Description

Temescal FC-1800 Evaporator

Photos: Download here

OEM: Temescal 

Model: Temescal FC-1800 Evaporator

Includes:  Power Supply and other system components (Crated, not pictured)

Location: San Jose, CA, U.S.A.

Description of Temescal FC-1800 Loadlock E-Beam Evaporator for your reference.

Production Features
• High throughput due to fast cycling, load-lockdesign
• Better reproducibility and higher yields because of complete programmed sequencing
• Improved step coverage with 2R source-to-substrate spacing
• Single dome for lift-off processes
• Minimized EIB source and substrate heater contamination since lower chamber is isolated
• Clean, convenient operation in laminar flow hood because of low profile construction

• Canted-dome planetary fixturing possible in full capacity chamber
• Manual semiautomatic or fully automatic operation due to modular systems designs
• Multimetal deposition capability with optional sources

The load-lock fast cycle concept

In 1966, Temescal introduced the first practical fast cycle coater designed for production-scale vacuum deposition-the FC-1100 with an 11″-diameter substrate carrier. It was made possible by the development  f higher-speed, more efficient pumping systems, more reliable power supplies, and rugged, dependable electron-beam sources with long-life filaments. The objectives were to free industry from dependence on a batch-type operation: to offer consistently superior coatings cycle after cycle, run after run, and to insure reproducibility. The sophisticated capability of the FC-1800 is based on the technology pioneered in development of the FC-1 100. The success of the simple concept of keeping the evaporation chamber under vacuum at all times while  loading substrates in and out through an isolated load/unload chamber (or chambers) depended on the efficiency of the electron-beam source and related accessories. Temescal anticipated the demands of evaporation technology and was largely responsible for the configuration of today’s proven electron-beam sources. Many problems were solved in the years between the development of the first FC-11 00 and today’s highly sophisticated FC-1800. Most were mechanical in nature: for example. eliminating shut-downs due to flaking, developing jamb-proof internal wire feeders, replacing O-ring seals with bellows seals, protecting sealing surfaces from scattered evaporant. and creating rotating rod-fed sources for subliming materials such as chrome and silica. The problems had to be solved quickly since industrial evaporation requirements were outgrowing the bell jar. By developing the integrated equipment needed by the electronics industry, Temescal has attained a unique “total systems” responsibility in the vacuum industry. We completely assemble and rigorously test each FC-1800 prior to shipment. “Total system” performance is guaranteed by Temescal. “Total system” maintenance and service are performed by qualified Temescal service engineers. You deal with only one manufacturer – TEMESCAL-and our responsibility is complete and fixed. This, in turn. makes Temescal a one-stop source for all vacuum deposition needs from the finest bell jar systems to high-production load-lock coaters.

The FC-1800

Compact
Although the FC- 1800 occupies the same floor space as and only two-thirds the height of a conventional bell Jar of the same diameter, It produces more than twice the per-shift volume. In addition. the substrates are of a consistently higher quality. For example. it takes only
9 minutes per cycle to evaporate and deposit 10,000 angstroms of aluminum. This includes the substrate heating and cooling cycles.

Capacity
Despite its compact 20″-diameter by 11 “-deep size, the FC-1800 deposition chamber is designed to accommodate the same mechanisms and duplicate all the functions performed in a conventional bell jar. The small volume of this chamber (approximately 60 liters)  can be pumped down rapidly before deposition usually in less than two minutes, utilizing the standard 30 cfm mechanical pump. This rapid pump-down is
possible because of a special gate valve. The balance of the system remains under continuous vacuum throughout the run.

Uniformity and Reproducibility
Maximum uniformity of ± 7% is a characteristic of substrates coated in the Temescal canted-dome planetary and angle-of-incidence dome. Step coverage with the canted dome is excellent. Reproducibility is outstanding because the evaporation chamber is kept under vacuum at all times and the possibility of trapped or absorbed gases is minimized. Because of the efficiency of the Temescal electron-beam sources and efficiency of the Temescal electron-beam sources and the integrity of the valve system, the material to be evaporated in this unique load-lock fast-cycle coater always remains outgassed and at its threshold of evaporating temperature. The source is never allowed to cool. and the longer the evaporation chamber remains hot and under vacuum, the cleaner the system becomes. With proper cleaning of the substrates. consistent coating reproducibility is assured.

