Description
Please contact us for the availability of the Plasmatherm 770 ICP Ion Couple Plasma Etching System.
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Plasmatherm 770 ICP Ion Couple Plasma Etching System, Manual Load Lock, Ceramic Clamp style ICP system, Leybold 600C turbo with Leybold NT20 controller, VAT Pen VAT PM5 Gage Valve controller Watlow Six Zone Chamber heat controller MKS 290 Ion Gauge Controller Backside He Cooling Advanced Energy RF5S 500W RF lower Electrode power supply with match work and tuner RFVII 1000W 13.56MHz upper Electrode power supply with match work and tuner Currently four Mass Flow Controllers Can offer System refurbished, operational or As is, where is. Can offer installation & training as well |
The items are subject to prior sale without notice. These items are only for end users.
SSEB380