Description
Model: Tystar Tytan 1600 LPCVD Carbon Nanotube Growth
Quantity: 1 set
Location: SS10850
Valid: Subject to prior sale without notice. This is only for end users. Applicate your time.
Condition: New. Still crated.
Info from the seller for your reference.
Carbon 300+
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Carbon +300™ Carbon Nanotube Growth System per Technical Specification TS-4844 including as a minimum:
• Complete set of Process Quartzware – capable of processing up to up to 32 sheets of 200mm x 200mm substrates:
o Horizontal Process Tube
o Sample Holder
• Mass Flow Controlled Gas Lines – five (5) gas lines with individual flow rate controls
• Pre-Heated Gas Line to 150 C prior entering process chamber
• Rolling Resistance Furnace – for rapid heating and cooling of the Process Tube:
o Six (6) zone resistance heating furnace
o Process temperature up to 900° Celsius
o Control system for precise temperature control
• Air Pump – to remove carbon deposits in the Process Tube
• Flammable Gas Leak Detection
• System and Process Control:
o CVDWinPrC™ PC based process control software o Hardware/Safety control – combination of hardware and PLC software interlocks
o Internet connectivity for training, service, remote diagnostics and software upgrades
• Low Pressure Operation:
o A 10 Torr and 1000 Torr capacitance manometer
o Low pressure control from 50 Torr to 700 Torr
o Dry Vacuum Pump o Vacuum bypass valve allows for atmospheric operation
• Comprehensive Safety System
• Air-to-Water Heat Exchanger – eliminates need for cooling water
• EasyExhaust™ Burn Box – pyrolyzes the exhaust gases
• Electrical Configuration – 208VAC, 60Hz, 3 Phase, 5-Wire
• Warranty – fifteen (15) month warranty from shipment or twelve (12) month warranty from system start-up (whichever occurs first)
• Factory Training – on Software, Maintenance and Operation
• Process Demo – The system will be setup at CVD’s application lab to run CNT process:
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ET-MFC
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Additional Mass Flow Controlled Gas Lines can be added to the system. Certain gases require gas leak detection and/or purge circuits. Consult factory for price.
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EasyPanel™ for Ar
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Ultra-High-Purity (UHP) Gas Panel – three (3)-Valve Panel configured for argon for either a high-pressure gas cylinder or a liquid Dewar
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EasyPanel™ for N2
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Ultra-High-Purity (UHP) Gas Panel – three (3)-Valve Panel configured for Nitrogen for either a high-pressure gas cylinder or a liquid Dewar
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EasyPanel™ for O2
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EasyGas™ 1000 Gas Cabinet – semi-automated 3-Cylinder Gas Cabinet with an internal nitrogen purge configured for Hydrogen and ethylene:
• 4-Valve Process Panels for H2 and C2H4
• 2-Valve Process Panel for N2
• FlexPowr ESO Controller
• Flammable Gas Monitoring
• Excess Flow Switch
• Emergency Shutoff Controller
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Spares
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Spare Quartz Ware Set – one (1) each Process Tube, Gas Injector, Sample Holder and O-Ring kit
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NRTL or UL Inspection
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NRTL or UL Inspection and Report at factory (Field certification not included, will add one week to delivery time)
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The trademarks of the equipment and parts contained in this page belonged to the Original Equipment Manufacturers.