1
AMAT	0100-09203	PCB ASSY PHASE MAGNITUDE	4
AMAT	0100-09208	MANOMETER SWITCH BD,PRSP	1
AMAT	0100-09212	PCB ASSY ESC CONTROL	1
AMAT	0100-09235	OZONATOR DISTRIBUTION BOARD	1
AMAT	0100-09238	ASSY ROBOT INTERCONNECT PCB	3
AMAT	0100-09240	PCB	14
AMAT	0100-09242	PNEUMATIC DIST PCB	2
AMAT	0100-09245	STEP DRIVER PCB	38
AMAT	0100-09251	SERIPLEX PCB	3
AMAT	0100-09254	PCB ASSY ENDPOINT	3
AMAT	0100-09254	PCB ASSY ENDPOINT	2
AMAT	0100-09255	TC INTERLOCK BD	4
AMAT	0100-09266	ASSY SYSTEM INTERFACE PCB, UHP	3
AMAT	0100-09267	ASSY CHAMBER DISTRIBU- TION PCB, UHP	1
AMAT	0100-09267	ASSY CHAMBER DISTRIBU- TION PCB, UHP	9
AMAT	0100-09268	ASSY PNEUMATIC PCB	6
AMAT	0100-09281	HFP INTERFACE BOARD	3
AMAT	0100-09283	STEPPER DRIVER INTERFACE BOARD	9
AMAT	0100-09285	CENTURA APC I/O DIST. BD	1
AMAT	0100-09298	HV CONTROLLER, ESC	4
AMAT	0100-09299	ASSY, SERIAL SIDE BOARD	1
AMAT	0100-09305	PCB INTERLOCK	4
AMAT	0100-09307	PCB, DTLR INTERLOCK ASSY,M KACI	3
AMAT	0100-09307	PCB, DTLR INTERLOCK ASSY,M KACI	4
AMAT	0100-09322	OZONATOR DISTRIBUTION BOARD REVB	3
AMAT	0100-09322	OZONATOR DISTRIBUTION BOARD REVB	1
AMAT	0100-09379	LAMP TEST MOD 1 FUSE	2
AMAT	0100-11000	ANALOG INPUT	13
AMAT	0100-11002	DIGITAL I/O PCB	4
AMAT	0100-11018	PCB, MVME 110-1 MODULE	5
AMAT	0100-11022	PWB,SERIAL I/O ASSY	1
AMAT	0100-11022	PWB,SERIAL I/O ASSY	2
AMAT	0100-11025	PROM BOARD	4
AMAT	0100-11025	PROM BOARD	1
AMAT	0100-11026	PCB PROM	1
AMAT	0100-14001	POWER INTERFACE PCB ASY	1
AMAT	0100-14003	PCB, LEAK DET INTERFACE,ASSY	1
AMAT	0100-14008	PCB SYSTEM INTERFACE ASSY	2
AMAT	0100-14014	ASSY PCB TOP ZONE SENSOR	4
AMAT	0100-14015	ASSY PCB BOT ZONE SENSOR	1
AMAT	0100-14022	WASSY PCB MASTER CPU	4
AMAT	0100-14042	SYSTEM INTERFACE	1
AMAT	0100-16002	PCB EXHAUST CONTROL INTERFACE	3
AMAT	0100-16014	ASSY,PCB VIDEO/SERIAL FOR 3 MONITORS, C	4
AMAT	0100-18001	PCBA FILTER TRACE BOARD HDP CVD	1
AMAT	0100-18005	PCBA, SOURCE SIGNAL CONDITIONING HDPCVD	7
AMAT	0100-18029	CU,ASSY, PCB, REMOTE SERIPLEX I/O HDPCVD, U	1
AMAT	0100-18029	CU,ASSY, PCB, REMOTE SERIPLEX I/O HDPCVD, U	2
AMAT	0100-18034	PCBA, CHB PNEUMATIC INTC,ULTIMA	8
AMAT	0100-18043	REMOTE SERIPLEX I/O BD. S/N: VAL-A-2538-08,(BAD)	1
AMAT	0100-18067	HDP CH Interconnect	1
AMAT	0100-20010	PCB,STEC MFC INTERCONNECT BD	1
AMAT	0100-20012	PCB, ISOLATION AMPLIFIER	7
AMAT	0100-20012	PCB, ISOLATION AMPLIFIER	4
AMAT	0100-20015	PCB, GAUGE, C	1
AMAT	0100-20026	PCB ASSY,STEPPER DRIVER DISTRIBUTION	1
AMAT	0100-20026	PCB ASSY,STEPPER DRIVER DISTRIBUTION	7
AMAT	0100-20030	PCB, ASSY CONTROLLER	2
AMAT	0100-20038	PCB, ASSY RELAY REMOTE	1
AMAT	0100-20053	PCB ASSY,SBC I/O BREAKO	1
AMAT	0100-20053	PCB ASSY,SBC I/O BREAKO	1
AMAT	0100-20054	MAIN FRAME INTERCONNECT ASSY	1
AMAT	0100-20067	STEPPER	2
AMAT	0100-20131	PCBA, RF MATCH CONTROL	1
AMAT	0100-20131	PCBA, RF MATCH CONTROL	31
AMAT	0100-20135	PCB ASSY MAIN FRAME DUAL DEGAS INT	2
AMAT	0100-20145	PCBASSY., SYS LAMPS /MAINT.	1
AMAT	0100-20154	SMIF ARM/5500 INTERFACE	1
AMAT	0100-20158	BALZER RGA INTERFACE BD	1
AMAT	0100-20158	BALZER RGA INTERFACE BD	1
