Description
Please contact us for the availability of the Innotec Group ES-26CB used semiconductor equipment.
Box Coater EBeam Vacuum Evaporation System. 304 stainless steel water cooled box chamber with Inside Dimensions of 27 in. L x 28 in. W x 39-3/4 in. H. Six pocket E-Gun with Innotec power supply and controls. Planetary style rotating substrate holders currently configured for 4 in. squares, see photos on fixturing. Quartz substrate heaters with digital setpoint controller. Air operated and electrically controlled automatic valve sequencing interlocked with system controller. Crystal deposition rate monitor. PC controller. CTI On-Board 8 cryopump with compressor and roughing pump
The items are subject to prior sale without notice. These items are only for end users.
SS5626