Description
Please contact us for the availability of the Modular Process Technology RTP-600Sused semiconductor equipment.
Rapid Thermal Processing System. The integrated process control system features real time graphics, recipe management, data aquisition and has a comprehensive diagnostic function. Wafer size up to 6 in. Temp. Range: 250 to 1300 deg C. Quartz chamber. Up to six channels of MFC control. Highly uniform loop array with accurate control and monitoring. 208V, 3 Ph, 60 Hz, 80A
The items are subject to prior sale without notice. These items are only for end users.
SS5626