AMAT	0100-20160	PCB ASSY SYSTEM LAMP W/BUZZER INTERFACE	3
AMAT	0100-20179	PCB ASSY DUAL DEGAS DRIVER CENTURA	1
AMAT	0100-20180	PCB ASSY PVD DRIVER CENTURA	1
AMAT	0100-20197	RS232 DISTRIBITION ASSY	2
AMAT	0100-20197	RS232 DISTRIBITION ASSY	1
AMAT	0100-20204	PCB ASSY SYS ELEC INTFC W/SEL ENC CLK	1
AMAT	0100-20226	OPERATOR PANEL (DAMAGED)	1
AMAT	0100-20235	PCB ASSY SER/VID.INTC. 3RD MONITOR W/LI	4
AMAT	0100-20238	PCB ASSY DISK PWR. DISTRIBUTION	4
AMAT	0100-20239	PCB ASSY ASYST SMIF INTERLOCK	4
AMAT	0100-20254	ASSY OPERATOR CONTROL PANEL WITH INTERLOCK SWITCH	1
AMAT	0100-20268	PCB ASSEMBLY, FEED THROUGH BRD, 300MM, B	2
AMAT	0100-20327	PCB ASSY. WAFER DETECT 1	1
AMAT	0100-20332	CASSETTE ALIGNMENT FIXTURE	1
AMAT	0100-20339	PCB ASS., TC AMPLIFIER WITH BUFFER	1
AMAT	0100-20353	PCB ASSEMBLY, OPERATOR CONTROL, PANEL I/	1
AMAT	0100-20418	PCB ASSEMBLY, VME POWER FILTER AND DISTR	1
AMAT	0100-20453	ASSEMBLY PCB, DEVICENET DIGITAL I/O	8
AMAT	0100-20454	ASSEMBLY PCB, CONTROLLER BACKPLANE	1
AMAT	0100-20455	ASSEMBLY PCB, DEVICENET ANALOG I/O	8
AMAT	0100-20458	ASSY PCB, CONFIGURABLE INTERLOCK SAP#141378	6
AMAT	0100-35024	ASSY PCB CENTERFINDER SBC	1
AMAT	0100-35045	PCB ASSY, FOUR RELAY INTERFACE	1
AMAT	0100-35054	CU,ASSY,PCB,CHMBR,INTRFC	8
AMAT	0100-35063	ASSY PCB REMOTE MAIN RLY	1
AMAT	0100-35069	ASSY PCB GENERIC RELAY INTFC	1
AMAT	0100-35070	ASSY, PCB RF GENERATOR INTERFACE	1
AMAT	0100-35075	DUAL EXHAST DIST	15
AMAT	0100-35108	AMPULE HEATER INTERLOCK	2
AMAT	0100-35111	PCB ASSEMBLY CENTURA HOTBOX BACKPLANE.	5
AMAT	0100-35112	ASSY,PCB,RF PEAK DETECTOR	1
AMAT	0100-35118	ASSY,METCH CHAMBER INTERFACE (DAMAGED)	1
AMAT	0100-35121	SERIPLEX I/P DISTRIBUTION	1
AMAT	0100-35170	DIVIDER PCB	4
AMAT	0100-35177	PCB ASSY, TC & INTERLOCK	1
AMAT	0100-35181	PCB, INTERLOCK BOARD, DPA	2
AMAT	0100-35187	PCB ASSY, LOAD LOCK BEEPER	2
AMAT	0100-35201	ASSY, PCB, MAINFRAME INTERFACE	1
AMAT	0100-35207	PCB, CHAMBER INTERFACE IPS, 5200	2
AMAT	0100-35213	PCBA, CHAMBER B/D TRAY, IPS, 5200	4
AMAT	0100-35214	ASSEMBLY, PCB, RF MATCH CONTROL	1
AMAT	0100-35219	DC POWER/ SERPLEX BUS DISTRIBUTION BD.	1
AMAT	0100-35220	VME DISTRIBUTION BD	1
AMAT	0100-35225	ASSY, PCB MICROWAVE INTERLOCK	1
AMAT	0100-35230	PCB ASSY, TC AMP/INTERLOCK	1
AMAT	0100-35230	PCB ASSY, TC AMP/INTERLOCK	2
AMAT	0100-35236	ENDPOINT SELECT	1
AMAT	0100-35260	ASSY, PCB, TC	3
AMAT	0100-35262	ASSY,PCB,WAFER DETECT DISTRIBUTION	1
AMAT	0100-35282	CH Interlock CVD 300XZ	1
AMAT	0100-35284	ASSEMBLY PCB BST LDS DISTRIBUTION	1
AMAT	0100-35342	PCB ASSY REACTIVE GAS INTERLOCK	1
AMAT	0100-35349	PCB ASSEMBLY RF/MICROWAVE GENERATOR BACKPLANE	4
AMAT	0100-35418	PCB	7
AMAT	0100-35559	ENDPOINT PWR MOD	2
AMAT	0100-35723	PCB	1
AMAT	0100-37863	DC PWR SERIPLEX BUS DIST.	1
AMAT	0100-37864	VME P2 Dist PCB (0015-00329)	1
AMAT	0100-37868	PCB ASSY, CONTACTOR INTERLOCK, PRODUCER	1
AMAT	0100-37890	ASSY,PCB,H2 DETECT	1
AMAT	0100-38032	0010-39769 BSC CONTROLLER PCB	2
AMAT	0100-38092	VIDEO/SERIAL FOR 2/3 MONITORS	1
AMAT	0100-40009	PCB,FUSE STATUS.	1
AMAT	0100-40009	PCB,FUSE STATUS.	1
