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Trion Minilock RIE Plasma Etcher

Description

Please contact us for the availability of the following used Trion Minilock RIE Plasma Etcher RIE Single Wafer Plasma Metal Etcher Semiconductor Equipment.

Manufacturer Trion Technology
Model Minilock
Wafer Size Range
  Set Size 200 mm
Controller Type PC Controller Type
Loadlock
  Loadlock Yes/No YES
Number of Gas Inputs Four Gas
Process Gases O2, CF4, Cl2, BCl3
Other Information
    • RIE Single Wafer Plasma Metal Etcher
    • 8” (dia.) Chuck
    • RFX-600 RF Generator, 13.56 MHz
    • Automatic RF Matching Network
    • Vacuum Loadlock
    • 4ea Mass Flow Controllers
    • 100 sccm O2
  • 100 sccm CF4
  • 50 sccm Cl2
  • 100 sccm BCl3
  • PC Process Controller
  • Color Touch Screen Graphical User Interface

The items are subject to prior sale without notice. These items are only for end users.

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