Options
There is no need to buy more capability than is required. The basic FC-1800 load-lock fast-cycle coater includes automatic valve sequencing during pump-down and venting to atmosphere. All other steps may be conducted manually by activating switches or pushing buttons.
However, modules may be added to fully automate the FC-1800. With total automation, the operator need only load and unload substrates and start the automatic cycle. In addition to automation, options include substrate heaters, a second or multi-crucible electron-beam source for sequential or graded deposition, rate and thickness monitors, shutters, wire feeders, filament evaporation sources, and many others.

Simplicity
Simplicity of operation depends entirely on the number of options ordered. However, even In the basic manual model, a semiskilled technician can operate the FC-1800 with minimum training. In construction. the FC-1800 incorporates the best features of a bell jar. It has the same uncomplicated valve sequencing. All controls are within easy reach. Unlike the conventional bell Jar. there Is no troublesome
hoist or heavy chamber. Loading is at a comfortable height. The spring-loaded hinged lid lifts with a finger-tip touch and remains In any preset position until lowered. And because of its low profile construction. the FC-1800 fits neatly into the economical, clean environment of a freestanding laminar-flow hood.

Vacuum Chambers
The large-capacity but compact load-lock deposition chamber is 20 inches in diameter and 11 inches high. By optimum utilization of space, this chamber duplicates the coating capacity and the flexibility of a conventional bell jar, and, at the same time, can be pumped down in less than two minutes. The lid is dome-shaped and will accept a canted-dome or angle of-incidence planetary fixture. The lid is hinged and spring-loaded. The spring-tensioned hinge can be set to keep the lid open in any position desired. One viewing port is provided in the load-lock deposition chamber. The volume of this “work” chamber is approximately one-third that of a conventional bell jar, so pump down is exceptionally fast. Work may be cooled in this chamber under vacuum or under partial pressure of inert gas. The evaporation chamber, directly below the deposition chamber. is kept under high vacuum continuously. It is large enough to accommodate one or two electron beam
sources associated with wire or rod-fed crucibles, feeders, shutters and monitors. Chambers and associated hardware are made of 304 stainless steel with internal surfaces No. 4 finish, or better to reduce outgassing and to facilitate cleaning. A new, unique and extremely efficient shielding system in this chamber protects all internal components from the evaporant. This one-piece shield is in the form of an open-ended single-stepped stainless steel cylinder which is held in place with spring clips. Cleaning is exceptionally easy and fast, outside the
chamber. The spring clips are released. and the unit drops straight down and out of the system.

Valves
The valve system is very similar to that used in bell jar valve sequencing. It has a simple. direct sequence which automatically controls four valves: (1) Roughing valve. (2) Deposition chamber vent valve. (3) Foreline valve, and (4) High-vacuum gate. The high-vacuum gate also acts as a shutter prior to substrate heating and deposition. It is designed to slide out of the way during evaporation. An isolation valve above the diffusion pump allows maintenance in the evaporation chamber without having to cool and vent the diffusion pump or bring the liquid nitrogen baffle up to ambient temperature.

Pumping Systems
The standard pumping system includes a 6-inch, highspeed diffusion pump module with ultimate pressure In the 1 o-e torr range. The system includes a highvacuum gate valve. a diffusion-pump isolation valve. a liquid-nitrogen trap and a 30 elm mechanical pump. The l1qu1d-nitrogen trap and its offset reservoir are built as one unit. A top diaphragm assures positive antimigrat1on trapping of all pumping fluids. Tests conducted under adverse conditions-without liquid nitrogen-measured an available pumping speed of 900 I/S when utilizing the expanded 6-inch d1ffus1on pump.   An alternate pumping system is the Cyro-Torr1 CTI 8 cryopump which can be supplied with either air- or water-cooled compressors. This model has pumping speeds of 400 I/s of water vapor.

Shutters
There is an efficient shutter system to protect against unwanted deposition. First. the high-vacuum gate acts as a shutter. Second, a shuttle ring-shaped shield exchanges place with the high-vacuum gate to protect the valve sealing surface during evaporation. Third. a small shutter covers the source until just before evaporation commences, when it swings clear, and. when evaporation stops, closes.

