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AG Associates Heatpulse 2146 Rapid Thermal Annealing

Description

Please contact us for the availability of the following used AG Associates Heatpulse 2146 Rapid Thermal Annealing Thermal Processing System  semiconductor equipment.

Manufacturer AG Associates
Model Heatpulse 2146
Description Single Chamber RTP
Cassette to Cassette YES
Other Information
  • Rapid Thermal Annealing
  • Oxide & Nitride Film Deposition
  • Cassette to Cassette Handling of 4”-6” Wafers
  • 2 Axis Robot for Transporting Wafers to Heating Chamber
  • 400°C to 1300°C Temperature Range
  • Programmable 0-600 sec Steady State Process Time
  • 120 Wafers/Hour Null Cycle (Zero Processing Time)
  • Wafer Cooldown Stage
  • Full Range Dual Pyrometer
  • SECS Communications

The items are subject to prior sale without notice. These items are only for end users.

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