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Lam Research Spare Parts

Description

Please contact us for the availability of the following  Lam Research Spare Parts

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The items are subject to prior sale without notice. These items are only for end users.

Item Description
1 Ceramic Tech 719-250922-001 Dark Space Ring Shield Lwr Electrode Lam Refurbished
2 Force Computers 100611 VME Card SYS68K/CPU-6VB Rev. 4.1 Lam 810-17034-300-1 Used
3 Force Computers 300000 CPU Processor SYS68K/SASI-1 Lam 17035-1-B-65623​47 Used
4 Force Computers 300000 PCB Card SYS68K/SASI-1 100108 Lam Rainbow 4420 Used
5 Force Computers 310004 PCB Card SYS68K/SIO-2 Lam Research 4420 Rainbow Used
6 Force Computers 810-017035-001 Rev B SASI Board 880-12536-101 Lam 4420 Used
7 Force Computers 880-12535-101 VME Card 810-017038-002 Lam 4420 Used Working
8 Force Computers 880-12535-101.A​1 VME PCB Lam 810-017038-002 Rainbow 4420 Used
9 Force Computers 880-12537-101.A​2 PCB Card Lam Research 4420 Used Working
10 Force Computers 890-14425-101 PCB Card SYS68K/CPU-6VB/​C3 Lam 4420 Used Working
11 Force Computers 890-14443-101 VME Card SYS68K/SASI-1 Lam MOD 1 4420 Used Working
12 Force Computers 930-12535-101.A​1 PCB Card SYS68K/SIO-2 Lam 810-017038-002.​B Used
13 GD California SYS68K/SIO-2 VME PCB Card Lam 810-017038-002 Rev. C Used Working
14 HIne Design Elevator Assembly SEMIGROUP TEXAS 590
15 Lam Reaserch 852-017500-001-​D CRT Keypanel Chassis 4420 Etcher Minor Damage Used
16 Lam Research / PEC 716-330167-261 / PEC-1525 RING, CLP, BOT ACTR, 2.3, 6″, NO MF
17 Lam Research 1001867-07-03-0​007 GAS INJECTION RING
18 Lam Research 12350-2-D-00622​135 Outer Gate Assembly 4420 Used Working
19 Lam Research 1289-98-42-004 CHAMBER LINER
20 Lam Research 310-170314 ADIO-A0 Control Board PCB Card Used Working
21 Lam Research 53T40618 UPPER DEPO SHIELD
22 Lam Research 70110-003 PCB Card 71110B1-001 Rainbow 4420 Used Working
23 Lam Research 713-028647-149 Ring 713-28647-149 Used Working
24 Lam Research 713-21816-1 Rev.B Blank Cover New
25 Lam Research 714-002602-001 E End Point Detection 853-001983-005 Rev. P Used
26 Lam Research 715-007469-002 Anode, 4-Pin, .031, Clear
27 Lam Research 715-011531-102 Electrode Aluminum Anodized
28 Lam Research 715-011912-083 8.3″ Upper Baffle Plate New
29 Lam Research 715-021771-002 Arm Cover HSG, RDC HGT w/Align
30 Lam Research 715-028552-001 Upper Electrode Ring Clamp New
31 Lam Research 715-028615-002 8″ Upper Baffle Plate New
32 Lam Research 715-11535-100-E​2 Upper Electrode Ring
33 Lam Research 715-11986-018 ASSY ELECTRODE, ESC 8″
34 Lam Research 715-140126-001 Facing Upper Baffle
35 Lam Research 715-330889-002 LAM 9600 Ring Ground Chamber
36 Lam Research 715-330889-002 Ring Ground Chamber
37 Lam Research 715-331051-002 9600 Web Kit BSR Ring Ceramic
38 Lam Research 715-495014-001 Chamber Liner Trans Lam 9600 DFM Kit
39 Lam Research 715-495014-001 Liner Transition Manifold
40 Lam Research 715-495014-001 Liner Transition Manifold Adapter
41 Lam Research 715-495014-001 Liner Transition Manifold Adaptor
42 Lam Research 716-011036-001 Alumina Orifice Filler Ring Used Working
43 Lam Research 716-011036-001 Ring Filler Lower Rev. F New
44 Lam Research 716-011036-001 Ring Filler Lower Rev. F Used Working
45 Lam Research 716-011036-001 Ring Filler Lower Rev. G New
46 Lam Research 716-011036-001 Ring, Filler Orifice, Alumina
47 Lam Research 716-011505-001 7.98″ Diffuser Disc New Surplus
48 Lam Research 716-011651-006 6″ Wafer Clamp Edge Ring New
49 Lam Research 716-021492-001 Director Process Gas Used Working