Planetary Fixturing
The FC-1800 is the first load-lock fast-cycle coater designed to accept planetaries-both canted-dome and flat types. The movement of the canted-dome planetary during deposition assures optimum uniformity of coating and step coverage. Using the TP-8 angle-of- incidence
dome and masking guarantees the user of high uniformity and minimum step coverage. Because of the bellows-sealed rotary drive, no leakage of contaminants into the system can occur, even during extended production runs. The consistent high quality, run-after-run, is uniquely attributable to the continuous vacuum environment in the source chamber. Together, the combination of benefits to industrial producers cannot be duplicated by any other vacuum deposition system on the market.

Substrate Heaters
Optional equipment includes substrate heaters. The design of the high-speed substrate heaters is unique and cannot be duplicated in a conventional bell jar. Because the heaters are below the gate valve. contamination resulting from high-temperature exposure to the atmosphere is minimized. Also, the cooling cycle time is reduced since the residual heat is shielded from the substrates by the closed gate valve. Heating action is extremely fast – 300°C substrate temperature is attained in less than 5 minutes. A water-cooling loop keeps the lower portion of the chamber lid cool and protects the O-ring from outgassing. The substrate heating system can be programmed into an automatic cycle. or controlled manually.

Electron-Beam Sources
One or two single or multiple-crucible Temescal 270-degree deflection electron-beam sources may tie installed for single sequential or graded deposition. They have long filament life because I0n erosion has been eliminated, and the cathode is shielded from falling particles. Each electron-beam source can be provided with a quick-acting shutter and a wire- feed mechanism. A variety of arrangements is available for resistance heated evaporation. Rate and thickness control systems can be tailored to exact requirements and coordinated with sources.

Power Supply
The standard power supply is the Temescal Model CV-8. It is rated for 8 kW at 10 kilovolts continuously, can be adjusted from 1.2 to 10 kilovolts and can be used with one or two electron-beam sources. Optionally. the Model CV-14 Temescal 14 kW. 10 kilovolt power supply is available.

Option:NE-6 Switching Power Supply (10KV, 600mA) instead of the  standard power supply  Temescal Model CV-8or CV-14

 

Cabinets and Accessories

Cabinets
A unique feature of the FC-1800 frame construction is the mounting of the roughing pump. This pump rests directly on standard shock mounts on the floor, instead of on long legs. As a result, vibration transmitted to the FC-1800 during roughing is virtually eliminated. When the system is to be moved, a maintenance person simply tightens one nut linking each end of the pump to a bracket on the frame, thus lifting
the pump slightly off the floor and joining it firmly to the sturdy frame. The frame is enclosed by removable painted steel panels. Hinged doors are on the front. Access to the interior from any direction is fast and easy. The counter top is covered with black Formica. Toe space is provided at floor level for the comfort of the operator.

Instrumentation
A compact instrumentation module, which contains all necessary controls and instrumentation for manually operated units, rests on the counter top. With fully automated units, all evaporation sequencing is contained in a 41 “-high rack that may stand on top of the cabinet or in an adjacent freestanding rack. The standard CV-8 electron-beam power supply can fit in the same freestanding rack. An optional electron-beam source power supply is the Temescal CV-14, which is housed in its own rack.

Source Viewing
Since the viewport for the evaporation source is located within the cabinet, Temescal has provided a direct viewing system. With easy-to-reach controls, the technician simply opens the protective shield over the viewing port to view the source. Clear film also protects the viewport from the evaporant. Again, with counter-top controls, the technician simply advances the roll of film to an unexposed section
after it coats up.

Maintenance
All components in the FC-1800 are easily accessible There are two ways to get into the evaporation chamber. For minor maintenance, the diffusion pump isolation valve is closed, the vacuum gate is moved aside, and the operator reaches in from the top of the counter. For cleaning and major maintenance, the entire source tray can be quickly and easily rotated outside the cabinet. Quick utility disconnects are provided. The source tray then is lowered, rotated to the front or side, and raised to counter-top height outside the cabinet.

The instrumentation module contains all necessary controls and instrumentation. It may stand on top of the cabinet or in an adjacent freestanding rack.

