Description
Thermco 5204 diffusion furnace, loadstation, source cabinet, tmx. This furnace was built at the Thermco orange county factory with the tmx control system, the most standard control system for all furnace systems.It is a 40 inch flat zone and 150mm wafers. The load station is approximately 10 feet long. The source cabinet is standard heroe design. One bank does have a stand alone TMX cabinet (like a thermco) and the other 3 have the modified tube drawers designed into the loadstation base on slides.
Condition: Unit pulled from a working service, however due to lack of power supply unable to fully test. Sold As-Is. Complete,working,functional test or refurbished conditions are optional at extra cost.
Valid time: Subject to prior sale without notice.
Contact us (sales@semistarcorp.com) for more info pls. Appreciate your time.
ID-SS380-e
