Description
The “Semitool Paragon Cu/Au Plating System” is only for end user. Please contact us if you have any questions. Subject to prior sale without notice. Appreciate your time!
– Model: Paragon
– Model #: PRGN D5-G2-N1-P1
– Wafer size: 200mm / 300mm capable
– Front and rear LCD monitors and keyboard
– Two FOUPs at load port
– Robot with dual end-effectors
– Plating chamber CP1,CP2,CP4 and CP9 setup for 200mm
– Plating chamber CP3 setup for 300mm
– Chamber configuration:
CP1 – Cu Plate 200mm
CP2 – Au D-Plate 20mm
CP3 – Au Plate 300mm
CP4 – Au Plate 200mm
CP5 – Chrome Etch 300mm
CP6 – N/A
CP7 – N/A
CP8 – PR Strip 300mm
CP9 – Ni Plate 200mm
CP10 – Three Metal Etch 200mm/300mm
CP11 – SRD 300mm
ID-SS380EB
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