Description
Please contact us for the availability of the Cambridge Nanotech Model # F200.
MANUFACTURER: Cambridge Nanotech
MODEL: Fiji F200
Description:
- Atomic layer deposition system with load lock
- Any substrate up to 200 mm wafer
- Plasma enhanced ALD available with O2, Ar, and N2 gases
- Thermal ALD with temperatures up to 300°C
- Turbo pump with APC
The items are subject to prior sale without notice. These items are only for end users.
SSEB380