Specifications

Cycle Time
10 to 15 minutes for 1 μ of aluminum

Coating Uniformity
± 7% with high-speed planetary substrate fixture
Construction
All internal surfaces are polished 304 stainless steel
Deposition Chamber
20″-diam. x 11 “-high (508 mm x 280 mm) bell jar.Designed for waist-high, 36.25” (921 mm) substrate loading and unloading. Hinged and counter-balanced cover for ease of operation. Easily raised to preset position.
Source Chamber
18″-diam. (457 mm).Automatically maintained at high vacuum at all times to prevent contamination
Source Tray
19″-diam. (483 mm) blank, flat plate.Manually operated jackscrew mechanism for raising and lowering the source tray. When lowered, the tray swings out 90° for ease of access
Electron Beam Source
A variety of optional electron beam source combinations is available (resistance sources available upon request)
Tray-mounted and fully shielded
Power Supply
A variety of 8 and 14 kW electron beam power supplies and accessories is available
Electronics
All components are conservatively rated and have proven records of performance. Electronic equipment is countertop-mounted in a 40.37″ H x 19″ W ( 1026 mm x 483 mm) relay rack for ease of operation (optional floor-supported cabinet available)
Vacuum System
Direct sequencing with automatic control of all valves. Fully automatic evaporation controller available. Vac-map panel, vacuum gauge controller and interconnecting cables provided with visual display of valving sequence and substrate rotation
Vacuum Valves
Stainless steel, removable high vacuum gate valve. Seals upward to isolate the substrate chamber from the evaporation chamber. High-vacuum valve design eliminates scuffing. Diffusion pump isolation valve for ease of maintenance.Handwheel actuated, ½” (13 mm), brass, angle leak detector valve included

Vacuum Pumps
30 cfm (845 I/m) dual-stage mechanical roughing and backing pump. Mounted on separate base for vibration isolation(remote location)
6″, 2400 I/s oil diffusion pump with isolation valve . Cryogenic pumping systems available
Shielding
Stainless steel cylindrical vapor shield in source chamber. Removable stainless steel source tray debris shield .Easily removable seal-ring vapor shield
Viewing Port
Model VV-400 4″ (102 mm) polarized-window viewing port in source chamber. Teflon® film, film advance, and shutter provided for continuous viewing
Cold Trap
Liquid nitrogen-cooled baffle
Vacuum Gauge Controller
Temescal VersaVac® ionization gauge controller with Bayard Alpert gauge tube. Automatic range-changing provided

Pumpdown Time for Load Lock

Less than 2 minutes
Typical Operating Vacuum
Mid 10-6 to mid 10-7 torr range with standard pumping system
Ultimate Operating Vacuum
1 o-8 torr with standard pumping system
Water System
Stainless steel manifold with four available circuits. Flow meter, flow switch and all necessary interconnects provided
Air System
Pressure regulator, meter and all necessary interconnects provided
Installation Requirements
Water: Filtered 1.25 gpm at 50 psig inlet pressure at <60° to 80°F (4.73I/m, 3.51 kg/cm2 , < 16° to 27°C)
Compressed air: 5 elm at 60 to 125 psig inlet pressure, filtered and dried (2360 cc/sec, 4.22 to 8.75 kg/cm2 )
Power: 208 V, 3 ct,, 70 A, 50/60 Hz, 5-wire with active neutral and equipment ground (optional input voltages available). Tolerable voltage ± 5%
Ambient temperature: 80° ± 10°F (26.8 ± 5.5°C)
Humidity: 50% maximum
Instrument weight: < 1800-lb. (818 kg)

Optional accessory utility requirements not included

Please contact us for the availability of the following used semiconductor equipment and parts.

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The items are subject to prior sale without notice. These items are only for end users.

