Equipment

Please contact us for the availability of the following Main Semiconductor Equipment Models from Popular brands.

Rapid Thermal Processing Equipment and Brands

• AG Associates-Heatpulse 610, Heatpulse 4100, Heatpulse 4108, Heatpulse 8108, Heatpulse 8800
• Mattson Steag – 2800, 2900, 3000,
• AMAT

Plasma Asher Equipment and Brands

• GaSonics – L3510, PEP 3510, PEP Iridia, IPC 9104
  • Aura – 1000, 2000, 3010
• Tegal – 411, 415, 515 Plasma Asher, 965 Plasma Asher, 901E, 903E, 915, 6500, 6540
• Branson/ICP – L3200, 4150, S3100, S2100, S2005, 3000

Plasma Etch Equipment and Brands

• STS – Multiplex, Multiplex ICP, STS Pegasus
• AMAT – P5000 Metal Etcher, Centura DPS II Metal, Centura 5200, Centura eMax, Centura eMax CT+
• TEL  – Unity, Unity 2E 855 (oxide etch)
• LAM Research  – 4520XL, 9400, 9408SE, Alliance A6, TCP-9400 DFM, TCP-9400SE, 9600SE
• Plasmatherm  – 790 RIE, SLR 730 PECVD, SLR ECR, SLR 720 RIE, 700VLR (Versalock), 770 ICP

Physical Vapor Deposition Equipment and Brands

• AMAT – Endura 5500 PVD
• KDF – 900 series: 903i, 943i, 943ix, 954i, 954ix
• MRC – 643, Eclipse, Eclipse Star PVD, Eclipse Mark IV PVD
• Novellus – Sabre, Sabre Classic, Sabre One
• Anelva
• Perkin-Elmer -44XX Series (Perkin-ELmer 4400, Perkin Emler 4410, Perkin-Elmer 4450 etc)

Chemical Vapor Deposition Equipment  and Brands 

• AMAT – Centura 5200 CVD, AMAT Producer CVD Teos,
• Novellus – Concept 2 Sequel CVD, Concept 2 Speed, Concept 2 Altus
• TEL – Probus-SiC^™, Trias e+, Trias Spa,
• ASM – Epsilon CVD

Chemical Mechanical Planarization Tool Types & Brands

• Strasbaugh – 7AA, 6EC, 6DF-SP
• Peter Wolters
• SpeedFam
• Okamoto Corp.
• DISCO Corp.

Furnace & Oven Models  and Brands

• Tokyo Electron Corporation (TEL)
• Kokusai – Vertron
• Bruce Technologies – BTU BDF-41
• Axcelis – Fusion
• MRL – Cyclone C430
• Blue M Ovens

Lithography  Equipment Models and Brands

• ASML – steppers, scanners
  • 2500/40
  • 2500/55
  • 2500/60
  • 5500/100
  • 5500/100A
  • 5500/100B
  • 5500/100C
  • 5500/100D
  • 5500/200
  • 5500/250
  • 5500/275
  • 5500/300
  • 5500/300B
  • 5500/300C
  • 5500/350
  • 5500/550
  • 5500/700
  • 5500/750
  • 5500/850
• Canon
  • 3000i4
  • 3000i5
  • 3000i5+
  • 3000i5++
  • 3000iW
• Nikon
  • i3
  • i4
  • i5
  • i6
  • i7
  • i8
  • i9
  • i10
  • i11
  • i12
  • i13
  • i14
• Ultratech
  • 1100
  • 1500
  • 4700
  • 6700
  • Titan
  • Saturn

Metrology Equipment Model and Brands

• KLA-Tencor – RS-35, RS-55, Prometrix RS-75, RS-100, KLA 2138, KLA 2139, AIT, AIT UV, UV-1280, UV-1280SE
  • Surfscan^® – 4500, 6100, 6200, 6220, 6400, 6420, 7100, 7700, SP1, SP1 TBI
• ADE – 9500, 9650, 9700
  • ALPHA-STEP^®
• Opti-Probe^® – 7340, 7341

Mask Aligners Models and Brands

• Karl Suss or Suss Microtech
  • MA6, MA8, MA150, MA200
• EVG
  • EVG 420, EVG 620, EVG 6200

Pumps & Chillers Model and  Brands

• Edwards – QDP 40, QDP 80, iQDP 40, iQDP 80, iH80, iH600, iH1000
• Ebara – A30W, A70W, A10S, A70S, A70V
• Alcatel – ASM 180TD, ASM 181 T2D+, ATH 400M
• Neslab Chillers – Merlin M75, HX300, HX500

Spin Rinse Dryers Models and  Brands

• Semitool – Semitool 440 SRD, 480 SRD, 830 SRD, 860, 870F
• Verteq – 1600-55A

Track System Models and Brands

• DNS Electronics
• TEL – Lithius tracks, ACT 8, ACT 12
• FSI International – Polaris^®
• Tazmo – Spin-on-Glass (SOG)

These items are only for end users.