Description
Suss Microtec MA6/BA6 aligner with backside optics and 100mm wafer tooling
Condition: Used
Valid Term: These are subject to prior sale. These are only for end user. Appreciate your time.
Location: CA, USA-SS7270W
Info for your reference.
- SUSS MA6/BA6 MASK ALIGNER
– Model: MA6 / BA6
– Manufacturer: Suss MicroTec
– Wafer Size: Currently configured for 100mm Diameter Wafers.
-includes 100mm backside wafer chuck and proximity mask holder
– Topside (TSA) Alignment
– Backside (BSA) Alignment
– Suss DVM6 Microscope
– Objectives:
– UV400 splitfield Optics (for 365nm and 405nm exposure)
– CIC 500 Power Supply
– Capable of Hard, Soft, Vacuum Contact with proper tooling.
– 350W Lamphouse
– Vibration Isolation Table (for Suss MA6)
– System Power: 230V, 50/60 Hz
– Operations Manual for Suss MA6 Mask Aligner
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