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Ulvac XeF2 release etch cluster tool FRE-200E

Description

Please contact us for the availability of the  Ulvac XeF2 release etch cluster tool FRE-200E.

ULVAC – XeF2 Etch Release  FRE-200E

Manufacturer: ULVAC

Model: FRE-200E

Equipment Details: RF Power supply.

Voltage: 208V    Frequency: 60Hz

  Phase, Wire: 3Phase, 3Wire+ G Line

Full Load Current: 142A

Max Load(unit): 15.5A

Over current protective: 250A

Short Circuit Current Rating: 5Ka

The items are subject to prior sale without notice. These items are only for end users.

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