Description
Please contact us for the availability of the Plasmatherm Versaline PECVD Deposition System.
| Plasmatherm VLR (Versaline) 7000 series Cassette to Cassette PECVD Deposition system. (1) LM/TM module & (1) PECVD Module. Can run up to 8″ dia. wafers. Cassette to Cassette Load Lock with robot transfer into PECVD module. PECVD module consist Plasmatherm OS with a Watlow Six Zone Chamber heat controller, Advanced Energy RF5S – 500W RF lower Electrode power supply with match work and tuner. Currently set up with four Mass Flow Controllers |
The items are subject to prior sale without notice. These items are only for end users.
SSEB380