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3	Airco / Temescal Model: 8008 Wired Controller.  Unused Old Stock   <
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15	AIRCO TEMESCAL 6″ ST-2 GATE VALVE
16	Airco Temescal 702-4453 1″ Baseplate Three-pass Gas/Liquid Feedthrough
17	AIRCO TEMESCAL 8007 OSCILLATOR
18	AIRCO TEMESCAL 8008 HAND HELD CONTROLLER
19	AIRCO TEMESCAL ALUMINUM VACUUM VALVE-6″ FIG 5030-V PNEUMATICALLY OPERATED
20	AIRCO TEMESCAL Auto Pump Down Control
21	Airco Temescal Auto Pump Down Control
22	Airco Temescal Auto Sequence Control
23	AIRCO TEMESCAL AUTO SEQUENCE CONTROLLER
24	Airco Temescal Berkeley Calif. 1-5/8″ Fig.1130 Vacuum Assy. For Parts or Repair
25	Airco Temescal Berkeley Calif. 5/8″ Fig.2130 Assy. w/ Skinner Valve V5L34435CT
26	AIRCO TEMESCAL CL-2A power supply
27	Airco Temescal CV-14 Electron Beam Power Supply CV14-110
28	AIRCO TEMESCAL CV8 POWER SUPPLY
29	AIRCO TEMESCAL CV-8, CV8A-212 E.B. POWER SUPPLY  FREE SHIP
30	AIRCO Temescal CV-8A (0605-7640), CV-14 (0506-2740), CV-14 (0506-2840)
31	Airco Temescal ED-701 Endpoint Detector Control & Cables
32	Airco Temescal Electron Beam Filament Transformer
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34	AIRCO TEMESCAL HRS 2550  SPUTTERING SYSTEM
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36	Airco Temescal Model 8008 E-Beam Deposition Hand Power Controller Nice!
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38	AIRCO TEMESCAL MODEL MC4 VACUUM CONTROL
39	AIRCO TEMESCAL MODEL MC4 VACUUM CONTROL,MC-4B,A/M VACUUM CONT BJD-1800 FREE SHIP
40	Airco Temescal Model RC-10 Remote Gun Control Unit New Old Stock
41	Airco Temescal Motor Speed Control – Model MC3
42	AIRCO TEMESCAL MOTOR SPEED CONTROLLER MC4  MC4B PART NO. 0505-0190-0 FREE SHIP
43	Airco Temescal Right Angle Valve Regulator – Used
44	AIRCO TEMESCAL SC-8009 0506-7160-0 CRYSTAL SENSOR * QTY 4 *
45	AIRCO TEMESCAL SC-8009 0506-7160-0 CRYSTAL SENSOR LOT OF 7
46	Airco Temescal SFIH-270-3 Super Source E-Beam Gun – 36 CC Pocket
47	Airco Temescal Single Pocket Electron Beam Gun
48	Airco Temescal SSC-150 Industrial Turbomolecular Pump Frequency Converter System
49	Airco Temescal SSC-150 Turbomolecular Vacuum Pump Frequ
50	Airco Temescal TP Time Power Controllers Model Numbers: TP-1000 & TP-1000-2 Lot2
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53	AIRCO TEMESCAL VACUUM MANIFOLD FLEXIBLE CHAMBER USA ELECTRON MICROSCOPE CAMECA
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55	Airco Temescal Versavac 2 REBUILT
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57	AIRCO Temescal XYS-8 Sweep control
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59	AIRCO/TEMESCAL MANUAL 6″OD/2-1/4″ID HIGH VACUUM GATE VALVE
60	BOC Coating E-Beam Temescal Single-gun Simba 2, 208/240 VAC input power supply
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62	boc edwards temescal simba position board electron beam gun controller
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64	BOC TEMESCAL 6042 2508 0 Din Rail Mount Adapter *LOT OF 2*
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66	Fil-Tech: Model: EB6871 E Beam Filament.  Equiv. to Temescal 0317-6871-0. New O<
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68	New listing TEMESCAL LEGACIES: NARRATIVES OF CHANGE FROM A NORTH OAKLAND By Jeff Norman
69	New listing TEMESCAL LEGACIES: NARRATIVES OF CHANGE FROM A NORTH OAKLAND By Jeff Norman Mint
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72	QTY 2 TEMESCAL VESCAL ELECTRON BEAM EMITTERS R M-0284A CHA TELEMARK
73	Temescal  Magnet Rotary Feedthrough  9999-0014-1     B81427
74	Temescal  SS64 Cable 0620-9330-0A   6′
75	Temescal 0040-1133-0 BOC X-Y Sweep Controller Remote Access Box.
76	Temescal 0222-9232-0 Wheel Bushing
77	Temescal 0322-6081-0 Gasket Kit
78	TEMESCAL 0715-8173-2 INSERT, NEW *QTY 2*
79	Temescal 0916-8294-0 Conjunto de emisor de alto rendimiento Hp para haz de elect
80	Temescal 3CK/2KW E-Beam Gun Four 24 CC Pockets
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82	Temescal 5130 2″ High Vacuum Gate Valve (MIS2288)
83	TEMESCAL 6″ #5080 PNEUMATIC HIGH VACUUM VALVE W/ 120V
84	Temescal 6M 5010(LOCQP1)
85	Temescal 7 1/2 Turn E-Beam Source Filaments (#1087)
86	TEMESCAL AIRCO E.B. POWER SUPPY CV-8A-111  FREE SHIP
87	Temescal Airco Electron Beam Source 7cc
88	TEMESCAL AUTO REGENERATION CONTROL FREE SHIP
89	TEMESCAL AUTO ROTATION CONTROLLER FREE SHIP
90	TEMESCAL AUTO SEQUENCE CONTROL  FREE SHIP
