Description
Tokyo Electron Ltd Lithius Pro Coater/Develeoper 300mm
- Mainframe (COT/DEV)
- Coater/Develeoper Tool
- Software : 100.0.90.2
- Process:ArF Dry
- CIM: SECS/GEMSECS/GEM
- Handler System CRA 1 , Handler System IRAM 1 , Handler System PRA 3
- Factory Interface FOUP 5
- Options System LynxOS / TE
- Vintage: 2011
- COT CABINET 1
- Chiller Original 1
- NONESYSTEM T/H CONTR. 1
- RESIST CABINET 1
- DEV. CABINET 1
- A/C POWER
Location: Europe
Condition: We sell this item at AS IS WHERE IS
Price: Make offer
These are subject to prior sale. These are only for end user. Appreciate your time.
The trademarks of the equipment and parts contained in this website belonged to the Original Equipment Manufacturers.
SS4781-0-4-1-1-230304