Description
Please contact us for the availability of the following used AG Associates Heatpulse 2146 Rapid Thermal Annealing Thermal Processing System semiconductor equipment.
| Manufacturer |
AG Associates |
| Model |
Heatpulse 2146 |
| Description |
Single Chamber RTP |
| Cassette to Cassette |
YES |
| Other Information |
- Rapid Thermal Annealing
- Oxide & Nitride Film Deposition
- Cassette to Cassette Handling of 4”-6” Wafers
- 2 Axis Robot for Transporting Wafers to Heating Chamber
- 400°C to 1300°C Temperature Range
- Programmable 0-600 sec Steady State Process Time
- 120 Wafers/Hour Null Cycle (Zero Processing Time)
- Wafer Cooldown Stage
- Full Range Dual Pyrometer
- SECS Communications
|
The items are subject to prior sale without notice. These items are only for end users.
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