Description
The “Optical Coating Laboratory OCLI M 1044 Vacuum Coating System” is only for end user. Please contact us if you have any questions. Subject to prior sale without notice. Appreciate your time!
OEM: Optical Coating Laboratory
Model: OCLI 1044
Category: Vacuum Coating System/ Sputtering Deposition System
Configuration:
– (4) PFEIFFER Turbo molecular pumps with power suppliers
– (2) ADVANCED ENERGY Pinnacle Ion gun, 12 kW
– (3) DC Engines
– (3) Drives
– (6) DC Power supplies: (3+3) Master – (20 kW) / Slave (10 kW)
– (2) MDX Sparc-LE 20, Si target: (1+1) Master / Slave
– (2) MKS 647B Multi gas controllers
– (3) MAGNETRON Sputter cathodes
– (20) Metal holders, 18 x 139 cm
– HONEYWELL PLC
– MKS Stabil-Ion Controller
– GRANVILLE PHILLIPS Series 370 Vacuum sensor
– GRANVILLE PHILLIPS Vacuum gauge
– MKS Mass Flow Controller (100 to 1000 SCCM)
– (2) Bias voltage sources
– Bias voltage suppliers
– VAT Gate and actuators
– (3) MDX Display
– (2) Pinnacle Display
– (2) Computers
– Monitor
– Frame
ID-OEM-1
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