AMAT	0100-40012	BACKPLANE FUSE STATUS	1
AMAT	0100-40013	MAINFARAME INTERLOCK BOARD	2
AMAT	0100-40021	WPCBA, MAINFRAME BACK PLANE	4
AMAT	0100-40022	PCBA, APC GAS INTERLOCK	1
AMAT	0100-40024	PCB, LOADLOCK INTERCONNECT D4	3
AMAT	0100-40025	PCBA MAINFRAME INTERCONN	1
AMAT	0100-40025	PCBA MAINFRAME INTERCONN	2
AMAT	0100-40027	PCBA, TWO CHAMBER BACKPLANE	1
AMAT	0100-40028	PCB,TWO CH GAS BACKPLANE	1
AMAT	0100-40028	PCB,TWO CH GAS BACKPLANE	2
AMAT	0100-40029	PCB, SOURCE METROLOGY ASSY	1
AMAT	0100-40030	PCB, BIAS METROLOGY ASSY	2
AMAT	0100-40033	ELECTROSTATIC CHECK POWER SUPPLY BD	5
AMAT	0100-40034	PCBA RF FILTER	2
AMAT	0100-40037	PCBA,SOURCE SIGNAL CONDI	3
AMAT	0100-40037	PCBA,SOURCE SIGNAL CONDI	3
AMAT	0100-40039	PCB ASSY, HIGH DEN PLAS CH	1
AMAT	0100-40039	PCB ASSY, HIGH DEN PLAS CH	1
AMAT	0100-40041	PCBA, RF MATCH BIAS CURRENT BD	1
AMAT	0100-40045	WAFER LIFT SENSOR BD	1
AMAT	0100-40046	WPCBA, RF MATCH PWR & INTERLOCK BD	1
AMAT	0100-55506	3 Channel TC Amp	1
AMAT	0100-66002	Temp Monitor	1
AMAT	0100-66005	Elevator Interface	4
AMAT	0100-66013	MF Sensor PWR Supply	1
AMAT	0100-66014	Exhaust Switching	1
AMAT	0100-66019	CVD CH Gas Interlock Gamma St	5
AMAT	0100-66022	Light Tower Driver	1
AMAT	0100-66023	PVD Shield Heater Control	1
AMAT	0100-70000	PCB ASSY MINI CONTROLLER DISTRIBUTION BD	1
AMAT	0100-70019	PCB, CONTROLLER DIST WPS BD	3
AMAT	0100-71000E2	PCB CVD CH PRIMARY DISTRIBUTION	1
AMAT	0100-71025	Remote Daughter PCB	1
AMAT	0100-71027	Elevator Intf PCB	2
AMAT	0100-71030	Slit Valve Interlock / 3500	1
AMAT	0100-71047	Mainframe Interlock / 5500	1
AMAT	0100-76005	PCB ASSY SERIAL VIDEO /DCN DISTRIBUTION	1
AMAT	0100-76012	HDP DINAMBER I/F BD	1
AMAT	0100-76019	CENTERFINDER INT BD.	2
AMAT	0100-76042	ASSY,PCB EWOB & OTF/CENTERFIND	1
AMAT	0100-76046	PCB GAS PANEL	8
AMAT	0100-76101	PCB ASSY, CHAMBER INTERLOCK	1
AMAT	0100-76102	MODIFIED DC INTERCONNECT BOARD	3
AMAT	0100-76102	MODIFIED DC INTERCONNECT BOARD	1
AMAT	0100-76105	PCB ASY, I/O INTERCONNECT BD, MF CNTRL #	2
AMAT	0100-76108E	INTERLOCK DISPLAY	1
AMAT	0100-76110	PCB S/N:VAL-E5-0548-04	4
AMAT	0100-76111	PCB ASSY, REMOTES DISTRIBUTION	1
AMAT	0100-76111	PCB ASSY, REMOTES DISTRIBUTION	3
AMAT	0100-76114	DIRECT ANALOG	2
AMAT	0100-76121	PC INTERCONNECT	1
AMAT	0100-76146	300MM MOTION DIST BOD	1
AMAT	0100-76254	AMI D5000 BACKPLANE POWERSUPPLY	1
AMAT	0100-76258	GAS PANEL PCB	1
AMAT	0100-76267	VOR MATCH INTERCONNE	1
AMAT	0100-76268	VOR LOGIC AND CONTROL	1
AMAT	0100-76269	PCBA RF MATCH CONTROL	3
AMAT	0100-76269	PCBA RF MATCH CONTROL	1
AMAT	0100-76286	ASSY,SERIAL DISTRIBUTION	1
AMAT	0100-76286	ASSY,SERIAL DISTRIBUTION	3
AMAT	0100-76288	ASSY, VDI MONITOR/TEST POINT	4
AMAT	0100-76290	ASSY, OPTO DAUGHTER CARD	1
AMAT	0100-76291	ASSY,VIDEO CONTROL DAUGHTER CARD	3
AMAT	0100-76297	ACTIVE TERMINAL BUFFER	4
AMAT	0100-76302	PCB CHAMBER INTERFACE	1
AMAT	0100-76302	PCB CHAMBER INTERFACE	2
AMAT	0100-76303	ASSY, ICE RF FILTER PCB	1
AMAT	0100-77003	PCB-ASSY CMP DET BD	2
AMAT	0100-77005	OBS ASSY INTERLOCK PCB #1	1
AMAT	0100-77014	ASSY, ENDPOINT CNTRLR BD	1
AMAT	0100-77016	ASSY, PCB DET.ANAL.BD	2