50 Lam Research 716-028721-281 8″ Shadow DMD Bottom Wafer Clamp PLT Rev. A New
51 Lam Research 716-033917-001 Research Quartz Ring Base New
52 Lam Research 716-140069-001 Upper Ceramic Insulator Ring
53 Lam Research 716-140118-001 Focus Ring ESC 8″
54 Lam Research 716-330915-001 Ring Insulator Ceramic
55 Lam Research 718-094523-282 ASSY ELECTRODE, ESC 8″
56 Lam Research 718-098591-001 Gate
57 Lam Research 718-098591-001 VAT 65 Paddle Pendulum Valve Gate
58 Lam Research 718-098592-001 VAT 65 Locking Ring
59 Lam Research 766-002089-002 Valve-Isolation Drive 4-Way
60 Lam Research 796-091092-102 Valve gate, VAT Housing
61 Lam Research 799-550690-001 CA, RS232, MAG7 Serial Cable Assembly New
62 Lam Research 810-017004-001 Solenoid Interlock Board Rev. E Used Working
63 Lam Research 810-017004-001 Solenoid Interlock Board Rev. F Used Working
64 Lam Research 810-017004-001 Solenoid Interlock Board Rev. G Used Working
65 Lam Research 810-017012-001 Heartbeat Board Rev. D 4420 Etcher Used Working
66 Lam Research 810-017012-001 Heartbeat Board Rev. F Used Working
67 Lam Research 810-017018-002 Gap Motor Controller Board PCB Rev. J Used Working
68 Lam Research 810-017031-003 ADIO A0 PCB Card Rev. 2 Used Working
69 Lam Research 810-017031-004 ADIO A0 PCB Card Rev. 01 810-17031 Used Working
70 Lam Research 810-017031-004 ADIO A0 PCB Card Rev. 1 810-17031-4 Used Working
71 Lam Research 810-017031-004 ADIO A0 PCB Card Rev. A 810-17031 Used Working
72 Lam Research 810-017031-004 ADIO A0 PCB Card Rev. C Used Working
73 Lam Research 810-017031-2 ADIO Board PCB Rev. 2 4420 Etcher Used Working
74 Lam Research 810-017031R004 ADIO A0 Processor Board PCB 810-17031-2 Used Working
75 Lam Research 810-017075-003 Gas Panel Interlock PCB Rainbow 4420 Used Working
76 Lam Research 810-048219-004 Pulse Power Sample & Hold PCB 710-048219-004 New
77 Lam Research 810-057032-001 DC Servo Driver PCB Card 810-57032-001 Used Working
78 Lam Research 810-069751-103 Node Board Type 27 PCB 710-069751-002 Used Working
79 Lam Research 810-17002-001 I/O Breakout Board Rev. D Used Working
80 Lam Research 810-17012-001 Heartbeat PCB Board Rev. D 4420 Used Working
81 Lam Research 810-17012-001 Heartbeat PCB Board Rev. D Rainbow 4428b Used Working
82 Lam Research 810-17012-001 Heartbeat PCB Board Rev. F 4420 Used Working
83 Lam Research 810-17012-002 Heartbeat PCB Rev. 2 Rainbow 4420 Used Working
84 Lam Research 810-17012-002 Heartbeat PCB Rev. 3 Rainbow 4420 Used Working
85 Lam Research 810-17018 Gap Motor Controller Board PCB Used Working
86 Lam Research 810-17018-002 Gap Motor Controller BD PCB Rev. G Rainbow 4420 Used
87 Lam Research 810-17018-002 Gap Motor Controller BD PCB Rev. H Rainbow 4420 Used
88 Lam Research 810-17031-004 ADIO-A0 Control Board PCB Card Used Working
89 Lam Research 810-17031-2 ADIO A0 PCB Rev. 2 Rainbow 4420 Used Working
90 Lam Research 810-17031-2 ADIO-A0 Control Board PCB Rainbow 4420 Used Working
91 Lam Research 810-17031-3 ADIO A0 PCB Card Rev. 2 Used Working
92 Lam Research 810-17031-3 ADIO-AO Board PCB 4420 Used Working
93 Lam Research 810-17031-4 ADIO A0 PCB Rev. 2 Rainbow 4420 Used Working
94 Lam Research 810-17031-R4 ADIO-AO Control Board PCB Rev. 1 Rainbow 4420 Used
95 Lam Research 810-17031R4 Processor Board PCB Card ADIO-A0 9100 Used Working
96 Lam Research 810-34806 RFG RF Interlock Board PCB Used Working
97 Lam Research 810-800031-300 System Interlock 300mm PCB 710-800031-300 Used
98 Lam Research 810-800081-013 P2 MB VME PCB 710-800081-013 Used Working
99 Lam Research 810-800082-029 VME Breakout KIY045 PCB 710-800082-029 Used Working
100 Lam Research 810-800086-010 DC Controller Assembly PCB 710-800086-010 New
