Description
Please contact us for the availability of the Varian 3190 Single Wafer Vertical Sputter System used Semiconductor Equipment.
| Manufacturer | Varian |
| Model | 3190 |
| Description | Single Wafer Vertical Sputter System |
| Vacuum System | Cryo Pumped |
| Load Lock Included | Yes |
| Number of RF Etch Cathodes | 1 |
| Substrate Heaters | Yes |
| Residual Gas Analyzer | Yes |
| DC Power Supply |  |
| Output Power | 12.00 kW DC |
| RF Generator | |
| Rated Power Output | 1000 Watts |
| Matching Network | Yes |
| Power Requirements | 480 V 22.0 A 60 Hz 3 Phase |
The items are subject to prior sale without notice. These items are only for end users.
SS5732