91	TEMESCAL AUTOMATIC REGENERATION CONTROLLER ARC-2000  FREE SHIP
92	Temescal BJD 1800 Rebuilt Vacuum System
93	TEMESCAL BJD-1800  WITH (REBUILT 4 POCKET ELECTRON BEAM GUN ) 30 Days Warranty
94	Temescal BJD-1800 4 Pocket E-Beam Evaporator Upgraded by TES
95	Temescal BJD-1800 BOX COATER with 8 Thermal  Evaporation Sources
96	Temescal BJD-1800 E-Beam Vacuum Deposition System  Tag #40
97	Temescal BJD-1800 Electron Beam Evaporator  Tag #60
98	Temescal BJD-1800 PC/PLC Controlled High Vacuum E Beam Evaporator with Ion Tech
99	Temescal BOC Coating Technology Bipolar Programmable Sweep Manual 0040-9604-0
100	Temescal BOC Coating Technology Cable Assembly Sweep Interface 0040-4972-1 NOS
101	Temescal BOC Coating Technology Cable Beam Position SIMBA 2 0040-3740-0 NOS
102	Temescal BOC Coating Technology Filament Module 6024-6113-0 Control Power NOS
103	Temescal BOC Coating Technology Filament Module Cables 6024-6113-0 NOS CV-XS
104	Temescal BOC Coating Technology High Voltage Lead Set 6024-6116-0 CV-XS NOS
105	Temescal BOC Coating Technology High Voltage Output Cable 6024-6112-0 NOS HV
106	Temescal BOC Coating Technology High Voltage Output Cable 6024-6112-1 NOS HV
107	Temescal BOC Coating Technology High Voltage Output Cable 6024-6116-0 NOS HV
108	Temescal BOC Coating Technology Remote Box Assembly 0040-1133-0 High Vacuum NOS
109	Temescal BOC Coating Technology User I/O Gun Control Cables 6024-6125-0 6124 NOS
110	Temescal BOC SuperSweep 64 Digital EGun Sweep Controller P/N 0611-8434-0
111	TEMESCAL CV-6SL POWER SUPPLY
112	TEMESCAL CV-8 regulator PC ASSEMBLY SECTION 1000
113	TEMESCAL CV-8 TRANSDUCER BOARD
114	Temescal E Beam Gun  Not Complete Used  #35
115	Temescal E Beam Gun  Not Complete Used  #36
116	Temescal E Beam Gun  Not Complete Used  #37
117	Temescal E-Beam Source #29
118	Temescal E-Beam Source w/Filiment block #300
119	Temescal E-Beam Source w/Filiment block #301
120	Temescal Edwards Inficon IC 6000 Thin Film Process Controller Model# 013-338
121	Temescal electron Beam Gun used.                   #302
122	Temescal Electron Beam Power Supply and Gun Controller
123	Temescal Electron beam Power Supply Model CV-10 used working- #472
124	Temescal Electron Beam Source #303
125	Temescal FC-1800 E-Beam Thin Film Evaporator
126	Temescal FC-1800 E-Beam Thin Film Evaporator w/1 Gun
127	Temescal FC-1800 E-Beam Thin Film Evaporator with Substrate Heaters
128	Temescal FC-1800 Load-Locked Electron Beam Evaporator with Substrate Heaters
129	Temescal Flow Switch M# 9102-0001-0 ~NIB NEW SURPLUS~
130	TEMESCAL GATE VALVE 3″ 5130 V-5
131	Temescal Horseshoe Magnet Assembly qty 3    #46
132	Temescal manual 2″ quick operating high vacuum valve, aluminum
133	Temescal manual 2″ throttle high vacuum valve, aluminum
134	Temescal manual 4″ quick operating high vacuum valve, aluminum
135	TEMESCAL MODEL: 2″ 5030  PNEUMATIC GATE VALVE [NEW]
136	TEMESCAL PALMS LODGE NO. 914 – 25 YEARS 3/4″ PIN PINBACK MASONIC LODGE        15
137	TEMESCAL PROPORTIONAL SUBSTRATE HEAT  FREE SHIP
138	Temescal Rod Feeder EGUN    used            #20
139	Temescal Rod Feeder EGUN    used            #21
140	Temescal SCT/BJD 2400 E-Beam Evaporator Thin Film Deposition System
141	Temescal SFIH-270-2 40cc Electron Beam Source With Liner [JW]
142	Temescal Simba 2 Electron Beam  Constant Power Supply with extras
143	TEMESCAL SIMBA 2 POWER SUPPLY INSTRUCTION MANUAL
144	Temescal Simba II power supply
145	Temescal Sloan Telemark Style Electron-Beam Feedthrough
146	Temescal SRIH 270-2
147	Temescal STIH 270 Four Pocket Electron Beam Source [JW]
148	Temescal SuperSweep 64 EGun Sweep Control – Excellent! – 4 Month Full Warranty
149	TEMESCAL TURRET SOURCE SELECTOR FREE SHIP
150	Temescal VES 2550 Electron Beam Evaporator (with warranty)
151	Temescal VES 2550 Electron Beam Evaporator <  with warranty >
152	Temescal VES 2550 Rebuilt Vacuum System
153	Temescal VES 2550 With New Process Controller
154	Temescal VES-2550 E-Beam Evaporation System with 2 Four Pocket E-Guns
155	Temescal Water Company et al., Petitioners, v. Public Utilities Commission of Ca
156	TEMESCAL XYS-8 SWEEP CONTROL AIRCO XYS-8-1A FREE SHIP
157	TEMESCAL,1920 s,H.H.Knibbs,DJ
158	Temescal/Airco MBPC, CV-14, 0411-8320-0
159	Turret source selector temescal Edward,
160	Used Temescal SFIH270-2 Super Source Bar Magnet
161	Vacuum valve 4 in ID Temescal Metallurgical Corp
162	Varian E-beam Deposition Thermal Evaporator Temescal E-Gun NRC 3117