101 Lam Research 832-038915-001 RF Match Network Poly Etch Autotuner As-Is
102 Lam Research 839-360218-001 S-BENO WITH BELLOWS
103 Lam Research 839-440562-518 ASSY, ESC, DUAL ZONE CLG
104 Lam Research 852-011060-503-​D-CHMAIN Upper Chamber Gap Housing Assembly As-Is
105 Lam Research 852-011061-103 Lower Chamber Assembly 4420 Etcher Untested As-Is
106 Lam Research 852-011061-503-​C-CHMN Lower Chamber Assembly 4420 Etcher As-Is
107 Lam Research 852-017750-001 Remote Used Untested As-Is
108 Lam Research 853-001142-001 Automatch Controller
109 Lam Research 853-004118R002 RFRB, ASSY RF INTERFACE W/EXCHANGE
110 Lam Research 853-011117-001 Upper Chamber Parts Lot 010250C1-AO01E 4420 Used
111 Lam Research 853-011661-001-​H Pedestal Cylinder Lift 4420 853-011632-001 Used
112 Lam Research 853-012123-001-​E-2305 Harmonic Arm Drive Motor Assembly 4428b Used
113 Lam Research 853-012123-001-​E-230S Harmonic Arm & Paddle Drive 4420 Rainbow Used
114 Lam Research 853-012123-001-​G-230 Harmonic Arm Drive Assembly 4420 Etcher Used
115 Lam Research 853-012123-001-​G-230S Harmonic Arm Drive 715-130092-008 4420 Used
116 Lam Research 853-012123-001-​I-LLFDR Harmonic Arm Drive 4420 Used Working
117 Lam Research 853-012123-500-​E1-230S Harmonic Arm Drive 4420 Used Working
118 Lam Research 853-012123-500-​E1-230S Harmonic Arm Drive 715-130080-008 4420 Used
119 Lam Research 853-012261-001-​4-230S Inner Gate Assembly 4420 Etcher Used Working
120 Lam Research 853-012350-002 Outer Gate Assembly Rev. H 4420 Etcher Used Working
121 Lam Research 853-012350-002-​-230D Outer Gate Assembly 4420 Etcher Used Working
122 Lam Research 853-012350-002-​D Outer Gate Assembly 4420 Etcher Used Working
123 Lam Research 853-012350-002-​F-2035 Outer Gate Assembly Rev. F 4428b Rainbow Used
124 Lam Research 853-012350-002-​F-230 Outer Gate Assembly 4420 Etcher Used Working
125 Lam Research 853-012350-002-​F-230D Outer Gate Assembly 4420 Etcher Used Working
126 Lam Research 853-012350-002-​F-230S Outer Gate Assembly 4420 Etcher Used Working
127 Lam Research 853-012350-002-​F-230S Outer Gate Assembly Rev. G 4420 Rainbow Used
128 Lam Research 853-012350-002-​H-230 Outer Gate Assembly 4420 Etcher Used Working
129 Lam Research 853-012350-002-​H-LL FDR Outer Gate Assembly 4420 Etcher Used
130 Lam Research 853-012350-002-​J Outer Gate Assembly Used Working
131 Lam Research 853-012350-002-​J-LLFD Outer Gate Assembly 4420 Etcher Used Working
132 Lam Research 853-012350-002-​J-LLFDR Outer Gate Assembly 4420 Etcher Used Working
133 Lam Research 853-012350-002-​LL FDR Outer Gate Assembly 4420 Etcher Used Working
134 Lam Research 853-012350R002 Outer Gate Assembly Rev. H 4420 Etcher Used Working
135 Lam Research 853-012500-002-​E-3117 Edge Detector ASSY
136 Lam Research 853-012500R-002​-E-ELM Edge Sensor Assembly 4420 Etcher Used Working
137 Lam Research 853-012550-001 Shuttle Assembly 4420 Etcher Used Working
138 Lam Research 853-012550-001-​D Wafer Shuttle Assembly Used Working
139 Lam Research 853-012550-001-​F-C222 Wafer Shuttle Assembly Rainbow 4420 Used
140 Lam Research 853-012550-001-​H Shuttle Assembly 4420 Etcher Used Working
141 Lam Research 853-012550-001-​H-ELM Wafer Shuttle Assembly 4420 Etcher Used
142 Lam Research 853-012550-001-​H-LEAN Wafer Shuttle Assembly Used Working
143 Lam Research 853-012550-002 E-ELM Edge Sensor Assembly Rainbow 4420 Etcher Used
144 Lam Research 853-012726-001 Wafer Transport Assembly 853-012550-001 4420 Used
145 Lam Research 853-012726-001-​G-C222 Wafer Transport Assembly 4420 Etcher Used
146 Lam Research 853-012726-101-​C-3117 Wafer Transport Assembly 4420 Etcher Used
