Description
Yield Engineering (YES) model 3TA HMDS vapor prime oven
Condition: Used
Valid Term: These are subject to prior sale. These are only for end user. Appreciate your time.
Location: CA, USA-SS7270W
Info for your reference.
- Interior chamber: 12″w x 13.25″d x 12″h
- (2) PID Temperature Controllers
- 25-200ºC
- PLD Logic Controller with Touchscreen Display
- Granville-Phillips Digital Vacuum Gauge
- Side Mounted, High-Capacity Syphon-Fill HMDS Vessel with Vacuum Gauge Mounted on Vessel
- Vacuum and Pressure Interlocks Ensure Process Integrity and Nitrogen Pressure Control
- Overtemp Protection Heater Shut-Off
- Preheated Nitrogen to bring wafers rapidly to Operational Temperature
- Multi-Program Capability
- Chamber Material: Electro-Chemically Polished 316L Stainless Steel
- 120v, 1ph, 50/60hz, 14amp
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