AMAT	0100-77018	PCB-ROBOT ASSY	1
AMAT	0100-77018	PCB-ROBOT ASSY	1
AMAT	0100-77034	ASSY,PCD,HEAD	2
AMAT	0100-77034	ASSY,PCD,HEAD	3
AMAT	0100-77036	ASSY,PCB ROBOT WRIST	2
AMAT	0100-77036	ASSY,PCB ROBOT WRIST	3
AMAT	0100-77039	ASSEMBLY, RC FILTER PCB	1
AMAT	0100-77042	PCB ASSY, PENTIUM INTERFACE 200MM CMP COM BOARD FOR RPM3 NOVA	1
AMAT	0100-77045	ASSY, PCB, ROBOT, WRIST	3
AMAT	0100-77045	ASSY, PCB, ROBOT, WRIST	4
AMAT	0100-77050	PCB ASSEM. C/M MODULE	1
AMAT	0100-77050	PCB ASSEM. C/M MODULE	1
AMAT	0100-77056	ASSY,PCB, ENDPOINT DETECTOR	2
AMAT	0100-77056	ASSY,PCB, ENDPOINT DETECTOR	39
AMAT	0100-89001	SCR INTERFACE	5
AMAT	0100-89005	PCB ASSEMBLY, CHAMBER INTERCONNECT	1
AMAT	0100-90025	PWBA 24V 1A POWER SUPPLY	6
AMAT	0100-90027	DATA ACQUISITION MODULE	2
AMAT	0100-90027	DATA ACQUISITION MODULE	4
AMAT	0100-90032	PCB ASSY	1
AMAT	0100-90066	PWBA I/V CONVERTER PWRSP	2
AMAT	0100-90077	PWBA CONTROLLER THERMSTR	2
AMAT	0100-90127	PWB TEMP. CONTR. SERV.	1
AMAT	0100-90140	PWBA WAFER INTERLOCK	1
AMAT	0100-90140	PWBA WAFER INTERLOCK	1
AMAT	0100-90177	VACUUM CONTROL DRIVE PWBA	2
AMAT	0100-90178	PWBA VAC CONTROL FEEDBACK	1
AMAT	0100-90178	PWBA VAC CONTROL FEEDBACK	1
AMAT	0100-90188	PCB ASSY VAC CONTROL	1
AMAT	0100-90216	PCB ASSY	2
AMAT	0100-90221	PCB ASSY	1
AMAT	0100-90221	PCB ASSY	1
AMAT	0100-90227	PWB ION GAUGE	1
AMAT	0100-90236	PWBA VACUUM MANUAL CONT	1
AMAT	0100-90276	PCB ASSY	1
AMAT	0100-90277	PCB ASSY	1
AMAT	0100-90278	PCB, SCAN CONTROL	1
AMAT	0100-90312	PWB ASSY SPIN \ SCAN INTERLOCK	1
AMAT	0100-90314	PWB ASSY SCAN CLOCK	1
AMAT	0100-90324	WAFER ORIENTER MICRO CONTROLLER	1
AMAT	0100-90359	PWBA LOGIC (FOCUS)	1
AMAT	0100-90377	PWBA GAUGE I/F	1
AMAT	0100-90385	PWBA CONTACTOR DRIVE	2
AMAT	0100-90388	PWBA ORIENTER SENSOR	1
AMAT	0100-90438	PWBA SOURCE MAGNET CONTROL	2
AMAT	0100-90443	PWBA, SPIN WINDOW	1
AMAT	0100-90444	PWBA, WHEEL CURRENT	2
AMAT	0100-90468	PWBA CHARGE VOLTAGE ACC	1
AMAT	0100-90468	PWBA CHARGE VOLTAGE ACC	1
AMAT	0100-90491	ARM, WAFER, POSITION, PWBA	2
AMAT	0100-90531	TARGET SYSTEM MOTHERBOARD IMPLANT	2
AMAT	0100-90586	HV/A Mother board Implant	2
AMAT	0100-90629	PWBA EXTENDER	1
AMAT	0100-90640	PCB ASSY CONVERTOR	1
AMAT	0100-90650	WHEEL CURRENT PCB	2
AMAT	0100-90650	WHEEL CURRENT PCB	1
AMAT	0100-90657	PWBA WAFER SENSOR	1
AMAT	0100-90659	PWBA FLOOD GUN BIAS ACC REPLACES 0100-90	1
AMAT	0100-90689	ARC VOLTAGE CONTROL PCB	1
AMAT	0100-90694	SCAN POSITION PCB IMPLANT	2
AMAT	0100-90706	PWB ASSY, VAC, MANUAL REPLACES 0100-902	1
AMAT	0100-90708	VAC CONTROL INTLK	1
AMAT	0100-90724	GUIDING TUBE PCB	1
AMAT	0100-90749	PHASE MONITOR PCB (BLPDU REPLACES 0100-9	1
AMAT	0100-90761	ROBOTIC INTERFACE ASSY	1
AMAT	0100-90782	PCB, SPIN CONTROL	2
AMAT	0100-90853	PWBA INDEX SERVO	6
AMAT	0100-90859	PWBA TO CONVERTER	1
AMAT	0100-90860	PWBA, BEAM STABILITY MONITOR	1
AMAT	0100-90861	PWBA,SPIN,SCAN,CONTROLS	1
AMAT	0100-90865	GAS INTERLOCK IMPLANT	1
AMAT	0100-90890	SPIN/SCAN INTLK	1
AMAT	0100-90914	ASSY, PWA MONITOR CTL PROCON	1
AMAT	0100-90995	SPIN/SCAN RELAY, IMPLANT	1
