Description
Please contact us for the availability of the CHA SE-600-RAP used semiconductor equipment.
Multiple Thermal Evaporation Source High Vacuum Deposition System. Used thin film deposition system. Physical vapor deposition system. 19 in. dia. water cooled bell jar with hoist. Inficon crystal deposition rate monitor. System has four thermal sources for evaporation of different materials. Source is selected via push button on front panel. System has controls for substrate heaters but none are installed. No substrate fixturing with system but rotation motor and controller are installed. Automatic valve sequencer. System uses a Varian VHS-6 high speed diffusion pump for high vacuum. Includes vacuum pump. 208V, 3 Ph, 60 Hz.r.
The items are subject to prior sale without notice. These items are only for end users.
SS5626