Description
ASML PAS 2500/40 WAFER STEPPER SYSTEM 150 MM/6”:
- Reticle Masking: Four independent blades; full field of travel
- Alignment System: Dual automatic through-the-lens using diffraction grating marks directly referenced to reticle alignment system
- Illumination System: Elliptical mirror and fly’s eye integrator
- Position Control: Three axis HP laser interferometer system
Condition: Unit pulled from a working service, however due to lack of power supply unable to fully test. Sold As-Is. Complete,working,functional test or refurbished conditions are optional at extra cost.
Valid time: Subject to prior sale without notice.
Contact us for more info pls. Appreciate your time.
ID-SS380-e