AMAT	0100-91032	PCB, PSU, DISCHARGE	2
AMAT	0100-91046	VIBRATION CARD IMPLANT	2
AMAT	0100-91087	PCB, SOL/FIL EXT INTERFACE	1
AMAT	0100-94002	MICRO DISCHARGE SENSE PCB	1
AMAT	0100-94004	PWBA ROBOTICS INTERFACE	1
AMAT	0100-94021	PCB	1
AMAT	0100-94089	VENDOR INTERFACE PRE-ACCEL IMPLANT	1
AMAT	0100-94094	PWB 2181 DSP HOST BOARD LEAP 2	1
AMAT	0100-94102	PCB, GAS INTERLOCK	2
AMAT	0100-96532	Beam Stabillity Monitor Implant	2
AMAT	0100-98028	PCB,MANIPULATOR INTERFACE	1
AMAT	0100-98061	ID PSD PCB	1
AMAT	0100-98062	2D PSD IMPLANT	1
AMAT	0100-98080	PCB, SCAN FARADAY OPTO SENSOR	1
AMAT	0100-99006	AUX SUPPLIES CONTROL IMPLANT	2
AMAT	0100-A0001	I/O BOARD ASSY	2
AMAT	0100-A0003	LASER DRIVER BOARD	1
AMAT	0100-JDP-1	DOUBLE LOAD LOACK DOOR INTERCONNECT BD.	6
AMAT	0100-LA100	CHAMBER PNE4MATICS INTERCONNECT	2
AMAT	0110-00241	TC AMP INTLK	1
AMAT	0110-09288	APC POWER DISTRIBUTION ASSY	2
AMAT	0110-20458	PVD AL / TTN INTERLOCK	1
AMAT	0110-38018	RF MATCH CONTROL	1
AMAT	0110-76038	WAFER MAP LED BD	1
AMAT	0120-90051	MAIN SENSE CRCUIT	1
AMAT	0120-90068	PCB	1
AMAT	0120-93352	PCB	1
AMAT	0140-00014	GATE VALVE, HARNESS ASSY	1
AMAT	0140-00015	HARNESS, ASSY	3
AMAT	0140-00021	HARNESS MAIN SYS	1
AMAT	0140-00024	BREAK, FAIL SAFE	2
AMAT	0140-00025	SWITCH, HARNESS CASSETTE	2
AMAT	0140-00026	MOTOR, ASSY DC	43
AMAT	0140-00033	SENSOR, DISTANCE, HARNESS ASSE	2
AMAT	0140-00036	ASSY, EMITTER WIRING	29
AMAT	0140-00039	HARNESS	2
AMAT	0140-00042	BASE PLATE THERMAL SWITCH	11
AMAT	0140-00047	Z AXIS HOME HARNESS	5
AMAT	0140-00048	FLAG SENSOR HARNESS ASSY	22
AMAT	0140-00053	ASSY, WIRING, MAGNETIC SW	4
AMAT	0140-00053	ASSY, WIRING, MAGNETIC SW	8
AMAT	0140-00054	AIR FLOW SW HARNESS ASSY	7
AMAT	0140-00056	HARNESS ASSY DOOR	3
AMAT	0140-00058	CABLE ASSY	1
AMAT	0140-00058	CABLE ASSY	3
AMAT	0140-00059	HARNESS	2
AMAT	0140-00059	HARNESS	1
AMAT	0140-00060	HRNS PWR CORD HEATER CONTROLLER	1
AMAT	0140-00072	KEYBOADR IN HARNESS	2
AMAT	0140-00081	HARNESS ASSY TRAVEL PLATE	1
AMAT	0140-00081	HARNESS ASSY TRAVEL PLATE	2
AMAT	0140-00085	HARNESS ASSY, HOME POS. SENSOR	8
AMAT	0140-00086	HARNESS ASSY, HOME DIR SENSOR	1
AMAT	0140-00114	HARN ASSY GRIPPER MTR EXTSN	3
AMAT	0140-00125	HARNESS ASSEMBLY, GRIPPER ALIGNMENT	1
AMAT	0140-00145	HARNESS ASSY,TURBO INTC RPLCS 0140-09016	4
AMAT	0140-00150	EXPANDED HARNESS ASSY, 1B	1
AMAT	0140-00154	CABLE	1
AMAT	0140-00160	HARNESS ASSY	2
AMAT	0140-00169	CABLE ASSY. E/P MODULE DC DISTRIBUTION	2
AMAT	0140-00183	HARNESS ASSY CB HOT OUT.	1
AMAT	0140-00203	HARNESS,PS INTERCONN B	1
AMAT	0140-00218	HARNESS ASSY,DRIVE INTERFACE,HT DPS	1
AMAT	0140-00218	HARNESS ASSY,DRIVE INTERFACE,HT DPS	1
AMAT	0140-00285	HARN. ASSY. CABLE	1
AMAT	0140-00343	HARNESS ASSY	1
AMAT	0140-00352	H/A MODULAR, OUTER LAMPS, IPS UPPER CHMB	3
AMAT	0140-00358	HARNESS, ASSY, JUMPER PLUG 4 POS., E-DTCU	1
AMAT	0140-00367	HARNESS ASSY, DNET INPUT LID WAFER SENSO	7
AMAT	0140-00369	HARNESS ASSY, INPUT LID WAFER SENSOR MOD	2
AMAT	0140-00383	PNEUMATIC AIR LINE	2
AMAT	0140-00414	HARNESS ASSY. ESC SERIAL CONTROL, MXP,	15
AMAT	0140-00488	HARNESS ASSY CHAMBER SINGEN	1