163	CHA SE-1000 E-Beam Evaporator 8″ Planetary Dome Cleaned
164	CHA SE-1000 E-Beam Evaporator 4″ Planetary Dome Cleaned
165	CHA SE-1000 E-Beam Evaporator 6″ Planetary Dome Cleaned
166	CHA SE-1000 E-Beam Evaporator Deposition System
167	CHA Mark 40 6 pocket Ebeam & Dual Thermal Evaporator / SR10 / CTI 10 Cryo
168	CHA SE-600-RAP Single Pocket E-Beam Evaporator
169	CHA SEC-1000-RAP Dual Gun E-Beam Evaporator
170	CHA Mark 50 4 pocket Hearth evaporator
171	NEW, HIGH VOLTAGE LEAD CABLE FOR E-BEAM CHA SR-22 EVAPORATOR VACUUM EVAPORATOR
172	CHA Industries SEC-600-RAP Vacuum EBeam Evaporator Deposition System Dryvac 100P
173	CHA Industries High Vacuum Valve
174	BRAND NEW! 9721 Rescue motor
175	CHA Industries High Vacuum Valve
176	CHA Industries VG-1A-002 Tube Ionization Ion Gauge Gage NEW NOS VG1B/3
177	CHA Industries Bell Jar
178	CHA Industries VG-1A-006T Tube Ionization Ion Gauge Gage NEW NOS VG1A/2
179	CHA Industries Bell Jar
180	CHA Industries/High Tech Services Filament Electron Panel
181	CHA Industries/High Tech Services Auto Pump Down Control
182	CHA Industries Bell Jar Motorized Hoist
183	CHA Industries Bell Jar Motorized Hoist

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The items are subject to prior sale without notice. These items are only for end users.

 

LOT 115 +SSEB380