Description
Please contact us for the availability of the following used Lam TCP 9600 Metal Etcher, 6″ semiconductor equipment .
The item is only for end user. The item is subject to prior sale without notice.
Lam TCP 9600 Metal Etcher, 6″
– Process gases: Cl2, BCl3, HBr, SF6, CF4, Ar, N2, O2, He
– Process pressure 0-100 mTorr
– Top electrode power 0 – 1250W
– Lower electrode power 0 – 1200W
– Process temperature 55°C
– Adjustable monochromator is used for endpoint detection
– Equipped with a decoupled source quartz (DSQ) strip module
to remove (strip) the photoresist from the wafers
1993/94 Vintage
The item is only for end user. The item is subject to prior sale without notice.
SS5816