AMAT	0140-00531	HARNESS ASSY,MICROWAVE ON RTP,GEN CONTROL,CH-A	1
AMAT	0140-00575	HARN. ASSY., RETURN TANK SENSORS	2
AMAT	0140-00610	HARNESS ASSY, CHEM CAB RS 232 ADAPTER	6
AMAT	0140-00643	CABLE CONTROL MICROWAVE PWR GENERATOR	11
AMAT	0140-00645	HARN. ASSY., HEAD BRAKE / HOME	1
AMAT	0140-00648	HARN. ASSY., CELL ANALOG	2
AMAT	0140-00728	HARNESS ASSY MFC MCE GP	1
AMAT	0140-00728	HARNESS ASSY MFC MCE GP	1
AMAT	0140-00759	HARNESS ASSY, VDI ACPS DRAWER, VDI CNTRL	1
AMAT	0140-00759	HARNESS ASSY, VDI ACPS DRAWER, VDI CNTRL	2
AMAT	0140-00796	HARN.ASSY., MF UPPER PANEL INTLK INT.	15
AMAT	0140-00839	HARNESS ASSY., SEB DC PWR IN BULKHEAD TO REV 01	1
AMAT	0140-00846	HARNESS ASSY, Y, EMO INTERC PUMP	1
AMAT	0140-00853	HARNESS ASSY, IHC TO SYSTEM I/O	19
AMAT	0140-00891	HARNESS ASSY, FACILITY WATER, INTERLOCK	3
AMAT	0140-00981	HARN. ASSY., MAINFRAME/PUMP RACK EMO	2
AMAT	0140-00993	HARNESS ASSY MASS STORAGE POWER	1
AMAT	0140-01062	CABLE ASSY	2
AMAT	0140-01084	HARNESS ASSY., LID UP SENSOR, ENDURA E	1
AMAT	0140-01150	CABLE HARNESS,CAROUSEL INTERLOCK	1
AMAT	0140-01266	PNEUMATIC AIR LINE (BLUE)	1
AMAT	0140-01288	H/A AC PWR TRAY TO FIC DRWR 120VAC 300MM	1
AMAT	0140-01289	H/A,AC PWR TRAY TO LIGHT TB, 300MM FI	1
AMAT	0140-01320	HARNESS ASSY, INTERNAL DRIVER POWER VDI	1
AMAT	0140-01322	HARNESS ASSY,VDI ENET,VDI CNTRL	1
AMAT	0140-01340	HARNESS ASSY AUTO BIAS INTERCONNECT	5
AMAT	0140-01340	HARNESS ASSY AUTO BIAS INTERCONNECT	7
AMAT	0140-01362	HARNESS ASSY, INTRLCK CNTOR DISTRIBUTION	8
AMAT	0140-01366	HARNESS ASSY HDD POWER VDI CONTROLLER	1
AMAT	0140-01372	HARNESS, ASSY SLIT VALVE	1
AMAT	0140-01374	HARNESS, CHAMBER, EMAX 200MM, CENTURA II	1
AMAT	0140-01405	HARNESS ETCH-300MM LAMP/MAG/CONTR/UPS	3
AMAT	0140-01463	HARNESS ASSY 6 DRIVEN DNET DISTRIBUTION	3
AMAT	0140-01467	HARNESS ASSY, CHAMBER WATER LEAK DETECTO	1
AMAT	0140-01584	HARNESS ASSY CABLE	1
AMAT	0140-01630	HARNESS, UV BREAKER	1
AMAT	0140-01639	HARNESS ASY,SWLL/FI INTERLOCK,300MM CENT	1
AMAT	0140-01640	HARNESS ASSY,EMO FRONT BEZEL INTRCONN.25FT.	1
AMAT	0140-01730	H/A WATER LEAK DETECT INTCNT	2
AMAT	0140-01740	HARNESS ASSY	1
AMAT	0140-01763	HARNESS ASSY, RF HOT SIDE REMOTE HEATER	3
AMAT	0140-01767	HARNESS ASSY, WBLL HTR HSS	2
AMAT	0140-01777	HARNESS ASSY, HARD DISK DRIVE POWER	1
AMAT	0140-01813	CABLE, TC 12 FT #8	1
AMAT	0140-01896	HARNESS ASSY DUAL CELL/IBC MOTOR I/O EXT	1
AMAT	0140-01922	H/A, EMO INTERCONNCET, 300MM FI	2
AMAT	0140-01981	H/A, SCR DRIVER CONTROL, 25FT, RADIANCE	1
AMAT	0140-01996	HARNESS ASSY, SWLL A INTERLOCK, 300MM CE	1
AMAT	0140-02099	PRESSURE TRANSDUCER, HARNESS,	2
AMAT	0140-02102	HARNESS ASSY, DUAL MAG DRIVER	2
AMAT	0140-02156	Harness assy, Interface/Shutdown	2
AMAT	0140-02185	HARNESS AASENBLY, DTLR STATUS.	5
AMAT	0140-02214	H/A SWLLA/LLB INTERCONNECT	1
AMAT	0140-02238	NEW CABLE SYSTEM INTERLOCK SY	1
AMAT	0140-02240	HARNESS ASSEMBLY CASSETTE IN PLACE 4W WA	6
AMAT	0140-02275	CABLE	1
AMAT	0140-02278	HARNESS ASSY, INPUT LID WAFER	1
AMAT	0140-02278	HARNESS ASSY, INPUT LID WAFER	2
AMAT	0140-02304	HARNESS ASSY OVER TEMP EXT LLA DOOR	1
