Description
Semiconductor Equipment Spare Parts
Valid: Subject to prior sale without notice. This is only for end users. Appreciate your time!
| Maker | Model | tool description |
| Rudolph | MP300 XCu | Cu Film thickness measurement |
| Rudolph | MP300 | Metal Film thickness measurement |
| Ebara | Frex 300( without HDD) | W CMP |
| Ebara | Frex 300 | STI CMP( some missing part) |
| Nitto Denko | MA 3000 II | wafer mounter and demounter |
| EO Tech | CSM 3000 | laser mark |
| Brooks | load port | Fixload 6M, Vision, Fixload 25 |
| TDK | load port | E3, E4, E4A, F1 |
| Asyst | Isoport | wafer load port |
| Rorze | load port | RV201 |
| August | 3Di-8000 | wafer bumping inspection |
| Nanometrics | EFEM module of Caliper Mosaic | Brooks Razor robot with Brooks load port |
| HSEB Zeiss | Axiotron 300 | AOI microscope with 2 units of Brooks load port |
| DNS | RF3S | coater and developer( 5C5D) |
| Rorze | Wafer sorter with RR717L1521 robot | wafer sorter for 300mm wafer |
| DNS | SK-2000 | coater and developer(4C4D) |
| SUSS | ACS-200 | coater |
| Raytex | RXW-0826SFIX-SMIF | edge scanner |
| Nanometrics | 8000Xse | Ox film thickness measurement |
| Nanometrics | Nanospec 9100 | Ox film thickness measurement( PC missing) |
| Rudolph | MP200XCU | Cu Film thickness measurement |
| Asyst | LPT 2200 | SMIF loader |
| Asyst | Versaport pod opener 2200(VPO) | SMIF loader |
| Asyst | e-charger | N2 charger |
| Asyst | Versaport 2200 with shuttle and back plate | SMIF loader |
| Asyst | Indexer 2200 | SMIF loader |
| EVG | 820 | mold carrier lamination |
| LAM | Ontrak Synergy | Post CMP cleaner with HEPA mini-environment |
| IPEC | 472 | CMP |
| August | NSX-105 | wafer bomping inspection( complete) |
| August | NSX-95 | Auto inspection system( part tool with part missing) |
| Nikon | NWL860-TBM with Optophot 200 | wafer auto loader with Microscope |
| Olympus | AL110-LMB6 with MX51 | wafer loader with Microscope |
| Disco | DAD 321 | wafer dicing saw |
| DNS | WS-820L | Bench type wafer cleaner( square solar wafer) |
| IPEC | 472 | CMP( fully refurbished) |
| ASM | MS896 | LED sorter |
| ASM | WS896 | LED sorter |
| Nikon | optiphot 150 | Microscope |
| Nikon | ECLIPSE L150 | Microscope |
| SAMCO | RIE-212 ICP | LED |
| SAMCO | PD3800 PECVD | 1 for 4″ LED and 1 for 6″ Si wafer |
| Brooks PRI | DBM 2406 | Dual arm Atmospheric wafer handling robot |
| Brooks PRI | DBM 2407 | Dual arm Atmospheric wafer handling robot |
| Brooks PRI | DBM 2706 | Dual arm Atmospheric wafer handling robot |
| Brooks PRI | ABM/ATM 407B | single arm atmospheric wafer handling robot |
| Brooks PRI | ABM/ATM 405 | single arm atmospheric wafer handling robot |
| Brooks PRI | ABM 205 | single arm atmospheric wafer handling robot |
| Brooks PRI | ATM 305/307 | single arm atmospheric wafer handling robot |
| Brooks PRI | ATM 204/207 | single arm atmospheric wafer handling robot |
| Brooks PRI | ATM/ABM 105/107/107B | single arm atmospheric wafer handling robot |
| Brooks PRI | ESC-200/212/212B/222/218 | PRI robot controller( single arm robot) |
| Brooks PRI | EDC-2400/2800 | PRI robot controller(dual arm robot) |
| Brooks PRI | PRE 300/300B/301/301B | wafer pre-aligner |
| Brooks PRI | PRE 200/200B/201/201B | wafer pre-aligner |
| Brooks PRI | Mag 8 | vacuum robot( AMAT Producer GT) |
| Brooks | ATR-8 robot alone (121669) | LAM tool |
| Kawasaki | 3NX540B-A302 | atmospheric wafer robot( AMAT producer) |
| Kawasaki | NS410B-A002 | atmospheric wafer robot( AMAT producer) |
| Kawasaki | 3NX520B-A008 | atmospheric wafer robot( KLA) |
| Yaskawa | XU RSM53E0 with XU-CM6180 controller | atmospheric wafer robot( Ebara Frex 300 CMP) |
| Yaskawa | XU RCM9205 with ERCR-NS01-A003 controller | atmospheric wafer robot for KLA |
| Yaskawa | XU RCM9206 robot alone | atmospheric wafer robot for KLA |
| Yaskawa | XU RC350D-C61+ERCR-RS10-C003 | atmospheric wafer robot( DNS SU-3000) |
| Yaskawa | XU RC350D-C31+ERCR-RS09-A003 | atmospheric wafer robot( DNS SU-3000) |
| Yaskawa | XU RC350D-K01+ERCR-RS09-A003 | atmospheric wafer robot( DNS SU-3100) |
| Yaskawa | XU-RCM6841 with XU-CN1170A controller | atmospheric wafer robot( AMAT Endura Enabler) |
| MECS | UTC 800 | atmospheric wafer handling robot( WJ-999) |
| MECS | UTC 801P | atmospheric wafer handling robot( WJ-1000, 1500) |
| MECS | UTC 820Z | atmospheric wafer handling robot( Hitachi CD-SEM) |
| MECS(Asyst) | UTW-FS5500S | atmospheric wafer handling robot |
| MECS | UTX 1100 | atmospheric wafer handling robot(ASM eagle-10) |
| MECS | UTX 1200 | atmospheric wafer handling robot(ASM eagle-10) |
| MECS | OF 250 | wafer pre-aligner(Hitachi CDSEM 8820/8840) |
| Kensington | WFH4D | wafer robot with aligner |
| Kensington | WFH4C | wafer robot with aligner |
| Genmark | GB4/3L | atmospheric wafer handling robot |
| Genmark | GB8-MT-80050102 | Dual arm Atmospheric wafer handling robot |
| Rorze | RR701L1521-3A3-111-2 | Dual arm Atmospheric wafer handling robot |
| Rorze | RR701L1521-3A3-111-3 | Dual arm Atmospheric wafer handling robot |
| Rorze | RR701L90-Z20-616 | Dual arm Atmospheric wafer handling robot |
| Rorze | RR717L1521 | Dual arm Atmospheric wafer handling robot |
| Rorze | RR713L1521-3A3-E13(E11)-1 | Dual arm Atmospheric wafer handling robot |
| Edwards | iH-1000 | dry pump |
| CTI | On board 10F | cryo pump |
| MKS | AX8407A | Ozone generator |
The trademarks of the equipment and parts contained in this website belonged to the Original Equipment Manufacturers.
SS9250-3-20230819-3