147 Lam Research 853-012726-101-​E Wafer Transport 853-012550-001-​G 4420 Etcher Used
148 Lam Research 853-013610-001 4420 Solenoid Tray Assembly Rev. E Used Working
149 Lam Research 853-013610-001-​C Solenoid Tray Assembly 4420 Etcher Used Working
150 Lam Research 853-013610-001-​D 4420 Solenoid Tray Assembly Missing PCB As-Is
151 Lam Research 853-013610-001-​D 4420 Solenoid Tray Assembly Used Working
152 Lam Research 853-013610-001-​D Solenoid Tray Assembly 4420 Incomplete As-Is
153 Lam Research 853-013610-001-​D Solenoid Tray Assembly 810-17004-001 4420 Used
154 Lam Research 853-013610-001-​D-C222 4420 Solenoid Tray Assembly Used Working
155 Lam Research 853-013610-001-​D-C222 Solenoid Tray Assembly 4420 Etcher Used
156 Lam Research 853-013610-001-​E-4050 4420 Solenoid Tray Assembly Missing PCB As-Is
157 Lam Research 853-013610-001-​E-C364 Pneumatic Manifold Assembly 4420 Etcher Used
158 Lam Research 853-013610-001-​E-LEAN 4420 Solenoid Tray Assembly Missing PCB As-Is
159 Lam Research 853-013610-001-​E-LEAN Pneumatic Manifold Assembly 4420 Etcher Used
160 Lam Research 853-013610-111-​1-C222 4420 Solenoid Tray Assembly Used Working
161 Lam Research 853-013610-501-​A-LEAN 4420 Solenoid Tray Assembly Missing PCB As-Is
162 Lam Research 853-013610-501-​A-LEAN Solenoid Tray Assembly 4420 Used Working
163 Lam Research 853-017160-002-​F-1273 Rear EMO Panel Assembly 4420 Used Working
164 Lam Research 853-017160-583-​B-LEAN Rear EMO Assembly PCB 810-017003-004 Used
165 Lam Research 853-017435-001-​A-1996 4 Pin Lifter Filter 4420 Used Working
166 Lam Research 853-020936-001 Upper Seal Plate Assembly 4420 Used Working
167 Lam Research 853-020936-002-​C-CHFDER Upper Seal Plate Assembly 4420 Used Working
168 Lam Research 853-054148-001 ASSY, Liquid Pump, 100ml
169 Lam Research 853-140013-001-​1-230D Outer Gate Assembly 4420 Etcher Used Working
170 Lam Research 853-140013-001-​1-230S Outer Gate Assembly 4420 Etcher Used Working
171 Lam Research 853-140013-001-​3-230S Outer Gate Valve Assembly 4420 Used Working
172 Lam Research 853-190023-001 Controller Assembly 272072-00 Lam Rainbow 4420 Used
173 Lam Research 853-190023-001 Hard Disk IDE W/ Controller PCB Assembly Used
174 Lam Research 853-495457-001 Pedestal, CSTR, 2.2K TMP Lifter Rev E2
175 Lam Research CORPORATION 716-021843-001 Bell, Jar, Base, ISO Etch
176 Lam Research Hard Disk and Controller 853-190023-001
177 Lam Research Kit, crtsy, cal, te 843-022046-001
178 Lam Research Kit, crtsy, cal, te 843-022046-001 REV B
179 Lam Research Ring Clamp Upper Electrode 715-028552-001 New
180 Lam Research SUS-CRR-0320 RING CONFINEMENT CERAMIC
181 Lam Research TA2004 4N5 GRADE TITANIUM VECTRA, SET 1 COIL 5 CUPS 5 PINS
182 MKS 649A-25466 Mass Flow Controller 54-106931A65 500 SCCM H2 Ne New
183 MKS Instruments 649A12T52C2DR Mass Flow Controller 54-106931A64 500 SCCM N2 New
184 Novellus 02-169180-01 C3 Vector LTM R L K VCTR 101079 Assy LAM used working
185 Omron R88M-H1K130 Servo Motor Seisa BL3-20A-11TAHDK​1 Gear Drive Lam 4420 Used
186 Precise Sensors 70425-250-01-GA Sensor Readout Used Working
187 Saphikon 17087 TC Sensor Weldment Lam Research 839-051689-002 New
188 Tylan General AC-2S06 Throttle Valve Controller AC211A Lam 796-006238-011 As-Is
189 Tylan General FC-2900M Mass Flow Controller Lam Research 797-91413-924 New
190 Wasco SV129-31W2A-X Vacuum Switch Lam Research 853-01780-002 Lot of 8 New
191 Xycom 70113-001H Memory Board Lam 4420 Used Working
192 Xycom 70113-003 PCB Card 71113A-001 Lam Research Rainbow 4420 Used Working

The items are subject to prior sale without notice. These items are only for end users.

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