AMAT	0140-02306	HARNESS ASSY, OVER TEMP EXT LLA SIDE	1
AMAT	0140-02341	REPLACED BY 0140-05128	1
AMAT	0140-02348	BACKSIDE GAS HARNESS	1
AMAT	0140-02355	ION GAUGE CONTROLLER HARNESS	1
AMAT	0140-02512	HARNESS ASSY, ANAFAZE RS-232	3
AMAT	0140-02525	CABLE, LID SWITCH, BRUSH LDM,	1
AMAT	0140-02655	H/A SMIF WB LLB INTRCNCT-NEW	1
AMAT	0140-02747	HARNESS, ASSY, 12 PRESS XDCR, GP 300MM	4
AMAT	0140-02748	HARNESS ASSY 4 PRESS XDCR GP 300MM	16
AMAT	0140-02748	HARNESS ASSY 4 PRESS XDCR GP 300MM	1
AMAT	0140-02758	HARNESS ASSY, LIFT GATES SLIT	5
AMAT	0140-02758	HARNESS ASSY, LIFT GATES SLIT	2
AMAT	0140-02810	H/A, GFCI OUTLETS, AP/SL 300M	1
AMAT	0140-02825	HARNESS ASSY	1
AMAT	0140-02854	H/A, DI/O 4-STA PDO TRAY, 5.X	2
AMAT	0140-02922	INTERLOCK INTERCONNECT HRNS I	1
AMAT	0140-02972	HARNESS ASSY, 300? DC POWER	1
AMAT	0140-02997	HARNESS ASSY, VME ASSY VME 5V DIST	3
AMAT	0140-03015	PNUEMATIC ASSY	6
AMAT	0140-03112	HARNESS ASSY, PNL INTLKS AND MOTOR STOP,	2
AMAT	0140-03142	HARNESS ASSY., EXTEND WATER FLOW, SW(2)	1
AMAT	0140-03148	HARNESS	1
AMAT	0140-03154	HARN ASSY, AC POWER TO BCR BOX	1
AMAT	0140-03186	HARNESS ASSY, INTLK, GENRACK.	1
AMAT	0140-03193	HARNESS, ETCH 300MM PUMP, TUR	1
AMAT	0140-03194	HARNESS ASSY, Z DRIVE, AB ROTAT	2
AMAT	0140-03209	HARNESS ASSY INDUCT	1
AMAT	0140-03213	H/A PWR, LEFT FAC TRAY TO PDO	6
AMAT	0140-03216	CABLE ASSY, FILTER BOX, CONN	1
AMAT	0140-03218	HARNESS ASSY, RF ON CHAMBER INTERCONNECT	5
AMAT	0140-03265	HARNESS, ASSY, SERIAL DIST 16CH 5X	5
AMAT	0140-03327	HARNESS CABLE ASSY	1
AMAT	0140-03398	CABLE ASSY	2
AMAT	0140-03539	HARNESS ASSY. VALVE SENSORS DPS11 300MM	1
AMAT	0140-03812	CABLE ASSY.	3
AMAT	0140-03812	CABLE ASSY.	1
AMAT	0140-03814	HARNESS ASSY FLOW METER SUP. CENT.	3
AMAT	0140-03814	HARNESS ASSY FLOW METER SUP. CENT.	3
AMAT	0140-03869	H/A, AC PWR, PDO TRAY 4-STA 2	1
AMAT	0140-03985	CABLE	1
AMAT	0140-04034	CABLE ASSY	1
AMAT	0140-04110	HARNESS ASSY, W501 WATER FLOW SWITCHES	1
AMAT	0140-04129	CABLE	1
AMAT	0140-04236	HARNESS ASSY, GP DOOR SW INTERCONNECT	1
AMAT	0140-04483	HARNESS ASSY, (W91), RACK CTRLS/HTR CTRL	2
AMAT	0140-04594	HARNESS ASSY, CH-MATCH, ISOVA	4
AMAT	0140-04655	HARNESS ASSY, WXZ WALL/LID WATER FLOW SE	1
AMAT	0140-04744	HARNESS CABLE ASSY	1
AMAT	0140-04833	HARNESS ASSEMBLY LAMP INTERLOCK INTERNA	11
AMAT	0140-04972	H/A, 208VAC PWR, AC TRAY TO F	1
AMAT	0140-05337	HARNESS ASSY, RF PEAK VOLTAGE DETECT. UM	1
AMAT	0140-05694	HARN ASSY MOTOR ENCODER ICLEAN IECP 30	1
AMAT	0140-05718	HARN ASSY CABLE	2
AMAT	0140-05894	HARNESS ASSY	1
AMAT	0140-06286	HARNESS ASS DUAL DRIVE TO PRODUCER E	1
AMAT	0140-06562	HARNESS ASSY, TEMPERATURE CONTROLLER	1
AMAT	0140-06597	HARN ASSY, AC INTC, 300MM TICL4M	1
AMAT	0140-06636	EXTENDED HARNESS ASSY	1
AMAT	0140-06761	HARNESS ASSY, CVCF I/F WITH A	1
AMAT	0140-06821	NSK ROBOT INTFC DRVR. PRODUCTION E.	1
AMAT	0140-07001	HARN CAROUSEL TR POS	1
AMAT	0140-07002	HARN-LDR CASSHLDR OP	1
AMAT	0140-07089	CABLE CONNECTORS	1
AMAT	0140-07473	HARNESS ASSY, P2KIII RS232 SI	1
AMAT	0140-07482	HARNESS ASSY, DUAL SER PORT,	2
