Description
Ulvac XeF2 release etch cluster tool FRE-200E:
- Manufacturer: ULVAC
- Model: FRE-200E
- Equipment Details: RF Power supply.
- Voltage: 208V Frequency: 60Hz
- Phase, Wire: 3Phase, 3Wire+ G Line
- Full Load Current: 142A
- Max Load(unit): 15.5A
- Over current protective: 250A
- Short Circuit Current Rating: 5Ka
Condition: Unit pulled from a working service, however due to lack of power supply unable to fully test. Sold As-Is. Complete,working,functional test or refurbished conditions are optional at extra cost.
Valid time: Subject to prior sale without notice. Appreciate your time.
ID-SS380-e
