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Cambridge Nanotech Model # F200

Description

Please contact us for the availability of the  Cambridge Nanotech Model # F200.

MANUFACTURER: Cambridge Nanotech

MODEL: Fiji F200

Description:

  • Atomic layer deposition system with load lock
  • Any substrate up to 200 mm wafer
  • Plasma enhanced ALD available with O2, Ar, and N2 gases
  • Thermal ALD with temperatures up to 300°C
  • Turbo pump with APC

The items are subject to prior sale without notice. These items are only for end users.

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