AMAT	0140-07596	CABLE ASSY	3
AMAT	0140-07662	HARNESS ASSY CH AC JUNTION BOX CB3-CB	5
AMAT	0140-08071	HARNESS ASSY TOP SOURCE CAN RF INTE.	2
AMAT	0140-08636	HARNESS ASSY, STAR BARATRON INTENT, TFTE 300MM	1
AMAT	0140-09000	HARNESS , ELECTRICAL SYSTEM	1
AMAT	0140-09003	HARNESS, DC POWER SUPPLY	1
AMAT	0140-09004	HARNESS,CHAMBER INTR.	1
AMAT	0140-09004	HARNESS,CHAMBER INTR.	1
AMAT	0140-09005	HARNESS	1
AMAT	0140-09005	HARNESS	2
AMAT	0140-09006	CABLE HARNESS	1
AMAT	0140-09007	HARNESS	4
AMAT	0140-09015	HARNESS,ASSY	2
AMAT	0140-09015	HARNESS,ASSY	1
AMAT	0140-09016	HARNESS ASSY, TURBO INTC, PLS USE 0140-00145	1
AMAT	0140-09026	HARNESS LOADER	1
AMAT	0140-09027	HARNESS, CHMB A, B SLIT	3
AMAT	0140-09028	ASSY HARNESS ELEV & COMB	1
AMAT	0140-09028	ASSY HARNESS ELEV & COMB	2
AMAT	0140-09029	HARNESS, LOADER DISCONN.	2
AMAT	0140-09031	HARNESS, CASSETTE POSITION	3
AMAT	0140-09036	HARNESS LOADER TO CENTER FINDER	6
AMAT	0140-09036	HARNESS LOADER TO CENTER FINDER	2
AMAT	0140-09038	HARNESS CHAMBER C AND D SLIT VALVE	2
AMAT	0140-09038	HARNESS CHAMBER C AND D SLIT VALVE	1
AMAT	0140-09043	HARNESS, LOAD CHAMBER	1
AMAT	0140-09044	HARNESS, LOADER DOOR OPEN	1
AMAT	0140-09044	HARNESS, LOADER DOOR OPEN	2
AMAT	0140-09045	VAC PUMP HARNESS C/D	1
AMAT	0140-09048	HARNESS ASSY PUMP A/B	1
AMAT	0140-09060	HARNESS ASSY,N2 SENSE,ELEC.	1
AMAT	0140-09060	HARNESS ASSY,N2 SENSE,ELEC.	2
AMAT	0140-09063	HARNESS ASSY,FRONT PANEL	1
AMAT	0140-09063	HARNESS ASSY,FRONT PANEL	2
AMAT	0140-09078	HARNESS HEATING MANIFOLD	1
AMAT	0140-09082	CABLE ASSY MAGNET (A)	6
AMAT	0140-09084	HARNESS ASSY POWERCORD	1
AMAT	0140-09087	HARNESS ASSY LAMP/MAG CONTROL D	1
AMAT	0140-09087	HARNESS ASSY LAMP/MAG CONTROL D	1
AMAT	0140-09088	HARNESS ASSY LAMP/MAG CONTROL B	1
AMAT	0140-09088	HARNESS ASSY LAMP/MAG CONTROL B	1
AMAT	0140-09089	HARNESS ASSY LAMP/MAG CONTROL A	6
AMAT	0140-09089	HARNESS ASSY LAMP/MAG CONTROL A	4
AMAT	0140-09104	HARNESS ASSY. CURRENT TRANSFORMER CHAMBER	1
AMAT	0140-09105	HARNESS ASY, CUR. TRANSF	1
AMAT	0140-09107	HARNESS ASSY SUSCEPTOR LIFT	1
AMAT	0140-09110	ASSY CABLE MONITOR STAND	2
AMAT	0140-09110	ASSY CABLE MONITOR STAND	1
AMAT	0140-09120	CABLE ASSY HARNESS END PT TRENCH/ BLANKET FILM	13
AMAT	0140-09120	CABLE ASSY HARNESS END PT TRENCH/ BLANKET FILM	1
AMAT	0140-09123	HARNESS ASSY EV VOLTAGE TO GAS PANEL	1
AMAT	0140-09125	CABLE ASSY LASER SAFETY EXT	9
AMAT	0140-09125	CABLE ASSY LASER SAFETY EXT	1
AMAT	0140-09130	ZERO ORDER SENSOR ASSY	3
AMAT	0140-09143	CABLE, HARNESS	2
AMAT	0140-09149	CABLE ASSY	1
AMAT	0140-09149	CABLE ASSY	2
AMAT	0140-09151	CABLE ASSY	1
AMAT	0140-09151	CABLE ASSY	1
AMAT	0140-09153	HARNESS ASSY EV VOLTAGE TO GAS PANEL.	2
AMAT	0140-09158	HARNESS ASSY, FINAL VALVE	3
AMAT	0140-09159	HARNESS ASSY, ROOTS BLOW JUMPER TO REMOTE	8
AMAT	0140-09160	HARNESS ASSY DRY VAC	8
AMAT	0140-09164	HARNESS ASSY DRY VAC PUMP A	8
AMAT	0140-09165	CABLE HARNESS	1
AMAT	0140-09165	CABLE HARNESS	7
AMAT	0140-09166	HARNESS, ASSY, DRY VAC PUMP	7
AMAT	0140-09166	HARNESS, ASSY, DRY VAC PUMP	21
AMAT	0140-09168	HARNESS ASY CASSET 4,5,6	1